CN105502929B - 显示器用玻璃基板及其制造方法 - Google Patents
显示器用玻璃基板及其制造方法 Download PDFInfo
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- CN105502929B CN105502929B CN201510895581.4A CN201510895581A CN105502929B CN 105502929 B CN105502929 B CN 105502929B CN 201510895581 A CN201510895581 A CN 201510895581A CN 105502929 B CN105502929 B CN 105502929B
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- 239000011521 glass Substances 0.000 title claims abstract description 425
- 239000000758 substrate Substances 0.000 title claims abstract description 202
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 43
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 167
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 103
- 229910052593 corundum Inorganic materials 0.000 claims abstract description 103
- 229910001845 yogo sapphire Inorganic materials 0.000 claims abstract description 103
- 229910052681 coesite Inorganic materials 0.000 claims abstract description 102
- 229910052906 cristobalite Inorganic materials 0.000 claims abstract description 102
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 102
- 229910052682 stishovite Inorganic materials 0.000 claims abstract description 102
- 229910052905 tridymite Inorganic materials 0.000 claims abstract description 102
- 238000002844 melting Methods 0.000 claims abstract description 61
- 230000008018 melting Effects 0.000 claims abstract description 61
- 229910000272 alkali metal oxide Inorganic materials 0.000 claims abstract description 30
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 claims abstract description 24
- FUJCRWPEOMXPAD-UHFFFAOYSA-N Li2O Inorganic materials [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 claims abstract description 23
- XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical compound [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 claims abstract description 23
- 238000010438 heat treatment Methods 0.000 claims description 45
- XOLBLPGZBRYERU-UHFFFAOYSA-N SnO2 Inorganic materials O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 30
- 238000010583 slow cooling Methods 0.000 claims description 22
- 239000005357 flat glass Substances 0.000 claims description 20
- 239000002994 raw material Substances 0.000 claims description 19
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims description 18
- 238000001816 cooling Methods 0.000 claims description 17
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 13
- GOLCXWYRSKYTSP-UHFFFAOYSA-N Arsenious Acid Chemical compound O1[As]2O[As]1O2 GOLCXWYRSKYTSP-UHFFFAOYSA-N 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- GHPGOEFPKIHBNM-UHFFFAOYSA-N antimony(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Sb+3].[Sb+3] GHPGOEFPKIHBNM-UHFFFAOYSA-N 0.000 claims description 3
- 238000004031 devitrification Methods 0.000 abstract description 78
- 238000005530 etching Methods 0.000 abstract description 38
- 230000005764 inhibitory process Effects 0.000 abstract 1
- XZWYZXLIPXDOLR-UHFFFAOYSA-N metformin Chemical compound CN(C)C(=N)NC(N)=N XZWYZXLIPXDOLR-UHFFFAOYSA-N 0.000 abstract 1
- 239000004615 ingredient Substances 0.000 description 48
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 14
- 230000001603 reducing effect Effects 0.000 description 14
- 229910001928 zirconium oxide Inorganic materials 0.000 description 14
- NOTVAPJNGZMVSD-UHFFFAOYSA-N potassium monoxide Inorganic materials [K]O[K] NOTVAPJNGZMVSD-UHFFFAOYSA-N 0.000 description 13
- 239000008395 clarifying agent Substances 0.000 description 11
- 239000000155 melt Substances 0.000 description 11
- 239000011819 refractory material Substances 0.000 description 8
- 238000005352 clarification Methods 0.000 description 6
- 230000008602 contraction Effects 0.000 description 6
- 238000003280 down draw process Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- 229910052726 zirconium Inorganic materials 0.000 description 4
- 238000003723 Smelting Methods 0.000 description 3
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Inorganic materials O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 3
- 235000013399 edible fruits Nutrition 0.000 description 3
- 239000000156 glass melt Substances 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum oxide Inorganic materials [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000006124 Pilkington process Methods 0.000 description 2
- 239000011449 brick Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000007088 Archimedes method Methods 0.000 description 1
- 206010058490 Hyperoxia Diseases 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- -1 as long as Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- NLQFUUYNQFMIJW-UHFFFAOYSA-N dysprosium(III) oxide Inorganic materials O=[Dy]O[Dy]=O NLQFUUYNQFMIJW-UHFFFAOYSA-N 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- VQCBHWLJZDBHOS-UHFFFAOYSA-N erbium(III) oxide Inorganic materials O=[Er]O[Er]=O VQCBHWLJZDBHOS-UHFFFAOYSA-N 0.000 description 1
- RSEIMSPAXMNYFJ-UHFFFAOYSA-N europium(III) oxide Inorganic materials O=[Eu]O[Eu]=O RSEIMSPAXMNYFJ-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- CMIHHWBVHJVIGI-UHFFFAOYSA-N gadolinium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Gd+3].[Gd+3] CMIHHWBVHJVIGI-UHFFFAOYSA-N 0.000 description 1
- 238000005816 glass manufacturing process Methods 0.000 description 1
- JYTUFVYWTIKZGR-UHFFFAOYSA-N holmium oxide Inorganic materials [O][Ho]O[Ho][O] JYTUFVYWTIKZGR-UHFFFAOYSA-N 0.000 description 1
- 230000000222 hyperoxic effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910003443 lutetium oxide Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000010813 municipal solid waste Substances 0.000 description 1
- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium oxide Inorganic materials [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 description 1
- 238000000879 optical micrograph Methods 0.000 description 1
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 150000003057 platinum Chemical class 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- FKTOIHSPIPYAPE-UHFFFAOYSA-N samarium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Sm+3].[Sm+3] FKTOIHSPIPYAPE-UHFFFAOYSA-N 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- YEAUATLBSVJFOY-UHFFFAOYSA-N tetraantimony hexaoxide Chemical compound O1[Sb](O2)O[Sb]3O[Sb]1O[Sb]2O3 YEAUATLBSVJFOY-UHFFFAOYSA-N 0.000 description 1
- ZIKATJAYWZUJPY-UHFFFAOYSA-N thulium (III) oxide Inorganic materials [O-2].[O-2].[O-2].[Tm+3].[Tm+3] ZIKATJAYWZUJPY-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- FIXNOXLJNSSSLJ-UHFFFAOYSA-N ytterbium(III) oxide Inorganic materials O=[Yb]O[Yb]=O FIXNOXLJNSSSLJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Glass Compositions (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Nonlinear Science (AREA)
- Liquid Crystal (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Applications Claiming Priority (13)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-288183 | 2012-12-28 | ||
| JP2012288186 | 2012-12-28 | ||
| JP2012288183 | 2012-12-28 | ||
| JP2012-288186 | 2012-12-28 | ||
| JP2012288193 | 2012-12-28 | ||
| JP2012-288193 | 2012-12-28 | ||
| JP2013186436 | 2013-09-09 | ||
| JP2013-186436 | 2013-09-09 | ||
| JP2013186445 | 2013-09-09 | ||
| JP2013186416 | 2013-09-09 | ||
| JP2013-186416 | 2013-09-09 | ||
| JP2013-186445 | 2013-09-09 | ||
| CN201310745033.4A CN103910487B (zh) | 2012-12-28 | 2013-12-30 | 显示器用玻璃基板及其制造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310745033.4A Division CN103910487B (zh) | 2012-12-28 | 2013-12-30 | 显示器用玻璃基板及其制造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105502929A CN105502929A (zh) | 2016-04-20 |
| CN105502929B true CN105502929B (zh) | 2019-08-09 |
Family
ID=51036542
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510895581.4A Active CN105502929B (zh) | 2012-12-28 | 2013-12-30 | 显示器用玻璃基板及其制造方法 |
| CN201310745033.4A Active CN103910487B (zh) | 2012-12-28 | 2013-12-30 | 显示器用玻璃基板及其制造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310745033.4A Active CN103910487B (zh) | 2012-12-28 | 2013-12-30 | 显示器用玻璃基板及其制造方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (3) | JP5914453B2 (enExample) |
| KR (2) | KR101602541B1 (enExample) |
| CN (2) | CN105502929B (enExample) |
| TW (2) | TWI530469B (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5914453B2 (ja) * | 2012-12-28 | 2016-05-11 | AvanStrate株式会社 | ディスプレイ用ガラス基板およびその製造方法 |
| JP6575223B2 (ja) * | 2014-08-27 | 2019-09-18 | Agc株式会社 | 無アルカリガラス |
| JP7060915B2 (ja) | 2014-12-12 | 2022-04-27 | 日本電気硝子株式会社 | 無アルカリガラス |
| JP7004488B2 (ja) * | 2015-03-10 | 2022-01-21 | 日本電気硝子株式会社 | ガラス基板 |
| JP7182871B2 (ja) * | 2015-04-03 | 2022-12-05 | 日本電気硝子株式会社 | ガラス |
| US10927034B2 (en) * | 2015-06-30 | 2021-02-23 | Avanstrate Inc. | Glass substrate for display and method for producing same |
| JP6692812B2 (ja) * | 2015-06-30 | 2020-05-13 | AvanStrate株式会社 | ディスプレイ用ガラス基板およびその製造方法 |
| KR20180096723A (ko) * | 2015-12-21 | 2018-08-29 | 코닝 인코포레이티드 | 낮은 알칼리 함량의 보로실리케이트 유리 |
| CN105502928B (zh) * | 2015-12-30 | 2018-12-11 | 东旭科技集团有限公司 | 一种铝硅酸盐玻璃用组合物及其用途 |
| CN105859127B (zh) * | 2016-04-01 | 2018-10-30 | 东旭科技集团有限公司 | 一种玻璃用组合物、铝硅酸盐玻璃及其制备方法和应用 |
| KR102403524B1 (ko) * | 2016-08-23 | 2022-05-31 | 에이지씨 가부시키가이샤 | 무알칼리 유리 |
| US11161769B2 (en) * | 2016-09-16 | 2021-11-02 | Corning Incorporated | High transmission glasses with alkaline earth oxides as a modifier |
| CN113800764A (zh) * | 2016-12-20 | 2021-12-17 | 日本电气硝子株式会社 | 玻璃 |
| CN107129142B (zh) * | 2017-04-18 | 2021-02-09 | 东旭光电科技股份有限公司 | 无碱玻璃基板及其制备方法 |
| CN107032604A (zh) | 2017-04-18 | 2017-08-11 | 东旭科技集团有限公司 | 玻璃用组合物、碱土铝硅酸盐玻璃及其制备方法和应用 |
| JP7418947B2 (ja) * | 2018-01-31 | 2024-01-22 | 日本電気硝子株式会社 | ガラス |
| JP7140582B2 (ja) * | 2018-07-17 | 2022-09-21 | AvanStrate株式会社 | ディスプレイ用ガラス基板 |
| CN109160727B (zh) | 2018-10-16 | 2020-10-13 | 东旭光电科技股份有限公司 | 铝硅酸盐玻璃组合物、铝硅酸盐玻璃及其制备方法和应用 |
| CN109231819B (zh) | 2018-10-16 | 2021-04-09 | 东旭光电科技股份有限公司 | 无碱铝硅酸盐玻璃及其制备方法和应用 |
| CN109725019A (zh) * | 2018-12-29 | 2019-05-07 | 东旭集团有限公司 | 基板玻璃热收缩的检测装置、测量系统及测量方法 |
| KR20250030509A (ko) * | 2022-08-10 | 2025-03-05 | 니폰 덴키 가라스 가부시키가이샤 | 무알칼리 유리판 |
| CN117105526B (zh) * | 2023-08-28 | 2024-03-19 | 北京工业大学 | 一种高稳定长寿命的液晶显示用基板玻璃 |
| CN117923791A (zh) * | 2023-12-18 | 2024-04-26 | 彩虹显示器件股份有限公司 | 一种低热收缩玻璃及其制备方法 |
| CN118026526B (zh) * | 2024-01-31 | 2025-11-07 | 浙江大学 | 玻璃组合物、高性能电子玻璃基板及其制备方法 |
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| JPH10324526A (ja) * | 1997-05-20 | 1998-12-08 | Asahi Glass Co Ltd | 無アルカリガラスの清澄方法 |
| WO2007020824A1 (ja) * | 2005-08-15 | 2007-02-22 | Nippon Sheet Glass Company, Limited | ガラス組成物およびガラス組成物の製造方法 |
| CN101400614A (zh) * | 2006-02-10 | 2009-04-01 | 康宁股份有限公司 | 具有高的热稳定性和化学稳定性的玻璃组合物及其制备方法 |
| WO2012023470A1 (ja) * | 2010-08-17 | 2012-02-23 | 日本電気硝子株式会社 | 無アルカリガラス |
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| US5374595A (en) * | 1993-01-22 | 1994-12-20 | Corning Incorporated | High liquidus viscosity glasses for flat panel displays |
| US5741746A (en) * | 1995-03-02 | 1998-04-21 | Kohli; Jeffrey T. | Glasses for display panels |
| JP3858293B2 (ja) * | 1995-12-11 | 2006-12-13 | 日本電気硝子株式会社 | 無アルカリガラス基板 |
| JPH09255356A (ja) * | 1996-03-18 | 1997-09-30 | Asahi Glass Co Ltd | 基板用ガラス組成物 |
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| JP2000044278A (ja) * | 1998-05-20 | 2000-02-15 | Nippon Electric Glass Co Ltd | ディスプレイ用ガラス基板 |
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| JP4457410B2 (ja) * | 2006-09-21 | 2010-04-28 | 日本電気硝子株式会社 | 無アルカリガラス基板 |
| US7534734B2 (en) * | 2006-11-13 | 2009-05-19 | Corning Incorporated | Alkali-free glasses containing iron and tin as fining agents |
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| US8187715B2 (en) * | 2008-05-13 | 2012-05-29 | Corning Incorporated | Rare-earth-containing glass material and substrate and device comprising such substrate |
| JP5333984B2 (ja) | 2008-06-27 | 2013-11-06 | 日本電気硝子株式会社 | 無アルカリガラス |
| JP5537144B2 (ja) | 2009-12-16 | 2014-07-02 | AvanStrate株式会社 | ガラス組成物とそれを用いたフラットパネルディスプレイ用ガラス基板 |
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| JP5882840B2 (ja) * | 2012-06-18 | 2016-03-09 | AvanStrate株式会社 | ガラス組成物とそれを用いたディスプレイ用ガラス基板 |
| JP5914453B2 (ja) * | 2012-12-28 | 2016-05-11 | AvanStrate株式会社 | ディスプレイ用ガラス基板およびその製造方法 |
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| JPH10324526A (ja) * | 1997-05-20 | 1998-12-08 | Asahi Glass Co Ltd | 無アルカリガラスの清澄方法 |
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Also Published As
| Publication number | Publication date |
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| JP2016011256A (ja) | 2016-01-21 |
| KR101602541B1 (ko) | 2016-03-10 |
| KR20150067115A (ko) | 2015-06-17 |
| CN103910487A (zh) | 2014-07-09 |
| TWI647196B (zh) | 2019-01-11 |
| CN103910487B (zh) | 2017-09-01 |
| JP2015134720A (ja) | 2015-07-27 |
| JP2015071523A (ja) | 2015-04-16 |
| TW201427920A (zh) | 2014-07-16 |
| CN105502929A (zh) | 2016-04-20 |
| KR20140086915A (ko) | 2014-07-08 |
| TW201623175A (zh) | 2016-07-01 |
| JP6375277B2 (ja) | 2018-08-15 |
| TWI530469B (zh) | 2016-04-21 |
| KR101666750B1 (ko) | 2016-10-17 |
| JP6122461B2 (ja) | 2017-04-26 |
| JP5914453B2 (ja) | 2016-05-11 |
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