CN104067368B - 电子显微镜用试样支架 - Google Patents

电子显微镜用试样支架 Download PDF

Info

Publication number
CN104067368B
CN104067368B CN201280067960.9A CN201280067960A CN104067368B CN 104067368 B CN104067368 B CN 104067368B CN 201280067960 A CN201280067960 A CN 201280067960A CN 104067368 B CN104067368 B CN 104067368B
Authority
CN
China
Prior art keywords
sample
electron microscope
transmission electron
holder
sample holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201280067960.9A
Other languages
English (en)
Chinese (zh)
Other versions
CN104067368A (zh
Inventor
寺田尚平
谷口佳史
长久保康平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of CN104067368A publication Critical patent/CN104067368A/zh
Application granted granted Critical
Publication of CN104067368B publication Critical patent/CN104067368B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007—Holding mechanisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/201—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated for mounting multiple objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20214—Rotation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2802—Transmission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
CN201280067960.9A 2012-01-25 2012-12-03 电子显微镜用试样支架 Expired - Fee Related CN104067368B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012012610A JP5846931B2 (ja) 2012-01-25 2012-01-25 電子顕微鏡用試料ホルダ
JP2012-012610 2012-01-25
PCT/JP2012/081231 WO2013111453A1 (ja) 2012-01-25 2012-12-03 電子顕微鏡用試料ホルダ

Publications (2)

Publication Number Publication Date
CN104067368A CN104067368A (zh) 2014-09-24
CN104067368B true CN104067368B (zh) 2016-08-24

Family

ID=48873194

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280067960.9A Expired - Fee Related CN104067368B (zh) 2012-01-25 2012-12-03 电子显微镜用试样支架

Country Status (5)

Country Link
US (1) US9558910B2 (https=)
JP (1) JP5846931B2 (https=)
CN (1) CN104067368B (https=)
DE (1) DE112012005295T5 (https=)
WO (1) WO2013111453A1 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101756171B1 (ko) * 2015-12-15 2017-07-12 (주)새론테크놀로지 주사 전자 현미경
US10373801B2 (en) * 2016-04-22 2019-08-06 Board Of Regents, The University Of Texas System Systems and methods for measuring magnetic fields produced within microscopes
CN106057618B (zh) * 2016-08-03 2017-11-24 兰州大学 可扩展力电两场透射电子显微镜原位样品杆
US11476083B2 (en) 2017-03-14 2022-10-18 Protochips, Inc. Electrical devices with edge slits for mounting sample
JP6876652B2 (ja) 2018-05-14 2021-05-26 日本電子株式会社 観察方法、試料支持体、試料保持具セット、および透過電子顕微鏡
JP6749544B2 (ja) * 2018-08-10 2020-09-02 株式会社メルビル カバー
JP7200064B2 (ja) * 2018-08-16 2023-01-06 日本電子株式会社 試料ホルダー
CN109613035B (zh) * 2019-02-22 2021-03-26 安徽泽攸科技有限公司 一种用于电子显微镜的样品支撑体及样品杆
CN110797246A (zh) * 2019-11-15 2020-02-14 河南河大科技发展有限公司 一种透射电子显微镜中间镜光阑调节装置
CN111307847B (zh) * 2020-03-11 2021-02-05 中国科学院地质与地球物理研究所 微纳尺度样品真空存储装置
CN111323278A (zh) * 2020-03-21 2020-06-23 桂林理工大学 一种可扩容拆解的真空镀膜仪样品架装置
CN112198174B (zh) * 2020-08-25 2023-01-13 华东师范大学 一种透射电子显微镜的装样装置
CN112289668B (zh) * 2020-09-28 2025-01-24 北京中科科仪股份有限公司 一种电镜探测器的驱动机构及电镜探测器装置
CN114137010B (zh) * 2021-11-05 2024-02-13 上海交通大学 一种高温合金微量元素分布状态的测定方法
JP7440484B2 (ja) * 2021-12-23 2024-02-28 日本電子株式会社 試料カートリッジ搬送システム

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6388262B1 (en) * 1998-08-12 2002-05-14 Gatan, Inc. Double tilt and rotate specimen holder for a transmission electron microscope
CN101275895A (zh) * 2008-01-04 2008-10-01 中国科学院物理研究所 一种在透射电子显微镜中原位测量纳电子器件性质的样品台系统
US20110155906A1 (en) * 2008-06-27 2011-06-30 Shohei Terada Transmission electron microscope apparatus comprising electron spectroscope, sample holder, sample stage, and method for acquiring spectral image
US20110253905A1 (en) * 2008-03-15 2011-10-20 University Of Sheffield Specimen holder assembly

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6431337A (en) * 1987-07-28 1989-02-01 Hitachi Ltd Sample shifting/inclining device for electron microscope or the like
US5225683A (en) * 1990-11-30 1993-07-06 Jeol Ltd. Detachable specimen holder for transmission electron microscope
JP2842083B2 (ja) * 1992-09-17 1998-12-24 株式会社日立製作所 試料ホルダー、これを用いた試料加工観察システム、試料観察方法、透過形電子顕微鏡及びイオンビーム装置
JPH0887972A (ja) * 1994-09-20 1996-04-02 Hitachi Ltd 試料ホールダ
JP3780620B2 (ja) 1997-04-25 2006-05-31 株式会社日立製作所 電子分光器及びそれを備えた透過型電子顕微鏡
JP3805547B2 (ja) * 1999-01-21 2006-08-02 株式会社日立製作所 試料作製装置
JP2002025490A (ja) * 2000-07-13 2002-01-25 Mitsubishi Electric Corp 電子顕微鏡の試料ホルダー、試料台および試料台用治具
JP4178741B2 (ja) * 2000-11-02 2008-11-12 株式会社日立製作所 荷電粒子線装置および試料作製装置
JP4055066B2 (ja) * 2003-02-06 2008-03-05 株式会社ルネサステクノロジ 電子顕微鏡用試料ホルダー
JP2004301851A (ja) * 2004-06-04 2004-10-28 Hitachi Ltd ３次元構造観察用試料作製装置、電子顕微鏡及びその方法
JP4426512B2 (ja) 2005-07-26 2010-03-03 アオイ電子株式会社 微小試料台
JP2008159513A (ja) * 2006-12-26 2008-07-10 Jeol Ltd 電子顕微鏡用試料ホルダー
JP5517559B2 (ja) * 2009-10-26 2014-06-11 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び荷電粒子線装置における三次元情報の表示方法
JP5422416B2 (ja) * 2010-01-28 2014-02-19 株式会社日立製作所 試料搬送装置
JP5532425B2 (ja) 2010-08-27 2014-06-25 株式会社日立ハイテクノロジーズ 荷電粒子装置用試料ホルダ
JP5403560B2 (ja) * 2010-11-17 2014-01-29 コリア ベイシック サイエンス インスティテュート 透過電子顕微鏡の、３方向以上から試片を観察し分析するための３軸駆動が可能な試片ホルダー
JP5470408B2 (ja) 2012-01-23 2014-04-16 株式会社日立ハイテクノロジーズ 電子分光器を有する透過型電子顕微鏡装置，試料ホルダ，試料台及びスペクトル像の取得方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6388262B1 (en) * 1998-08-12 2002-05-14 Gatan, Inc. Double tilt and rotate specimen holder for a transmission electron microscope
CN101275895A (zh) * 2008-01-04 2008-10-01 中国科学院物理研究所 一种在透射电子显微镜中原位测量纳电子器件性质的样品台系统
US20110253905A1 (en) * 2008-03-15 2011-10-20 University Of Sheffield Specimen holder assembly
US20110155906A1 (en) * 2008-06-27 2011-06-30 Shohei Terada Transmission electron microscope apparatus comprising electron spectroscope, sample holder, sample stage, and method for acquiring spectral image

Also Published As

Publication number Publication date
US20140353499A1 (en) 2014-12-04
DE112012005295T5 (de) 2014-09-04
CN104067368A (zh) 2014-09-24
US9558910B2 (en) 2017-01-31
JP5846931B2 (ja) 2016-01-20
JP2013152831A (ja) 2013-08-08
WO2013111453A1 (ja) 2013-08-01

Similar Documents

Publication Publication Date Title
CN104067368B (zh) 电子显微镜用试样支架
US8436301B2 (en) Transmission electron microscope having electron spectrometer
CN105405734B (zh) 在透射带电粒子显微镜中执行光谱术的方法
JP5883658B2 (ja) 荷電粒子線顕微鏡、荷電粒子線顕微鏡用試料ホルダ及び荷電粒子線顕微方法
JP4923716B2 (ja) 試料分析装置および試料分析方法
US10224174B1 (en) Transmission charged particle microscope with imaging beam rotation
US20120001068A1 (en) Method of Electron Diffraction Tomography
JP7703817B2 (ja) 電子エネルギー損失分光検出器を備えた透過型荷電粒子顕微鏡
US20150214004A1 (en) Method for preparing and analyzing an object as well as particle beam device for performing the method
JP5094788B2 (ja) 電子顕微鏡及びその試料ホルダ
US9190242B2 (en) Particle beam device having a sample holder
US10483084B2 (en) Object preparation device and particle beam device having an object preparation device and method for operating the particle beam device
CN114121580B (zh) 辐射设备及其操作方法、计算机程序产品和物体固持器
JP6666627B2 (ja) 荷電粒子線装置、及び荷電粒子線装置の調整方法
JP2018186076A (ja) 荷電粒子顕微鏡における収差測定
JP3692806B2 (ja) 走査電子顕微鏡
US8530858B2 (en) Transmission electron microscope apparatus comprising electron spectroscope, sample holder, sample stage, and method for acquiring spectral image
WO2014195998A1 (ja) 荷電粒子線顕微鏡、荷電粒子線顕微鏡用試料ホルダ及び荷電粒子線顕微方法
JP5532425B2 (ja) 荷電粒子装置用試料ホルダ
JP7239926B2 (ja) 粒子の観察方法
CN120473379A (zh) 用于创建图像的方法、计算机程序产品和粒子束设备
JP2025129139A (ja) 試料チップ

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160824

Termination date: 20201203