CN103597913B - 等离子体发生装置、以及蒸镀装置和蒸镀方法 - Google Patents

等离子体发生装置、以及蒸镀装置和蒸镀方法 Download PDF

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Publication number
CN103597913B
CN103597913B CN201380001628.7A CN201380001628A CN103597913B CN 103597913 B CN103597913 B CN 103597913B CN 201380001628 A CN201380001628 A CN 201380001628A CN 103597913 B CN103597913 B CN 103597913B
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CN
China
Prior art keywords
plasma
magnetic flux
coil
electrode
chamber
Prior art date
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Expired - Fee Related
Application number
CN201380001628.7A
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English (en)
Chinese (zh)
Other versions
CN103597913A (zh
Inventor
古屋英二
赤野真也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chugai Ro Co Ltd
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Chugai Ro Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Publication of CN103597913A publication Critical patent/CN103597913A/zh
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Publication of CN103597913B publication Critical patent/CN103597913B/zh
Expired - Fee Related legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
CN201380001628.7A 2012-04-09 2013-02-27 等离子体发生装置、以及蒸镀装置和蒸镀方法 Expired - Fee Related CN103597913B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012088547A JP5968666B2 (ja) 2012-04-09 2012-04-09 プラズマ発生装置および蒸着装置
JP2012-088547 2012-04-09
PCT/JP2013/055230 WO2013153864A1 (ja) 2012-04-09 2013-02-27 プラズマ発生装置並びに蒸着装置および蒸着方法

Publications (2)

Publication Number Publication Date
CN103597913A CN103597913A (zh) 2014-02-19
CN103597913B true CN103597913B (zh) 2016-09-14

Family

ID=49327443

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380001628.7A Expired - Fee Related CN103597913B (zh) 2012-04-09 2013-02-27 等离子体发生装置、以及蒸镀装置和蒸镀方法

Country Status (7)

Country Link
US (1) US20140158047A1 (enExample)
EP (1) EP2838324A4 (enExample)
JP (1) JP5968666B2 (enExample)
KR (1) KR101953930B1 (enExample)
CN (1) CN103597913B (enExample)
TW (1) TWI604077B (enExample)
WO (1) WO2013153864A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2016282065A1 (en) * 2015-06-23 2018-02-08 Aurora Labs Limited Plasma driven particle propagation apparatus and pumping method
CN120529472A (zh) * 2019-12-26 2025-08-22 上海宏澎能源科技有限公司 等离子束发生装置
CN113365402B (zh) * 2020-03-06 2023-04-07 上海宏澎能源科技有限公司 限制等离子束的装置
CN114442437B (zh) * 2020-10-30 2024-05-17 上海宏澎能源科技有限公司 光源装置
CN114921764B (zh) * 2022-06-28 2023-09-22 松山湖材料实验室 一种用于高功率脉冲磁控溅射的装置及方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4739170A (en) * 1985-05-09 1988-04-19 The Commonwealth Of Australia Plasma generator
JPH04329637A (ja) * 1991-05-01 1992-11-18 Fuji Electric Co Ltd 絶縁膜の製造方法
CN1135538A (zh) * 1994-12-28 1996-11-13 住友重机械工业株式会社 等离子处理方法及其处理装置
CN1197848A (zh) * 1997-02-28 1998-11-04 住友重机械工业株式会社 真空薄膜生长设备
CN1263952A (zh) * 1999-02-01 2000-08-23 中外炉工业株式会社 真空涂层形成装置
JP2001295031A (ja) * 2000-04-14 2001-10-26 Sumitomo Heavy Ind Ltd 成膜装置及び方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0215166A (ja) * 1988-07-04 1990-01-18 Kawasaki Steel Corp イオンプレーティング装置
JPH0222464A (ja) * 1988-07-12 1990-01-25 Raimuzu:Kk イオンプレーティング装置
US5397956A (en) * 1992-01-13 1995-03-14 Tokyo Electron Limited Electron beam excited plasma system
JPH0765170B2 (ja) * 1992-01-30 1995-07-12 中外炉工業株式会社 薄膜形成装置におけるプラズマ走査装置
JP3409874B2 (ja) * 1993-03-12 2003-05-26 株式会社アルバック イオンプレーティング装置
JPH0776770A (ja) 1993-09-10 1995-03-20 A G Technol Kk 蒸着装置
JPH07254315A (ja) * 1994-03-14 1995-10-03 Nippon Sheet Glass Co Ltd 被膜の形成方法
US7300559B2 (en) * 2000-04-10 2007-11-27 G & H Technologies Llc Filtered cathodic arc deposition method and apparatus
JP4627365B2 (ja) * 2000-11-17 2011-02-09 中外炉工業株式会社 圧力勾配型プラズマ発生装置の始動方法
JP2003008197A (ja) * 2001-06-20 2003-01-10 Fujitsu Ten Ltd 基板加熱装置
JP2004010920A (ja) * 2002-06-04 2004-01-15 Nissin Electric Co Ltd 真空アーク蒸着装置
JP3744467B2 (ja) * 2002-06-04 2006-02-08 日新電機株式会社 真空アーク蒸着方法及びその装置
JP4003448B2 (ja) * 2001-11-30 2007-11-07 日新電機株式会社 真空アーク蒸着方法及びその装置
US7033462B2 (en) * 2001-11-30 2006-04-25 Nissin Electric Co., Ltd. Vacuum arc vapor deposition process and apparatus
KR100606451B1 (ko) * 2004-06-16 2006-08-01 송석균 상압 플라즈마 발생장치
JP3793816B2 (ja) * 2003-10-03 2006-07-05 国立大学法人東北大学 プラズマ制御方法、及びプラズマ制御装置
JP2008038197A (ja) 2006-08-04 2008-02-21 Shin Meiwa Ind Co Ltd プラズマ成膜装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4739170A (en) * 1985-05-09 1988-04-19 The Commonwealth Of Australia Plasma generator
JPH04329637A (ja) * 1991-05-01 1992-11-18 Fuji Electric Co Ltd 絶縁膜の製造方法
CN1135538A (zh) * 1994-12-28 1996-11-13 住友重机械工业株式会社 等离子处理方法及其处理装置
CN1197848A (zh) * 1997-02-28 1998-11-04 住友重机械工业株式会社 真空薄膜生长设备
CN1263952A (zh) * 1999-02-01 2000-08-23 中外炉工业株式会社 真空涂层形成装置
JP2001295031A (ja) * 2000-04-14 2001-10-26 Sumitomo Heavy Ind Ltd 成膜装置及び方法

Also Published As

Publication number Publication date
WO2013153864A1 (ja) 2013-10-17
KR101953930B1 (ko) 2019-03-04
EP2838324A4 (en) 2015-09-23
JP5968666B2 (ja) 2016-08-10
KR20140143072A (ko) 2014-12-15
US20140158047A1 (en) 2014-06-12
EP2838324A1 (en) 2015-02-18
CN103597913A (zh) 2014-02-19
TWI604077B (zh) 2017-11-01
TW201348480A (zh) 2013-12-01
JP2013218881A (ja) 2013-10-24

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Granted publication date: 20160914

Termination date: 20210227