JP7054170B2 - Belt conveyor equipment - Google Patents

Belt conveyor equipment Download PDF

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Publication number
JP7054170B2
JP7054170B2 JP2017230255A JP2017230255A JP7054170B2 JP 7054170 B2 JP7054170 B2 JP 7054170B2 JP 2017230255 A JP2017230255 A JP 2017230255A JP 2017230255 A JP2017230255 A JP 2017230255A JP 7054170 B2 JP7054170 B2 JP 7054170B2
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belt
substrate
members
transport direction
dividing device
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JP2019099302A (en
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勝喜 中田
平道 谷垣内
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Mitsuboshi Diamond Industrial Co Ltd
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Mitsuboshi Diamond Industrial Co Ltd
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Priority to JP2017230255A priority Critical patent/JP7054170B2/en
Priority to KR1020180147793A priority patent/KR20190064464A/en
Priority to TW107142630A priority patent/TW201932389A/en
Priority to CN201811455452.3A priority patent/CN110015588B/en
Publication of JP2019099302A publication Critical patent/JP2019099302A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
    • B65G21/10—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors movable, or having interchangeable or relatively movable parts; Devices for moving framework or parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/06—Registering, tensioning, smoothing or guiding webs longitudinally by retarding devices, e.g. acting on web-roll spindle
    • B65H23/10—Registering, tensioning, smoothing or guiding webs longitudinally by retarding devices, e.g. acting on web-roll spindle acting on running web
    • B65H23/14—Tensioning rollers applying braking forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/26—Registering, tensioning, smoothing or guiding webs longitudinally by transverse stationary or adjustable bars or rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H35/00—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers
    • B65H35/04—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers from or with transverse cutters or perforators
    • B65H35/06—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers from or with transverse cutters or perforators from or with blade, e.g. shear-blade, cutters or perforators
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/02—Belt or chain conveyors
    • B65G2812/02009—Common features for belt or chain conveyors
    • B65G2812/02019—Supporting or guiding frames
    • B65G2812/02029—Transportable conveyor frames

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Framework For Endless Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

本発明は、ベルトコンベヤ装置に関する。 The present invention relates to a belt conveyor device.

ベルトコンベヤ装置は、一般に、無端状のベルトと、ベルトが掛け回された複数のプーリと、プーリを駆動してベルトによって物品を搬送させる駆動部（例えば、モータ）とを有している。
ベルトコンベヤ装置では、ベルトコンベヤの上側搬送部の長さを変更できる伸縮可能なものが知られている（例えば、特許文献１を参照）。
特許文献１に記載のベルトコンベヤ装置は、ベルト長さ伸縮装置１３を有している。ベルト長さ伸縮装置１３は、移動自在な往復ベルト支持ローラー８、９を有している。 A belt conveyor device generally has an endless belt, a plurality of pulleys around which the belt is hung, and a drive unit (for example, a motor) that drives the pulleys to convey articles by the belt.
As a belt conveyor device, a stretchable one capable of changing the length of the upper transport portion of the belt conveyor is known (see, for example, Patent Document 1).
The belt conveyor device described in Patent Document 1 has a belt length expansion / contraction device 13. The belt length expansion / contraction device 13 has movable reciprocating belt support rollers 8 and 9.

特開２０００－１６５５５号公報Japanese Unexamined Patent Publication No. 2000-16555

近年、基板をベルトで搬送してベルト上で基板を加工する装置が知られている。この装置の場合、ベルトコンベヤの上側搬送部を伸縮はしないが搬送方向に移動させる（シフトさせる）ことが考えられる。しかし、従来技術では、そのような構造に下方からの支持部材を適用するときの具体的な問題点及び解決手段を提供していない。 In recent years, an apparatus for transporting a substrate by a belt and processing the substrate on the belt has been known. In the case of this device, it is conceivable to move (shift) the upper transport portion of the belt conveyor in the transport direction without expanding or contracting. However, the prior art does not provide specific problems and solutions when applying a support member from below to such a structure.

本発明の目的は、基板をベルトで搬送可能でありかつベルト上で基板を加工装置によって加工可能なベルトコンベヤ装置において、ベルトの上側搬送部を複数の支持部材によって適切に下方から支持することにある。 An object of the present invention is to appropriately support the upper transport portion of a belt from below by a plurality of support members in a belt conveyor device in which the substrate can be transported by a belt and the substrate can be machined on the belt by a processing device. be.

以下に、課題を解決するための手段として複数の態様を説明する。これら態様は、必要に応じて任意に組み合せることができる。 Hereinafter, a plurality of aspects will be described as means for solving the problem. These aspects can be arbitrarily combined as needed.

本発明の一見地に係るベルトコンベヤ装置は、基板をベルトで搬送可能でありかつベルト上で加工装置によって基板が加工される装置であって、無端状のベルトと、駆動部と、移動部と、複数の支持部材とを備えている。
駆動部はベルトを駆動する。
移動部は、ベルトの上側搬送部の一部を保持して搬送方向に移動可能である。
複数の支持部材は、上側搬送部を下方から支持するための部材であって、上側搬送部の移動にしたがって搬送方向に移動可能である。
この装置では、移動部がベルトの上側搬送部の一部を保持して搬送方向に移動すると、ベルトの上側搬送部が搬送方向に移動する。このとき、複数の支持部材は上側搬送部の移動にしたがって搬送方向に移動する。したがって、ベルトの上側搬送部は、複数の支持部材によって適切に下方から支持される。つまり、ベルトの蛇行が生じにくい。 The belt conveyor device according to the first aspect of the present invention is a device capable of transporting a substrate by a belt and processing the substrate on the belt by the processing apparatus, and includes an endless belt, a drive unit, and a moving unit. , With a plurality of support members.
The drive unit drives the belt.
The moving portion holds a part of the upper transport portion of the belt and can move in the transport direction.
The plurality of support members are members for supporting the upper transport portion from below, and can move in the transport direction according to the movement of the upper transport portion.
In this device, when the moving portion holds a part of the upper transport portion of the belt and moves in the transport direction, the upper transport portion of the belt moves in the transport direction. At this time, the plurality of support members move in the transport direction according to the movement of the upper transport portion. Therefore, the upper transport portion of the belt is appropriately supported from below by the plurality of support members. That is, the meandering of the belt is unlikely to occur.

移動部は、ベルトの上側搬送部の上に載置された基板を分断する分断装置であってもよい。
この装置では、分断装置は搬送方向に移動しながら基板を分断していく。このときに、ベルトの上側搬送部は搬送方向に移動するが、その間も複数の支持部材によって下方から適切に支持される。つまり、ベルトの蛇行が生じにくい。 The moving portion may be a dividing device that divides the substrate placed on the upper transport portion of the belt.
In this device, the dividing device divides the substrate while moving in the transport direction. At this time, the upper transport portion of the belt moves in the transport direction, and is appropriately supported from below by the plurality of support members during that time. That is, the meandering of the belt is unlikely to occur.

複数の支持部材は、ベルトの幅方向に延びる側面を上側に有する複数の板状部材である。
この装置では、複数の板状部材は搬送方向に短いので、所定区間内でベルトの上側搬送部が縮小された場合に上側搬送部の長さを十分に短くできる。 The plurality of support members are a plurality of plate-shaped members having a side surface extending in the width direction of the belt on the upper side.
In this device, since the plurality of plate-shaped members are short in the transport direction, the length of the upper transport portion of the belt can be sufficiently shortened when the upper transport portion of the belt is reduced within a predetermined section.

ベルトコンベヤ装置は、複数の板状部材のうち一対ずつを連結する複数の連結部材をさらに備えている。
この装置では、一対の板状部材が連結部材によって互いに連結されているので、各板状部材が搬送方向に倒れにくい。 The belt conveyor device further includes a plurality of connecting members for connecting a pair of the plurality of plate-shaped members .
In this device, since the pair of plate-shaped members are connected to each other by the connecting member, each plate-shaped member is unlikely to fall down in the transport direction.

連結部材は、一対の板状部材を所定範囲内でのみ接近・離反可能に連結している。
この装置では、一対の板状部材が所定範囲内でのみ接近・離反可能となっているので、各板状部材が適切な範囲で互いに対して移動する。 The connecting member connects a pair of plate-shaped members so as to be able to approach and separate from each other only within a predetermined range.
In this device, since the pair of plate-shaped members can approach and separate from each other only within a predetermined range, the plate-shaped members move with respect to each other within an appropriate range.

連結部材は、一方の板状部材に固定された第１部材と、他方の板状部材に固定され第１部材に対して上下方向に延びる軸を中心に回動自在に連結された第２部材とを有している。
この装置では、第１部材と第２部材が上下方向に延びる軸を中心に回動自在になっているので、簡単な構造でスムーズな動作が実現される。 The connecting member is a first member fixed to one plate-shaped member and a second member fixed to the other plate-shaped member and rotatably connected about an axis extending in the vertical direction with respect to the first member. And have .
In this device, since the first member and the second member are rotatable about an axis extending in the vertical direction, smooth operation is realized with a simple structure.

ベルトコンベヤ装置は、一対の板状部材が互いに接近すると互いに離れる方向への付勢力を発生する付勢部材をさらに備えていてもよい。
この装置では、所定区間内でベルトの上側搬送部が広がっていくときに、付勢部材によって一対の板状部材が互いに離れていき、そのため全ての対において板状部材が一斉に互いから離れていく。したがって、ベルトの上側搬送部は、複数の支持部材によって全体にわたって均等に下方から支持される。 The belt conveyor device may further include an urging member that generates an urging force in a direction away from each other when the pair of plate-shaped members approach each other.
In this device, when the upper transport portion of the belt expands within a predetermined section, the pair of plate-shaped members are separated from each other by the urging member, so that the plate-shaped members are separated from each other all at once in all the pairs. go. Therefore, the upper transport portion of the belt is evenly supported from below by the plurality of support members.

本発明に係るベルトコンベヤ装置では、ベルトの上側搬送部は複数の支持部材によって適切に下方から支持される。 In the belt conveyor device according to the present invention, the upper transport portion of the belt is appropriately supported from below by a plurality of support members.

本発明の第１実施形態に係る基板加工装置の模式的平面図。The schematic plan view of the substrate processing apparatus which concerns on 1st Embodiment of this invention. 基板分断装置の模式的斜視図。Schematic perspective view of the board breaking device. 基板分断装置の模式的側面図。Schematic side view of the board breaking device. 基板加工装置の制御構成を示すブロック図。The block diagram which shows the control composition of a substrate processing apparatus. 基板分断動作の一状態を示す、基板分断装置の模式的側面図。The schematic side view of the board breaking apparatus which shows one state of a board breaking operation. ベルト支持機構の平面図。Top view of the belt support mechanism. ベルト支持機構の側面図。Side view of the belt support mechanism. ベルト支持機構の動作の一状態を示す模式図。The schematic diagram which shows one state of the operation of a belt support mechanism. ベルト支持機構の動作の一状態を示す模式図。The schematic diagram which shows one state of the operation of a belt support mechanism. ベルト支持機構の動作の一状態を示す模式図。The schematic diagram which shows one state of the operation of a belt support mechanism.

１．第１実施形態
（１）基板加工装置の概略説明
図１～図３を用いて、基板加工装置１を説明する。図１は、本発明の第１実施形態に係る基板加工装置の模式的平面図である。図２は、基板分断装置の模式的斜視図である。図３は、基板分断装置の側面図である。図１において、図の上下方向が第１方向（矢印Ｘ）であり、図の左右方向が第２方向（矢印Ｙ）である。
基板加工装置１は、貼り合わせ基板１００から複数の単位基板１１３を形成する装置である。図１において、これから述べる複数の装置は、第２方向において左から右に向かって並べられている。つまり、被加工対象の基板の搬送方向は第２方向であり、基板は第２方向において左から右に向かって搬送されながら加工される。そのため、図１の第２方向左側が搬送方向上流側であり、図１の第２方向右側が搬送方向下流側である。 1. 1. First Embodiment (1) Schematic Description of Substrate Processing Equipment The substrate processing apparatus 1 will be described with reference to FIGS. 1 to 3. FIG. 1 is a schematic plan view of the substrate processing apparatus according to the first embodiment of the present invention. FIG. 2 is a schematic perspective view of the substrate dividing device. FIG. 3 is a side view of the substrate dividing device. In FIG. 1, the vertical direction of the figure is the first direction (arrow X), and the left-right direction of the figure is the second direction (arrow Y).
The substrate processing apparatus 1 is an apparatus for forming a plurality of unit substrates 113 from the bonded substrate 100. In FIG. 1, the plurality of devices described below are arranged from left to right in the second direction. That is, the transport direction of the substrate to be machined is the second direction, and the substrate is machined while being transported from left to right in the second direction. Therefore, the left side in the second direction in FIG. 1 is the upstream side in the transport direction, and the right side in the second direction in FIG. 1 is the downstream side in the transport direction.

基板加工装置１は、スクライブライン形成装置３を有している。スクライブライン形成装置３は、貼り合わせ基板１００の表面に複数の第１スクライブラインＳ１と複数の第２スクライブラインＳ２を形成する。第１スクライブラインＳ１と第２スクライブラインＳ２は互いに直交している。なお、スクライブ加工後の基板を貼り合わせ基板１００Ａとする。
スクライブライン形成装置３は、具体的には、スクライブユニット５１と、貼り合わせ基板１００を搬送方向下流側に搬送するコンベヤ装置５３と、貼り合わせ基板１００を保持して搬送方向両側に移動させるチャック機構５５とを有している。スクライブユニット５１は、第１方向に延長して設けられたスクライブビーム５１ａと、それに沿って第１方向に移動可能なスクライブヘッド５１ｂ（図４）と、スクライブヘッド移動装置５１ｃ（図４）を有している。コンベヤ装置５３は、ベルトコンベヤである。チャック機構５５は、コンベヤ装置５３の上において、第２方向に沿って前後に移動可能に設置されたチャックビーム５５ａと、チャックビーム移動装置５５ｂ（図４）と、チャックビーム５５ａの片側に形成され、貼り合わせ基板１００を把持するチャック５５ｃとを有している。チャックビーム５５ａがスクライブユニット５１に向かって第１方向両側に移動することによって、チャック５５ｃに把持されている貼り合わせ基板１００はスクライブヘッド５１ｂ（図４）の下方を通過しながらスクライブされる。 The substrate processing device 1 has a scribe line forming device 3. The scribe line forming apparatus 3 forms a plurality of first scribe lines S1 and a plurality of second scribe lines S2 on the surface of the bonded substrate 100. The first scribe line S1 and the second scribe line S2 are orthogonal to each other. The substrate after scribe processing is bonded to the substrate 100A.
Specifically, the scribe line forming device 3 includes a scribe unit 51, a conveyor device 53 that conveys the bonded substrate 100 to the downstream side in the transport direction, and a chuck mechanism that holds the bonded substrate 100 and moves it to both sides in the transport direction. It has 55 and. The scribe unit 51 includes a scribe beam 51a extended in the first direction, a scribe head 51b (FIG. 4) capable of moving in the first direction along the scribe beam 51a, and a scribe head moving device 51c (FIG. 4). are doing. The conveyor device 53 is a belt conveyor. The chuck mechanism 55 is formed on one side of the chuck beam 55a, the chuck beam moving device 55b (FIG. 4), and the chuck beam 55a, which are installed on the conveyor device 53 so as to be movable back and forth along the second direction. It has a chuck 55c for gripping the bonded substrate 100. As the chuck beam 55a moves to both sides in the first direction toward the scribe unit 51, the bonded substrate 100 held by the chuck 55c is scribed while passing under the scribe head 51b (FIG. 4).

基板加工装置１は、基板分断装置５を有している。基板分断装置５は、貼り合わせ基板１００Ａを複数の第１スクライブラインＳ１と複数の第２スクライブラインＳ２に沿って分断することで、単位基板１１３を形成する。基板分断装置５は、スクライブライン形成装置３の搬送方向下流側に配置されている。 The substrate processing device 1 has a substrate dividing device 5. The board dividing device 5 forms the unit substrate 113 by dividing the bonded substrate 100A along the plurality of first scribe lines S1 and the plurality of second scribe lines S2. The board dividing device 5 is arranged on the downstream side in the transport direction of the scribe line forming device 3.

基板分断装置５は、第１分断装置７（移動部の一例）を有している。
第１分断装置７は、貼り合わせ基板１００Ａを複数の第１スクライブラインＳ１に沿って分断することで、複数の短冊状基板１１１を形成する。第１分断装置７は、第１方向に平行に延びており、貼り合わせ基板１００Ａの複数の第１スクライブラインＳ１に合わせて搬送方向に移動・分断を繰り返す。第１分断装置７は、第２ベルト４３ａの上側搬送部４３ａ１の一部を保持して搬送方向に移動可能である。 The board dividing device 5 has a first dividing device 7 (an example of a moving unit).
The first dividing device 7 divides the bonded substrate 100A along the plurality of first scribe lines S1 to form a plurality of strip-shaped substrates 111. The first dividing device 7 extends in parallel with the first direction, and repeatedly moves and divides in the transport direction in accordance with a plurality of first scribe lines S1 of the bonded substrate 100A. The first dividing device 7 holds a part of the upper transport portion 43a1 of the second belt 43a and can move in the transport direction.

基板分断装置５は、第２分断装置９を有している。
第２分断装置９は、第１分断装置７の搬送方向下流側に配置され、複数の短冊状基板１１１を第２スクライブラインＳ２に沿って分断することで、複数の単位基板１１３を形成する。第２分断装置９は、第１方向に平行に延びており、複数の短冊状基板１１１の複数の第２スクライブラインＳ２に合わせて搬送方向に移動・分断を繰り返す。第２分断装置９は、第３ベルト４５ａの上側搬送部４５ａ１の一部を保持して搬送方向に移動可能である。 The board dividing device 5 has a second dividing device 9.
The second dividing device 9 is arranged on the downstream side in the transport direction of the first dividing device 7, and divides a plurality of strip-shaped substrates 111 along the second scribe line S2 to form a plurality of unit substrates 113. The second dividing device 9 extends in parallel with the first direction, and repeatedly moves and divides in the transport direction in accordance with the plurality of second scribe lines S2 of the plurality of strip-shaped substrates 111. The second dividing device 9 holds a part of the upper transport portion 45a1 of the third belt 45a and can move in the transport direction.

基板加工装置１は、ピックアップ装置１１を有している。ピックアップ装置１１は、複数の単位基板１１３をピックアップして他の装置１３に搬送する。
なお、第１分断装置７及び第２分断装置９においてブレイクバー等を支持しつつ搬送方向にビームを移動させる機構は公知であるので、説明を省略する。 The substrate processing device 1 has a pickup device 11. The pickup device 11 picks up a plurality of unit boards 113 and conveys them to another device 13.
Since the mechanism for moving the beam in the transport direction while supporting the break bar or the like in the first dividing device 7 and the second dividing device 9 is known, the description thereof will be omitted.

次に、基板を搬送するための搬送装置２９を説明する。搬送装置２９は、スクライブライン形成装置３、第１分断装置７、第２分断装置９、ピックアップ装置１１の順番で基板を搬送する。
具体的には、搬送装置２９は、第１コンベヤ装置４１と、第２コンベヤ装置４３と、第３コンベヤ装置４５とを有している。第１コンベヤ装置４１は、スクライブライン形成装置３と第１分断装置７との間に延びている。第２コンベヤ装置４３は、第１分断装置７と第２分断装置９の間に延びている。第３コンベヤ装置４５は第２分断装置９とピックアップ装置１１との間に延びている。 Next, a transfer device 29 for transporting the substrate will be described. The transfer device 29 conveys the substrate in the order of the scribe line forming device 3, the first dividing device 7, the second dividing device 9, and the pickup device 11.
Specifically, the transfer device 29 has a first conveyor device 41, a second conveyor device 43, and a third conveyor device 45. The first conveyor device 41 extends between the scribe line forming device 3 and the first dividing device 7. The second conveyor device 43 extends between the first dividing device 7 and the second dividing device 9. The third conveyor device 45 extends between the second dividing device 9 and the pickup device 11.

図３に示すように、第１コンベヤ装置４１は、第１ベルト４１ａと、複数のローラ４１ｂと、第１モータ４１ｃ（図４）とを有している。複数のローラ４１ｂのうち搬送方向上流側のもの及び搬送方向下流側のものは、所定範囲内で搬送方向前後に移動可能になっている。
図３に示すように、第２コンベヤ装置４３は、第２ベルト４３ａと、複数のローラ４３ｂと、第２モータ４３ｃ（駆動部の一例）（図４）とを有している。複数のローラ４３ｂのうち搬送方向上流側のもの及び搬送方向下流側のものは、所定範囲内で搬送方向前後に移動可能になっている。 As shown in FIG. 3, the first conveyor device 41 includes a first belt 41a, a plurality of rollers 41b, and a first motor 41c (FIG. 4). Of the plurality of rollers 41b, those on the upstream side in the transport direction and those on the downstream side in the transport direction are movable back and forth in the transport direction within a predetermined range.
As shown in FIG. 3, the second conveyor device 43 has a second belt 43a, a plurality of rollers 43b, and a second motor 43c (an example of a drive unit) (FIG. 4). Of the plurality of rollers 43b, those on the upstream side in the transport direction and those on the downstream side in the transport direction are movable back and forth in the transport direction within a predetermined range.

図３に示すように、第３コンベヤ装置４５は、第３ベルト４５ａと、複数のローラ４５ｂと、第３モータ４５ｃ（図４）とを有している。複数のローラ４５ｂのうち搬送方向上流側のものと搬送方向下流側のものは、所定範囲内で搬送方向前後に移動可能になっている。
図３に示すように、第１ベルト４１ａの上面部の搬送方向下流側端と、第２ベルト４３ａの上面部の搬送方向上流側端とはわずかな隙間を挟んで近接している。第２ベルト４３ａの上面部の搬送方向下流側端と、第３ベルト４５ａの上面部の搬送方向上流側端とはわずかな隙間を挟んで近接している。 As shown in FIG. 3, the third conveyor device 45 has a third belt 45a, a plurality of rollers 45b, and a third motor 45c (FIG. 4). Of the plurality of rollers 45b, those on the upstream side in the transport direction and those on the downstream side in the transport direction can move back and forth in the transport direction within a predetermined range.
As shown in FIG. 3, the downstream end in the transport direction of the upper surface portion of the first belt 41a and the upstream end in the transport direction of the upper surface portion of the second belt 43a are close to each other with a slight gap. The downstream end in the transport direction of the upper surface portion of the second belt 43a and the upstream end in the transport direction of the upper surface portion of the third belt 45a are close to each other with a slight gap.

上記の構成によって、基板加工装置１では、第１分断装置７が貼り合わせ基板１００Ａを分割して複数の短冊状基板１１１を形成しているときに、それと同時に第２分断装置９が複数の短冊状基板１１１を分割して複数の単位基板１１３を形成できる。したがって、基板加工装置１の単位基板１１３を形成する能力が従来より高くなっている。 With the above configuration, in the substrate processing device 1, when the first dividing device 7 divides the bonded substrate 100A to form a plurality of strip-shaped substrates 111, the second dividing device 9 simultaneously performs a plurality of strips. The shape substrate 111 can be divided to form a plurality of unit substrates 113. Therefore, the ability of the substrate processing apparatus 1 to form the unit substrate 113 is higher than before.

図１～図３に示すように、第１ベルト４１ａには、第１ダンサーユニット３５が配置されている。第２ベルト４３ａには、第２ダンサーユニット３７が配置されている。第３ベルト４５ａには、第３ダンサーユニット３９が配置されている。第１ダンサーユニット３５、第２ダンサーユニット３７及び第３ダンサーユニット３９は、第１ベルト４１ａ、第２ベルト４３ａ及び第３ベルト４５ａをそれぞれ押し下げることでベルトの長さを調整する。これら装置の構成及び機能は公知であるので、説明を省略する。 As shown in FIGS. 1 to 3, a first dancer unit 35 is arranged on the first belt 41a. A second dancer unit 37 is arranged on the second belt 43a. A third dancer unit 39 is arranged on the third belt 45a. The first dancer unit 35, the second dancer unit 37, and the third dancer unit 39 adjust the length of the belt by pushing down the first belt 41a, the second belt 43a, and the third belt 45a, respectively. Since the configurations and functions of these devices are known, the description thereof will be omitted.

（２）基板加工装置の制御構成
図４を用いて、基板加工装置１の制御構成を説明する。図４は、基板加工装置の制御構成を示すブロック図である。
基板加工装置１は、コントローラ５０を有している。コントローラ５０は、プロセッサ（例えば、ＣＰＵ）と、記憶装置（例えば、ＲＯＭ、ＲＡＭ、ＨＤＤ、ＳＳＤなど）と、各種インターフェース（例えば、Ａ／Ｄコンバータ、Ｄ／Ａコンバータ、通信インターフェースなど）を有するコンピュータシステムである。コントローラ５０は、記憶部（記憶装置の記憶領域の一部又は全部に対応）に保存されたプログラムを実行することで、各種制御動作を行う。 (2) Control configuration of the substrate processing apparatus The control configuration of the substrate processing apparatus 1 will be described with reference to FIG. FIG. 4 is a block diagram showing a control configuration of the substrate processing apparatus.
The substrate processing apparatus 1 has a controller 50. The controller 50 is a computer having a processor (for example, a CPU), a storage device (for example, ROM, RAM, HDD, SSD, etc.) and various interfaces (for example, an A / D converter, a D / A converter, a communication interface, etc.). It is a system. The controller 50 performs various control operations by executing a program stored in the storage unit (corresponding to a part or all of the storage area of the storage device).

コントローラ５０は、単一のプロセッサで構成されていてもよいが、各制御のために独立した複数のプロセッサから構成されていてもよい。
コントローラ５０の各要素の機能は、一部又は全てが、コントローラ５０を構成するコンピュータシステムにて実行可能なプログラムとして実現されてもよい。その他、コントローラ５０の各要素の機能の一部は、カスタムＩＣにより構成されていてもよい。 The controller 50 may be composed of a single processor, or may be composed of a plurality of independent processors for each control.
Some or all of the functions of each element of the controller 50 may be realized as a program that can be executed by the computer system constituting the controller 50. In addition, a part of the function of each element of the controller 50 may be configured by a custom IC.

コントローラ５０には、スクライブユニット５１（スクライブヘッド５１ｂ、スクライブヘッド移動装置５１ｃ）、チャック機構５５（チャックビーム移動装置５５ｂ、チャック５５ｃ）、第１コンベヤ装置４１の第１モータ４１ｃ、第２コンベヤ装置４３の第２モータ４３ｃ、第３コンベヤ装置４５の第３モータ４５ｃ、第１ダンサーユニット３５、第２ダンサーユニット３７、第３ダンサーユニット３９が接続されている。コントローラ５０には、さらに、第１分断装置７、第２分断装置９が接続されている。
コントローラ５０には、図示しないが、基板の大きさ、形状及び位置を検出するセンサ、各装置の状態を検出するためのセンサ及びスイッチ、並びに情報入力装置が接続されている。 The controller 50 includes a scribing unit 51 (scribing head 51b, scribing head moving device 51c), a chuck mechanism 55 (chuck beam moving device 55b, chuck 55c), a first motor 41c of the first conveyor device 41, and a second conveyor device 43. The second motor 43c, the third motor 45c of the third conveyor device 45, the first dancer unit 35, the second dancer unit 37, and the third dancer unit 39 are connected to each other. Further, a first dividing device 7 and a second dividing device 9 are connected to the controller 50.
Although not shown, the controller 50 is connected to a sensor that detects the size, shape, and position of the substrate, a sensor and a switch for detecting the state of each device, and an information input device.

（３）ベルト支持機構
（３－１）ベルト支持機構の構成
図３及び図５～図７を用いて、搬送装置２９（ベルトコンベヤ装置の一例）に用いられるベルト支持機構２００を説明する。
図５は、基板分断動作の一状態を示す、基板分断装置の模式的側面図である。図６は、ベルト支持機構の平面図である。図７は、ベルト支持機構の側面図である。 (3) Belt Support Mechanism (3-1) Configuration of Belt Support Mechanism The belt support mechanism 200 used in the transport device 29 (an example of the belt conveyor device) will be described with reference to FIGS. 3 and 5 to 7.
FIG. 5 is a schematic side view of the board dividing device showing one state of the board dividing operation. FIG. 6 is a plan view of the belt support mechanism. FIG. 7 is a side view of the belt support mechanism.

前述のように第１分断装置７と第２分断装置９が搬送方向に移動すると、それに伴って、第１ベルト４１ａ、第２ベルト４３ａ及び第３ベルト４５ａが搬送方向に移動する。
ベルトが搬送方向上流側に移動すると、第１ダンサーユニット３５と第２ダンサーユニット３７との間の区間では、第１ベルト４１ａの上側搬送部４１ａ１が短くなり、第２ベルト４３ａの上側搬送部４３ａ１が長くなる。さらに、第２ダンサーユニット３７と第３ダンサーユニット３９との間の区間では、第２ベルト４３ａの上側搬送部４３ａ１が短くなり、第３ベルト４５ａの上側搬送部４５ａ１が長くなる。
ベルト支持機構２００は、上述のベルトの移動の際に各移動に応じて適切にベルトを支持するための機構である。 As described above, when the first dividing device 7 and the second dividing device 9 move in the transport direction, the first belt 41a, the second belt 43a, and the third belt 45a move in the transport direction accordingly.
When the belt moves upstream in the transport direction, the upper transport portion 41a1 of the first belt 41a becomes shorter in the section between the first dancer unit 35 and the second dancer unit 37, and the upper transport portion 43a1 of the second belt 43a becomes shorter. Becomes longer. Further, in the section between the second dancer unit 37 and the third dancer unit 39, the upper transport portion 43a1 of the second belt 43a becomes shorter, and the upper transport portion 45a1 of the third belt 45a becomes longer.
The belt support mechanism 200 is a mechanism for appropriately supporting the belt in response to each movement of the belt as described above.

ベルト支持機構２００は、複数の支持部材２０１を有している。
複数の支持部材２０１は、第１ベルト４１ａの上側搬送部４１ａ１、第２ベルト４３ａの上側搬送部４３ａ１、及び第３ベルト４５ａの上側搬送部４５ａ１の下方にそれぞれ配置されている。より具体的には、複数の支持部材２０１は、下記の６箇所に配置されている。
（ａ）第１ダンサーユニット３５より搬送方向上流側
（ｂ）第１ダンサーユニット３５と第１分断装置７との間
（ｃ）第１分断装置７と第２ダンサーユニット３７との間
（ｄ）第２ダンサーユニット３７と第２分断装置９との間
（ｅ）第２分断装置９と第３ダンサーユニット３９との間
（ｆ）第３ダンサーユニット３９より搬送方向下流側 The belt support mechanism 200 has a plurality of support members 201.
The plurality of support members 201 are arranged below the upper transport portion 41a1 of the first belt 41a, the upper transport portion 43a1 of the second belt 43a, and the upper transport portion 45a1 of the third belt 45a, respectively. More specifically, the plurality of support members 201 are arranged at the following six locations.
(A) Upstream side in the transport direction from the first dancer unit 35 (b) Between the first dancer unit 35 and the first dividing device 7 (c) Between the first dividing device 7 and the second dancer unit 37 (d) Between the 2nd dancer unit 37 and the 2nd dividing device 9 (e) Between the 2nd dividing device 9 and the 3rd dancer unit 39 (f) Downstream in the transport direction from the 3rd dancer unit 39

次に、一例として、上記（ｃ）における複数の支持部材２０１を説明する。なお、下記の説明は他の箇所における複数の支持部材２０１にも適用される。
複数の支持部材２０１は、第２ベルト４３ａの上側搬送部４３ａ１を下方から支持するための部材であって、上側搬送部４３ａ１の移動にしたがって搬送方向に移動可能である。具体的には、複数の支持部材２０１は、第１分断装置７と第２ダンサーユニット３７との間で搬送方向に間隔を空けて並んでいる。具体的には、第１分断装置７と第２ダンサーユニット３７の間には、７個の支持部材２０１が配置されている。 Next, as an example, the plurality of support members 201 in (c) above will be described. The following description also applies to a plurality of support members 201 at other locations.
The plurality of support members 201 are members for supporting the upper transport portion 43a1 of the second belt 43a from below, and can move in the transport direction according to the movement of the upper transport portion 43a1. Specifically, the plurality of support members 201 are arranged at intervals in the transport direction between the first dividing device 7 and the second dancer unit 37. Specifically, seven support members 201 are arranged between the first dividing device 7 and the second dancer unit 37.

また、複数の支持部材２０１は、レール２０２によってガイドされている。レール２０２は、搬送方向に延びている。
複数の支持部材２０１は、第２ベルト４３ａの幅方向（第１方向）に延びる側面を上側に有する複数の板状部材である。レール２０２は、複数の支持部材２０１の幅方向両側に配置された２本のレール部材を有している。これにより、複数の支持部材２０１は互いに平行な状態を維持できる。 Further, the plurality of support members 201 are guided by the rail 202. The rail 202 extends in the transport direction.
The plurality of support members 201 are a plurality of plate-shaped members having a side surface extending in the width direction (first direction) of the second belt 43a on the upper side. The rail 202 has two rail members arranged on both sides in the width direction of the plurality of support members 201. As a result, the plurality of support members 201 can maintain a state of being parallel to each other.

ベルト支持機構２００では、第１分断装置７が第２ベルト４３ａの上側搬送部４３ａ１の一部を保持して搬送方向に移動すると、それに従って第２ベルト４３ａの上側搬送部４３ａ１が移動する。また、第１ベルト４１ａの上側搬送部も同方向に移動する。このとき、複数の支持部材２０１は、各ベルトの上側搬送部の移動に従って搬送方向に移動する。したがって、第１ベルト４１ａの上側搬送部４１ａ１及び第２ベルト４３ａの上側搬送部４３ａ１は、複数の支持部材２０１によって下方から適切に支持される。つまり、第１ベルト４１ａ及びの第２ベルト４３ａの蛇行が生じにくい。 In the belt support mechanism 200, when the first dividing device 7 holds a part of the upper transport portion 43a1 of the second belt 43a and moves in the transport direction, the upper transport portion 43a1 of the second belt 43a moves accordingly. Further, the upper transport portion of the first belt 41a also moves in the same direction. At this time, the plurality of support members 201 move in the transport direction according to the movement of the upper transport portion of each belt. Therefore, the upper transport portion 41a1 of the first belt 41a and the upper transport portion 43a1 of the second belt 43a are appropriately supported from below by the plurality of support members 201. That is, meandering of the first belt 41a and the second belt 43a is unlikely to occur.

図３及び図５～図７に示すように、ベルト支持機構２００は、複数の支持部材２０１のうち一対ずつを連結する複数の連結部材２０３をさらに有している。連結部材２０３によって、各支持部材２０１が搬送方向に倒れにくくなる。
図６及び図７に示すように、連結部材２０３は、一方の支持部材２０１に固定された第１部材２０５と、他方の支持部材２０１に固定され第１部材２０５に対して上下方向に延びる軸２０９を中心に回動自在に連結された第２部材２０７とを有している。このようにして、連結部材２０３は、一対の支持部材２０１を所定範囲内でのみ接近・離反可能に連結しており、そのため各支持部材２０１が適切な範囲で互いに対して移動する。さらに、簡単な構造でスムーズな動作が実現される。 As shown in FIGS. 3 and 5 to 7, the belt support mechanism 200 further includes a plurality of connecting members 203 for connecting a pair of the plurality of support members 201. The connecting member 203 makes it difficult for each support member 201 to fall in the transport direction.
As shown in FIGS. 6 and 7, the connecting member 203 has a first member 205 fixed to one support member 201 and a shaft fixed to the other support member 201 and extending in the vertical direction with respect to the first member 205. It has a second member 207 rotatably connected around 209. In this way, the connecting member 203 connects the pair of supporting members 201 so as to be able to approach and separate from each other only within a predetermined range, so that the supporting members 201 move with respect to each other within an appropriate range. Furthermore, smooth operation is realized with a simple structure.

なお、第１部材２０５と第２部材２０７が閉じて互いに近接した状態を閉じ状態といい、第１部材２０５と第２部材２０７が開いて互いに離れた状態を開き状態という。
具体的には、第１ダンサーユニット３５と第１分断装置７との間には、４個の連結部材２０３が設けられている。最も第１分断装置７に近い連結部材２０３は、第１分断装置７に直接固定されている。さらに、第１分断装置７と第２ダンサーユニット３７との間には、４個の連結部材２０３が設けられている。最も第１分断装置７に近い連結部材２０３は、第１分断装置７に直接固定されている。 The state in which the first member 205 and the second member 207 are closed and close to each other is referred to as a closed state, and the state in which the first member 205 and the second member 207 are open and separated from each other is referred to as an open state.
Specifically, four connecting members 203 are provided between the first dancer unit 35 and the first dividing device 7. The connecting member 203 closest to the first dividing device 7 is directly fixed to the first dividing device 7. Further, four connecting members 203 are provided between the first dividing device 7 and the second dancer unit 37. The connecting member 203 closest to the first dividing device 7 is directly fixed to the first dividing device 7.

図６に示すように、ベルト支持機構２００は、複数の付勢部材２１１をさらに有している。付勢部材２１１は、一対の支持部材２０１が互いに接近すると互いに離れる方向への付勢力を発生する。
付勢部材２１１は、例えば、引張りコイルスプリングである。ただし、付勢部材の種類は限定されない。また、付勢部材はなくてもよい。 As shown in FIG. 6, the belt support mechanism 200 further includes a plurality of urging members 211. When the pair of support members 201 approach each other, the urging member 211 generates an urging force in a direction away from each other.
The urging member 211 is, for example, a tension coil spring. However, the type of urging member is not limited. Further, the urging member may not be provided.

（３－２）基板分断動作時のベルト支持機構の動作
図３及び図５を用いて、基板分断動作を説明する。
図３に示すように、第１段階では、第１分断装置７は、第１ダンサーユニット３５と第２ダンサーユニット３７の間において、第２ダンサーユニット３７に近接した位置にある。したがって、第１ダンサーユニット３５と第１分断装置７との間は広くなっており、そのため第１コンベヤ装置４１の第１ベルト４１ａの下方では複数の支持部材２０１が開き状態で配置されている（上記（ｂ）の説明）。また、第１分断装置７と第２ダンサーユニット３７との間は狭くなっており、そのため第２コンベヤ装置４３の第２ベルト４３ａの下方では複数の支持部材２０１が閉じ状態で配置されている（上記（ｃ）の説明）。なお、複数の支持部材２０１は搬送方向に短いので、このように第２ベルト４３ａの上側搬送部４３ａ１が所定区間内で短くなっている場合に当該区域内での上側搬送部４３ａ１の長さを十分に短くできる。 (3-2) Operation of the belt support mechanism during the substrate division operation The substrate division operation will be described with reference to FIGS. 3 and 5.
As shown in FIG. 3, in the first stage, the first dividing device 7 is located between the first dancer unit 35 and the second dancer unit 37 in a position close to the second dancer unit 37. Therefore, the space between the first dancer unit 35 and the first dividing device 7 is widened, and therefore, a plurality of support members 201 are arranged in an open state below the first belt 41a of the first conveyor device 41 (). Explanation of (b) above). Further, the space between the first dividing device 7 and the second dancer unit 37 is narrowed, so that a plurality of support members 201 are arranged in a closed state below the second belt 43a of the second conveyor device 43 (). Explanation of (c) above). Since the plurality of support members 201 are short in the transport direction, when the upper transport portion 43a1 of the second belt 43a is shortened within a predetermined section in this way, the length of the upper transport portion 43a1 in the area is increased. Can be short enough.

図５に示すように、第２段階では、第１分断装置７は、貼り合わせ基板１００Ａを分断しながら搬送方向上流側に移動する。このとき、第１分断装置７は、第１ベルト４１ａの搬送方向下流側端及び第２ベルト４３ａの搬送方向上流側端を保持している。したがって、第１ダンサーユニット３５と第１分断装置７との間は狭くなり、そのため第１コンベヤ装置４１の第１ベルト４１ａの下方では複数の支持部材２０１が閉じ状態になる（上記（ｂ）の説明）。また、第１分断装置７と第２ダンサーユニット３７との間は広くなり、そのため第２コンベヤ装置４３の第２ベルト４３ａの下方では複数の支持部材２０１が開き状態になる（上記（ｃ）の説明）。なお、形成された複数の短冊状基板１１１は、第２ベルト４３ａの上側搬送部に載置される。
また、図５に示すように、第２段階では、第２分断装置９は、短冊状基板１１１を分断しながら搬送方向上流側に移動する。このとき、第２分断装置９は、第２ベルト４３ａの搬送方向下流側端及び第３ベルト４５ａの搬送方向上流側端を保持している。したがって、第２ダンサーユニット３７と第２分断装置９との間は狭くなり、そのため第３コンベヤ装置４５の第３ベルト４５ａの下方では複数の支持部材２０１が閉じ状態になる（上記（ｄ）の説明）。 As shown in FIG. 5, in the second stage, the first dividing device 7 moves to the upstream side in the transport direction while dividing the bonded substrate 100A. At this time, the first dividing device 7 holds the downstream end in the transport direction of the first belt 41a and the upstream end in the transport direction of the second belt 43a. Therefore, the space between the first dancer unit 35 and the first dividing device 7 becomes narrower, so that the plurality of support members 201 are closed below the first belt 41a of the first conveyor device 41 (in the above (b)). explanation). Further, the space between the first dividing device 7 and the second dancer unit 37 becomes wider, so that a plurality of support members 201 are opened below the second belt 43a of the second conveyor device 43 (in the above (c)). explanation). The formed strip-shaped substrate 111 is placed on the upper transport portion of the second belt 43a.
Further, as shown in FIG. 5, in the second stage, the second dividing device 9 moves to the upstream side in the transport direction while dividing the strip-shaped substrate 111. At this time, the second dividing device 9 holds the downstream end in the transport direction of the second belt 43a and the upstream end in the transport direction of the third belt 45a. Therefore, the space between the second dancer unit 37 and the second dividing device 9 becomes narrower, so that the plurality of support members 201 are closed below the third belt 45a of the third conveyor device 45 (in the above (d)). explanation).

なお、図５では示されていないが、第２分断装置９と第３ダンサーユニット３９との間は広くなり、そのため第３コンベヤ装置４５の第３ベルト４５ａの下方では複数の支持部材２０１が開き状態になる（上記（ｅ）の説明）。また、図５では示されていないが、複数の単位基板１１３は、第３ベルト４５ａの上側搬送部４５ａ１に載置される。 Although not shown in FIG. 5, the space between the second dividing device 9 and the third dancer unit 39 becomes wider, so that a plurality of support members 201 open below the third belt 45a of the third conveyor device 45. It becomes a state (explanation of (e) above). Further, although not shown in FIG. 5, the plurality of unit substrates 113 are placed on the upper transport portion 45a1 of the third belt 45a.

図８～図１０を用いて、ベルトの上側搬送部が所定区間内で縮小状態から拡張状態に移行する動作を説明する。図８～図１０は、ベルト支持機構の動作の一状態を示す模式図である。
図８では、第１分断装置７は第１ダンサーユニット３５に近接して配置されており、その間で複数の支持部材２０１は閉じ状態で配置されている。 8 to 10 will be used to describe an operation in which the upper transport portion of the belt shifts from the contracted state to the expanded state within a predetermined section. 8 to 10 are schematic views showing one state of operation of the belt support mechanism.
In FIG. 8, the first dividing device 7 is arranged close to the first dancer unit 35, and the plurality of support members 201 are arranged in a closed state between them.

図９では、第１分断装置７は第１ダンサーユニット３５から搬送方向下流側に移動し、そのため複数の支持部材２０１は開き状態に移行する。つまり、第１ベルト４１ａの上側搬送部４１ａ１が第１ダンサーユニット３５と第２ダンサーユニット３７との間の区間で拡張されていくときに、付勢部材２１１によって一対の支持部材２０１が互いに離れていくので、全ての対において支持部材２０１が一斉に互いから離れていく。したがって、第１ベルト４１ａの上側搬送部４１ａ１は、複数の支持部材２０１によって全体にわたって下方から支持される。
図１０では、第１分断装置７は第１ダンサーユニット３５から搬送方向下流側に最も離れた位置に移動しており、そのため複数の支持部材２０１は開き状態になっている。 In FIG. 9, the first dividing device 7 moves from the first dancer unit 35 to the downstream side in the transport direction, so that the plurality of support members 201 shift to the open state. That is, when the upper transport portion 41a1 of the first belt 41a is expanded in the section between the first dancer unit 35 and the second dancer unit 37, the pair of support members 201 are separated from each other by the urging member 211. As a result, the support members 201 move away from each other all at once in all pairs. Therefore, the upper transport portion 41a1 of the first belt 41a is supported from below by the plurality of support members 201.
In FIG. 10, the first dividing device 7 has moved to the position farthest from the first dancer unit 35 on the downstream side in the transport direction, so that the plurality of support members 201 are in an open state.

２．他の実施形態
以上、本発明の一実施形態について説明したが、本発明は上記実施形態に限定されるものではなく、発明の要旨を逸脱しない範囲で種々の変更が可能である。特に、本明細書に書かれた複数の実施形態及び変形例は必要に応じて任意に組み合せ可能である。 2. 2. Other Embodiments Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the gist of the invention. In particular, the plurality of embodiments and modifications described herein can be arbitrarily combined as needed.

（１）基板の変形例
２枚の脆性材料基板を貼り合せた貼り合せ脆性材料基板には、ガラス基板を貼り合わせた液晶パネル、プラズマディスプレイパネル、有機ＥＬディスプレイパネル等のフラットディスプレイパネルと、シリコン基板、サファイヤ基板等をガラス基板に貼り合わせた半導体基板とが含まれる。
基板の種類は特に限定されない。基板は、単板のガラス、半導体ウエハ、セラミック基板を含んでいる。 (1) Deformation example of substrate Bonding of two brittle material substrates The brittle material substrate includes a liquid crystal panel, a plasma display panel, an organic EL display panel, and other flat display panels with a glass substrate bonded together, and silicon. It includes a semiconductor substrate in which a substrate, a sapphire substrate, etc. are bonded to a glass substrate.
The type of substrate is not particularly limited. The substrate includes a single glass, a semiconductor wafer, and a ceramic substrate.

（２）各種装置の変形例
支持部材の形状、数は特に限定されない。 (2) Modification examples of various devices The shape and number of support members are not particularly limited.

本発明は、ベルトコンベヤ装置に広く適用できる。 The present invention can be widely applied to belt conveyor devices.

１ ：基板加工装置
３ ：スクライブライン形成装置
５ ：基板分断装置
７ ：第１分断装置
９ ：第２分断装置
１１ ：ピックアップ装置
２９ ：搬送装置
３５ ：第１ダンサーユニット
３７ ：第２ダンサーユニット
４１ ：第１コンベヤ装置
５１ ：スクライブユニット
１００ ：貼り合わせ基板
１１１ ：短冊状基板
１１３ ：単位基板
２００ ：ベルト支持機構
２０１ ：支持部材
２０２ ：レール
２０３ ：連結部材
２０５ ：第１部材
２０７ ：第２部材
２０９ ：軸
２１１ ：付勢部材 1: Board processing device 3: Scrivener line forming device 5: Board dividing device 7: First dividing device 9: Second dividing device 11: Pickup device 29: Conveyor device 35: First dancer unit 37: Second dancer unit 41: First conveyor device 51: Scrivener unit 100: Laminated substrate 111: Strip-shaped substrate 113: Unit substrate 200: Belt support mechanism 201: Support member 202: Rail 203: Connecting member 205: First member 207: Second member 209: Shaft 211: Bouncer

Claims (3)

基板をベルトで搬送可能でありかつ前記ベルト上で加工装置によって前記基板が加工される装置であって、
無端状のベルトと、
前記ベルトを駆動する駆動部と、
前記ベルトの上側搬送部の一部を保持して搬送方向に移動可能な移動部と、
前記上側搬送部を下方から支持するための部材であって、前記上側搬送部の移動にしたがって搬送方向に移動可能な複数の支持部材と、
を備え、
前記複数の支持部材は、前記ベルトの幅方向に延びる側面を上側に有する複数の板状部材であり、
前記複数の板状部材のうち一対ずつを連結する複数の連結部材をさらに備え、
前記連結部材は前記一対の板状部材を所定範囲内でのみ接近・離反可能に連結し、
前記連結部材は、一方の板状部材に固定された第１部材と、他方の板状部材に固定され前記第１部材に対して上下方向に延びる軸を中心に回動自在に連結された第２部材とを有する、ベルトコンベヤ装置。 A device capable of transporting a substrate with a belt and processing the substrate on the belt by a processing device.
With an endless belt,
The drive unit that drives the belt and
A moving portion that holds a part of the upper transport portion of the belt and can move in the transport direction,
A plurality of support members for supporting the upper transport portion from below and capable of moving in the transport direction according to the movement of the upper transport portion.
Equipped with
The plurality of support members are a plurality of plate-shaped members having a side surface extending in the width direction of the belt on the upper side.
A plurality of connecting members for connecting a pair of the plurality of plate-shaped members are further provided.
The connecting member connects the pair of plate-shaped members so that they can approach and separate from each other only within a predetermined range.
The connecting member is rotatably connected to a first member fixed to one plate-shaped member and a shaft fixed to the other plate-shaped member and extending in the vertical direction with respect to the first member. A belt conveyor device having two members . 前記一対の板状部材が互いに接近すると互いに離れる方向への付勢力を発生する付勢部材をさらに備えている、請求項１に記載のベルトコンベヤ装置。 The belt conveyor device according to claim 1 , further comprising an urging member that generates an urging force in a direction in which the pair of plate-shaped members approach each other and separate from each other. 前記移動部は、前記ベルトの前記上側搬送部の上に載置された基板を分断する分断装置である、請求項１又は２に記載のベルトコンベヤ装置。 The belt conveyor device according to claim 1 or 2 , wherein the moving portion is a dividing device that divides a substrate placed on the upper transport portion of the belt.
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JP2008544934A (en) 2005-07-06 2008-12-11 トルンプ・ヴェルクツォイクマシーネン・ゲーエム・ベーハー・ウント・コンパニ・カーゲー Plate-like material support device

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