CN104129908B - Substrate breaking device and substrate transportation method of substrate breaking device - Google Patents
Substrate breaking device and substrate transportation method of substrate breaking device Download PDFInfo
- Publication number
- CN104129908B CN104129908B CN201410364041.9A CN201410364041A CN104129908B CN 104129908 B CN104129908 B CN 104129908B CN 201410364041 A CN201410364041 A CN 201410364041A CN 104129908 B CN104129908 B CN 104129908B
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- Prior art keywords
- roller
- transport unit
- substrate
- band portion
- downstream control
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1313—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
- B26F3/00—Severing by means other than cutting; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/037—Controlling or regulating
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Forests & Forestry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Intermediate Stations On Conveyors (AREA)
- Structure Of Belt Conveyors (AREA)
- Framework For Endless Conveyors (AREA)
Abstract
The present invention is to provide a substrate breaking device and a substrate transportation method of a substrate breaking device for preventing the occurrence of substrate falling or fracture during movement of the transportation. The substrate breaking device includes a first transportation part and a second transportation part, a scribing unit and a jumping roller unit. The first transportation part and the second transportation part are disposed separately with an in-between space along the transportation direction of the substrate and have a band part which winds around a plurality ofrollers and carries out rotation under the state of carrying the substrate. The scribing unit is disposed in the in-between space. The jumping roller unit is located in the first direction and between the upstream side second transportation part and the downstream side second transmission part, and at least has a first roller and a second roller. The first roller is located at the external side of the band part of the second transportation part, while the second roller is located at the internal side of the band part of the second transportation part. The first roller and the second roller are formed in the second direction intersecting with the first direction to make mutual and opposite direction movement. The invention further provides a substrate transportation method of the substrate breaking device.
Description
The application is the entitled " base of substrate breaking apparatus and substrate breaking apparatus of Application No. 201310116487.5
The divisional application of the application for a patent for invention of plate conveying method ", the applying date of original application is on 04 03rd, 2013.
Technical field
The present invention is related to be used in the various of the motherboards such as the glass substrate of the display floaters such as liquid crystal indicator to including
The motherboard of material carries out the substrate transfer method adopted therein of disjunction, the substrate breaking apparatus of conveyance and substrate breaking apparatus, is more related to
To delineating, the brittle substrate of disjunction is when being transported to next stage, can to substrate not causing to damage, it is good
The substrate breaking apparatus transported under state and substrate transfer method adopted therein.
Background technology
In general, the display floater such as liquid crystal indicator, is usually used brittle substrate i.e. glass substrate and is formed.Liquid
Crystal device, engages by a pair of glass substrates are separated with appropriate interval, and encloses liquid crystal in the interval and become
Display floater.When display floater so is manufactured, it is to carry out disjunction by the engagement mother substrate to engaging female glass substrate,
And carry out from engagement mother substrate being fabricated to the processing of multiple display floaters.The substrate-cutting of mother substrate is engaged so for disjunction
Device, is disclosed in Korean Patent Laid the 2006-0125915th (hereinafter referred to as patent documentation 1).
Fig. 1, roughly represents the axonometric chart of the main composition of the substrate breaking apparatus of the Figure 32 for being disclosed in patent documentation 1.
With reference to Fig. 1, substrate breaking apparatus 200 possess positioning unit portion 220, transmission (conveyor) portion of delineation unit portion 240, brisement
260th, steam (steam) brisement unit portion 280, panel inverting units portion 320 and panel terminal separated part 340.
It is set as that substrate is moved into side, will be configured with 340 side of panel terminal separated part 220 side of positioning unit portion will be configured with
When being set as that substrate takes out of side, substrate is after the positioning unit portion 220 that side is moved into by substrate supplies, sequentially past to delineate unit
Portion 240, brisement transport unit 260, steam brisement unit portion 280, substrate transport unit portion 300, panel inverting units portion 320 and face
Plate terminal separated part 340 is transported, and carries out substrate-cutting operation, takes out of side conveyance toward substrate afterwards.
That is, due to being arranged at the substrate that the positioning unit portion 220 above setting table 230 supplies, it is placed in be formed in and determines
On multiple substrate-holding units (not shown) in bit location portion 220, the location positioning of substrate is single in substrate support is arranged at
After in the band portion (belt) (not shown) of unit, unit portion 240 is delineated toward next stage and transported by the spinning movement in band portion.
On the other hand, unit portion 240 is delineated, with the break-up device guide body for being arranged above setting table 250 in X direction
242, and the break-up device guide body 242 is sandwiched in therebetween and along the 1st substrate-holding unit portion 241A and the of Y-direction configuration
2 substrate-holding unit portion 241B.Additionally, the 1st substrate-holding unit 244A and the 2nd substrate of the 1st substrate-holding unit portion 241A
The 2nd substrate-holding unit 244B of supporter portion 241B, is respectively relative to framework (frame) 243A and framework 243B abreast
Configuration.
In this respect, from positioning unit portion 220 toward the substrate of 240 conveyance of delineation unit portion, it is placed in the 1st substrate and supports single
The 1st substrate-holding unit 244A of first portion 241A, and clamp by binder (clamp) device 251.Afterwards, once making setting
Rotate in the band portion of the 1st substrate-holding unit 244A, while making binder device 251 move along Y-direction, substrate is made whereby by dividing
Disconnected device guide body 242 and delineate, and delineate after substrate toward the 2nd substrate-holding unit portion 241B the 2nd substrate-holding unit
244B is transported.
The substrate of the 2nd substrate-holding unit 244B conveyances before, by the band portion for being arranged at the 2nd substrate-holding unit 244B
Rotation, toward with the 2nd substrate-holding unit 244B with part from and the band portion 261 of brisement transport unit 260 that arranges transports, afterwards
Substrate fully disjunction is made by steam brisement unit portion 280, and through substrate transport unit portion 300, panel inverting units portion
320 and panel terminal separated part 340, side conveyance is taken out of toward substrate by robot etc..
Additionally, in general, completing to delineate operation and the base with transporting in portion toward the 2nd substrate-holding unit 244B
Plate, the past brisement transport unit by the rotation with portion 261 with portion and brisement transport unit 260 of the 2nd substrate-holding unit 244B
260 conveyances.The substrate toward 260 conveyance of brisement transport unit is completed, has been stopped in the rotation with portion 261 of brisement transport unit 260
State, pick up by (pick-up) robot etc. is picked up after brisement by steam brisement unit 280, and toward substrate transport
Unit portion 300 discharges.Even if additionally, in the state that stopped of the rotation with portion 261 of brisement transport unit 260, for substrate
Delineation, constitutes the band portion of the 1st substrate-holding unit 244A and the 2nd substrate-holding unit 244B in delineation unit portion 240 still to hold
The mode of continuous rotation is controlled.
Patent documentation 1:Korean Patent Laid the 2006-0125915th.
But, in the existing known substrate breaking apparatus as so, the substrate delineated is past from delineation unit portion 240
Brisement transport unit 260 transport when, more specifically, from the 2nd substrate-holding unit 244B toward brisement transport unit 260 transport when, by
In in the 2nd substrate-holding unit 244B with portion and brisement transport unit 260 with carrying out the transfer with portion between portion 261 so that
Between the 2nd substrate-holding unit 244B and brisement transport unit 260, hold material to fall, or the glass chip etc. of substrate breakage produce.
With regard to the problem points with portion's transfer as so, more specifically illustrate with reference to Fig. 2.
Fig. 2 is shown diagrammatically in existing known substrate breaking apparatus, and substrate is picked up transmission from delineation unit portion is past
Portion transports the schematic diagram of process.In fig. 2, symbol 100 is represented carries out receiving, positions to the substrate that side conveyance is moved into by substrate
And/or the confession material portion of rotation, symbol 110 and 120 represents upstream side delineation portion and downstream delineation portion respectively, and 130 table of symbol
Show that the substrate to disjunction is picked up transport unit by what robot etc. picked up and discharged.
With reference to Fig. 2, in existing known substrate breaking apparatus, the substrate of substrate grasping mechanism 114 is held in,
Reciprocate between upstream side delineation portion 110 and downstream delineation portion 120, by the delineation for being arranged at delineation beam 116
118 and delineate.Then, the substrate 102a for completing to delineate being placed on the conveyer belt 134 in downstream delineation portion 120, it is past to pick up
The conveyer belt 135 for playing transport unit 130 is transported.
But, due between the conveyer belt 134 in downstream delineation portion 120 and the conveyer belt 135 for picking up transport unit 130,
There is transmission transfer portion, therefore when substrate 102a is transported toward the position of the substrate 102b picked up in transport unit 135 so that from
The substrate 102a of delineation falls end material.Additionally, substrate 102a from downstream delineation portion 120 toward pick up transfer in transport unit 130 when,
So that substrate 102a produces dipping and heaving, the part of delineation of substrate 102a is caused to collide each other and produce substrate whereby
The glass chip of part rupture.Even if for example by downstream delineation portion 120 and setting with the height on ground of picking up transport unit 130
Be calculated as it is equal, in fact, still there are slightly difference, or either one in downstream delineation portion 120 with the height for picking up transport unit 130
Obliquely arrange, hence in so that glass chip is produced.Especially, it is more in the situation of handling thin substrate recently, so as
Problem become apparent from.
The content of the invention
Prevent from causing holding that material falls or substrate is broken because of the transfer of transporter it is an object of the invention to provide a kind of
The problem split, and can have been delineated substrate do not cause damage transport to substrate breaking apparatus and the substrate conveyance side of next stage
Method.
The object of the invention to solve the technical problems employs the following technical solutions to realize.The present invention provides a kind of
Substrate breaking apparatus, comprising:1st transport unit and the 2nd transport unit, in setting table, are the 1st direction phase along the conveyance direction of substrate
Mutually it is arranged at intervals, and possesses what is in the state of the substrate is loaded be wound in multiple rollers (roller) and rotated
Band portion;Delineation unit, is arranged between the 1st transport unit and the 2nd transport unit and the substrate is delineated;And bounce roller
(dancer-roller) unit, in the 1st direction, the upstream side the 2nd for being arranged in the upstream side of the 2nd transport unit is transmitted
Portion and between 2 transport unit of downstream control in downstream, and at least possess the 1st roller and the 2nd roller;1st roller is located at
On the outside of the band portion of the 2nd transport unit;2nd roller is located on the inside of the band portion of the 2nd transport unit;1st roller and the 2nd roller
Son, in the 2nd direction intersected with the 1st direction, be formed as can reciprocally toward rightabout move, and form as one this on
Trip the 2nd transport unit of side and 2 transport unit of downstream control, can become operating states different each other.
The object of the invention to solve the technical problems can also be applied to the following technical measures to achieve further.
Preferably, aforesaid substrate breaking apparatus, wherein the 1st roller and the 2nd roller in the 2nd direction reciprocally toward phase
When opposite direction is moved, the displacement of the 1st roller is identical with the displacement of the 2nd roller.
Preferably, aforesaid substrate breaking apparatus, wherein at least one of the 1st roller and the 2nd roller, maintaining should
The tension force with portion of the 2nd transport unit, is contacted with the band portion.
Preferably, aforesaid substrate breaking apparatus, wherein the 1st roller and the 2nd roller, are clipping and gear drive motor
The little gear of link and it is reciprocally oppositely disposed in the state of, respectively with the 1st tooth bar that is engaged in the little gear and the 2nd tooth bar knot
Close.
Preferably, aforesaid substrate breaking apparatus, wherein in the plurality of roller, comprising the 3rd roller, and the 3rd roller
It is wound with the band portion of 2 transport unit of downstream control, and the 3rd roller linking belt portion drive motor.
Preferably, aforesaid substrate breaking apparatus, wherein in the bounce roller units, being provided with makes the upstream side the 2nd
The 1st brake (stopper) that the rotation with portion of transport unit stops, and the rotation with portion for making 2 transport unit of downstream control
Turn the 2nd brake for stopping.
The object of the invention to solve the technical problems also employs the following technical solutions to realize.The present invention also provides one
Substrate transfer method adopted therein is planted, is reciprocally being matched somebody with somebody across interval comprising conveyance direction i.e. the 1st direction possessed along substrate in setting table
The 1st transport unit with portion put and in the state of the substrate is loaded be wound in multiple rollers and rotated and the 2nd transport unit,
And it is arranged at the substrate-cutting of the delineation unit delineated between the 1st transport unit and the 2nd transport unit and to the substrate
In device, being transported toward the 1st direction with the substrate in portion for the 2nd transport unit will be placed in, wherein in the substrate-cutting
In device, in the 1st direction, in the 2nd transport unit of upstream side positioned at the upstream side of the 2nd transport unit and under downstream
Between trip the 2nd transport unit of side, possess and reciprocally can move at least toward rightabout in the 2nd direction intersected with the 1st direction
Bounce roller units with the 1st roller and the 2nd roller, and make the 1st roller be located at the 2nd transport unit band portion on the outside of,
And in the state of the 2nd roller is located on the inside of the band portion of the 2nd transport unit, make the 1st roller with the 2nd roller reciprocally toward phase
Opposite direction is moved, and makes the 2nd transport unit of upstream side for forming as one from 2 transport unit of downstream control reciprocally with different whereby
Mode action.
The object of the invention to solve the technical problems can also be applied to the following technical measures to achieve further.
Preferably, aforesaid substrate transfer method adopted therein, wherein by making the 1st roller reciprocate with the 2nd roller, in the case where making
In the state of the band portion of trip the 2nd transport unit of side stops, the band portion of the 2nd transport unit of upstream side is made toward clockwise direction or side counterclockwise
To rotation, and to being placed in delineating with the substrate in portion for the 2nd transport unit of upstream side;In the stage delineated by this,
Be opposite to halted state 2 transport unit of downstream control with portion complete delineate substrate unloaded (unload);By
While making to be wound with the rotation of the 3rd roller with portion of 2 transport unit of downstream control, move the 1st roller and the 2nd roller
It is dynamic, in the state of the band portion for making the 2nd transport unit of upstream side stops, rotating the band portion of 2 transport unit of downstream control, to indwelling
Being unloaded with the end material in portion in 2 transport unit of downstream control;Also, after the end material unloading, the 3rd roller is made persistently to revolve
Turn, make to be placed in the 2nd transport unit of upstream side with the substrate for completing to delineate in portion toward 2 transport unit of downstream control band portion
On transported.
Preferably, aforesaid substrate transfer method adopted therein, wherein the 3rd roller linking belt portion drive motor, and to the substrate
In the stage delineated, stop the action with portion's drive motor.
Preferably, aforesaid substrate transfer method adopted therein, wherein in the stage unloaded to the end material, making the band portion drive horse
Up to action.
Preferably, aforesaid substrate transfer method adopted therein, wherein in the bounce roller units, setting transmits the upstream side the 2nd
The 1st brake that the rotation with portion in portion stops, and make the 2nd system of the rotation stopping with portion of 2 transport unit of downstream control
Dynamic device, and in the stage delineated to the substrate, make the 2nd brake action.
Preferably, aforesaid substrate transfer method adopted therein, wherein in the stage unloaded to the end material, making the 1st brake
Action.
Preferably, aforesaid substrate transfer method adopted therein, wherein the substrate delineated is toward the band portion of 2 transport unit of downstream control
In the stage of conveyance, the 1st brake and the 2nd brakeage is made to release completely.
By above-mentioned technical proposal, substrate breaking apparatus of the present invention and substrate transfer method adopted therein at least have following advantages and have
Beneficial effect:According to the present invention, transmit with downstream control 2 by the 2nd transport unit of upstream side in the 2nd transport unit for forming as one
Possess bounce roller units between portion, can not have and existing known be present in downstream delineation portion and pick up between transport unit
Transmission transfer portion mode, substrate is transported from the 2nd transport unit of upstream side toward 2 transport unit of downstream control.Thus, can prevent
Not-go-end material fall or glass chip etc. generation.Additionally, can also prevent the wound on substrate surface is produced because transmitting transfer portion
Trace or damage.Additionally, according to the present invention, can make the 2nd transport unit of upstream side from 2 transport unit of downstream control reciprocally with different sides
Formula action, even if therefore being stopped 2 transport unit of downstream control in order to pick up to the substrate in 2 transport unit of downstream control
In the state of, delineation operation that also can be in the 2nd transport unit of upstream side to substrate is persistently carried out.Therefore, substrate-cutting dress can be improved
The treatment effeciency of the entirety put.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of description, and in order to allow the present invention above and other objects, features and advantages can
Become apparent, below especially exemplified by preferred embodiment, and coordinate accompanying drawing, describe in detail as follows.
Description of the drawings
Fig. 1:The axonometric chart of the main composition of existing known substrate breaking apparatus is represented roughly.
Fig. 2:Show diagrammatically in existing known substrate breaking apparatus, the substrate delineated is removed toward picking up transport unit
The schematic diagram for sending.
Fig. 3:The side view of the main composition of the substrate breaking apparatus of the embodiment of the present invention is represented roughly.
Fig. 4 (a) to Fig. 4 (d):Roughly represent that the substrate of the substrate breaking apparatus of the embodiment of the present invention transports showing for process
It is intended to.
Fig. 5:The partial perspective view of the substrate breaking apparatus for being provided with bounce roller units of the embodiment of the present invention.
Fig. 6:The axonometric chart of the bounce roller units of the embodiment of the present invention.
Fig. 7:The side view of the bounce roller units of the embodiment of the present invention.
Fig. 8:Represent in the bounce roller units of the embodiment of the present invention, the bounce that the 1st roller declines and the 2nd roller rises
The sectional side view of roller units.
Fig. 9:Represent in the bounce roller units of the embodiment of the present invention, the bounce that the 1st roller rises and the 2nd roller declines
The sectional side view of roller units.
【Main element symbol description】
2、2a:Substrate 10:1st transport unit
14:Chuck beam 16:Chuck
18:Band portion 20:2nd transport unit
21:Roller 21a:3rd roller
22:The 2nd transport unit of upstream side (transport unit after delineation)
22a:Framework 23 is transmitted after delineation:Bounce roller units
23a:1st roller 23b:2nd roller
24:2 transport unit of downstream control (picking up transport unit)
24a:Pick up transmission framework 25a:Pick up X-axis robot
25b:Pick up Y-axis robot 25c:Pick up Z axis robot
27:Pick up handss 28:Band portion
30:Delineation unit 32:Delineation beam
34:Engraving head 40:Band portion drive motor
50a:1st brake 50b:2nd brake
52:Band portion brake countershaft 54:Tooth bar and little gear
232:Gear drive motor 234:Little gear
236a:1st tooth bar 236b:2nd tooth bar
238:Guiding element
Specific embodiment
Further to illustrate the present invention to reach technological means and effect that predetermined goal of the invention is taken, below in conjunction with
Accompanying drawing and preferred embodiment, to the substrate conveyance side according to a kind of substrate breaking apparatus proposed by the present invention and substrate breaking apparatus
The specific embodiment of method, structure, feature and its effect, describe in detail as after.
Hereinafter, referring to the drawings, it is described in detail for embodiments of the invention.But the present invention can be with a variety of
Form is specifically presented, and is not limited to embodiment described herein as.In the example shown, in order to carry out to the present invention simply and clearly
Illustrate, eliminate the part unrelated with explanation, and be directed to the generally same or similar composed component labelling phase of insertion description
Same reference marks.Additionally, in an embodiment of the present invention, to having revealed that known substrate-cutting existing in patent documentation 1 etc.
Device is illustrated centered on the difference in composition, with regard to being same or like with existing known substrate breaking apparatus
Composition, the description thereof will be omitted.On the other hand, in an embodiment of the present invention, " substrate " comprising disjunction into multiple substrates female base
Plate, additionally comprising the fragility such as the metal basal boards such as steel plate, plank, plastic substrate and ceramic substrate, semiconductor substrate, glass substrate
The veneers such as material substrate.Additionally, veneer so is not limited to, and the engagement substrate also comprising a pair of substrates of engagement, Yi Jiji
The laminated substrate of a pair of substrate of layer.
Fig. 3, roughly represents the side view of the main composition of the substrate breaking apparatus of the embodiment of the present invention.With reference to Fig. 3, this
The substrate breaking apparatus of embodiment, comprising the 1st transport unit 10 and the 2nd transport unit 20, delineation unit 30 and bounce roller units 23.
1st transport unit 10 and the 2nd transport unit 20, are the 1st direction (+Y in figure 3 along substrate conveyance direction in setting table (not shown)
Direction) reciprocally it is arranged at intervals.In the 1st transport unit 10, the band portion for being wound in multiple rollers 11 and being rotated is provided with
18, in the 2nd transport unit 20, it is provided with the band portion 28 for being wound in multiple rollers 21 and being rotated.And, in the present embodiment,
Constitute as follows:Among multiple rollers 21, the 3rd roller 21a is linked with band portion drive motor 40, therefore drives by the band portion
The rotation of the 3rd roller 21a of action control of dynamic motor 40, is rotated band portion 28 whereby.
Between the 1st transport unit 10 and the 2nd transport unit 20, configuration delineation unit 30.Delineation unit 30, possesses and sets crosscutting
The delineation beam 32 that the direction (+X direction in figure 3) of platform extends and arranges is put, and is installed on the delineation beam 32 can be along delineation
The engraving head 34 of the direction movement that beam 32 extends.Additionally, in the band portion 18 of the 1st transport unit 10, being provided with and setting along the 1st direction
It is set to and toward (+Y direction and -Y direction in figure 3) in front and back mobile chuck (chuck) beam 14, and the chuck beam 14 can be formed at
Side simultaneously holds the chuck 16 of substrate 2.And, towards delineation unit 30, fore-and-aft direction is moved chuck beam 14, is made whereby
The bottom of 2 one side of substrate by engraving head 34 of chuck 16 is held in, is delineated.
In the present embodiment, the 2nd transport unit 20 is distinguished in the conveyance direction of substrate and passes positioned at the upstream side the 2nd of upstream side
Portion 22 (transport unit after below, also known as delineating), and 2 transport unit 24 of downstream control positioned at downstream is sent (below, also known as to pick up
Transport unit).
Transport unit 22 after delineation, load from the 1st transport unit 10 by delineating the substrate portion that unit 30 is delineated;Pick up transmission
Portion 24, temporarily loads what the transmission of transport unit 22 from after delineation came by for example by picking up in the way of robot etc. picks up substrate
Substrate 2a parts.
The delineation of difference in functionality each other is carried out so after transport unit 22 and pick up transport unit 24, though pass through in the present embodiment
Band portion 28 and as the 2nd transport unit 20 and form as one, but its can by configure after scribing transport unit 22 with pick up transmission
Bounce roller units 23 between portion 24.
Bounce roller units 23, transport unit 22 and pick up between transport unit 24 after being arranged at delineation, and at least have a pair
1st roller 23a and the 2nd roller 23b.In figure 3, though only illustrating a pair the 1st roller 23a and the 2nd roller 23b, the present invention is simultaneously
This is not limited to, is also applicable to possess 2 pairs of bounce roller units with upper roller.Additionally, in figure 3, the 1st roller 23a positions
In the outside of the 2nd transport unit 20 that is, on the outside of the track with portion 28, the 2nd roller 23b is located at the inner side of the 2nd transport unit 20 that is, band
On the inside of the track in portion 28, but the present invention is not limited to this, is also applicable to the 1st roller 23a on the inside of the track with portion 28,
Compositions of the 2nd roller 23b on the outside of the track with portion 28.
Bounce roller units 23 the 1st roller 23a and the 2nd roller 23b, be formed as can in the conveyance direction with substrate i.e. with
The 2nd direction (+Z direction or -Z direction in figure 3) that 1st direction intersects is mobile.Additionally, the 1st roller 23a and the 2nd roller 23b,
Formed in the way of reciprocally moving toward rightabout when moving.For example, moved toward -Z direction with once the 1st roller 23a
Dynamic, then the 2nd roller 23b is moved toward +Z direction, once and the 1st roller 23a is moved toward +Z direction, then the 2nd roller 23b is toward -Z direction
Mobile mode, the 1st roller 23a and the 2nd roller 23b are mutually linkedly combined.It is bonded with regard to this, will be described hereafter.
Thus, transport unit 22 and pick up between transport unit 24 after scribing, formation possesses that to be formed can reciprocally toward contrary
The bounce roller units 23 of the 1st roller 23a and the 2nd roller 23b of direction movement, whereby, the shifting with portion 28 in the 2nd delineation portion 20
It is dynamic, transport unit 22 and controllable in picking up transport unit 24 make respective independence after scribing.That is, it is controllable to make such a way:
After delineation, the band portion 28 of transport unit 22 is rotated, but picks up the band portion 28 of transport unit 24 to stop, or in contrast to this, is picked up
The band portion 28 of transport unit 24 is rotated, but the band portion 28 of transport unit 22 is stopping after delineating.Whereby, after delineation transport unit 22 and
Transport unit 24 is picked up, though the composition formed as one in the way of not having transmission transfer is (by 1 structure constituted with portion 28
Into), but the mode that operating state can be different each other controls.
Therefore, the substrate for completing to delineate that will can be placed in after delineation in transport unit 22, it is past not have along band portion 28
The mode for picking up 24 transfer of transport unit is transported.Therefore, with following effect:Can prevent such as existing known substrate-cutting
Device, by substrate from the delineation portion in downstream toward pick up transport unit and transport when, the transfer of transport unit causes to hold falling or glass for material
The problem of glass chip etc., and can also prevent the transfer of transport unit from causing the problem that substrate surface causes to damage.Pin is in this regard, reference picture
4 (a) is more specifically illustrated to Fig. 4 (d).
Fig. 4 (a) to Fig. 4 (d), roughly represents that the substrate of the substrate breaking apparatus of the embodiment of the present invention transports showing for process
It is intended to.Fig. 4 (a), expression start to carry out substrate the schematic diagram in delineation stage.With reference to Fig. 4 (a), become the substrate 2 of delineation object
It is held in chuck 16.Additionally, the substrate 2a for completing to delineate being loaded on transport unit 24 is picked up and waiting to pick up.
On the other hand, in the bounce roller units 23 of the present embodiment, it is provided with the basis of the 1st roller 23a and is formed at
1st brake 50a of 22 side of transport unit after delineation, and on the basis of the 1st roller 23a be formed at and pick up 24 side of transport unit
2nd brake 50b.1st brake 50a and the 2nd brake 50b, for make the 2nd transport unit 20 the rotation with portion 28 positively
Stop, in Fig. 4 (a), the 2nd brake 50b declines and the rotation with portion 28 for picking up transport unit 24 is positively stopped.
Fig. 4 (b), expression are delineated to substrate 2, at the same the substrate 2a to picking up in transport unit 24 picked up and toward removing
The next stages such as transport unit (not shown) are sent to carry out the schematic diagram of unloading phase.
With reference to Fig. 4 (a) and Fig. 4 (b), chuck beam 14 is mobile along substrate conveyance direction (+Y direction in Fig. 4 (b)), whereby,
It is held in the bottom of the substrate 2 also through engraving head 34 of chuck 16.At the same time, the 1st roller 23a is moved toward -Z direction, and the 2nd
Roller 23b is moved toward the +Z direction contrary with the moving direction of the 1st roller 23a.
Now, the action with portion's drive motor 40 is unlatching, as band portion 28 is positively wound in the 3rd roller 21a, therefore
When the 1st roller 23a and the 2nd roller 23b are moved, 28 action of band portion of 22 side of transport unit after only delineating, and pick up transmission
The band portion 28 of 24 side of portion is to be failure to actuate.As shown in Fig. 4 (b), can also be:Decline the 2nd brake 50b, and make to pick up transport unit
24 band portion 28 more reliably stops.
Additionally, in the present embodiment, the distance of the 1st roller 23a and the 2nd roller 23b movements, is formed as mutually the same.Also
Once that is, the 1st roller 23a is only toward -Z direction displacement L, then the 2nd roller 23b also modes of +Z direction displacement L in the past
And adjust.Whereby, the distance for making the 1st roller 23a move toward +Z direction toward the distance that -Z direction is moved with the 2nd roller 23b
Payment, then after only delineating, transport unit 22 is past with the degree of the displacement of the 1st roller 23a or the 2nd roller 23b with portion 28
Rotated clockwise.Whereby, the substrate 2 of chuck 16 is held in, also can be reached in the bottom by engraving head 34
After delineation after transport unit 22, persistently move in the band portion 28 of transport unit 22 after scribing.
Afterwards, once chuck beam 14 and chuck 16 are toward the conveyance direction rightabout (-Y direction in Fig. 4 (b)) with substrate
Retreat, at the same time, the 1st roller 23a is moved toward +Z direction once again, and the 2nd roller 23b is moved toward -Z direction once again, whereby, carve
After drawing transport unit 22 with portion 28 with the degree of the displacement of the 1st roller 23a or the 2nd roller 23b, once again toward counterclockwise
Rotated.Then, by the such process of repetition, delineation is held in the whole face of the substrate 2 of chuck 16.
On the other hand, the band portion 28 of transport unit 24 is picked up, even if it has been observed that the 1st roller 23a and the 2nd roller 23b are moved
Dynamic, its action is fixed.Therefore, though substrate delineate during, be placed in pick up transport unit 24 with portion 28
Complete to delineate the substrate 2a of operation, also can pick up by robot etc. is for example picked up, and unload toward next stage.
Fig. 4 (c), expression completes to delineate operation and chuck beam 14 and chuck 16 are back to primary position, and residues in and pick up
Play the schematic diagram for transferring the stage with the end material in portion 28 toward disintegrating machine of transport unit 24.With reference to Fig. 4 (b) and Fig. 4 (c), complete
The substrate 2 of delineation operation, holdings of chuck 16 are released from and are placed in after delineation in the band portion 28 of transport unit 22, chuck 16 and press from both sides
Head beam 14 is then back to primary position.
Now, once making 40 action of band portion drive motor, the 3rd roller 21a is made toward being rotated clockwise, and make the 1st
Roller 23a is moved toward +Z direction, the 2nd roller 23b is moved toward -Z direction, then the band portion 28 for only picking up transport unit 24 is clockwise
Rotation, after delineation, the band portion 28 of transport unit 22 is maintenance halted state.Whereby, can be in the band portion 28 of the transport unit 22 after delineating
On substrate 2 for stop in the state of, only make indwelling in pick up transport unit 24 with the end material in portion 28 toward disintegrating machine transfer.
Additionally, in the situation, being adjusted in the way of the 2nd brake 50b rises and the 1st brake 50a declines, borrowing
This, also can not limit to the rotation with portion 28 for picking up transport unit 24, and only make transport unit 22 after delineation with portion 28
Movement more reliably stops.
Fig. 4 (d), expression make new substrate load toward in the 1st transport unit 10, make to be placed in the band portion of transport unit 22 after delineating
Substrate on 28 transports the schematic diagram in stage toward transport unit 24 is picked up.With reference to Fig. 4 (d), in the 1st transport unit 10, by new substrate 2
It is loaded in the band portion 18 of the 1st transport unit 10, and is held in the chuck beam 14 and chuck 16 that return primary position.
In the 2nd transport unit 20, once the 1st roller 23a is persistently moved toward +Z direction and is released and the contact with portion 28, then band
Portion 28 recovers to the flat condition of un-flexed, mounting substrate and conveyance delineation after transport unit 22 band portion 28 with pick up transmission
Becoming between the band portion 28 in portion 24.And, the 1st brake 50a is risen and is released and with portion 28
Contact.Now, during band portion drive motor 40 is due to perseveration, rotated by the band portion 28 for picking up transport unit 24, delineated
The band portion 28 of transport unit 22 is also simultaneously rotated afterwards, whereby, can by be placed in transport unit 22 after delineation with complete in portion 28
Into the substrate of delineation, transported toward the band portion 28 for picking up transport unit 24 in the way of there is no transmission transfer.Therefore, can be to delineating
Substrate do not cause to be transferred toward the conveying unit of next stage (for example, picking up the stage) with damaging.
On the other hand, in the present embodiment, the 1st roller 23a and the 2nd roller 23b at least one of, maintain band
The tension force in portion 28 is while contacted.Whereby, by the movement of the 1st roller 23a and the 2nd roller 23b, band portion 28 can also maintain
Rotated in the state of tensioned, and be placed in and also sleekly can be transported with the substrate in portion 28.
Additionally, in other embodiments, the 1st roller 23a and the 2nd roller 23b is also using can be in being wound with portion 28
Under state, other means with the movement of portion 28 are made by rotation and constituted.
Fig. 5, the partial perspective view of the substrate breaking apparatus for being provided with bounce roller units of the embodiment of the present invention.Reference picture
5, transmit after scribing along substrate conveyance direction i.e. the 1st direction, and picking up biography
Send to arrange on framework 24a and pick up transport unit 24.Transport unit 24 is being picked up, and is provided with and X-axis can be picked up respectively at X, Y, Z axis movement
Robot 25a, pick up Y-axis robot 25b and pick up Z axis robot 25c, by the substrate that handss 27 are picked up is picked up, by described
The movement of multiple robots and the position of the be intended to migration of migration and unload.
And, after scribing transport unit 22 and pick up between transport unit 24 arrange bounce roller units 23.With regard to dancer roll
Subelement 23, illustrates with reference to Fig. 6 and Fig. 7.
Fig. 6, the axonometric chart of the bounce roller units 23 of the embodiment of the present invention, Fig. 7, the bounce roller list of the embodiment of the present invention
The side view of unit 23.With reference to Fig. 6 and Fig. 7, the bounce roller units 23 of the embodiment of the present invention, comprising with gear drive motor 232
The little gear (pinion) 234 of link, and the little gear 234 is clipped in the state of engaging with the little gear 234 simultaneously mutually
The 1st oppositely disposed tooth bar (rack) 236a and the 2nd tooth bar 236b of ground.And, the 1st tooth bar 236a combines by coupling member
1 roller 23a, and the 2nd tooth bar 236b combines the 2nd roller 23b by coupling member.Therefore, once by gear drive motor 232
Action and little gear 234 is rotated, the 1st tooth bar 236a and the 2nd tooth bar 236b is reciprocally dynamic toward rightabout in Z-direction
Make, the 1st roller 23a and the 2nd roller 23b is also along guiding element 238 toward the 1st tooth bar 236a and the direction action of the 2nd tooth bar 236b actions.
Additionally, possess on the top of bounce roller units 23 controlling the brakings of the 1st brake 50a and the 2nd with the movement of portion 28
Device 50b.1st brake 50a and the 2nd brake 50b, and is linked to the tooth bar with portion's brake countershaft 52 and little gear 54 is tied
Close.Therefore, by the action of tooth bar and little gear 54, the 1st brake 50a and the 2nd brake 50b is also risen or fallen.
Fig. 8, represents that in embodiments of the present invention, the side of the bounce roller units that the 1st roller declines and the 2nd roller rises is cutd open
Face figure;Fig. 9, represents in embodiments of the present invention, the side section of the bounce roller units that the 1st roller rises and the 2nd roller declines
Figure.
With reference to Fig. 8, by the 1st roller 23a, toward -Z direction decline, band portion 28 also together declines, at the same time, by the 2nd
Roller 23b rises toward +Z direction and band portion 28 also together rises.Additionally, reference Fig. 9, then, once the past+Z sides of the 1st roller 23a
Ramp up, the flat condition for maintaining tension force is reverted to portion 28, at the same time, the 2nd roller 23b declines and band portion toward -Z direction
28 also together decline.By the movement of the 1st roller 23a and the 2nd roller 23b so, even a band portion 28, also can para-position
In the upstream side of bounce roller units 23 the action with portion 28 with the downstream for being located at bounce roller units 23 with portion 28
Action is controlled in the way of different each other.Therefore, can be opposite to and be passed with not having with the substrate for completing to delineate in portion 28
Send the mode of transfer to be transported toward next stage, whereby, caused by can preventing because transmitting transfer, hold material to fall or glass chip
The problems such as.
The above, is only presently preferred embodiments of the present invention, not makees any pro forma restriction to the present invention, though
So the present invention is disclosed above with preferred embodiment, but is not limited to the present invention, any to be familiar with this professional technology people
Member, in the range of without departing from technical solution of the present invention, when making a little change or modification using the technology contents of the disclosure above
For the Equivalent embodiments of equivalent variations, as long as being the content without departing from technical solution of the present invention, the technical spirit of the foundation present invention
Any simple modification, equivalent variations and the modification made to above example, still falls within the range of technical solution of the present invention.
Claims (12)
1. a kind of substrate breaking apparatus, it is characterised in which includes:
1st transport unit and the 2nd transport unit, in setting table, are that the 1st direction is reciprocally matched somebody with somebody across interval along the conveyance direction of substrate
Put, and possess the band portion in the state of the substrate is loaded being wound in multiple rollers and being rotated;
Delineation unit, is arranged between the 1st transport unit and the 2nd transport unit and the substrate is delineated;And
Bounce roller units, in the 1st direction, be arranged in the 2nd transport unit upstream side the 2nd transport unit of upstream side with
Between 2 transport unit of downstream control in downstream, and at least possess a pair the 1st rollers and the 2nd roller;
1st roller is located on the outside of the band portion of the 2nd transport unit, and the 2nd roller is located on the inside of the band portion of the 2nd transport unit;
1st roller and the 2nd roller, in the 2nd direction intersected with the 1st direction, are formed as with can reciprocally toward phase negative side
Mutually interlock to mobile mode, and the 2nd transport unit of upstream side for forming as one and 2 transport unit of downstream control, can be into
For operating states different each other;
1st roller and the 2nd roller, when the 2nd direction is reciprocally moved toward rightabout, the displacement of the 1st roller
It is identical with the displacement of the 2nd roller;
In 2 transport unit of downstream control, being provided with can be respectively at multiple robot of X, Y, Z axis direction movement.
2. substrate breaking apparatus as claimed in claim 1, it is characterised in that at least the one of wherein the 1st roller and the 2nd roller
Person, maintains the band portion tension force of the 2nd transport unit, while contacting with the band portion.
3. substrate breaking apparatus as claimed in claim 1, it is characterised in that wherein the 1st roller and the 2nd roller, clip with
Gear drive motor link little gear and it is reciprocally oppositely disposed in the state of, respectively with the 1st tooth for being engaged in the little gear
Article and the 2nd tooth bar combine.
4. substrate breaking apparatus as claimed in claim 1, it is characterised in that the 3rd roller is included wherein in the plurality of roller,
3rd roller winding has the band portion of 2 transport unit of downstream control, and the 3rd roller linking belt portion drive motor.
5. substrate breaking apparatus as claimed in claim 1, it is characterised in that wherein in the bounce roller units, being provided with makes
The 1st brake that the rotation with portion of the 2nd transport unit of upstream side stops, and make 2 transport unit of downstream control with portion
The 2nd brake that rotation stops.
6. a kind of substrate transfer method adopted therein, comprising possess in setting table along conveyance direction i.e. the 1st direction of substrate reciprocally every
Interval configuration and the 1st transport unit with portion that is wound in multiple rollers and rotated and the in the state of the substrate is loaded
2 transport units, and it is arranged at the delineation unit delineated between the 1st transport unit and the 2nd transport unit and to the substrate
In substrate breaking apparatus, being transported toward the 1st direction with the substrate in portion for the 2nd transport unit will be placed in, its feature exists
In:
In the substrate breaking apparatus, possess bounce roller units, the bounce roller units are being located at the 2nd in the 1st direction
The 2nd transport unit of upstream side of the upstream side of transport unit and between 2 transport unit of downstream control in downstream, with this
The 2nd direction that 1 direction intersects is by can reciprocally toward at least one pair of the 1st roller for mutually interlocking in the way of rightabout movement and the
2 rollers;
Make the 1st roller be located at the 2nd transport unit band portion on the outside of, and make the 2nd roller be located at the 2nd transport unit band portion
In the state of inner side, make the 1st roller and the 2nd roller reciprocally toward rightabout movement, make whereby to form as one this on
Trip the 2nd transport unit of side and downstream control 2 transport unit action in the way of different each other;
1st roller and the 2nd roller, when the 2nd direction is reciprocally moved toward rightabout, the displacement of the 1st roller
It is identical with the displacement of the 2nd roller;
In 2 transport unit of downstream control, it is provided with and can be picked up by handss are picked up respectively at multiple robots of X, Y, Z axis direction movement
The substrate for rising, the desired position of migration unloads by the movement of the plurality of robot.
7. substrate transfer method adopted therein as claimed in claim 6, it is characterised in that wherein past with the 2nd roller by the 1st roller
Movement is returned, and in the state of the band portion for making 2 transport unit of downstream control stops, the band portion of the 2nd transport unit of upstream side is made toward suitable
Clockwise or counterclockwise rotates, and to being placed in delineating with the substrate in portion for the 2nd transport unit of upstream side;
In the stage delineated by this, be opposite to halted state 2 transport unit of downstream control with the base for completing to delineate in portion
Plate is unloaded;
Make to be wound with the rotation of the 3rd roller with portion of 2 transport unit of downstream control by one side, make the 1st roller and the 2nd
Roller is moved, and in the state of the band portion for making the 2nd transport unit of upstream side stops, rotating the band portion of 2 transport unit of downstream control,
To indwelling unloading with the end material in portion in 2 transport unit of downstream control;
Also, after the unloading of end material, the 3rd roller is persistently rotated, make to be placed in the 2nd transport unit of upstream side with portion
The substrate for completing to delineate is transported toward in the band portion of 2 transport unit of downstream control.
8. substrate transfer method adopted therein as claimed in claim 7, it is characterised in that wherein the 3rd roller linking belt portion drive motor,
And in the stage delineated to the substrate, stop the action with portion's drive motor.
9. substrate transfer method adopted therein as claimed in claim 8, it is characterised in that wherein in the stage unloaded to the end material, make
The band portion drive motor action.
10. substrate transfer method adopted therein as claimed in claim 7, it is characterised in that wherein in the bounce roller units, setting make this
The 1st brake that the rotation with portion of the 2nd transport unit of upstream side stops, and the rotation with portion for making 2 transport unit of downstream control
Turn the 2nd brake for stopping, and in the stage delineated to the substrate, make the 2nd brake action.
11. substrate transfer method adopted thereins as claimed in claim 10, it is characterised in that wherein in the stage unloaded to the end material,
Make the 1st brake action.
12. substrate transfer method adopted thereins as claimed in claim 11, it is characterised in that wherein in the substrate delineated toward the downstream
In the stage with portion's conveyance of the 2nd transport unit, the 1st brake and the 2nd brakeage is made to release completely.
Applications Claiming Priority (3)
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KR1020120059044A KR101449487B1 (en) | 2012-06-01 | 2012-06-01 | Panel cutting device and method of transferring panel in the same |
KR10-2012-0059044 | 2012-06-01 | ||
CN201310116487.5A CN103449714B (en) | 2012-06-01 | 2013-04-03 | The substrate transfer method adopted therein of substrate breaking apparatus and substrate breaking apparatus |
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CN201310116487.5A Division CN103449714B (en) | 2012-06-01 | 2013-04-03 | The substrate transfer method adopted therein of substrate breaking apparatus and substrate breaking apparatus |
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CN104129908A CN104129908A (en) | 2014-11-05 |
CN104129908B true CN104129908B (en) | 2017-04-12 |
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CN201410364679.2A Active CN104150756B (en) | 2012-06-01 | 2013-04-03 | The substrate transfer method adopted therein of substrate breaking apparatus and substrate breaking apparatus |
CN201410364825.1A Active CN104129910B (en) | 2012-06-01 | 2013-04-03 | The substrate transfer method adopted therein of substrate breaking apparatus and substrate breaking apparatus |
CN201410364041.9A Expired - Fee Related CN104129908B (en) | 2012-06-01 | 2013-04-03 | Substrate breaking device and substrate transportation method of substrate breaking device |
CN201310116487.5A Active CN103449714B (en) | 2012-06-01 | 2013-04-03 | The substrate transfer method adopted therein of substrate breaking apparatus and substrate breaking apparatus |
CN201410364823.2A Active CN104129909B (en) | 2012-06-01 | 2013-04-03 | Substrate breaking apparatus and the substrate transfer method adopted therein of substrate breaking apparatus |
CN201410334000.5A Active CN104129907B (en) | 2012-06-01 | 2013-04-03 | Substrate breaking device and substrate transportation method of substrate breaking device |
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CN201410364825.1A Active CN104129910B (en) | 2012-06-01 | 2013-04-03 | The substrate transfer method adopted therein of substrate breaking apparatus and substrate breaking apparatus |
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CN201410364823.2A Active CN104129909B (en) | 2012-06-01 | 2013-04-03 | Substrate breaking apparatus and the substrate transfer method adopted therein of substrate breaking apparatus |
CN201410334000.5A Active CN104129907B (en) | 2012-06-01 | 2013-04-03 | Substrate breaking device and substrate transportation method of substrate breaking device |
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KR (1) | KR101449487B1 (en) |
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KR101579598B1 (en) * | 2013-11-14 | 2015-12-23 | 주식회사 탑 엔지니어링 | Scribe apparatus and scribe method |
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TWI510444B (en) | 2015-12-01 |
JP2013249248A (en) | 2013-12-12 |
JP2017154966A (en) | 2017-09-07 |
CN104150756A (en) | 2014-11-19 |
JP6365705B2 (en) | 2018-08-01 |
KR20130135469A (en) | 2013-12-11 |
TW201350452A (en) | 2013-12-16 |
CN104129909B (en) | 2016-08-24 |
JP6101143B2 (en) | 2017-03-22 |
CN103449714A (en) | 2013-12-18 |
CN104150756B (en) | 2018-01-12 |
CN104129907B (en) | 2017-04-12 |
CN104129909A (en) | 2014-11-05 |
CN104129907A (en) | 2014-11-05 |
CN104129910B (en) | 2017-07-18 |
CN103449714B (en) | 2016-03-09 |
CN104129910A (en) | 2014-11-05 |
KR101449487B1 (en) | 2014-10-14 |
CN104129908A (en) | 2014-11-05 |
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