CN102480278B - 压电振动片以及压电振子 - Google Patents

压电振动片以及压电振子 Download PDF

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Publication number
CN102480278B
CN102480278B CN201110363382.0A CN201110363382A CN102480278B CN 102480278 B CN102480278 B CN 102480278B CN 201110363382 A CN201110363382 A CN 201110363382A CN 102480278 B CN102480278 B CN 102480278B
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CN
China
Prior art keywords
axis
piezoelectric
excitation
piezoelectric vibrating
vibrating piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201110363382.0A
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English (en)
Chinese (zh)
Other versions
CN102480278A (zh
Inventor
伊井稔博
小峰贤二
内藤松太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Filing date
Publication date
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Priority to CN201410472181.8A priority Critical patent/CN104300930B/zh
Publication of CN102480278A publication Critical patent/CN102480278A/zh
Application granted granted Critical
Publication of CN102480278B publication Critical patent/CN102480278B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0504—Holders or supports for bulk acoustic wave devices
    • H03H9/0509—Holders or supports for bulk acoustic wave devices consisting of adhesive elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN201110363382.0A 2010-11-19 2011-11-16 压电振动片以及压电振子 Expired - Fee Related CN102480278B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410472181.8A CN104300930B (zh) 2010-11-19 2011-11-16 压电振动片以及压电振子

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010259177A JP5589167B2 (ja) 2010-11-19 2010-11-19 圧電振動片および圧電振動子
JP2010-259177 2010-11-19

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201410472181.8A Division CN104300930B (zh) 2010-11-19 2011-11-16 压电振动片以及压电振子

Publications (2)

Publication Number Publication Date
CN102480278A CN102480278A (zh) 2012-05-30
CN102480278B true CN102480278B (zh) 2014-10-22

Family

ID=45346229

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201110363382.0A Expired - Fee Related CN102480278B (zh) 2010-11-19 2011-11-16 压电振动片以及压电振子
CN201410472181.8A Active CN104300930B (zh) 2010-11-19 2011-11-16 压电振动片以及压电振子

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201410472181.8A Active CN104300930B (zh) 2010-11-19 2011-11-16 压电振动片以及压电振子

Country Status (6)

Country Link
US (2) US8766514B2 (OSRAM)
EP (1) EP2456069A1 (OSRAM)
JP (1) JP5589167B2 (OSRAM)
KR (1) KR101860948B1 (OSRAM)
CN (2) CN102480278B (OSRAM)
TW (1) TWI483545B (OSRAM)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202535316U (zh) 2011-03-09 2012-11-14 精工爱普生株式会社 振动元件、振子、振荡器以及电子设备
JP5708089B2 (ja) * 2011-03-18 2015-04-30 セイコーエプソン株式会社 圧電振動素子、圧電振動子、圧電発振器及び電子デバイス
JP5930526B2 (ja) * 2012-02-20 2016-06-08 日本電波工業株式会社 圧電振動素子及び圧電デバイス
JP5943186B2 (ja) 2012-03-19 2016-06-29 セイコーエプソン株式会社 振動片、振動子、電子デバイス、および電子機器
JP5943187B2 (ja) 2012-03-21 2016-06-29 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、および電子機器
JP2013213731A (ja) * 2012-04-02 2013-10-17 Nippon Dempa Kogyo Co Ltd 外力検出センサ及び外力検出装置
JP6175743B2 (ja) * 2012-06-06 2017-08-09 セイコーエプソン株式会社 振動素子の製造方法
JP6229456B2 (ja) * 2013-11-25 2017-11-15 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
JP6390836B2 (ja) 2014-07-31 2018-09-19 セイコーエプソン株式会社 振動片、振動子、振動デバイス、発振器、電子機器、および移動体
KR101616632B1 (ko) * 2014-09-23 2016-04-28 삼성전기주식회사 수정 진동자와 이를 포함하는 패키지
US9503045B2 (en) 2015-01-19 2016-11-22 Seiko Epson Corporation Resonator element, resonator, oscillator, electronic apparatus, and moving object
JP2016140024A (ja) 2015-01-29 2016-08-04 セイコーエプソン株式会社 振動片、振動子、振動デバイス、発振器、電子機器、および移動体
JP6592906B2 (ja) 2015-01-29 2019-10-23 セイコーエプソン株式会社 振動片、振動子、振動デバイス、発振器、電子機器、および移動体
JP2016152477A (ja) * 2015-02-17 2016-08-22 セイコーエプソン株式会社 振動子、振動デバイス、発振器、電子機器、および移動体
WO2016132766A1 (ja) * 2015-02-19 2016-08-25 株式会社村田製作所 水晶振動子及び水晶振動デバイス
JP6624803B2 (ja) * 2015-04-15 2019-12-25 日本電波工業株式会社 Ａｔカット水晶片及び水晶振動子
JP6218004B2 (ja) * 2015-06-12 2017-10-25 株式会社村田製作所 水晶片及び水晶振動子
WO2016199921A1 (ja) * 2015-06-12 2016-12-15 株式会社村田製作所 水晶片及び水晶振動子
CN107710611B (zh) * 2015-06-12 2020-09-22 株式会社村田制作所 晶体片以及晶体振子
WO2017006941A1 (ja) * 2015-07-09 2017-01-12 株式会社村田製作所 水晶振動片及び水晶振動子
JP6086950B2 (ja) * 2015-07-22 2017-03-01 京セラクリスタルデバイス株式会社 水晶振動素子及び水晶デバイス
JP6150092B1 (ja) 2015-09-01 2017-06-21 株式会社村田製作所 水晶片及び水晶振動子
KR102163053B1 (ko) * 2015-09-07 2020-10-08 삼성전기주식회사 압전 진동편 및 압전 진동자
JP6233621B2 (ja) * 2015-09-25 2017-11-22 株式会社村田製作所 水晶片及び水晶振動子
WO2017057137A1 (ja) * 2015-10-02 2017-04-06 株式会社村田製作所 水晶片及び水晶振動子
JP6268629B2 (ja) * 2015-10-08 2018-01-31 株式会社村田製作所 水晶振動素子、及びこの水晶振動素子を備える水晶振動子
JP2017079388A (ja) 2015-10-20 2017-04-27 セイコーエプソン株式会社 圧電振動子、電子機器及び移動体
JP6998795B2 (ja) * 2018-02-28 2022-01-18 京セラ株式会社 水晶振動素子及び水晶デバイス
JP7259940B2 (ja) * 2019-03-28 2023-04-18 株式会社村田製作所 圧電振動子とその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050258146A1 (en) * 2004-05-21 2005-11-24 Kazushige Umetsu Manufacturing method of quartz crystal resonator, apparatus therefor, and quartz crystal resonator manufactured thereby
CN1960178A (zh) * 2005-10-31 2007-05-09 爱普生拓优科梦株式会社 台面型压电振动片

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57151023U (OSRAM) * 1981-03-16 1982-09-22
JPS5847316A (ja) 1981-09-16 1983-03-19 Seikosha Co Ltd 厚みすべり圧電振動子およびその製法
JPH0257009A (ja) 1988-08-23 1990-02-26 Yokogawa Electric Corp 圧電共振器
JPH0475893A (ja) 1990-07-17 1992-03-10 Mitsubishi Electric Corp 産業用ロボット
JPH04341583A (ja) 1991-05-17 1992-11-27 Matsushita Electric Ind Co Ltd 合成樹脂薄膜のパターン形成方法
US5495600A (en) 1992-06-03 1996-02-27 Xerox Corporation Conversion of queries to monotonically increasing incremental form to continuously query a append only database
JPH10308645A (ja) 1997-05-08 1998-11-17 Toyo Commun Equip Co Ltd Ａｔカット水晶振動子及びその製造方法
JP3731348B2 (ja) 1998-06-09 2006-01-05 松下電器産業株式会社 圧電振動子
JP3702723B2 (ja) 1999-09-01 2005-10-05 セイコーエプソン株式会社 圧電振動片の製造方法
JP2001230654A (ja) * 2000-02-16 2001-08-24 Matsushita Electric Ind Co Ltd 圧電振動素子およびその製造方法
JP4665282B2 (ja) 2000-02-18 2011-04-06 エプソントヨコム株式会社 Ａｔカット水晶振動子
JP2003163567A (ja) * 2001-11-22 2003-06-06 Nippon Dempa Kogyo Co Ltd 水晶振動子
JP2004180274A (ja) * 2002-11-15 2004-06-24 Nippon Dempa Kogyo Co Ltd 水晶振動子
JP2005159717A (ja) 2003-11-26 2005-06-16 Toyo Commun Equip Co Ltd 圧電振動子とその製造方法
JP2005318477A (ja) * 2004-04-30 2005-11-10 Seiko Epson Corp 圧電振動片、その電極形成方法、及び圧電デバイス
JP4352464B2 (ja) * 2004-07-22 2009-10-28 株式会社大真空 水晶振動板および水晶振動子
JP4341583B2 (ja) 2005-06-02 2009-10-07 エプソントヨコム株式会社 メサ型水晶振動子
JP2007189492A (ja) 2006-01-13 2007-07-26 Epson Toyocom Corp 圧電基板の製造方法、圧電基板、圧電振動子、及び圧電発振器
JP2008236439A (ja) 2007-03-21 2008-10-02 Epson Toyocom Corp 水晶振動片
JP2008263387A (ja) 2007-04-11 2008-10-30 Epson Toyocom Corp メサ型圧電振動片
JP4936221B2 (ja) * 2007-06-08 2012-05-23 セイコーエプソン株式会社 メサ型圧電振動片、メサ型圧電振動デバイス、発振器、及び電子機器
JP5088686B2 (ja) 2007-11-21 2012-12-05 セイコーエプソン株式会社 振動片および振動デバイス
JP5151823B2 (ja) 2008-09-02 2013-02-27 セイコーエプソン株式会社 圧電振動片、圧電振動子及び発振器
JP5239748B2 (ja) 2008-10-29 2013-07-17 セイコーエプソン株式会社 水晶振動片
JP5059897B2 (ja) * 2010-02-24 2012-10-31 日本電波工業株式会社 圧電振動片の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050258146A1 (en) * 2004-05-21 2005-11-24 Kazushige Umetsu Manufacturing method of quartz crystal resonator, apparatus therefor, and quartz crystal resonator manufactured thereby
CN1960178A (zh) * 2005-10-31 2007-05-09 爱普生拓优科梦株式会社 台面型压电振动片

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Energy Trapping in Mesa-Shaped Quartz Crystal Microbalance;F. Shen等;《Sensors, 2002. Proceedings of IEEE》;20021231;第2卷;1154页第5段至1159页第1段，图1、2、4、7、9 *

Also Published As

Publication number Publication date
US20140217856A1 (en) 2014-08-07
JP5589167B2 (ja) 2014-09-17
US20120126668A1 (en) 2012-05-24
JP2012114495A (ja) 2012-06-14
US9231184B2 (en) 2016-01-05
CN104300930A (zh) 2015-01-21
KR101860948B1 (ko) 2018-05-24
TWI483545B (zh) 2015-05-01
KR20120054542A (ko) 2012-05-30
US8766514B2 (en) 2014-07-01
CN104300930B (zh) 2017-08-18
EP2456069A1 (en) 2012-05-23
TW201223142A (en) 2012-06-01
CN102480278A (zh) 2012-05-30

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