JP6341959B2 - ファブリペロー干渉フィルタの製造方法 - Google Patents
ファブリペロー干渉フィルタの製造方法 Download PDFInfo
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- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00523—Etching material
- B81C1/00539—Wet etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00634—Processes for shaping materials not provided for in groups B81C1/00444 - B81C1/00626
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
Description
[ファブリペロー干渉フィルタの構成]
[ファブリペロー干渉フィルタの製造方法]
[変形例]
Claims (8)
- 複数のラインのそれぞれに沿って複数の基板に切断される予定のウェハの第1主面に、それぞれが固定ミラーとして機能する予定の複数の第1ミラー部を有する第1ミラー層、複数の除去予定部を有する犠牲層、及びそれぞれが可動ミラーとして機能する予定の複数の第2ミラー部を有する第2ミラー層を、1つの前記第1ミラー部、1つの前記除去予定部、及び1つの前記第2ミラー部が1つの前記基板側からこの順序で配置されるように形成し、前記第1ミラー層、前記犠牲層、及び前記第2ミラー層の少なくとも1つが複数の前記ラインのそれぞれに沿って部分的に薄化された第1薄化領域を形成する形成工程と、
前記形成工程の後に、レーザ光の照射によって、複数の前記ラインのそれぞれに沿って前記ウェハの内部に改質領域を形成し、前記改質領域から前記ウェハの厚さ方向に亀裂を伸展させることにより、複数の前記ラインのそれぞれに沿って前記ウェハを複数の前記基板に切断する切断工程と、
前記形成工程と前記切断工程との間に、又は前記切断工程の後に、エッチングによって前記犠牲層から前記除去予定部を除去する除去工程と、を備える、ファブリペロー干渉フィルタの製造方法。 - 前記形成工程においては、前記ウェハの第2主面に応力調整層を形成し、前記応力調整層が複数の前記ラインのそれぞれに沿って部分的に薄化された第2薄化領域を形成する、請求項1に記載のファブリペロー干渉フィルタの製造方法。
- 前記切断工程においては、前記応力調整層側に貼り付けられたエキスパンドテープを拡張させることにより、前記改質領域から前記ウェハの厚さ方向に前記亀裂を伸展させる、請求項2に記載のファブリペロー干渉フィルタの製造方法。
- 前記切断工程においては、前記応力調整層側に前記エキスパンドテープが貼り付けられた状態で、前記エキスパンドテープとは反対側から前記ウェハに前記レーザ光を入射させる、請求項3に記載のファブリペロー干渉フィルタの製造方法。
- 前記切断工程においては、前記応力調整層側に前記エキスパンドテープが貼り付けられた状態で、前記エキスパンドテープ側から前記エキスパンドテープを介して前記ウェハに前記レーザ光を入射させる、請求項3に記載のファブリペロー干渉フィルタの製造方法。
- 前記除去工程は、前記形成工程と前記切断工程との間に実施される、請求項1〜5のいずれか一項に記載のファブリペロー干渉フィルタの製造方法。
- 前記形成工程においては、前記第1ミラー層上に形成された前記犠牲層のうち複数の前記ラインのそれぞれに沿った部分を薄化した後に、前記犠牲層上に前記第2ミラー層を形成することにより、複数の前記ラインのそれぞれに沿って互いに対向する前記犠牲層の側面を前記第2ミラー層で被覆する、請求項1〜6のいずれか一項に記載のファブリペロー干渉フィルタの製造方法。
- 前記形成工程においては、前記第1ミラー層又は前記第2ミラー層を構成する少なくとも1つの層の表面が露出するように、前記第1ミラー層、前記犠牲層、及び前記第2ミラー層の少なくとも1つのうち複数の前記ラインのそれぞれに沿った部分を薄化し、
前記切断工程においては、前記層の前記表面を介して前記ウェハに前記レーザ光を入射させる、請求項1〜7のいずれか一項に記載のファブリペロー干渉フィルタの製造方法。
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201780032566.4A CN109313334B (zh) | 2016-05-27 | 2017-05-01 | 法布里-帕罗干涉滤光器的制造方法 |
PCT/JP2017/017167 WO2017203947A1 (ja) | 2016-05-27 | 2017-05-01 | ファブリペロー干渉フィルタの製造方法 |
FIEP17802544.1T FI3467565T3 (fi) | 2016-05-27 | 2017-05-01 | Tuotantomenetelmä Fabryn-Perot’n interferenssisuodatinta varten |
EP17802544.1A EP3467565B1 (en) | 2016-05-27 | 2017-05-01 | Production method for fabry-perot interference filter |
KR1020187037423A KR102361550B1 (ko) | 2016-05-27 | 2017-05-01 | 패브리 페로 간섭 필터의 제조 방법 |
CA3024961A CA3024961A1 (en) | 2016-05-27 | 2017-05-01 | Production method for fabry-perot interference filter |
US16/065,856 US10908022B2 (en) | 2016-05-27 | 2017-05-01 | Production method for fabry-perot interference filter |
TW106117483A TWI735581B (zh) | 2016-05-27 | 2017-05-26 | 法布立-培若干涉濾光器之製造方法 |
US17/126,297 US20210131870A1 (en) | 2016-05-27 | 2020-12-18 | Production method for fabry-perot interference filter |
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JP2018519165A Active JP6983767B2 (ja) | 2016-05-27 | 2017-05-01 | ファブリペロー干渉フィルタ、及びファブリペロー干渉フィルタの製造方法 |
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JP2018093874A Active JP6368447B1 (ja) | 2016-05-27 | 2018-05-15 | ウェハ構造体 |
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US (3) | US10900834B2 (ja) |
EP (2) | EP3467565B1 (ja) |
JP (3) | JP6341959B2 (ja) |
KR (1) | KR102349371B1 (ja) |
CN (2) | CN109313334B (ja) |
CA (1) | CA3024961A1 (ja) |
PH (1) | PH12018502443A1 (ja) |
SG (1) | SG11201807221YA (ja) |
TW (2) | TWI733816B (ja) |
WO (1) | WO2017203949A1 (ja) |
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SG11201810376PA (en) | 2016-05-27 | 2018-12-28 | Hamamatsu Photonics Kk | Production method for fabry-perot interference filter |
JP6899314B2 (ja) * | 2017-11-17 | 2021-07-07 | 浜松ホトニクス株式会社 | 吸着方法 |
JP7374114B2 (ja) | 2018-10-03 | 2023-11-06 | 浜松ホトニクス株式会社 | ファブリペロー干渉フィルタ |
JP7202160B2 (ja) * | 2018-12-05 | 2023-01-11 | 浜松ホトニクス株式会社 | 光学フィルタ装置、及び光学フィルタ装置の制御方法 |
JP7091489B2 (ja) * | 2020-02-26 | 2022-06-27 | キヤノンファインテックニスカ株式会社 | ワンウェイクラッチ、このワンウェイクラッチを用いた駆動伝達ユニット、及び、この駆動伝達ユニットを用いたインクジェット記録装置 |
DE102020203573A1 (de) | 2020-03-19 | 2021-09-23 | Robert Bosch Gesellschaft mit beschränkter Haftung | Halbleitersubstrat und Verfahren zum Bilden eines Luft- und/oder Gastransferzugangs durch ein Halbleitersubstrat |
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EP3467565B1 (en) | 2024-02-14 |
US20190204150A1 (en) | 2019-07-04 |
JPWO2017203949A1 (ja) | 2019-03-22 |
JP6983767B2 (ja) | 2021-12-17 |
WO2017203949A1 (ja) | 2017-11-30 |
SG11201807221YA (en) | 2018-09-27 |
CN109196404B (zh) | 2022-05-03 |
CN109313334B (zh) | 2021-08-17 |
EP3467565A4 (en) | 2020-03-11 |
TW201800728A (zh) | 2018-01-01 |
JP2017215559A (ja) | 2017-12-07 |
CN109313334A (zh) | 2019-02-05 |
EP3467566A4 (en) | 2019-12-25 |
TWI733816B (zh) | 2021-07-21 |
CA3024961A1 (en) | 2017-11-30 |
JP6368447B1 (ja) | 2018-08-01 |
US20210131870A1 (en) | 2021-05-06 |
US10900834B2 (en) | 2021-01-26 |
PH12018502443A1 (en) | 2019-09-09 |
US10908022B2 (en) | 2021-02-02 |
EP3467565A1 (en) | 2019-04-10 |
KR102349371B1 (ko) | 2022-01-11 |
JP2018128703A (ja) | 2018-08-16 |
EP3467566A1 (en) | 2019-04-10 |
TWI735581B (zh) | 2021-08-11 |
CN109196404A (zh) | 2019-01-11 |
US20180373021A1 (en) | 2018-12-27 |
TW201805686A (zh) | 2018-02-16 |
KR20190012139A (ko) | 2019-02-08 |
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