JP6534386B2 - スタック化されたダイの位置を制御するための技術 - Google Patents

スタック化されたダイの位置を制御するための技術 Download PDF

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JP6534386B2
JP6534386B2 JP2016522774A JP2016522774A JP6534386B2 JP 6534386 B2 JP6534386 B2 JP 6534386B2 JP 2016522774 A JP2016522774 A JP 2016522774A JP 2016522774 A JP2016522774 A JP 2016522774A JP 6534386 B2 JP6534386 B2 JP 6534386B2
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semiconductor die
assembly
stack
chip package
vertical
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JP2016533640A (ja
JP2016533640A5 (https=
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デイリンガー,マイケル・エイチ・エス
ホプキンス,アール・デイビッド
チョウ,アレックス
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オラクル・インターナショナル・コーポレイション
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)
  • Die Bonding (AREA)
JP2016522774A 2013-10-21 2014-09-24 スタック化されたダイの位置を制御するための技術 Active JP6534386B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/059,302 2013-10-21
US14/059,302 US9209165B2 (en) 2013-10-21 2013-10-21 Technique for controlling positions of stacked dies
PCT/US2014/057237 WO2015060978A1 (en) 2013-10-21 2014-09-24 Technique for controlling positions of stacked dies

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JP2016533640A JP2016533640A (ja) 2016-10-27
JP2016533640A5 JP2016533640A5 (https=) 2017-10-12
JP6534386B2 true JP6534386B2 (ja) 2019-06-26

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US (1) US9209165B2 (https=)
EP (1) EP3061131B1 (https=)
JP (1) JP6534386B2 (https=)
KR (1) KR102174120B1 (https=)
CN (1) CN105659382B (https=)
TW (1) TWI627682B (https=)
WO (1) WO2015060978A1 (https=)

Families Citing this family (10)

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Publication number Priority date Publication date Assignee Title
US9698093B2 (en) * 2015-08-24 2017-07-04 Nxp Usa,Inc. Universal BGA substrate
US10707171B2 (en) 2015-12-22 2020-07-07 Intel Corporation Ultra small molded module integrated with die by module-on-wafer assembly
US10234626B2 (en) * 2016-02-08 2019-03-19 Skorpios Technologies, Inc. Stepped optical bridge for connecting semiconductor waveguides
CN108878398B (zh) * 2017-05-16 2020-07-21 晟碟半导体(上海)有限公司 包括导电凸块互连的半导体器件
KR20190052957A (ko) * 2017-11-09 2019-05-17 에스케이하이닉스 주식회사 다이 오버시프트 지시 패턴을 포함하는 반도체 패키지
US11521862B2 (en) * 2017-12-15 2022-12-06 Chih-Liang Hu Process for fabricating circuit components in matrix batches
US20190279962A1 (en) * 2018-03-09 2019-09-12 Oracle International Corporation Method and apparatus for stacking warped chips to assemble three-dimensional integrated circuits
KR20200055853A (ko) 2018-11-13 2020-05-22 삼성디스플레이 주식회사 큐디 글래스 에이징 장치 및 그것의 에이징 방법
WO2020132937A1 (zh) * 2018-12-26 2020-07-02 深圳市兴华炜科技有限公司 一种smt精密定位计算方法及相关产品
US20230247795A1 (en) 2022-01-28 2023-08-03 The Research Foundation For The State University Of New York Regenerative preheater for phase change cooling applications

Family Cites Families (12)

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Publication number Priority date Publication date Assignee Title
US5239447A (en) * 1991-09-13 1993-08-24 International Business Machines Corporation Stepped electronic device package
JPH06291248A (ja) * 1993-04-05 1994-10-18 Toshiba Corp 半導体装置
JP2004228117A (ja) * 2003-01-20 2004-08-12 Idea System Kk 半導体装置および半導体パッケージ
JP2009027067A (ja) * 2007-07-23 2009-02-05 Alps Electric Co Ltd 半導体装置の製造方法および半導体装置
JP2011040418A (ja) * 2007-12-18 2011-02-24 Alps Electric Co Ltd 半導体装置およびその製造方法
KR100997787B1 (ko) * 2008-06-30 2010-12-02 주식회사 하이닉스반도체 적층 반도체 패키지 및 이의 제조 방법
US8227904B2 (en) * 2009-06-24 2012-07-24 Intel Corporation Multi-chip package and method of providing die-to-die interconnects in same
US8476749B2 (en) * 2009-07-22 2013-07-02 Oracle America, Inc. High-bandwidth ramp-stack chip package
US8290319B2 (en) * 2010-08-25 2012-10-16 Oracle America, Inc. Optical communication in a ramp-stack chip package
US8373280B2 (en) * 2010-09-01 2013-02-12 Oracle America, Inc. Manufacturing fixture for a ramp-stack chip package using solder for coupling a ramp component
US8283766B2 (en) * 2010-09-02 2012-10-09 Oracle America, Inc Ramp-stack chip package with static bends
JP2013138177A (ja) * 2011-11-28 2013-07-11 Elpida Memory Inc 半導体装置の製造方法

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CN105659382B (zh) 2019-04-12
US9209165B2 (en) 2015-12-08
JP2016533640A (ja) 2016-10-27
US20150108615A1 (en) 2015-04-23
CN105659382A (zh) 2016-06-08
KR102174120B1 (ko) 2020-11-05
WO2015060978A1 (en) 2015-04-30
KR20160074494A (ko) 2016-06-28
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EP3061131A1 (en) 2016-08-31
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