CN1035990C - 光纤用多孔预制件的加热玻璃化的方法 - Google Patents
光纤用多孔预制件的加热玻璃化的方法 Download PDFInfo
- Publication number
- CN1035990C CN1035990C CN92115267A CN92115267A CN1035990C CN 1035990 C CN1035990 C CN 1035990C CN 92115267 A CN92115267 A CN 92115267A CN 92115267 A CN92115267 A CN 92115267A CN 1035990 C CN1035990 C CN 1035990C
- Authority
- CN
- China
- Prior art keywords
- gas
- pressure
- vacuum
- vacuum oven
- muffle tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 48
- 238000000034 method Methods 0.000 title claims abstract description 45
- 239000013307 optical fiber Substances 0.000 title claims abstract description 17
- 230000008569 process Effects 0.000 title description 4
- 238000004017 vitrification Methods 0.000 title description 3
- 239000007789 gas Substances 0.000 claims abstract description 155
- 239000005373 porous glass Substances 0.000 claims abstract description 8
- 229910052736 halogen Inorganic materials 0.000 claims description 28
- 150000002367 halogens Chemical class 0.000 claims description 28
- 239000001307 helium Substances 0.000 claims description 27
- 229910052734 helium Inorganic materials 0.000 claims description 27
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical group [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 27
- 150000004820 halides Chemical class 0.000 claims description 26
- 239000011261 inert gas Substances 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 16
- 238000005086 pumping Methods 0.000 description 15
- 229910052799 carbon Inorganic materials 0.000 description 12
- 239000011521 glass Substances 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 9
- 238000000354 decomposition reaction Methods 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 239000000047 product Substances 0.000 description 8
- 230000004580 weight loss Effects 0.000 description 7
- 239000000460 chlorine Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 230000014509 gene expression Effects 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 239000003575 carbonaceous material Substances 0.000 description 4
- 230000018044 dehydration Effects 0.000 description 4
- 238000006297 dehydration reaction Methods 0.000 description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- QWPPOHNGKGFGJK-UHFFFAOYSA-N hypochlorous acid Chemical compound ClO QWPPOHNGKGFGJK-UHFFFAOYSA-N 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000004062 sedimentation Methods 0.000 description 2
- 238000007669 thermal treatment Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007596 consolidation process Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000007850 degeneration Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/10—Non-chemical treatment
- C03B37/12—Non-chemical treatment of fibres or filaments during winding up
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
- C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33204791A JP3175247B2 (ja) | 1991-12-16 | 1991-12-16 | 光ファイバ用多孔質母材の加熱透明化方法 |
| JP332047/91 | 1991-12-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1076430A CN1076430A (zh) | 1993-09-22 |
| CN1035990C true CN1035990C (zh) | 1997-10-01 |
Family
ID=18250551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN92115267A Expired - Fee Related CN1035990C (zh) | 1991-12-16 | 1992-12-16 | 光纤用多孔预制件的加热玻璃化的方法 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US5470369A (enExample) |
| EP (1) | EP0547560B2 (enExample) |
| JP (1) | JP3175247B2 (enExample) |
| KR (1) | KR950008578B1 (enExample) |
| CN (1) | CN1035990C (enExample) |
| AU (1) | AU656643B2 (enExample) |
| CA (1) | CA2085198C (enExample) |
| DE (1) | DE69222619D1 (enExample) |
| TW (1) | TW279153B (enExample) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05105455A (ja) * | 1991-06-25 | 1993-04-27 | Sumitomo Electric Ind Ltd | ガラス物品の製造方法 |
| AU653411B2 (en) * | 1991-07-19 | 1994-09-29 | Sumitomo Electric Industries, Ltd. | Method for producing glass preform for optical fiber |
| JP3060782B2 (ja) * | 1993-06-08 | 2000-07-10 | 住友電気工業株式会社 | 高純度透明ガラスの製造方法 |
| US6011644A (en) * | 1994-07-29 | 2000-01-04 | Corning Incorporated | Hybrid fiber amplifier |
| US5656057A (en) * | 1995-05-19 | 1997-08-12 | Corning Incorporated | Method for drying and sintering an optical fiber preform |
| JP3845906B2 (ja) * | 1996-08-09 | 2006-11-15 | 住友電気工業株式会社 | 合成シリカガラスの製造方法 |
| CN1272831A (zh) * | 1997-07-15 | 2000-11-08 | 康宁股份有限公司 | 在光纤中降低h2的敏感度 |
| GB2362645B (en) * | 1997-09-08 | 2002-03-20 | Sumitomo Electric Industries | Apparatus for producing glass preform |
| US5974838A (en) * | 1998-07-07 | 1999-11-02 | Alcatel | Optical fiber graphite furnace featuring an automatic shutter door system for feeding an optical preform |
| US6543257B1 (en) * | 1999-05-28 | 2003-04-08 | The Furukawa Electric Co., Ltd. | Dehydration and sintering apparatus for porous optical fiber preform |
| DE10020033C2 (de) | 2000-04-22 | 2003-04-03 | Heraeus Quarzglas | Vorrichtung zum Sintern eines Formkörpers |
| JP4379554B2 (ja) * | 2000-09-01 | 2009-12-09 | 住友電気工業株式会社 | 光ファイバ母材の脱水焼結方法 |
| WO2002098808A1 (en) * | 2001-05-31 | 2002-12-12 | Corning Incorporated | Method of low pmd optical fiber manufacture |
| US7272285B2 (en) * | 2001-07-16 | 2007-09-18 | Massachusetts Institute Of Technology | Fiber waveguides and methods of making the same |
| JP3753975B2 (ja) * | 2001-11-29 | 2006-03-08 | 株式会社フジクラ | シングルモード光ファイバの製造方法及びシングルモード光ファイバ |
| US7866189B2 (en) * | 2003-12-08 | 2011-01-11 | Fujikura Ltd. | Dehydration-sintering furnace, a manufacturing method of an optical fiber preform utilizing the furnace and an optical fiber preform manufactured by the method |
| DE102004035086B4 (de) * | 2004-07-20 | 2008-07-03 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung eines Hohlzylinders aus Quarzglas mit kleinem Innendurchmesser sowie zur Durchführung des Verfahrens geeignete Vorrichtung |
| CN100397114C (zh) * | 2004-09-08 | 2008-06-25 | 江苏法尔胜光子有限公司 | 一种光纤预制棒的保温装置 |
| JP4712359B2 (ja) * | 2004-11-29 | 2011-06-29 | 古河電気工業株式会社 | 光ファイバの製造方法 |
| US8789393B2 (en) * | 2004-11-29 | 2014-07-29 | The Furukawa Electric Co., Ltd. | Optical fiber preform, method of manufacturing optical fiber preform, and method of manufacturing optical fiber |
| JP4951906B2 (ja) * | 2005-09-09 | 2012-06-13 | 住友電気工業株式会社 | ガラス母材の製造方法 |
| KR100713460B1 (ko) * | 2005-12-20 | 2007-04-30 | 삼성전자주식회사 | 광섬유 모재의 소결 장치 |
| JP4640293B2 (ja) * | 2006-08-24 | 2011-03-02 | 住友電気工業株式会社 | 石英ガラス体製造方法 |
| US20100122558A1 (en) * | 2008-11-19 | 2010-05-20 | John Michael Jewell | Apparatus and Method of Sintering an Optical Fiber Preform |
| KR101210064B1 (ko) * | 2010-09-01 | 2012-12-07 | 엘지이노텍 주식회사 | 진공 열처리 장치 |
| JP2013056808A (ja) * | 2011-09-09 | 2013-03-28 | Sumitomo Electric Ind Ltd | ガラス母材の製造方法 |
| JP2014201513A (ja) * | 2013-04-10 | 2014-10-27 | 信越化学工業株式会社 | 焼結装置 |
| WO2016086013A1 (en) * | 2014-11-26 | 2016-06-02 | Corning Incorporated | Method for making halogen doped optical element |
| US11554981B2 (en) * | 2019-06-11 | 2023-01-17 | Corning Incorporated | Apparatuses and methods for processing optical fiber preforms |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924742B2 (ja) * | 1979-10-25 | 1984-06-12 | 日本電信電話株式会社 | 光フアイバ用ガラス素材の製造方法 |
| JPS59174538A (ja) † | 1983-03-24 | 1984-10-03 | Hitachi Cable Ltd | 光フアイバ母材の製造方法 |
| JPS6090836A (ja) * | 1983-10-25 | 1985-05-22 | Shin Etsu Chem Co Ltd | 合成石英の製造方法 |
| JPS60215537A (ja) * | 1984-04-06 | 1985-10-28 | Furukawa Electric Co Ltd:The | 光フアイバ用多孔質母材の処理方法 |
| CA1290942C (en) * | 1985-03-18 | 1991-10-22 | Michihisa Kyoto | Method for producing glass preform for optical fiber |
| DE3674749D1 (de) * | 1985-12-27 | 1990-11-08 | Sumitomo Electric Industries | Verfahren zur herstellung eines optischen glasartikels. |
| JPS62176936A (ja) * | 1986-01-30 | 1987-08-03 | Sumitomo Electric Ind Ltd | 光フアイバプリフオ−ムの製造方法および製造装置 |
| JP2559395B2 (ja) * | 1987-02-17 | 1996-12-04 | 住友電気工業株式会社 | 高純度透明ガラスの製造方法及び製造装置 |
| US4789389A (en) † | 1987-05-20 | 1988-12-06 | Corning Glass Works | Method for producing ultra-high purity, optical quality, glass articles |
| US4961767A (en) * | 1987-05-20 | 1990-10-09 | Corning Incorporated | Method for producing ultra-high purity, optical quality, glass articles |
| JPH01131033A (ja) * | 1987-11-16 | 1989-05-23 | Fujikura Ltd | 光ファイバ母材の製造方法 |
| JPH01183430A (ja) * | 1988-01-14 | 1989-07-21 | Sumitomo Electric Ind Ltd | 多孔質光ファイバ母材の脱水焼結炉 |
| JP2514689B2 (ja) * | 1988-04-28 | 1996-07-10 | 住友電気工業株式会社 | 光フアイバ用プリフォ―ムの製造方法 |
| JPH0251436A (ja) * | 1988-08-11 | 1990-02-21 | Fujikura Ltd | 光ファイバ母材の脱水焼結炉 |
| JPH03131544A (ja) * | 1989-06-29 | 1991-06-05 | Sumitomo Electric Ind Ltd | 光ファイバ用ガラス母材の加熱炉および製法 |
| JPH03247523A (ja) * | 1990-02-26 | 1991-11-05 | Asahi Glass Co Ltd | 石英ガラスの製造法および石英ガラス |
| JPH03265533A (ja) * | 1990-03-16 | 1991-11-26 | Fujikura Ltd | 光フアイバの製造方法 |
-
1991
- 1991-12-16 JP JP33204791A patent/JP3175247B2/ja not_active Expired - Fee Related
-
1992
- 1992-12-11 TW TW081109938A patent/TW279153B/zh active
- 1992-12-11 CA CA002085198A patent/CA2085198C/en not_active Expired - Fee Related
- 1992-12-15 DE DE69222619T patent/DE69222619D1/de not_active Expired - Lifetime
- 1992-12-15 EP EP92121323A patent/EP0547560B2/en not_active Expired - Lifetime
- 1992-12-15 AU AU30150/92A patent/AU656643B2/en not_active Ceased
- 1992-12-16 KR KR1019920024431A patent/KR950008578B1/ko not_active Expired - Lifetime
- 1992-12-16 CN CN92115267A patent/CN1035990C/zh not_active Expired - Fee Related
-
1994
- 1994-02-16 US US08/197,534 patent/US5470369A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CN1076430A (zh) | 1993-09-22 |
| EP0547560B2 (en) | 2001-03-28 |
| EP0547560B1 (en) | 1997-10-08 |
| AU656643B2 (en) | 1995-02-09 |
| JPH05163038A (ja) | 1993-06-29 |
| AU3015092A (en) | 1993-06-17 |
| KR950008578B1 (ko) | 1995-08-03 |
| EP0547560A2 (en) | 1993-06-23 |
| JP3175247B2 (ja) | 2001-06-11 |
| US5470369A (en) | 1995-11-28 |
| CA2085198C (en) | 1996-10-01 |
| CA2085198A1 (en) | 1993-06-17 |
| EP0547560A3 (en) | 1993-09-22 |
| TW279153B (enExample) | 1996-06-21 |
| KR930012607A (ko) | 1993-07-20 |
| DE69222619D1 (de) | 1997-11-13 |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
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