CN105457942B - 一种延长pecvd炉用石墨舟使用寿命的方法 - Google Patents
一种延长pecvd炉用石墨舟使用寿命的方法 Download PDFInfo
- Publication number
- CN105457942B CN105457942B CN201510627202.3A CN201510627202A CN105457942B CN 105457942 B CN105457942 B CN 105457942B CN 201510627202 A CN201510627202 A CN 201510627202A CN 105457942 B CN105457942 B CN 105457942B
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- bubbling
- service life
- boat
- extension
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510627202.3A CN105457942B (zh) | 2015-09-28 | 2015-09-28 | 一种延长pecvd炉用石墨舟使用寿命的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510627202.3A CN105457942B (zh) | 2015-09-28 | 2015-09-28 | 一种延长pecvd炉用石墨舟使用寿命的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105457942A CN105457942A (zh) | 2016-04-06 |
CN105457942B true CN105457942B (zh) | 2018-02-13 |
Family
ID=55596350
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510627202.3A Active CN105457942B (zh) | 2015-09-28 | 2015-09-28 | 一种延长pecvd炉用石墨舟使用寿命的方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105457942B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111589769A (zh) * | 2020-05-25 | 2020-08-28 | 常州时创能源股份有限公司 | 硅片pecvd镀非晶硅用石墨舟的清洗方法 |
CN113787048A (zh) * | 2021-09-13 | 2021-12-14 | 通威太阳能(眉山)有限公司 | 清洗石墨舟的方法 |
CN114433541A (zh) * | 2021-12-27 | 2022-05-06 | 张家港博佑光电科技有限公司 | 一种石墨舟清洗工艺 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102280396A (zh) * | 2011-09-14 | 2011-12-14 | 江阴鑫辉太阳能有限公司 | 一种石墨舟饱和处理工艺 |
CN102951931A (zh) * | 2011-08-29 | 2013-03-06 | 镇江仁德新能源科技有限公司 | 制备SiC涂层的方法 |
CN103387416A (zh) * | 2013-07-31 | 2013-11-13 | 青岛隆盛晶硅科技有限公司 | 一种提高介质熔炼中石墨坩埚使用寿命的方法 |
CN103521473A (zh) * | 2013-10-29 | 2014-01-22 | 宁夏银星能源股份有限公司 | 一种石墨舟的清洗工艺 |
CN104064503A (zh) * | 2014-06-19 | 2014-09-24 | 奉化拓升商贸有限公司 | 石墨舟的清洗工艺 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100209539B1 (ko) * | 1997-08-19 | 1999-07-15 | 박원훈 | 탄화규소 휘스커의 제조 방법 |
CN106460172B (zh) * | 2014-02-06 | 2019-01-15 | Kgt石墨科技有限公司 | 针对由石墨构成的pecvd舟皿的保护层 |
-
2015
- 2015-09-28 CN CN201510627202.3A patent/CN105457942B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102951931A (zh) * | 2011-08-29 | 2013-03-06 | 镇江仁德新能源科技有限公司 | 制备SiC涂层的方法 |
CN102280396A (zh) * | 2011-09-14 | 2011-12-14 | 江阴鑫辉太阳能有限公司 | 一种石墨舟饱和处理工艺 |
CN103387416A (zh) * | 2013-07-31 | 2013-11-13 | 青岛隆盛晶硅科技有限公司 | 一种提高介质熔炼中石墨坩埚使用寿命的方法 |
CN103521473A (zh) * | 2013-10-29 | 2014-01-22 | 宁夏银星能源股份有限公司 | 一种石墨舟的清洗工艺 |
CN104064503A (zh) * | 2014-06-19 | 2014-09-24 | 奉化拓升商贸有限公司 | 石墨舟的清洗工艺 |
Also Published As
Publication number | Publication date |
---|---|
CN105457942A (zh) | 2016-04-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105457942B (zh) | 一种延长pecvd炉用石墨舟使用寿命的方法 | |
CN105470344B (zh) | 一种延长石墨舟使用寿命的方法 | |
CN106952805B (zh) | 一种石墨舟清洗工艺 | |
CN104399699B (zh) | 一种石墨舟清洗工艺 | |
CN106699228A (zh) | 一种低成本碳化钽涂层的制备方法 | |
KR101356230B1 (ko) | 양극 산화 피막의 형성 방법 | |
CN103911648A (zh) | 一种镁合金车轮预处理工艺 | |
CN104357840A (zh) | 一种金属结构材料表面纯铝或铝合金涂层的制备方法 | |
WO2023077737A1 (zh) | 载板的清洗方法及其应用 | |
CN107936776A (zh) | 一种六方氮化硼改性环氧超疏水涂层材料及其制备方法 | |
CN111945091A (zh) | 一种镀锌生产工艺 | |
CN107611220A (zh) | 一种太阳能电池片制备方法 | |
CN100484666C (zh) | 一种粘接钕铁硼磁体无机封孔和阴极电泳复合表面防护技术 | |
CN112226721A (zh) | 一种应用于电子产业设备腔体的铜熔射层的制备工艺 | |
US20200347490A1 (en) | Metal surface protective layer and preparation method thereof | |
CN106048528A (zh) | 一种薄膜电极制备工艺的方法及装置 | |
CN108315677B (zh) | 通信塔热镀锌工艺 | |
CN110607510A (zh) | 一种磁控溅射制备非晶金属钒薄膜的方法 | |
CN104060228B (zh) | 一种钢表面高硬铝钛陶瓷膜的制备方法 | |
CN102921665A (zh) | 硅片表面的氮化硅膜的清洗液及清除方法 | |
CN204367501U (zh) | 一种镀锌钢板 | |
CN108754562B (zh) | 一种TiN薄膜的制备方法 | |
CN102181851A (zh) | 镁合金表面涂装的无水前处理方法 | |
CN101575694B (zh) | 一种超大直径钼圆片表面渗钌工艺 | |
TWI797487B (zh) | 等離子體處理腔室內部部件及其製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information |
Address after: 362302 Nanan City, Quanzhou province photoelectric information industry base Sunshine Road, No. 1, No. Applicant after: YANGGUANG ZHONGKE (FUJIAN) ENERGY CO.,LTD. Address before: 362302 Nanan City, Quanzhou province photoelectric information industry base Sunshine Road, No. 1, No. Applicant before: SUNLIGHT EARTH GROUND (FUJIAN) NEW ENERGY Co.,Ltd. |
|
CB02 | Change of applicant information | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Method for prolonging service life of graphite boat for PECVD furnace Effective date of registration: 20191203 Granted publication date: 20180213 Pledgee: Nanan branch of Xingye Bank, Limited by Share Ltd. Pledgor: YANGGUANG ZHONGKE (FUJIAN) ENERGY CO.,LTD. Registration number: Y2019350000076 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20230224 Granted publication date: 20180213 Pledgee: Nanan branch of Xingye Bank, Limited by Share Ltd. Pledgor: YANGGUANG ZHONGKE (FUJIAN) ENERGY CO.,LTD. Registration number: Y2019350000076 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right |