CN105308862B - 使用穿玻通孔技术的高通滤波器和低通滤波器及其制造方法 - Google Patents

使用穿玻通孔技术的高通滤波器和低通滤波器及其制造方法 Download PDF

Info

Publication number
CN105308862B
CN105308862B CN201480030699.4A CN201480030699A CN105308862B CN 105308862 B CN105308862 B CN 105308862B CN 201480030699 A CN201480030699 A CN 201480030699A CN 105308862 B CN105308862 B CN 105308862B
Authority
CN
China
Prior art keywords
filter
capacitor
inductors
coupled
glass substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201480030699.4A
Other languages
English (en)
Chinese (zh)
Other versions
CN105308862A (zh
Inventor
C·左
J·金
C·H·尹
D·D·金
M·F·维纶茨
J-H·兰
R·P·米库尔卡
M·M·诺瓦克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qualcomm Inc
Original Assignee
Qualcomm Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Inc filed Critical Qualcomm Inc
Publication of CN105308862A publication Critical patent/CN105308862A/zh
Application granted granted Critical
Publication of CN105308862B publication Critical patent/CN105308862B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01Frequency selective two-port networks
    • H03H7/0138Electrical filters or coupling circuits
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01Frequency selective two-port networks
    • H03H7/0115Frequency selective two-port networks comprising only inductors and capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Filters And Equalizers (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Manufacturing & Machinery (AREA)
CN201480030699.4A 2013-05-31 2014-03-25 使用穿玻通孔技术的高通滤波器和低通滤波器及其制造方法 Expired - Fee Related CN105308862B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361829714P 2013-05-31 2013-05-31
US61/829,714 2013-05-31
US14/055,707 2013-10-16
US14/055,707 US9425761B2 (en) 2013-05-31 2013-10-16 High pass filters and low pass filters using through glass via technology
PCT/US2014/031779 WO2014193525A1 (en) 2013-05-31 2014-03-25 High pass filters and low pass filters using through glass via technology and method for manufacturing the same

Publications (2)

Publication Number Publication Date
CN105308862A CN105308862A (zh) 2016-02-03
CN105308862B true CN105308862B (zh) 2018-07-24

Family

ID=51984443

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480030699.4A Expired - Fee Related CN105308862B (zh) 2013-05-31 2014-03-25 使用穿玻通孔技术的高通滤波器和低通滤波器及其制造方法

Country Status (6)

Country Link
US (1) US9425761B2 (https=)
EP (1) EP3005559B1 (https=)
JP (1) JP6266765B2 (https=)
KR (1) KR101799425B1 (https=)
CN (1) CN105308862B (https=)
WO (1) WO2014193525A1 (https=)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10665377B2 (en) 2014-05-05 2020-05-26 3D Glass Solutions, Inc. 2D and 3D inductors antenna and transformers fabricating photoactive substrates
US9954267B2 (en) * 2015-12-28 2018-04-24 Qualcomm Incorporated Multiplexer design using a 2D passive on glass filter integrated with a 3D through glass via filter
US12165809B2 (en) 2016-02-25 2024-12-10 3D Glass Solutions, Inc. 3D capacitor and capacitor array fabricating photoactive substrates
US10026546B2 (en) * 2016-05-20 2018-07-17 Qualcomm Incorported Apparatus with 3D wirewound inductor integrated within a substrate
JP6838328B2 (ja) * 2016-09-15 2021-03-03 大日本印刷株式会社 インダクタおよびインダクタの製造方法
US10510828B2 (en) 2016-10-04 2019-12-17 Nano Henry, Inc. Capacitor with high aspect radio silicon cores
US10872950B2 (en) 2016-10-04 2020-12-22 Nanohenry Inc. Method for growing very thick thermal local silicon oxide structures and silicon oxide embedded spiral inductors
US10854946B2 (en) 2017-12-15 2020-12-01 3D Glass Solutions, Inc. Coupled transmission line resonate RF filter
JP7106875B2 (ja) * 2018-01-30 2022-07-27 凸版印刷株式会社 ガラスコアデバイスの製造方法
US10693432B2 (en) * 2018-05-17 2020-06-23 Qualcommm Incorporated Solenoid structure with conductive pillar technology
JP7509035B2 (ja) * 2018-05-24 2024-07-02 Toppanホールディングス株式会社 回路基板
US10433425B1 (en) * 2018-08-01 2019-10-01 Qualcomm Incorporated Three-dimensional high quality passive structure with conductive pillar technology
CN109302161A (zh) * 2018-08-31 2019-02-01 维沃移动通信有限公司 调谐滤波电路和终端设备
EP3648128B1 (en) * 2018-11-02 2024-01-03 Delta Electronics (Shanghai) Co., Ltd. Transformer module and power module
KR20210147040A (ko) 2019-04-05 2021-12-06 3디 글래스 솔루션즈 인코포레이티드 유리 기반의 빈 기판 집적 도파관 디바이스
CN110519913A (zh) * 2019-09-23 2019-11-29 努比亚技术有限公司 一种实现pcb单点接地设计的方法、封装和印刷电路板
JP7608727B2 (ja) * 2020-04-07 2025-01-07 Toppanホールディングス株式会社 高周波フィルタ内蔵ガラスコア配線基板の製造方法
JP2023516817A (ja) * 2020-04-17 2023-04-20 スリーディー グラス ソリューションズ,インク 広帯域誘導
JP7834430B2 (ja) * 2020-09-17 2026-03-24 株式会社村田製作所 インダクタ部品
US11728293B2 (en) * 2021-02-03 2023-08-15 Qualcomm Incorporated Chip modules employing conductive pillars to couple a passive component device to conductive traces in a metallization structure to form a passive component
US12324169B2 (en) 2021-04-23 2025-06-03 Boe Technology Group Co., Ltd. Substrate integrated with passive device and method for manufacturing the same
CN115241163B (zh) * 2021-04-23 2025-03-25 京东方科技集团股份有限公司 可调滤波器及其制备方法
US20220408562A1 (en) * 2021-06-16 2022-12-22 Intel Corporation Integrated rf passive devices on glass
US12424518B2 (en) * 2022-02-28 2025-09-23 Qualcomm Incorporated Capacitor embedded 3D resonator for broadband filter
CN114709054A (zh) * 2022-03-23 2022-07-05 上海艾为电子技术股份有限公司 一种片上电感及其制作方法
WO2023245593A1 (zh) * 2022-06-24 2023-12-28 京东方科技集团股份有限公司 滤波器及其制备方法
CN115765667A (zh) * 2022-11-24 2023-03-07 杭州电子科技大学 一种频率可重构的毫米波高通滤波器结构
WO2024116490A1 (ja) * 2022-11-29 2024-06-06 株式会社村田製作所 電子部品
CN116318003B (zh) * 2022-12-12 2026-01-16 南京国博电子股份有限公司 一种三维混合集成滤波器及其电子装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002184946A (ja) * 2000-12-11 2002-06-28 Murata Mfg Co Ltd Mimキャパシタおよびその製造方法
JP2004056097A (ja) * 2002-05-27 2004-02-19 Nec Corp 薄膜キャパシタ、薄膜キャパシタを含む複合受動部品、それらの製造方法およびそれらを内蔵した配線基板
JP4499731B2 (ja) * 2004-07-15 2010-07-07 富士通株式会社 容量素子とその製造方法、及び半導体装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0992539A (ja) 1995-09-22 1997-04-04 Uniden Corp 立体渦巻状インダクタ及びそれを用いた誘導結合フィルタ
JP2004200227A (ja) 2002-12-16 2004-07-15 Alps Electric Co Ltd プリントインダクタ
JP2006229173A (ja) * 2005-02-21 2006-08-31 Tokyo Electron Ltd インダクタンス素子
FR2906962B1 (fr) 2006-10-06 2010-11-12 Thales Sa Self integree dans un circuit imprime
JP4305779B2 (ja) 2007-01-30 2009-07-29 Tdk株式会社 積層型ローパスフィルタ
US7724117B2 (en) 2008-01-11 2010-05-25 Northrop Grumman Systems Corporation Multilayer passive circuit topology
US8384507B2 (en) 2010-06-01 2013-02-26 Qualcomm Incorporated Through via inductor or transformer in a high-resistance substrate with programmability
CN103283023B (zh) 2010-12-20 2016-09-14 英特尔公司 封装衬底中具有集成无源器件的集成数字和射频片上系统器件及其制造方法
US20130207745A1 (en) * 2012-02-13 2013-08-15 Qualcomm Incorporated 3d rf l-c filters using through glass vias
US20140104284A1 (en) * 2012-10-16 2014-04-17 Qualcomm Mems Technologies, Inc. Through substrate via inductors

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002184946A (ja) * 2000-12-11 2002-06-28 Murata Mfg Co Ltd Mimキャパシタおよびその製造方法
JP2004056097A (ja) * 2002-05-27 2004-02-19 Nec Corp 薄膜キャパシタ、薄膜キャパシタを含む複合受動部品、それらの製造方法およびそれらを内蔵した配線基板
JP4499731B2 (ja) * 2004-07-15 2010-07-07 富士通株式会社 容量素子とその製造方法、及び半導体装置

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"Design and Fabrication of Bandpass Filters in Glass Interposer with Through-Package-Vias(TPV);Vivek Sridharan;《Electronic Components and Technology Conference》;20100601;第530-535页 *
Integrated Passives for High-Frequency Applications;XiaoYu Mi;《URL:http://cdn.intechopen.com/pdfs/9635.pdf》;20100401;第249-290页 *

Also Published As

Publication number Publication date
US20140354378A1 (en) 2014-12-04
EP3005559A1 (en) 2016-04-13
CN105308862A (zh) 2016-02-03
JP6266765B2 (ja) 2018-01-24
JP2016527743A (ja) 2016-09-08
KR101799425B1 (ko) 2017-11-20
US9425761B2 (en) 2016-08-23
EP3005559B1 (en) 2017-12-13
KR20160015283A (ko) 2016-02-12
WO2014193525A1 (en) 2014-12-04

Similar Documents

Publication Publication Date Title
CN105308862B (zh) 使用穿玻通孔技术的高通滤波器和低通滤波器及其制造方法
JP5982585B2 (ja) ガラス貫通ビア技術を使用するダイプレクサ構成
US10039188B2 (en) Two-stage power delivery architecture
US9876513B2 (en) LC filter layer stacking by layer transfer to make 3D multiplexer structures
JP2019507972A (ja) 3dガラス貫通ビアフィルタと統合された2d受動オンガラスフィルタを使用するマルチプレクサ構成
JP7442446B2 (ja) ラミネート積層基板における埋め込み垂直インダクタ
CN109155299A (zh) 具有集成在基底内的3d线绕电感器的装置
CN105185507B (zh) 片式电子器件和用于安装片式电子器件的板
JP6280244B2 (ja) 構成可能/制御可能等価直列抵抗を有する埋込みパッケージ基板キャパシタ
US10749499B2 (en) Wideband filter including an acoustic resonator chip integrated with 3D inductors and a 3D transformer
CN109155617B (zh) 双侧电路
US20190006728A1 (en) On-chip coplanar waveguide (cpw) transmission line integrated with metal-oxide-metal (mom) capacitors
JP2022027893A (ja) オープンパッシベーションボールグリッドアレイパッド
Bian et al. Simulation and modeling of wafer level silicon-base spiral inductor
CN108054151B (zh) 一种电感可变封装基板
US20180083589A1 (en) Face-to-face multiplexer circuit layout
US10141353B2 (en) Passive components implemented on a plurality of stacked insulators

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180724