CN103418558A - 基板清洗方法 - Google Patents

基板清洗方法 Download PDF

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Publication number
CN103418558A
CN103418558A CN2013101935844A CN201310193584A CN103418558A CN 103418558 A CN103418558 A CN 103418558A CN 2013101935844 A CN2013101935844 A CN 2013101935844A CN 201310193584 A CN201310193584 A CN 201310193584A CN 103418558 A CN103418558 A CN 103418558A
Authority
CN
China
Prior art keywords
cleaning
substrate
roller
area
cleaning liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2013101935844A
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English (en)
Chinese (zh)
Inventor
石桥知淳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of CN103418558A publication Critical patent/CN103418558A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/20—Cleaning during device manufacture
    • H10P70/23—Cleaning during device manufacture during, before or after processing of insulating materials
    • H10P70/237—Cleaning during device manufacture during, before or after processing of insulating materials the processing being a planarisation of insulating layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/27—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using selective deposition, e.g. simultaneous growth of monocrystalline and non-monocrystalline semiconductor materials
    • H10P14/276—Lateral overgrowth
    • H10P14/278—Pendeoepitaxy
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/20—Cleaning during device manufacture
    • H10P70/27—Cleaning during device manufacture during, before or after processing of conductive materials, e.g. polysilicon or amorphous silicon layers
    • H10P70/277—Cleaning during device manufacture during, before or after processing of conductive materials, e.g. polysilicon or amorphous silicon layers the processing being a planarisation of conductive layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B08B1/34—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members rotating about an axis parallel to the surface
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/60—Cleaning only by mechanical processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CN2013101935844A 2012-05-23 2013-05-22 基板清洗方法 Pending CN103418558A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2012117344 2012-05-23
JP2012-117344 2012-05-23
JP2013041494A JP5886224B2 (ja) 2012-05-23 2013-03-04 基板洗浄方法
JP2013-041494 2013-03-04

Publications (1)

Publication Number Publication Date
CN103418558A true CN103418558A (zh) 2013-12-04

Family

ID=49620627

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2013101935844A Pending CN103418558A (zh) 2012-05-23 2013-05-22 基板清洗方法

Country Status (5)

Country Link
US (1) US8932407B2 (https=)
JP (1) JP5886224B2 (https=)
KR (1) KR20130131232A (https=)
CN (1) CN103418558A (https=)
TW (1) TWI493614B (https=)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104907300A (zh) * 2015-06-01 2015-09-16 常州兆阳能源科技有限公司 太阳能电池板的高效清洗系统
CN107086190A (zh) * 2016-02-15 2017-08-22 株式会社荏原制作所 基板清洗装置和基板处理装置
CN107123609A (zh) * 2016-02-25 2017-09-01 株式会社迪思科 清洗装置
CN111524829A (zh) * 2019-02-04 2020-08-11 株式会社荏原制作所 清洗部件安装部、清洗部件组件以及基板清洗装置
CN111589752A (zh) * 2014-04-01 2020-08-28 株式会社荏原制作所 清洗装置
CN114798653A (zh) * 2014-11-24 2022-07-29 康宁股份有限公司 用于基材表面清洁的方法和设备
US11837477B2 (en) 2014-04-01 2023-12-05 Ebara Corporation Washing device and washing method
WO2025148643A1 (zh) * 2024-01-12 2025-07-17 盛美半导体设备(上海)股份有限公司 电镀装置及基板清洁方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD735427S1 (en) * 2013-02-01 2015-07-28 Ebara Corporation Roller shaft for substrate cleaning
USD728177S1 (en) * 2013-02-01 2015-04-28 Ebara Corporation Roller shaft for substrate cleaning
TWI664672B (zh) * 2013-07-03 2019-07-01 Ebara Corporation 基板洗淨裝置及基板洗淨方法
US9475272B2 (en) 2014-10-09 2016-10-25 Taiwan Semiconductor Manufacturing Company, Ltd. De-bonding and cleaning process and system
JP6718714B2 (ja) 2016-03-25 2020-07-08 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法および基板処理装置
KR102573572B1 (ko) * 2017-12-20 2023-09-01 삼성전자주식회사 웨이퍼 세정 장치
CN111085485B (zh) * 2019-12-26 2021-02-09 海盐宝仕龙塑业股份有限公司 一种板材的表面处理系统
CN112268211B (zh) * 2020-10-27 2022-05-10 沧州诚效通信器材有限公司 一种智能无线通信设备支撑固定方法
KR20230173091A (ko) 2021-04-21 2023-12-26 신에쯔 한도타이 가부시키가이샤 웨이퍼의 세정방법 및 세정처리장치

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5690544A (en) * 1995-03-31 1997-11-25 Nec Corporation Wafer polishing apparatus having physical cleaning means to remove particles from polishing pad
US20020007840A1 (en) * 2000-07-21 2002-01-24 Koji Atoh Substrate cleaning apparatus, substrate cleaning method and substrate processing apparatus
JP2003077876A (ja) * 2001-08-30 2003-03-14 Matsushita Electric Ind Co Ltd 洗浄装置及び洗浄方法
CN1814357A (zh) * 2004-12-27 2006-08-09 大日本网目版制造株式会社 基板处理装置以及基板处理方法
CN101266803A (zh) * 2007-03-13 2008-09-17 昭和电工株式会社 圆盘状基板的制造方法、清洗装置
US20080289652A1 (en) * 2004-09-28 2008-11-27 Satomi Hamada Substrate Cleaning Apparatus and Method for Determining Timing of Replacement of Cleaning Member
JP2010278103A (ja) * 2009-05-27 2010-12-09 Sumitomo Metal Mining Co Ltd スクラブ洗浄装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61152392A (ja) * 1984-12-25 1986-07-11 武藤工業株式会社 長尺状用紙の切断方法及び装置
JPH04363022A (ja) * 1991-06-06 1992-12-15 Enya Syst:Kk 貼付板洗浄装置
JP2887095B2 (ja) 1995-08-31 1999-04-26 芝浦メカトロニクス株式会社 洗浄装置
JP2003142444A (ja) * 2001-10-31 2003-05-16 Applied Materials Inc 洗浄装置
US6733596B1 (en) * 2002-12-23 2004-05-11 Lam Research Corporation Substrate cleaning brush preparation sequence, method, and system
US6951042B1 (en) * 2003-02-28 2005-10-04 Lam Research Corporation Brush scrubbing-high frequency resonating wafer processing system and methods for making and implementing the same
US7353560B2 (en) * 2003-12-18 2008-04-08 Lam Research Corporation Proximity brush unit apparatus and method
JP2008311481A (ja) * 2007-06-15 2008-12-25 Sony Corp 基板洗浄方法、基板洗浄装置及び半導体製造方法
JP2010212295A (ja) * 2009-03-06 2010-09-24 Elpida Memory Inc 基板洗浄装置および基板洗浄方法
JP2011165751A (ja) * 2010-02-05 2011-08-25 Toshiba Corp 洗浄装置及び半導体装置の製造方法
JP2011233646A (ja) * 2010-04-26 2011-11-17 Sumitomo Metal Mining Co Ltd 半導体用基板の洗浄方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5690544A (en) * 1995-03-31 1997-11-25 Nec Corporation Wafer polishing apparatus having physical cleaning means to remove particles from polishing pad
US20020007840A1 (en) * 2000-07-21 2002-01-24 Koji Atoh Substrate cleaning apparatus, substrate cleaning method and substrate processing apparatus
JP2003077876A (ja) * 2001-08-30 2003-03-14 Matsushita Electric Ind Co Ltd 洗浄装置及び洗浄方法
US20080289652A1 (en) * 2004-09-28 2008-11-27 Satomi Hamada Substrate Cleaning Apparatus and Method for Determining Timing of Replacement of Cleaning Member
JP2010074191A (ja) * 2004-09-28 2010-04-02 Ebara Corp 基板洗浄装置及び洗浄部材の交換時期判定方法
CN1814357A (zh) * 2004-12-27 2006-08-09 大日本网目版制造株式会社 基板处理装置以及基板处理方法
CN101266803A (zh) * 2007-03-13 2008-09-17 昭和电工株式会社 圆盘状基板的制造方法、清洗装置
JP2010278103A (ja) * 2009-05-27 2010-12-09 Sumitomo Metal Mining Co Ltd スクラブ洗浄装置

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111589752A (zh) * 2014-04-01 2020-08-28 株式会社荏原制作所 清洗装置
CN111589752B (zh) * 2014-04-01 2023-02-03 株式会社荏原制作所 清洗装置
US11837477B2 (en) 2014-04-01 2023-12-05 Ebara Corporation Washing device and washing method
CN114798653A (zh) * 2014-11-24 2022-07-29 康宁股份有限公司 用于基材表面清洁的方法和设备
CN104907300A (zh) * 2015-06-01 2015-09-16 常州兆阳能源科技有限公司 太阳能电池板的高效清洗系统
CN107086190A (zh) * 2016-02-15 2017-08-22 株式会社荏原制作所 基板清洗装置和基板处理装置
CN107086190B (zh) * 2016-02-15 2022-03-22 株式会社荏原制作所 基板清洗装置和基板处理装置
CN107123609A (zh) * 2016-02-25 2017-09-01 株式会社迪思科 清洗装置
CN107123609B (zh) * 2016-02-25 2022-02-11 株式会社迪思科 清洗装置
CN111524829A (zh) * 2019-02-04 2020-08-11 株式会社荏原制作所 清洗部件安装部、清洗部件组件以及基板清洗装置
WO2025148643A1 (zh) * 2024-01-12 2025-07-17 盛美半导体设备(上海)股份有限公司 电镀装置及基板清洁方法

Also Published As

Publication number Publication date
US20130312790A1 (en) 2013-11-28
KR20130131232A (ko) 2013-12-03
US8932407B2 (en) 2015-01-13
JP5886224B2 (ja) 2016-03-16
TW201349323A (zh) 2013-12-01
JP2014003273A (ja) 2014-01-09
TWI493614B (zh) 2015-07-21

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Application publication date: 20131204