CN104203780B - 上浮用空气板 - Google Patents

上浮用空气板 Download PDF

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Publication number
CN104203780B
CN104203780B CN201380017508.6A CN201380017508A CN104203780B CN 104203780 B CN104203780 B CN 104203780B CN 201380017508 A CN201380017508 A CN 201380017508A CN 104203780 B CN104203780 B CN 104203780B
Authority
CN
China
Prior art keywords
air
mentioned
communicated
suction hole
cutoff port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201380017508.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN104203780A (zh
Inventor
角田耕一
伊藤彰彦
安田贵裕
小泽秀夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oiles Industry Co Ltd
Original Assignee
Oiles Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oiles Industry Co Ltd filed Critical Oiles Industry Co Ltd
Publication of CN104203780A publication Critical patent/CN104203780A/zh
Application granted granted Critical
Publication of CN104203780B publication Critical patent/CN104203780B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Laser Beam Processing (AREA)
CN201380017508.6A 2012-04-03 2013-03-21 上浮用空气板 Expired - Fee Related CN104203780B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2012-084409 2012-04-03
JP2012084409 2012-04-03
JP2013-055853 2013-03-19
JP2013055853A JP5998086B2 (ja) 2012-04-03 2013-03-19 浮上用エアプレート
PCT/JP2013/057967 WO2013150894A1 (ja) 2012-04-03 2013-03-21 浮上用エアプレート

Publications (2)

Publication Number Publication Date
CN104203780A CN104203780A (zh) 2014-12-10
CN104203780B true CN104203780B (zh) 2016-01-13

Family

ID=49300387

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380017508.6A Expired - Fee Related CN104203780B (zh) 2012-04-03 2013-03-21 上浮用空气板

Country Status (7)

Country Link
US (2) US9422120B2 (ja)
JP (1) JP5998086B2 (ja)
KR (1) KR20150000482A (ja)
CN (1) CN104203780B (ja)
HK (1) HK1205085A1 (ja)
TW (1) TWI565643B (ja)
WO (1) WO2013150894A1 (ja)

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JP6287089B2 (ja) * 2013-11-13 2018-03-07 村田機械株式会社 基板浮上装置、基板移載装置、および基板搬送装置
TWI582896B (zh) * 2015-08-18 2017-05-11 由田新技股份有限公司 氣浮載台
US10807811B2 (en) 2016-03-07 2020-10-20 Purple Innovation, Llc Mattress toppers, air tables for making mattress toppers, and related methods
TWI577626B (zh) * 2016-06-04 2017-04-11 由田新技股份有限公司 氣浮載台
KR102300934B1 (ko) * 2016-06-21 2021-09-13 코아 플로우 리미티드 에지 리프팅을 동반한 비접촉 지지 플랫폼
JP6910518B2 (ja) * 2016-08-29 2021-07-28 株式会社日本製鋼所 レーザ照射装置
EP3512789A1 (en) * 2016-09-13 2019-07-24 Corning Incorporated Apparatus and method for processing a glass substrate
US9889995B1 (en) * 2017-03-15 2018-02-13 Core Flow Ltd. Noncontact support platform with blockage detection
JP7106627B2 (ja) * 2017-07-11 2022-07-26 コーニング インコーポレイテッド ガラスを処理する装置及び方法
US10513011B2 (en) * 2017-11-08 2019-12-24 Core Flow Ltd. Layered noncontact support platform
JP7161185B2 (ja) * 2018-10-23 2022-10-26 株式会社平安コーポレーション 木材加工機の吸着テーブル
US10745215B2 (en) 2018-12-27 2020-08-18 Core Flow Ltd. Port arrangement for noncontact support platform
CN110124908B (zh) * 2019-06-21 2021-09-07 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） 晶片真空吸附装置
CN110980280A (zh) * 2019-11-28 2020-04-10 东莞理工学院 一种非接触多点式气浮抓取装置
JP7437187B2 (ja) * 2020-02-26 2024-02-22 Ｊｓｗアクティナシステム株式会社 浮上搬送装置、及びレーザ処理装置
JP7437186B2 (ja) * 2020-02-26 2024-02-22 Ｊｓｗアクティナシステム株式会社 浮上搬送装置、及びレーザ処理装置
KR102396254B1 (ko) * 2021-11-17 2022-05-09 황희진 디스플레이 패널 부상 스테이지
KR102396243B1 (ko) * 2021-11-17 2022-05-09 황희진 세척수단을 갖는 디스플레이 패널 부상 스테이지 및 이의 세척방법
CN114229471A (zh) * 2021-12-22 2022-03-25 中导光电设备股份有限公司 一种基于伯努利原理的气浮平台装置和气浮方法
KR102451485B1 (ko) * 2022-03-10 2022-10-06 황희진 흡기라인에 이물질 수용공간을 갖는 디스플레이 패널 부상 스테이지장치
KR102451501B1 (ko) * 2022-03-10 2022-10-06 황희진 진공 동기라인을 갖는 디스플레이 패널 부상 스테이지장치
KR102451491B1 (ko) * 2022-03-10 2022-10-06 황희진 이물질 수용공간을 갖는 디스플레이 패널 부상 스테이지장치

Citations (2)

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CN1623219A (zh) * 2001-12-27 2005-06-01 考夫乐科学方案有限公司 高性能非接触支承平台
CN100557769C (zh) * 2005-02-23 2009-11-04 东京毅力科创株式会社 工作台装置以及涂敷处理装置

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CN101133488A (zh) * 2005-03-03 2008-02-27 住友重机械工业株式会社 搬运物浮起组件、搬运物浮起装置及载物台装置
KR101234475B1 (ko) * 2005-06-20 2013-02-18 엘지디스플레이 주식회사 비접촉 반송 장치에서의 지지플랫폼
JP4570545B2 (ja) * 2005-09-22 2010-10-27 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP2007324442A (ja) * 2006-06-02 2007-12-13 Smc Corp 非接触搬送装置
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KR20100130991A (ko) * 2008-03-11 2010-12-14 코아 플로우 리미티드 편평한 물체를 국부적으로 제어하여 지지하기 위한 방법 및 시스템
JP5012651B2 (ja) * 2008-05-14 2012-08-29 東京エレクトロン株式会社 塗布装置、塗布方法、塗布、現像装置及び記憶媒体
JP5465595B2 (ja) * 2010-05-10 2014-04-09 オイレス工業株式会社 非接触搬送装置
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CN1623219A (zh) * 2001-12-27 2005-06-01 考夫乐科学方案有限公司 高性能非接触支承平台
CN100557769C (zh) * 2005-02-23 2009-11-04 东京毅力科创株式会社 工作台装置以及涂敷处理装置

Also Published As

Publication number Publication date
WO2013150894A1 (ja) 2013-10-10
US9550633B2 (en) 2017-01-24
JP5998086B2 (ja) 2016-09-28
TW201410572A (zh) 2014-03-16
US20160318719A1 (en) 2016-11-03
JP2013232631A (ja) 2013-11-14
HK1205085A1 (en) 2015-12-11
CN104203780A (zh) 2014-12-10
US20150336751A1 (en) 2015-11-26
TWI565643B (zh) 2017-01-11
US9422120B2 (en) 2016-08-23
KR20150000482A (ko) 2015-01-02

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