CN105008868B - 热式空气流量计 - Google Patents
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- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
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- G—PHYSICS
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- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
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Abstract
为了提供测量精度高的热式流量计,采用以下结构:具有流量检测部、用于配置上述流量检测部的副通路和被输入从上述流量检测部得到的信号且向外部输出信号的LSI,上述副通路的侧壁配置在上述流量检测部与上述LSI之间或者配置在上述LSI上,设置在上述LSI的内部的扩散电阻的长度方向与单晶硅的<100>轴平行。
Description
技术领域
本发明涉及热式空气流量计。
背景技术
测量空气的流量的热式空气流量计具有用于测量空气流量的流量检测部,通过在上述流量检测部和作为测量对象的上述气体之间进行热传递,测量上述气体的空气流量。热式空气流量计所测量的空气流量作为各种装置的重要的控制参数广泛使用。热式空气流量计的特征在于与其它方式的流量计相比能够以相对高的精度测量空气的流量。
但是,期待进一步提高空气流量的测量精度。例如,在搭载有内燃机的车辆中,节省燃料的要求和排气净化的要求都非常高。为了实现这些要求,需要以较高的精度测量作为内燃机的主要参数的吸入空气量。测量被导入内燃机的吸入空气量的热式空气流量计包括取入吸入空气量的一部分的副通路和配置在上述副通路的流量检测部,上述流量检测部在其与被测量气体之间进行热传递,由此测量流过上述副通路的被测量气体的状态,输出表示被导入上述内燃机的吸入空气量的电信号。这样的技术例如公开于日本特开2011-252796号公报(专利文献1)中。
现有技术文献
专利文献
专利文献1:日本特开2011-252796号公报
发明内容
发明要解决的技术问题
为了利用热式空气流量计以较高精度测量空气的流量,要求在设置于用于测量流过主通路的空气流量的热式空气流量计的副通路,以较高精度将流量检测部定位且固定,正确地测量由流量检测部检测出的流量。专利文献1记载的技术中,用树脂预先制造具有成形有用于嵌入流量检测部的孔的副通路的箱体,除了该箱体之外,制造具有流量检测部的传感器组件,然后在将上述流量检测部插入到上述副通路的孔的状态下,将上述传感器组件固定于箱体。在上述副通路的孔与流量检测部之间的间隙和传感器组件向箱体的嵌入部分的间隙中,填充有弹性粘接剂,利用接合剂的弹性力吸收彼此的线膨胀差。
在这样的结构中,难以将包含流量检测部的传感器组件正确地设定并固定于包含副通路的箱体。即,存在传感器组件和设置于箱体的副通路的位置和角度因粘接剂的状态等的不同而简单地变化的问题。因此,在现有的热式空气流量计中,难以进一步提高流量的检测精度。
为了将流量检测部相对于副通路正确地定位,将包含流量检测部的传感器组件在箱体形成的同时进行固定是有效的。但是,在该情况下,与使用粘接材料的情况相比,由传感器组件与箱体部件的线膨胀系数差导致的热应力较高地产生,配置在传感器组件内的LSI的输出(主要是电阻因热应力而发生变化)发生变动,存在热式空气流量计的测量精度降低的问题。
本发明的目的在于提供一种测量精度高的热式空气流量计。
用于解决技术课题的技术方案
为了达成上述目的,本发明的热式空气流量计包括:流量检测部;用于配置上述流量检测部的副通路;和被输入从上述流量检测部获得的信号,且向外部输出信号的LSI,上述副通路的侧壁配置在上述流量检测部与上述LSI之间或者配置在上述LSI上,设置在上述LSI的内部的扩散电阻的长度方向与单晶硅的<100>轴平行。
发明效果
根据本发明,能够提供测量精度高的热式空气流量计。
附图说明
图1是本发明的第1实施例中的传感器组件平面图。
图2是本发明的第1实施例中的热式空气流量计平面图。
图3是本发明的第1实施例中的热式空气流量计截面图。
图4是说明本发明的第1实施例中的电阻配置的图。
图5是说明本发明的第2实施例中的电阻配置的图。
图6是改变本发明的第2实施例中的电阻配置的图。
图7是说明本发明的第3实施例中的电阻体的图。
具体实施方式
以下,使用附图对本发明的实施方式进行说明。
(实施例1)
对作为本发明的热式空气流量计的一实施例的第1实施例进行说明。如图1所示,传感器组件10包括引线架1、玻璃板2、LSI3、传感器芯片4,它们被第1树脂7覆盖。使用树脂膜5将玻璃板2接合于引线架1,使用树脂膜6将LSI3和传感器芯片4接合于该玻璃板2。LSI3与传感器芯片4之间、LSI3与引线架1之间通过利用金属线8、9进行引线接合而接线,从而电连接。对它们用热固化性的第1树脂7进行模塑,制作传感器组件10。此外,LSI3将来自成为流量检测部的传感器芯片4的模拟信号转换为数字信号,并进行控制、输出。
图2是包含副通路的壳体11和传感器组件10的正面图,图3是图2上的双点划线A-A的截面图。上述壳体11包括:用于将流过上述主通路的空气导向传感器芯片4的副通路槽12;传感器组件10的保持部13;和上述引线架1的保持部14。传感器组件10在形成包含副通路的壳体11的同时被固定,该壳体11由热可塑性的第2树脂形成。成为流量检测部的上述传感器芯片4测定空气流量,因此配置在上述副通路槽12中。因此,上述传感器组件10在传感器芯片4与LSI3之间、或者在上述LSI3的正上方周边由上述保持部13固定。
图4是表示上述LSI3内的扩散电阻体15的配置方向的概要图。上述LSI3由Si单晶形成,上述LSI3内的扩散电阻体15以Si结晶轴的<100>方向16和扩散电阻体15的长度方向平行的方式配置。
接着,说明上述第1实施例的效果。传感器组件10在利用第2树脂进行模塑时与壳体11一体成形而固定。因此,传感器组件10内的传感器芯片4的位置精度提高,空气流量的测定精度提高。壳体11包括具有传感器芯片4的副通路槽12,利用保持部13固定传感器组件10,因此,在保持部13正下方的周边配置LSI3。传感器组件10由第1树脂形成,壳体11由第2树脂形成,因此,在保持部13和传感器组件10的分界面(LSI3附近)产生因第1树脂与第2树脂的线膨胀系数差导致的热应力或者因树脂收缩差导致的收缩应力。
在此,当电阻体产生应力(应变)时,由于压电效应而产生电阻值的变化。上述压电效应导致的电阻值的变化为压电电阻系数和在电阻中产生的应变(形变)的函数。另外,上述压电电阻系数较强地依赖于Si单晶(单晶硅)的结晶方位,在Si结晶轴的<100>方向16上配置电阻体的长度方向时,压电电阻系数最小。在本实施例中,在Si结晶轴的<100>方向16上配置扩散电阻体15的长度方向,因此,能够减小因产生应变而导致的电阻值的变化,LSI的输出变化受到抑制,流量测定精度提高。
(实施例2)
说明热式空气流量计的第2实施例。此外,传感器组件10和壳体11的结构为与上述实施例1相同的结构。
图5是表示保持部13和LSI3的内部的扩散电阻体15的位置关系的概要图。LSI3的内部的扩散电阻体15是例如A/D转换电路这样的输出被电路内电阻的比所控制的电路17所具有的电阻体。A/D转换电路是将由传感器芯片4得到的模拟信号转换为数字信号的电路,使得能够在LSI3内进行处理,由整数倍的电阻体、数个构成。该扩散电阻体15以下述方式配置:壳体11所具有的保持部13的端部a与扩散电阻体15的各个端部的距离为相等距离L,保持部13的端部a与扩散电阻体15的另一方的各个端部的距离为相等距离L’。进而,利用相同长度的电阻体制作整数倍的电阻体。
接着,说明热式空气流量计的第2实施例的效果。在LSI3的内部的扩散电阻体15产生因第1树脂与第2树脂的线膨胀系数差导致的热应力,或者因树脂收缩差导致的收缩应力。在扩散电阻体15产生因压电效应导致的电阻值变动,该电阻变动是压电电阻系数和在电阻体产生产生的应变的函数。在第2实施例中,扩散电阻体15位于距作为应力产生源的保持部13的端部a相等距离的位置,在各电阻体产生的热应变分布是一样的。另外,利用相同长度的电阻体制作整数倍的电阻体。因此,压电效应导致的扩散电阻体15各自的电阻值变动相同,输出由电阻值的比控制的A/D转换电路等中,能够使热应力的影响相互抵消。因此,能够降低在LSI3产生的热应力的影响,能够提高空气流量的测定精度。此外,如图6所示,扩散电阻体15在本实施例中,在与Si结晶轴的<100>方向16平行的方向上配置长度方向时,能够进一步降低热应力的影响,这是当然的。
(实施例3)
说明热式空气流量计的第3实施例。传感器组件10和壳体11的结构是与上述实施例1相同的结构。在实施例3中,如图7所示,将LSI3内部的扩散电阻体改变为多晶硅电阻18。
接着,说明热式空气流量计的第3实施例的效果。Si的压电电阻系数在<110>结晶方向上较大,在<100>结晶方向上最小。当由多晶硅膜形成电阻体时,多晶硅膜中的晶粒在各个方向上生长,因此压电电阻系数被平均化。因此,与扩散电阻体的长度方向为<110>结晶方向的结构相比,压电电阻系数变小。如以上所说明的那样,能够降低在LSI3产生的热应力的影响,能够提高该空气流量的测定精度。
在本实施例中,将LSI3的内部的扩散电阻体改变为多晶硅电阻18,但是,在距保持部13远的位置几乎没有应变的影响,因此当然也可以由多晶硅电阻形成LSI3内所有的电阻。此外,像实施例2所示的那样将A/D转换电路的扩散电阻体15由多晶硅膜形成,当然也能够降低应力的影响。
附图标记说明
1……引线架
2……玻璃板
3……LSI
4……传感器芯片
5……树脂膜
6……树脂膜
7……第1树脂
8……金属线
9……金属线
10……传感器组件
11……壳体
12……副通路槽
13……传感器组件保持部
14……引线架保持部
15……扩散电阻体
16……Si结晶轴<100>方向
17……电路
18……多晶硅电阻。
Claims (2)
1.一种热式空气流量计,其特征在于,包括:
流量检测部;用于配置所述流量检测部的副通路;和被输入从所述流量检测部得到的信号,且向外部输出信号的LSI,
所述副通路的侧壁配置在所述流量检测部与所述LSI之间或者配置在所述LSI上,
所述流量检测部和所述LSI被热固化性树脂覆盖,
所述副通路由热可塑性树脂成形,
设置在所述LSI的内部的扩散电阻的长度方向与单晶硅的<100>轴平行。
2.如权利要求1所述的热式空气流量计,其特征在于,
构成所述LSI的内部的A/D转换电路的电阻配置在从所述副通路的侧壁起一定距离的位置。
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