TWI510444B - Substrate breaking device and substrate breaking device - Google Patents

Description

Substrate breaking device and substrate transfer device substrate transfer method

The present invention relates to a substrate cutting device and a substrate transfer method for dividing and transporting a mother board including various materials of a mother substrate such as a glass substrate of a display panel such as a liquid crystal display device, and more. A substrate cutting device and a substrate transfer method capable of transporting a substrate having a scratched or broken brittle material to the next stage without being damaged and in a good state.

In general, a display panel such as a liquid crystal display device is usually formed using a glass substrate which is a brittle material substrate. The liquid crystal display device is bonded by separating a pair of glass substrates at an appropriate interval, and liquid crystal is sealed in the space to form a display panel. When such a display panel is manufactured, the bonding mother substrate to which the mother glass substrate is bonded is divided, and processing for forming a plurality of display panels from the bonding mother substrate is performed. A substrate breaking device for separating such a mother substrate is disclosed in Korean Laid-Open Patent Publication No. 2006-0125915 (hereinafter referred to as Patent Document 1).

Fig. 1 is a perspective view schematically showing a main configuration of a substrate cutting device disclosed in Fig. 32 of Patent Document 1. Referring to Fig. 1, a substrate breaking device 200 includes a positioning unit portion 220, a scribing unit portion 240, a conveyor portion 260, a steam breaking unit portion 280, a panel inverting unit portion 320, and a panel terminal. Separation unit 340.

The positioning unit portion 220 side is disposed as a substrate loading side, and is disposed When the panel terminal separation portion 340 side is set as the substrate carry-out side, the substrate is sequentially supplied to the positioning unit portion 220 on the substrate loading side, and the unit portion 240, the cracking and transporting portion 260, and the vapor cracking unit portion 280 are sequentially scribed. The panel inversion unit unit 320 and the panel terminal separation unit 340 are transported, and the substrate is cut off, and then transported to the substrate carry-out side.

That is, the substrate supplied from the positioning unit portion 220 disposed above the mounting table 230 is placed on a plurality of substrate supporting units (not shown) formed on the positioning unit portion 220 to position the substrate in the setting. After being attached to a belt portion (not shown) of the substrate supporting unit, the belt unit 240 is transported to the next stage, that is, by the rotation operation of the belt portion.

On the other hand, the scribing unit portion 240 has a breaking device guide body 242 which is disposed above the mounting table 250 in the X direction, and a portion in which the breaking device guiding body 242 is sandwiched therebetween and arranged in the Y direction. 1 substrate supporting unit portion 241A and second substrate supporting unit portion 241B. Further, the first substrate supporting unit 244A of the first substrate supporting unit portion 241A and the second substrate supporting unit 244B of the second substrate supporting unit portion 241B are arranged in parallel with respect to the frame 243A and the frame 243B, respectively.

In this case, the substrate transferred from the positioning unit portion 220 to the scribing unit portion 240 is placed on the first substrate supporting unit 244A of the first substrate supporting unit portion 241A, and is held by the clamp device 251. . After that, when the belt portion provided in the first substrate supporting unit 244A is rotated and the clip device 251 is moved in the Y direction, the substrate is passed through the cutting device guide body 242 and the substrate is scored. The second substrate supporting unit 244B of the second substrate supporting unit portion 241B is transported.

The substrate transferred to the second substrate supporting unit 244B is separated from the tape portion of the second substrate supporting unit 244B by rotating the tape portion provided in the second substrate supporting unit 244B. The belt portion 261 of the rupture transport unit 260 is transported, and then the substrate is completely separated by the vapor rupture unit unit 280, and passes through the substrate transport unit unit 300, the panel inversion unit unit 320, and the panel terminal separation unit 340. It is transported to the substrate carry-out side by a robot or the like.

Further, in general, the substrate that has been subjected to the scribing operation and transported to the belt portion of the second substrate supporting unit 244B is rotated by the belt portion of the second substrate supporting unit 244B and the belt portion 261 of the split conveying portion 260. It is transported to the split transmission unit 260. The substrate that has been transported to the rupture transport unit 260 is stopped by the steam rupture unit 280 in a state where the rotation of the belt portion 261 of the rupture transport unit 260 is stopped, and the pick-up robot is picked up. It is picked up and discharged to the substrate transport unit unit 300. Further, even in a state where the rotation of the belt portion 261 of the severing conveying portion 260 is stopped, the belt portion of the first substrate supporting unit 244A and the second substrate supporting unit 244B constituting the scribe unit portion 240 is still scribed for the substrate. Controlled by continuous rotation.

Patent Document 1: Korean Laid-Open Patent Publication No. 2006-0125915.

However, in the above-described conventional substrate breaking device, when the scribed substrate is transported from the scribing unit portion 240 to the cleavage transport portion 260, more specifically, it is detached from the second substrate supporting unit 244B. When the portion 260 is transported, the tape portion is transferred between the tape portion of the second substrate supporting unit 244B and the tape portion 261 of the cracking transport portion 260, so that the second substrate supporting unit 244B and the split transfer portion 260 are transferred. The end material is dropped, or the glass crumb of the substrate is broken or the like. The problem of the transfer of such a belt portion will be described in more detail with reference to Fig. 2 .

Fig. 2 is a view schematically showing a process of transporting a substrate from a scribing unit unit to a pick-up and transport unit in a conventional substrate cutting device. In FIG. 2, reference numeral 100 denotes a supply portion for receiving, positioning, and/or rotating a substrate conveyed by the substrate loading side, symbols 110 and 120. The upstream side scribed portion and the downstream side scribed portion are respectively indicated, and the reference numeral 130 is a pick-up and transfer portion that discharges the separated substrate by the robot or the like.

Referring to Fig. 2, in the conventional substrate breaking device, the substrate held by the substrate holding mechanism 114 is reciprocally moved between the upstream side scribing portion 110 and the downstream side scribing portion 120, and is set by scribing. The beam 116 is scored by the head 118. Then, the substrate 102a that has been placed on the conveyor belt 134 of the downstream side scribing portion 120 is transported to the conveyor belt 135 of the pick-up transport unit 130.

However, between the conveyor belt 134 of the downstream side scribing portion 120 and the conveyor belt 135 of the pickup transport unit 130, since the transport transfer portion is present, when the substrate 102a is transported to the position of the substrate 102b on the pick-up transport portion 135, The end material is dropped from the scored substrate 102a. In addition, when the substrate 102a is transferred from the downstream side scribing portion 120 to the pick-up transfer portion 130, the substrate 102a is caused to rise and fall, thereby causing the scribed portions of the substrate 102a to collide with each other to cause a partial rupture of the substrate. Glass crumbs. Even if, for example, the heights of the downstream side scribing portion 120 and the pick-up transport portion 130 are equal to the ground, in actuality, the heights of the downstream side scribing portion 120 and the pick-up transport portion 130 are slightly different, or either It is placed obliquely, thus causing glass debris to be generated. In particular, the problem is more pronounced because of the recent situation in which thinned substrates are processed.

The present invention has been made in order to solve the above problems, and an object thereof is to provide a problem that can prevent the transfer of a transfer device and cause the problem as described above, and can transport the substrate to the scratched substrate without causing damage to the substrate. The next stage of the substrate breaking device and the substrate transfer method.

In order to achieve the object, a substrate cutting device according to an embodiment of the present invention includes a first transfer unit and a second transfer unit, which are attached to a mounting table and are transported along the substrate. The direction is disposed at intervals with respect to each other, and includes a belt portion that is wound around a plurality of rollers and rotated while the substrate is placed; the scribing unit is provided in the first transmission unit and the first portion 2, the substrate is scribed between the transfer portions; and a dancer-roller unit is disposed in the first direction, and is disposed on the upstream side of the second transfer portion on the upstream side of the second transfer portion Between the second transfer portion on the downstream side and the second transfer portion, at least the first roller and the second roller are provided; the first roller is located outside the band portion of the second transfer portion; and the second roller is located at the second transfer portion The first roller and the second roller are formed in the second direction intersecting the first direction so as to be movable in opposite directions, and the upstream second transfer portion is formed integrally with the first roller and the second roller The downstream second transfer unit can be in a different operating state.

In the substrate cutting device, when the first roller and the second roller move in opposite directions to each other in the second direction, the moving distance of the first roller may be the same as the moving distance of the second roller.

In the substrate cutting device, at least one of the first roller and the second roller may be in contact with the belt portion while maintaining the tension of the belt portion of the second conveying portion.

In the substrate cutting device, the first roller and the second roller may be coupled to the pinion in a state in which the first roller and the second roller are disposed to face each other with a pinion gear coupled to the gear drive motor. The first rack and the second rack are combined.

In the substrate cutting device, the third roller may be included in the plurality of rollers, and the downstream portion of the second transfer portion may be wound around the third roller, and the third roller may be wound on the third roller. Connect the belt drive motor.

In the substrate breaking device, the first roller (stopper) for stopping the rotation of the belt portion of the upstream second conveying portion may be provided in the dancer roller unit, and The second brake in which the rotation of the belt portion of the downstream second conveying portion is stopped.

In addition, the substrate transfer method according to the embodiment of the present invention is configured such that the substrate is placed on the installation table in a first direction which is a transport direction along the substrate, and is interposed therebetween, and is wound around the substrate. a first transfer portion and a second transfer portion of a belt portion that rotates with a plurality of rollers, and a substrate portion of the scribing unit that is disposed between the first transfer portion and the second transfer portion and that scribes the substrate In the cutting device, the substrate transfer method of transporting the substrate placed on the tape portion of the second transfer portion to the first direction is characterized in that the substrate cutting device is in the first direction The second transfer unit on the upstream side of the upstream side of the second transfer unit and the second transfer unit on the downstream side of the downstream side are provided to be movable in opposite directions to each other in the second direction intersecting the first direction. At least the first roller and the second roller are provided with a beating roller unit, and the first roller is positioned outside the belt portion of the second conveying portion, and the second roller is positioned inside the belt portion of the second conveying portion. So that the first roller and the second roller are opposite each other To move, thereby forming the upstream side of the second conveying unit and the second conveying portion of the downstream side integrally in mutually different ways actuation.

In the substrate transfer method, the first transfer unit and the second roll may be reciprocated, and the second transfer unit may be brought to the upstream side while the belt portion of the downstream second transfer unit is stopped. The portion rotates clockwise or counterclockwise, and the substrate placed on the belt portion of the upstream second transfer portion is scored, and at the stage of the scribing, the downstream side of the stop state is placed (2) The unfinished substrate on the belt portion of the transport portion is unloaded, and the first roller and the first roller are rotated while rotating the third roller of the belt portion on which the downstream second transport portion is wound. In the state in which the belt portion of the upstream second conveying portion is stopped, the belt portion of the downstream second conveying portion is rotated, and the end portion of the belt portion that is left on the downstream second conveying portion is rotated. The material is unloaded, and after the unloading of the end material, the third roller is continuously rotated, and the substrate which is placed on the belt portion of the upstream second transfer portion is cut to the second transfer portion on the downstream side. The belt is transported on the belt.

In the substrate transfer method, the motor may be driven by the third roller connecting belt portion, and the operation of the belt portion driving motor may be stopped at the stage of scribing the substrate.

In the substrate transfer method, the belt drive motor may be actuated at the stage of unloading the end material.

In the substrate transfer method, the first brake that stops the rotation of the belt portion of the upstream second transfer portion and the belt portion that rotates the downstream second transfer portion may be provided in the dancer roller unit. The second brake is stopped, and the second brake is actuated at the stage of scribing the substrate.

In the substrate transfer method, the first brake may be actuated at the stage of unloading the end material.

In the substrate transfer method, the operation of the first brake and the second brake may be completely released at the stage of transporting the marked substrate to the belt portion of the downstream second transfer portion.

According to the substrate cutting device and the substrate transfer method of the embodiment of the present invention, the second transfer unit on the upstream side and the second transfer unit on the downstream side of the second transfer unit that is integrally formed may be provided with a dancer roller unit. The substrate is transported from the upstream side second transfer unit to the downstream side second transfer unit so as to exist in the transfer transfer portion between the downstream side scribing portion and the pick-up transfer unit. In this way, it is possible to prevent the problem of falling of the end material or the problem of glass crumbs. In addition, it is also possible to prevent the occurrence of scratches or damage on the surface of the substrate due to the transfer of the transfer portion. Of course. Further, according to the substrate cutting device and the substrate transfer method of the embodiment of the present invention, the upstream second transfer unit and the downstream second transfer unit can be operated differently from each other, so that even for the downstream side When the substrate on the transport unit is picked up and the downstream second transport unit is stopped, the scribing operation of the substrate on the upstream second transport unit may be continued. Therefore, the processing efficiency of the entire substrate breaking device can be improved.

2, 2a‧‧‧ substrate

10‧‧‧1st Transfer Department

14‧‧‧Chuck beam

16‧‧‧ chuck

18‧‧‧Lead Department

20‧‧‧2nd Transfer Department

21‧‧‧ Roller

21a‧‧‧3rd roller

22‧‧‧Upstream side second transfer unit (post-scoring transfer unit)

22a‧‧‧post-transfer architecture

23‧‧‧Bounce roller unit

23a‧‧‧1st roller

23b‧‧‧2nd roller

24‧‧‧Down side second transfer unit (pick up transfer unit)

24a‧‧‧ Pick up the transmission framework

25a‧‧‧ Pick up X-axis robot

25b‧‧‧ Pick up the Y-axis robot

25c‧‧‧ Pick up the Z-axis robot

27‧‧‧ Pick up

28‧‧‧Belt

30‧‧‧ scribing unit

32‧‧‧ scribing beams

34‧‧‧Scratch

40‧‧‧Band drive motor

50a‧‧‧1st brake

50b‧‧‧2nd brake

52‧‧‧Band brake countershaft

54‧‧‧Racks and pinions

232‧‧‧Gear drive motor

234‧‧‧ pinion

236a‧‧‧1st rack

236b‧‧‧2nd rack

238‧‧‧ Guides

Fig. 1 is a perspective view schematically showing a main configuration of a conventional substrate breaking system.

Fig. 2 is a view schematically showing a process of transporting a scored substrate to a pick-up transfer unit in a conventional substrate breaking device.

Fig. 3 is a side view schematically showing a main configuration of a substrate cutting device according to an embodiment of the present invention.

4(a) to 4(d) are diagrams schematically showing a substrate transfer process of the substrate cutting device according to the embodiment of the present invention.

Fig. 5 is a partial perspective view showing a substrate breaking device provided with a dancer roller unit according to an embodiment of the present invention.

Figure 6 is a perspective view of a dancer roller unit in accordance with an embodiment of the present invention.

Figure 7 is a side elevational view of a dancer roller unit in accordance with an embodiment of the present invention.

Fig. 8 is a side cross-sectional view showing a dancer roller unit in which the first roller is lowered and the second roller is raised in the dancer roller unit according to the embodiment of the present invention.

Fig. 9 is a side cross-sectional view showing a dancer roller unit in which the first roller is raised and the second roller is lowered in the dancer roller unit according to the embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention can be embodied in various different forms and is not limited to the embodiments described herein. In the drawings, parts that are not related to the description are omitted for the sake of simplicity and clarity of the present invention, and the same or similar constituent elements are denoted by the same reference numerals throughout the description. Further, in the embodiment of the present invention, the difference in configuration of the conventional substrate breaking device disclosed in Patent Document 1 and the like will be mainly described, and the same or similar to the conventional substrate breaking device. The configuration is omitted. On the other hand, in the embodiment of the present invention, the "substrate" includes a mother substrate that is divided into a plurality of substrates, and includes a metal substrate such as a steel plate, a board, a plastic substrate, a ceramic substrate, a semiconductor substrate, a glass substrate, and the like. A single board such as a material substrate. Further, the present invention is not limited to such a single board, and includes a bonded substrate in which a pair of substrates are bonded to each other, and a laminated substrate in which a pair of substrates are laminated.

Fig. 3 is a side view schematically showing a main configuration of a substrate cutting device according to an embodiment of the present invention. Referring to Fig. 3, the substrate cutting device of the present embodiment includes a first transfer unit 10, a second transfer unit 20, a scribing unit 30, and a dancer roller unit 23. The first transfer unit 10 and the second transfer unit 20 are disposed on the installation table (not shown) in a first direction (in the +Y direction in FIG. 3 ) along the substrate transfer direction. In the first conveying unit 10, a belt portion 18 that is wound around a plurality of rollers 11 and rotated is provided, and a belt portion 28 that is wound around a plurality of rollers 21 and rotated is also provided in the second conveying unit 20. Further, in the present embodiment, the belt drive motor 40 is coupled to the third roller 21a among the plurality of rollers 21, so that the third roller 21a is controlled by the operation of the belt drive motor 40. This is rotated to thereby rotate the belt portion 28.

The scribing unit 30 is disposed between the first transport unit 10 and the second transport unit 20. The scribing unit 30 is provided with a scribing beam 32 that is extended in a direction transverse to the setting table (in the +X direction in FIG. 3), and a direction in which the scribing beam 32 is attached and extends along the scribing beam 32. Move the scratch head 34. Further, on the belt portion 18 of the first conveying portion 10, a chuck beam 14 which is provided in the first direction so as to be movable forward (in the +Y direction and the -Y direction in Fig. 3) is provided. And a collet 16 formed on one side of the collet beam 14 and holding the substrate 2. Further, the chuck beam 14 is moved toward the scribing unit 30 in the front-rear direction, whereby the substrate 2 held by the chuck 16 is scored while passing through the lower portion of the scribing head 34.

In the present embodiment, the second transport unit 20 is divided into a second transport unit 22 (hereinafter, also referred to as a post-mortem transport unit) on the upstream side in the transport direction of the substrate, and a second downstream side on the downstream side. The transport unit 24 (hereinafter also referred to as a pick-up transport unit).

The post-scoring transfer unit 22 mounts a portion of the substrate that has been scribed by the scribing unit 30 from the first transport unit 20, and the pick-up transport unit 24 picks up the substrate by, for example, picking up a robot or the like. The portion of the substrate 2a transferred from the post-scoping transfer portion 22 is temporarily placed.

In the present embodiment, the post-transporting unit 22 and the pick-up and transport unit 24 are configured to be integrated with each other as the second transport unit 20 in the present embodiment. The dancer roller unit 23 between the transport portion 22 and the pick-up transport portion 24 is scored.

The dancer roller unit 23 is provided between the post-scoping transport unit 22 and the pick-up transport unit 24, and has at least a pair of first rollers 23a and second rollers 23b. In FIG. 3, only the pair of first roller 23a and second roller 23b are shown. However, the present invention is not limited thereto, and may be applied to a dancer roller unit including two or more pairs of rollers. Further, in Fig. 3, the first roller 23a is located outside the track of the belt portion 28 on the outer side of the second transport portion 20, and the second roller 23b is located at the second. The inner side of the transport unit 20 is the inner side of the rail of the belt portion 28. However, the present invention is not limited thereto, and the first roller 23a may be located inside the rail of the belt portion 28, and the second roller 23b may be located on the rail of the belt portion 28. The composition of the outside.

The first roller 23a and the second roller 23b of the dancer roller unit 23 are formed to be movable in a second direction (in the +Z direction or the -Z direction in FIG. 3) that intersects the substrate transport direction, that is, the first direction. Further, the first roller 23a and the second roller 23b are formed to move in opposite directions when moving. For example, when the first roller 23a moves in the -Z direction, the second roller 23b moves in the +Z direction, and when the first roller 23a moves in the +Z direction, the second roller 23b moves in the -Z direction. The first roller 23a and the second roller 23b are coupled to each other in conjunction with each other. The combination structure will be described in detail later.

In this manner, between the post-scratching transport unit 22 and the pick-up transport unit 24, the dancer roller unit 23 including the first roller 23a and the second roller 23b that are movable in opposite directions is formed, whereby the second The movement of the belt portion 28 of the scribing portion 20 can be controlled to be independent in the post-scoping transport portion 22 and the pick-up transport portion 24. That is, it can be controlled in such a manner that the belt portion 28 of the transport portion 22 is rotated after scribing, but the belt portion 28 of the pick-up transport portion 24 is stopped, or conversely, the belt portion of the transport portion 24 is picked up. The rotation is performed 28, but the belt portion 28 of the conveying portion 22 is stopped after scoring. In this way, the post-scoping transfer unit 22 and the pick-up transfer unit 24 are integrally formed without being transferred by transfer (constituted by one belt portion 28), but the actuation state can be mutually Controlled for different ways.

Therefore, the substrate which can be placed on the post-scratching transport unit 22 can be transported along the belt portion 28 so as not to be transferred to the second pick-up transport unit 24. Therefore, there is an effect that it is possible to prevent the substrate from being cut from the downstream side as in the conventional substrate breaking device. When the portion is transported to the pick-up and transport portion, the transfer of the transport portion causes problems such as falling of the end material or glass debris, and also prevents the problem of damage to the surface of the substrate caused by the transfer of the transport portion. This will be described more specifically with reference to FIGS. 4(a) to 4(d).

4(a) to 4(d) are diagrams schematically showing a substrate transfer process of the substrate cutting device according to the embodiment of the present invention. Fig. 4(a) is a diagram showing the stage of starting the dicing of the substrate. Referring to Fig. 4(a), the substrate 2 to be scribed is held by the chuck 16. Further, the substrate 2a which has been scored is placed on the pick-up transfer portion 24 to be picked up.

On the other hand, the dancer roller unit 23 of the present embodiment is provided with a first brake 50a formed on the side of the post-scratching transport unit 22 with respect to the first roller 23a, and a first roller 50a as a reference. The second brake 50b on the side of the conveying unit 24 is picked up. The first brake 50a and the second brake 50b are used to reliably stop the rotation of the belt portion 28 of the second transport unit 20, and in FIG. 4(a), the second brake 50b is lowered to cause the pick-up transport unit 24 to be lowered. The rotation of the belt portion 28 is surely stopped.

(b) of FIG. 4 is a view showing a stage in which the substrate 2 is scribed, and the substrate 2a on the pick-up transfer unit 24 is picked up and unloaded in a lower stage such as a transport unit (not shown). formula.

4(a) and 4(b), the chuck beam 14 is moved in the substrate transport direction (in the +Y direction in FIG. 4(b)), whereby the substrate 2 held by the chuck 16 is also passed through the scribing head. 34 below. At the same time, the first roller 23a moves in the -Z direction, and the second roller 23b moves in the +Z direction opposite to the moving direction of the first roller 23a.

At this time, the operation of the belt portion drive motor 40 is turned on, and since the belt portion 28 is surely wound around the third roller 21a, the first roller 23a and the second roller 23b are moved. At the time of the movement, only the belt portion 28 on the side of the rear conveying portion 22 is actuated, and the belt portion 28 on the side where the conveying portion 24 is picked up is not actuated. As shown in FIG. 4(b), the second brake 50b may be lowered to stop the belt portion 28 of the pick-up conveyor portion 24 more reliably.

Further, in the present embodiment, the distances at which the first roller 23a and the second roller 23b move are formed to be the same as each other. In other words, when the first roller 23a is moved by the distance L in the -Z direction, the second roller 23b is also adjusted so as to move the distance L in the +Z direction. Thereby, while the distance moved by the first roller 23a in the -Z direction and the distance moved by the second roller 23b in the +Z direction are offset, only the belt portion 28 of the rear conveying portion 22 is scored by the first roller 23a or The degree of the movement of the second roller 23b is rotated clockwise. Thereby, the substrate 2 held by the chuck 16 can continue to move on the belt portion 28 of the post-scratching transport portion 22 after passing through the lower portion of the scribing head 34 to reach the post-scouring transport portion 22.

After that, the chuck beam 16 and the chuck 14 are retracted in the opposite direction to the transport direction of the substrate (in the -Y direction in FIG. 4(b)), and at the same time, the first roller 23a moves again in the +Z direction, and The second roller 23b is again moved in the -Z direction, whereby the belt portion 28 of the transport portion 22 after the scribing is rotated counterclockwise again to the extent that the first roller 23a or the second roller 23b is moved. Then, by repeating such a process, the entire surface of the substrate 2 held by the chuck 16 is scored.

On the other hand, as described above, even if the first roller 23a and the second roller 23b are moved, the belt portion 28 of the transporting portion 24 is fixed. Therefore, even in the process of the substrate scribing, the substrate 2a which has been placed on the belt portion 28 of the pick-up transfer portion 24 and which has been subjected to the scribing operation can be picked up by, for example, picking up the robot or the like, and is lowered. One stage unloading.

Fig. 4(c) shows the stage where the chucking beam 14 and the collet 16 are returned to the initial position and the end material remaining in the belt portion 28 of the pick-up conveying portion 24 is transferred to the crusher. The pattern. Referring to Figures 4(b) and 4(c), the substrate 2 on which the scribing operation has been completed, the grip of the collet 16 is released and placed on the belt portion 28 of the post-scribe transfer portion 22, the collet 16 and the collet beam 14 then return to the initial position.

At this time, when the belt drive motor 40 is actuated, the third roller 21a is rotated in the clockwise direction, the first roller 23a is moved in the +Z direction, and the second roller 23b is moved in the -Z direction. The belt portion 28 of the transport portion 24 is rotated clockwise, and the belt portion 28 of the transport portion 22 after the scribing is maintained in a stopped state. Thereby, only the end material remaining on the belt portion 28 of the pick-up conveying portion 24 can be transferred to the crusher in a state where the substrate 2 on the belt portion 28 of the post-scratching conveying portion 22 is stopped.

Further, in this case, since the second brake 50b is raised and the first brake 50a is lowered, the rotation of the belt portion 28 of the pick-up conveyor portion 24 is not restricted, and only the post-tracking is transmitted. The movement of the belt portion 28 of the portion 22 is more reliably stopped.

4(d) is a view showing a stage in which a new substrate is loaded onto the first transport unit 10, and the substrate placed on the belt portion 28 of the post-scratching transport unit 22 is transported to the pick-up transport unit 24. . Referring to FIG. 4(d), the first substrate 10 is placed on the tape portion 18 of the first transfer unit 10 in the first transfer unit 10, and is held by the chuck beam 14 at the initial position. Chuck 16.

When the first roller 23a is continuously moved in the +Z direction and the contact with the belt portion 28 is released, the belt portion 28 is returned to the non-bending flat state, and the substrate is placed and transported. The belt transfer portion between the belt portion 28 of the transport portion 22 and the belt portion 28 of the pick-up transport portion 24 does not have a transport transfer portion. Then, the first brake 50a is raised to release the contact with the belt portion 28. At this time, the belt drive motor 40 is rotated by the belt portion 28 of the pick-up conveyor 24, and the belt portion 28 of the transport portion 22 is also rotated at the same time, whereby the belt portion drive motor 40 can be placed at the same time. to The substrate on which the scribed portion on the belt portion 28 of the transport portion 22 is scribed is transported to the belt portion 28 of the pick-up transport portion 24 without transfer of the transport. Therefore, the transported portion of the next stage (for example, the pick-up stage) can be transferred without causing damage to the scribed substrate.

On the other hand, in the present embodiment, at least one of the first roller 23a and the second roller 23b is brought into contact while maintaining the tension of the belt portion 28. Thereby, the belt portion 28 can be rotated while maintaining the tension by the movement of the first roller 23a and the second roller 23b, and the substrate placed on the belt portion 28 can be smoothly conveyed.

Further, in the present embodiment, the first roller 23a and the second roller 23b may be configured by other means capable of moving the belt portion 28 by rotation while the belt portion 28 is wound.

Fig. 5 is a partial perspective view showing a substrate breaking device provided with a dancer roller unit according to an embodiment of the present invention. Referring to Fig. 5, the post-scribe transport frame 22a is provided with a post-scribe transport portion 22 along the first direction of the substrate transport direction, and a pick-up transport portion 24 is provided on the pick-up transport frame 24a. The pick-up transfer unit 24 is provided with a pick-up X-axis robot 25a that can move on the X, Y, and Z axes, pick up the Y-axis robot 25b, and pick up the Z-axis robot 25c, and pick up the hand 27 The substrate is unloaded by moving the robot to the desired position by the movement of the robot.

Further, a dancer roller unit 23 is provided between the post-scoping conveying portion 22 and the pick-up conveying portion 24. The dancer roller unit 23 will be described with reference to Figs. 6 and 7 .

Fig. 6 is a perspective view of a dancer roller unit 23 according to an embodiment of the present invention, and Fig. 7 is a side view of a dancer roller unit 23 according to an embodiment of the present invention. Referring to Fig. 6 and Fig. 7, a dancer roller unit 23 according to an embodiment of the present invention includes a pinion 234 coupled to the gear drive motor 232, and is sandwiched by the pinion 234 in a state of being engaged with the pinion 234. Gear 234 The first rack 236a and the second rack 236b are disposed opposite each other. In the first rack 236a, the first roller 23a is coupled to the connecting member, and the second roller 23b is coupled to the second rack 236b via the connecting member. Therefore, when the pinion 234 is rotated by the operation of the gear drive motor 232, the first rack 236a and the second rack 236b move in opposite directions in the Z direction, and the first roller 23a and the second roller 23b are also The guide 238 is actuated in the direction in which the first rack 236a and the second rack 236b are actuated.

Further, a first brake 50a and a second brake 50b that control the movement of the belt portion 28 are provided on the upper portion of the dancer roller unit 23. The first brake 50a and the second brake 50b are coupled to the rack and pinion 54 coupled to the belt brake countershaft 52. Therefore, the first brake 50a and the second brake 50b are also raised or lowered by the operation of the rack and pinion 54.

Figure 8 is a side cross-sectional view showing a beating roller unit in which the first roller is lowered and the second roller is raised in an embodiment of the present invention; and Figure 9 is a first embodiment of the present invention. A side cross-sectional view of the dancer roller unit in which the roller is raised and the second roller is lowered.

Referring to Fig. 8, the belt portion 28 is lowered by the first roller 23a in the -Z direction, and at the same time, the belt portion 28 is also raised by the second roller 23b in the +Z direction. Further, referring to Fig. 9, when the first roller 23a is raised in the +Z direction, the belt portion 28 is restored to a flat state in which the tension is maintained, and at the same time, the second roller 23b is lowered in the -Z direction and the belt portion 28 is also joined. decline. By the movement of the first roller 23a and the second roller 23b, even if the belt portion 28 is provided, the belt portion 28 located on the upstream side of the dancer roller unit 23 can be operated and located on the downstream side of the dancer roller unit 23. The operation of the belt portion 28 is controlled in a mutually different manner. Therefore, the substrate on which the finished scribe is placed on the belt portion 28 can be transferred without transfer. The process is carried out in the next stage, whereby problems such as falling of the end material or glass debris due to transfer of the transfer can be prevented.

As described above, the preferred embodiments of the present invention have been described, but the present invention is not limited thereto, and various modifications and changes can be made without departing from the scope of the invention. It is of course also within the scope of the invention.

2, 2a‧‧‧ substrate

10‧‧‧1st Transfer Department

11‧‧‧ Roller

14‧‧‧Chuck beam

16‧‧‧ chuck

18‧‧‧Lead Department

20‧‧‧2nd Transfer Department

21‧‧‧ Roller

21a‧‧‧3rd roller

22‧‧‧Upstream side second transfer unit (post-scoring transfer unit)

23‧‧‧Bounce roller unit

23a‧‧‧1st roller

23b‧‧‧2nd roller

24‧‧‧Down side second transfer unit (pick up transfer unit)

28‧‧‧Belt

30‧‧‧ scribing unit

32‧‧‧ scribing beams

34‧‧‧Scratch

40‧‧‧Band drive motor

50a‧‧‧1st brake

50b‧‧‧2nd brake

Claims (13)

A substrate cutting device includes a first transfer unit and a second transfer unit, which are disposed on a mounting table and are disposed at intervals in a first direction along a transfer direction of the substrate, and are disposed on the substrate a belt portion that is wound around a plurality of rollers while rotating the substrate; the scribing unit is disposed between the first transport portion and the second transport portion and scribing the substrate; and the bounce roller unit In the first direction, the second transfer unit on the upstream side of the upstream side of the second transfer unit and the second transfer unit on the downstream side of the downstream side are provided, and at least the first roll and the second roll are provided. The first roller is located outside the belt portion of the second conveying portion, and the second roller is located inside the belt portion of the second conveying portion; the first roller and the second roller are in the first direction The second direction intersecting is formed so as to be movable in the opposite direction, and the upstream second transfer unit and the downstream second transfer unit which are integrally formed can be in different operating states. The substrate cutting device according to the first aspect of the invention, wherein the first roller and the second roller move in a direction opposite to each other in the second direction, the movement distance of the first roller and the movement of the second roller The distance is the same. The substrate cutting device according to the first aspect of the invention, wherein at least one of the first roller and the second roller is in contact with the belt portion while maintaining the tension of the belt portion of the second conveying portion. The substrate breaking device of claim 1, wherein the first roller and the second roller The first rack and the second rack, which are coupled to the pinion, are coupled to each other in a state in which the pinion gears coupled to the gear drive motor are disposed to face each other. The substrate cutting device according to the first aspect of the invention, wherein the plurality of rollers include a third roller, and the third roller has a belt portion of the downstream second conveying portion, and the The 3 roller is coupled to the belt drive motor. The substrate cutting device according to the first aspect of the invention, wherein the first roller for stopping the rotation of the belt portion of the upstream second conveying portion and the second portion for the downstream side are provided in the dancer roller unit The second brake that stops the rotation of the belt portion of the conveying portion. A method of transporting a substrate, including a belt that is disposed so as to be spaced apart from each other in a first direction along a transport direction of the substrate, and that is wound around a plurality of rollers while being placed on the mounting table The first transfer unit and the second transfer unit of the unit and the substrate cutting device provided between the first transfer unit and the second transfer unit and scribing the substrate are placed in the substrate cutting device The substrate on the belt portion of the second transport unit is transported in the first direction, and the substrate cutting device is located on the upstream side of the upstream side of the second transport unit in the first direction. The transfer unit and the second transfer unit on the downstream side of the downstream side are provided with at least a first roller and a second roll that are movable in opposite directions in a second direction intersecting the first direction. When the first roller is positioned outside the belt portion of the second conveying portion, and the second roller is positioned inside the belt portion of the second conveying portion, the first roller and the second roller are opposite to each other. Moving in the direction, thereby making the second side of the upstream side integrated The delivery unit and the downstream second transmission unit operate in mutually different manners. The substrate transfer method of claim 7, wherein the first roller is The second roller is reciprocated, and the belt portion of the upstream second conveying portion is rotated clockwise or counterclockwise in a state where the belt portion of the downstream second conveying portion is stopped, and the pair is placed on the upstream side. The substrate on the belt portion of the second transfer portion is scribed; at the stage of scribing, the completed scribed substrate on the downstream portion of the second transfer portion in the stopped state is unloaded; While the third roller that is wound with the belt portion of the downstream second conveying portion is rotated, the first roller and the second roller are moved, and the belt portion of the upstream second conveying portion is stopped. The belt portion of the downstream second conveying portion is rotated, and the end material remaining on the belt portion of the downstream second conveying portion is unloaded; after the unloading of the end material, the third roller is continuously rotated. The completed scribing substrate placed on the belt portion of the upstream side second transport portion is transported to the belt portion of the downstream side second transport portion. The substrate transfer method of claim 8, wherein the motor is driven by the third roller connecting belt portion, and the operation of the belt portion driving motor is stopped at the stage of scribing the substrate. The substrate transfer method of claim 9, wherein the belt drive motor is actuated at the stage of unloading the end material. The substrate transfer method of the eighth aspect of the invention, wherein the bounce roller unit is provided with a first brake for stopping the rotation of the belt portion of the upstream second transfer portion and a second transfer portion for the downstream side. The second brake that is stopped by rotation rotates the second brake at the stage of scribing the substrate. The substrate transfer method of claim 11, wherein the end material is unloaded At the stage of loading, the first brake is actuated. The substrate transfer method according to claim 12, wherein the operation of the first brake and the second brake is completely released at the stage of transporting the marked substrate to the belt portion of the downstream second transfer portion.