CN1814357A - 基板处理装置以及基板处理方法 - Google Patents
基板处理装置以及基板处理方法 Download PDFInfo
- Publication number
- CN1814357A CN1814357A CNA200510128972XA CN200510128972A CN1814357A CN 1814357 A CN1814357 A CN 1814357A CN A200510128972X A CNA200510128972X A CN A200510128972XA CN 200510128972 A CN200510128972 A CN 200510128972A CN 1814357 A CN1814357 A CN 1814357A
- Authority
- CN
- China
- Prior art keywords
- cleaning brush
- substrate
- mentioned
- interarea
- pieces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004-378338 | 2004-12-27 | ||
JP2004378338 | 2004-12-27 | ||
JP2004378338A JP4387938B2 (ja) | 2004-12-27 | 2004-12-27 | 基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1814357A true CN1814357A (zh) | 2006-08-09 |
CN1814357B CN1814357B (zh) | 2010-06-16 |
Family
ID=36734976
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200510128972XA Expired - Fee Related CN1814357B (zh) | 2004-12-27 | 2005-12-02 | 基板处理装置以及基板处理方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4387938B2 (zh) |
KR (1) | KR100740385B1 (zh) |
CN (1) | CN1814357B (zh) |
TW (1) | TWI274385B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103418558A (zh) * | 2012-05-23 | 2013-12-04 | 株式会社荏原制作所 | 基板清洗方法 |
CN105605909A (zh) * | 2016-01-15 | 2016-05-25 | 武汉华星光电技术有限公司 | 基板清洗方法 |
CN113678576A (zh) * | 2020-02-13 | 2021-11-19 | 戴亚机械株式会社 | 基板处理装置 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI402111B (zh) * | 2010-07-06 | 2013-07-21 | Au Optronics Corp | 製程反應系統 |
CN103157628B (zh) * | 2011-12-16 | 2015-09-30 | 宸鸿科技(厦门)有限公司 | 无机元件的清洗装置及其清洗方法 |
CN103240244A (zh) * | 2012-02-02 | 2013-08-14 | 林进诚 | 表面清洁装置与表面清洁方法 |
KR101402359B1 (ko) | 2012-06-27 | 2014-06-12 | 주식회사 마산 | 브러시장치 |
CN108160545A (zh) * | 2017-12-26 | 2018-06-15 | 邱蔓 | 一种led灯带清洗设备 |
CN113786122B (zh) * | 2021-09-13 | 2022-06-14 | 广东电网有限责任公司 | 配电房清洁吸尘装置 |
CN114378013B (zh) * | 2021-12-28 | 2022-11-25 | 苏州坚特而光电科技有限公司 | 一种连续式导光板加工系统 |
CN116525507B (zh) * | 2023-07-05 | 2023-08-29 | 光微半导体(吉林)有限公司 | 倒装毛刷清洗装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3544789B2 (ja) * | 1996-07-17 | 2004-07-21 | 株式会社リコー | モータ制御装置及び画像読み取り装置の走行体駆動装置 |
FI20000532A0 (fi) * | 2000-03-08 | 2000-03-08 | Process Team Finland Oy | Menetelmä ja laite liikkuvan pinnan käsittelemiseksi |
JP5021112B2 (ja) * | 2000-08-11 | 2012-09-05 | キヤノンアネルバ株式会社 | 真空処理装置 |
-
2004
- 2004-12-27 JP JP2004378338A patent/JP4387938B2/ja not_active Expired - Fee Related
-
2005
- 2005-11-04 TW TW094138750A patent/TWI274385B/zh not_active IP Right Cessation
- 2005-12-02 CN CN200510128972XA patent/CN1814357B/zh not_active Expired - Fee Related
- 2005-12-14 KR KR1020050123115A patent/KR100740385B1/ko not_active IP Right Cessation
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103418558A (zh) * | 2012-05-23 | 2013-12-04 | 株式会社荏原制作所 | 基板清洗方法 |
CN105605909A (zh) * | 2016-01-15 | 2016-05-25 | 武汉华星光电技术有限公司 | 基板清洗方法 |
CN105605909B (zh) * | 2016-01-15 | 2018-01-30 | 武汉华星光电技术有限公司 | 基板清洗方法 |
CN113678576A (zh) * | 2020-02-13 | 2021-11-19 | 戴亚机械株式会社 | 基板处理装置 |
CN113678576B (zh) * | 2020-02-13 | 2024-03-29 | 戴亚机械株式会社 | 基板处理装置 |
US11986978B2 (en) | 2020-02-13 | 2024-05-21 | M-Dia & Co., Ltd. | Substrate processing apparatus |
Also Published As
Publication number | Publication date |
---|---|
KR20060074831A (ko) | 2006-07-03 |
JP2006181488A (ja) | 2006-07-13 |
JP4387938B2 (ja) | 2009-12-24 |
CN1814357B (zh) | 2010-06-16 |
KR100740385B1 (ko) | 2007-07-16 |
TW200623248A (en) | 2006-07-01 |
TWI274385B (en) | 2007-02-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: SCREEN GROUP CO., LTD. Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD. Owner name: DAINIPPON SCREEN MFG. CO., LTD. Free format text: FORMER NAME: DAINIPPON MESH PLATE MFR. CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Kyoto Japan Patentee after: Skilling Group Address before: Kyoto Japan Patentee before: DAINIPPON SCREEN MFG Co.,Ltd. Address after: Kyoto Japan Patentee after: DAINIPPON SCREEN MFG Co.,Ltd. Address before: Kyoto Japan Patentee before: Dainippon Screen Mfg. Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100616 Termination date: 20141202 |
|
EXPY | Termination of patent right or utility model |