CN104516040B - 干涉滤波器、光学滤波器装置、光模块以及电子设备 - Google Patents
干涉滤波器、光学滤波器装置、光模块以及电子设备 Download PDFInfo
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- CN104516040B CN104516040B CN201410505073.6A CN201410505073A CN104516040B CN 104516040 B CN104516040 B CN 104516040B CN 201410505073 A CN201410505073 A CN 201410505073A CN 104516040 B CN104516040 B CN 104516040B
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- reflectance coating
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- interference filter
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Links
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
- G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
- G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Optical Filters (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-201047 | 2013-09-27 | ||
| JP2013201047A JP6264810B2 (ja) | 2013-09-27 | 2013-09-27 | 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104516040A CN104516040A (zh) | 2015-04-15 |
| CN104516040B true CN104516040B (zh) | 2018-10-12 |
Family
ID=51726307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410505073.6A Active CN104516040B (zh) | 2013-09-27 | 2014-09-26 | 干涉滤波器、光学滤波器装置、光模块以及电子设备 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9651770B2 (enExample) |
| EP (1) | EP2853931A1 (enExample) |
| JP (1) | JP6264810B2 (enExample) |
| KR (1) | KR20150035429A (enExample) |
| CN (1) | CN104516040B (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5786424B2 (ja) * | 2011-04-11 | 2015-09-30 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光モジュール、及び電子機器 |
| JP6341959B2 (ja) | 2016-05-27 | 2018-06-13 | 浜松ホトニクス株式会社 | ファブリペロー干渉フィルタの製造方法 |
| KR102508597B1 (ko) * | 2016-08-24 | 2023-03-13 | 하마마츠 포토닉스 가부시키가이샤 | 패브리 페로 간섭 필터 |
| JP6861214B2 (ja) * | 2016-08-24 | 2021-04-21 | 浜松ホトニクス株式会社 | ファブリペロー干渉フィルタ |
| DE102016223917B4 (de) * | 2016-12-01 | 2019-12-05 | Robert Bosch Gmbh | Interferometerbauelement und Verfahren zum Herstellen eines Interferometerbauelements |
| DE102017105113B4 (de) | 2017-03-10 | 2021-09-30 | Leibniz-Institut für Photonische Technologien e.V. (Engl.Leibniz Institute of Photonic Technology) | Anordnung und Verfahren für die Erfassung von Änderungen der optischen Weglänge in einem Nano-Kapillarkanal |
| WO2018230567A1 (ja) * | 2017-06-13 | 2018-12-20 | 浜松ホトニクス株式会社 | 光学フィルタシステム |
| US10955336B2 (en) * | 2017-08-26 | 2021-03-23 | Innovative Micro Technology | Gas sensor comprising a rotatable Fabry-Perot multilayer etalon |
| JP6907884B2 (ja) * | 2017-10-27 | 2021-07-21 | セイコーエプソン株式会社 | 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
| JP6983633B2 (ja) * | 2017-11-24 | 2021-12-17 | 浜松ホトニクス株式会社 | ウェハの検査方法、及びウェハ |
| US10936844B2 (en) * | 2018-07-16 | 2021-03-02 | Beijing Boe Optoelectronics Technology Co., Ltd. | Fingerprint sensor, display apparatus, method of detecting a fingerprint, and method of fabricating a fingerprint sensor |
| TWM576667U (zh) * | 2018-10-22 | 2019-04-11 | 隆達電子股份有限公司 | 顯示裝置 |
| JP7495599B2 (ja) * | 2019-02-28 | 2024-06-05 | 日亜化学工業株式会社 | 光学部材、又は、発光装置 |
| US10840391B1 (en) * | 2019-04-26 | 2020-11-17 | Visera Technologies Company Limited | Light filter structure |
| JP7279565B2 (ja) * | 2019-07-26 | 2023-05-23 | セイコーエプソン株式会社 | 波長可変干渉フィルター |
| US11693164B2 (en) * | 2019-10-09 | 2023-07-04 | Viavi Solutions Inc. | Multi-transmission optical filter |
| JP7517139B2 (ja) * | 2020-12-24 | 2024-07-17 | セイコーエプソン株式会社 | 波長可変光学フィルター |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6813291B2 (en) * | 1998-06-26 | 2004-11-02 | Coretek Inc | Tunable fabry-perot filter and tunable vertical cavity surface emitting laser |
| CN102736156A (zh) * | 2011-04-11 | 2012-10-17 | 精工爱普生株式会社 | 波长可变干涉滤波器、光模块以及电子设备 |
| CN102834761A (zh) * | 2010-04-09 | 2012-12-19 | 高通Mems科技公司 | 机电装置的机械层及其形成方法 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58217901A (ja) * | 1982-06-14 | 1983-12-19 | Nippon Kogaku Kk <Nikon> | 透過型光学部材 |
| JP2002148528A (ja) | 2000-11-09 | 2002-05-22 | Seiko Epson Corp | フィルタ、照明装置および画像表示装置 |
| JP3835525B2 (ja) | 2001-03-19 | 2006-10-18 | ホーチキ株式会社 | 波長可変フィルタ制御装置 |
| JP3888075B2 (ja) * | 2001-03-23 | 2007-02-28 | セイコーエプソン株式会社 | 光スイッチング素子、光スイッチングデバイス、および画像表示装置 |
| JP4916647B2 (ja) | 2003-05-23 | 2012-04-18 | サムスン エレクトロニクス カンパニー リミテッド | 外部共振器半導体レーザーおよびその製造方法 |
| JP5017803B2 (ja) * | 2005-06-13 | 2012-09-05 | セイコーエプソン株式会社 | 光学素子および光学装置 |
| JP2007241017A (ja) * | 2006-03-10 | 2007-09-20 | Epson Toyocom Corp | ハーフミラー |
| JP2008197362A (ja) * | 2007-02-13 | 2008-08-28 | Olympus Corp | 可変分光素子 |
| JP5370246B2 (ja) | 2009-05-27 | 2013-12-18 | セイコーエプソン株式会社 | 光フィルター、光フィルター装置、分析機器、および光フィルターの製造方法 |
| JP2011169943A (ja) * | 2010-02-16 | 2011-09-01 | Seiko Epson Corp | 波長可変干渉フィルター、光センサーおよび分析機器 |
| JP6010275B2 (ja) * | 2010-03-15 | 2016-10-19 | セイコーエプソン株式会社 | 光フィルター並びにそれを用いた分析機器及び光機器 |
| JP5641220B2 (ja) * | 2010-11-12 | 2014-12-17 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光モジュール、及び光分析装置 |
| JP2012108220A (ja) * | 2010-11-16 | 2012-06-07 | Seiko Epson Corp | 光フィルターおよび光機器 |
| JP5716412B2 (ja) * | 2011-01-24 | 2015-05-13 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光モジュール、及び光分析装置 |
| US20130049844A1 (en) * | 2011-08-23 | 2013-02-28 | Qualcomm Mems Technologies, Inc. | Capacitive touch sensor having light shielding structures |
| JP5834718B2 (ja) | 2011-09-29 | 2015-12-24 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
| JP6035768B2 (ja) | 2012-02-16 | 2016-11-30 | セイコーエプソン株式会社 | 干渉フィルター、光学モジュール、および電子機器 |
| JP2013033257A (ja) | 2012-08-23 | 2013-02-14 | Seiko Epson Corp | 波長可変フィルタ |
-
2013
- 2013-09-27 JP JP2013201047A patent/JP6264810B2/ja active Active
-
2014
- 2014-09-15 US US14/486,283 patent/US9651770B2/en active Active
- 2014-09-25 KR KR20140128208A patent/KR20150035429A/ko not_active Withdrawn
- 2014-09-26 EP EP20140186596 patent/EP2853931A1/en not_active Withdrawn
- 2014-09-26 CN CN201410505073.6A patent/CN104516040B/zh active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6813291B2 (en) * | 1998-06-26 | 2004-11-02 | Coretek Inc | Tunable fabry-perot filter and tunable vertical cavity surface emitting laser |
| CN102834761A (zh) * | 2010-04-09 | 2012-12-19 | 高通Mems科技公司 | 机电装置的机械层及其形成方法 |
| CN102736156A (zh) * | 2011-04-11 | 2012-10-17 | 精工爱普生株式会社 | 波长可变干涉滤波器、光模块以及电子设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2853931A1 (en) | 2015-04-01 |
| JP2015068886A (ja) | 2015-04-13 |
| CN104516040A (zh) | 2015-04-15 |
| KR20150035429A (ko) | 2015-04-06 |
| US9651770B2 (en) | 2017-05-16 |
| US20150092272A1 (en) | 2015-04-02 |
| JP6264810B2 (ja) | 2018-01-24 |
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