CN102317862B - 可低温固化的光敏树脂组合物和用该组合物制备的干膜 - Google Patents

可低温固化的光敏树脂组合物和用该组合物制备的干膜 Download PDF

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CN102317862B
CN102317862B CN2010800075281A CN201080007528A CN102317862B CN 102317862 B CN102317862 B CN 102317862B CN 2010800075281 A CN2010800075281 A CN 2010800075281A CN 201080007528 A CN201080007528 A CN 201080007528A CN 102317862 B CN102317862 B CN 102317862B
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chemical formula
resin composition
photosensitive resin
acrylate
methyl
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CN102317862A (zh
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李光珠
高珠恩
金炳男
宋宪植
庆有真
金熹正
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LG Chem Ltd
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LG Chem Ltd
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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/46—Polymerisation initiated by wave energy or particle radiation
    • C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1003—Preparatory processes
    • C08G73/1007—Preparatory processes from tetracarboxylic acids or derivatives and diamines
    • C08G73/1025—Preparatory processes from tetracarboxylic acids or derivatives and diamines polymerised by radiations
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/0008—Organic ingredients according to more than one of the "one dot" groups of C08K5/01 - C08K5/59
    • C08K5/0025—Crosslinking or vulcanising agents; including accelerators
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/16—Nitrogen-containing compounds
    • C08K5/34—Heterocyclic compounds having nitrogen in the ring
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D4/00—Coating compositions, e.g. paints, varnishes or lacquers, based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; Coating compositions, based on monomers of macromolecular compounds of groups C09D183/00 - C09D183/16
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/037—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/562—Protection against mechanical damage
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/285—Permanent coating compositions
    • H05K3/287—Photosensitive compositions
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0137—Materials
    • H05K2201/0154—Polyimide
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/12—Using specific substances
    • H05K2203/122—Organic non-polymeric compounds, e.g. oil, wax or thiol
    • H05K2203/124—Heterocyclic organic compounds, e.g. azole, furan

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Wood Science & Technology (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Materials For Photolithography (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
CN2010800075281A 2009-08-28 2010-08-27 可低温固化的光敏树脂组合物和用该组合物制备的干膜 Active CN102317862B (zh)

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KR20090080612 2009-08-28
KR10-2009-0080612 2009-08-28
PCT/KR2010/005795 WO2011025307A2 (ko) 2009-08-28 2010-08-27 저온 경화성 감광성 수지 조성물 및 이를 이용하여 제조된 드라이 필름

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US (1) US8288656B2 (enExample)
JP (1) JP5707394B2 (enExample)
KR (1) KR101021947B1 (enExample)
CN (1) CN102317862B (enExample)
TW (1) TWI418935B (enExample)
WO (1) WO2011025307A2 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103429639B (zh) * 2011-03-18 2015-08-19 株式会社Lg化学 聚酰胺酸、光敏树脂组合物、干燥膜及电路板
KR20130108027A (ko) 2012-03-23 2013-10-02 주식회사 엘지화학 유기전자소자용 기판의 제조방법
KR20130111154A (ko) * 2012-03-30 2013-10-10 주식회사 엘지화학 유기전자소자용 기판
WO2013165211A1 (ko) * 2012-05-03 2013-11-07 주식회사 엘지화학 신규한 폴리아믹산, 감광성 수지 조성물, 드라이 필름 및 회로 기판
JP5788096B2 (ja) * 2012-05-03 2015-09-30 エルジー・ケム・リミテッド 新規なポリアミック酸、感光性樹脂組成物、ドライフィルムおよび回路基板
CN103694701B (zh) * 2012-09-27 2017-07-21 新日铁住金化学株式会社 聚酰胺酸组合物、聚酰亚胺组合物、电路基板及其使用方法与层压体以及其制造方法
TWI471360B (zh) * 2012-12-26 2015-02-01 Ind Tech Res Inst 感光型聚亞醯胺及負型光阻組成物
TWI462669B (zh) * 2013-02-08 2014-11-21 Ichia Tech Inc 多層式的軟性印刷電路板及其製造方法
KR101641211B1 (ko) * 2013-09-30 2016-07-29 주식회사 엘지화학 연성 금속 적층체의 제조 방법
JP6361191B2 (ja) * 2014-03-14 2018-07-25 日立化成株式会社 感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法及びタッチパネルの製造方法
JP2016080803A (ja) * 2014-10-14 2016-05-16 太陽インキ製造株式会社 ドライフィルムおよびフレキシブルプリント配線板
CN105388703A (zh) * 2015-12-10 2016-03-09 苏州城邦达力材料科技有限公司 一种用于制备感光性覆盖膜的感光组合物及fpc用感光性覆盖膜的制备方法和应用方法
KR102329943B1 (ko) * 2016-03-16 2021-11-22 동우 화인켐 주식회사 네가티브 감광형 수지 조성물 및 이로부터 제조된 광경화 패턴
JP6947519B2 (ja) * 2016-04-14 2021-10-13 旭化成株式会社 感光性樹脂組成物、硬化レリーフパターンの製造方法及び半導体装置
JP6824389B2 (ja) * 2017-03-29 2021-02-03 富士フイルム株式会社 感光性樹脂組成物、硬化膜、積層体、硬化膜の製造方法および半導体デバイス
CN108196429B (zh) * 2017-12-06 2022-02-11 中国乐凯集团有限公司 一种水洗凸版感光树脂组合物及制品
TWI851752B (zh) * 2019-07-01 2024-08-11 日商富士軟片股份有限公司 硬化性樹脂組成物、硬化性樹脂組成物的製造方法、硬化膜、積層體、硬化膜的製造方法及半導體器件
JP7495477B2 (ja) * 2020-03-19 2024-06-04 富士フイルム株式会社 転写フィルム、感光性材料、パターン形成方法、回路基板の製造方法、タッチパネルの製造方法
JP2022126150A (ja) * 2021-02-18 2022-08-30 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング レジスト膜厚膜化組成物および厚膜化パターンの製造方法
KR20220132106A (ko) * 2021-03-22 2022-09-30 삼성디스플레이 주식회사 경화성 수지 조성물 및 컬러 필터층을 포함하는 표시 장치
CN113061338B (zh) * 2021-05-08 2022-11-15 深圳先进电子材料国际创新研究院 聚酰胺酸组合物、聚酰亚胺组合物、聚酰亚胺薄膜及聚酰亚胺覆铜板

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1556939A (zh) * 2001-09-26 2004-12-22 日产化学工业株式会社 正感光性聚酰亚胺树脂组合物
JP2006146244A (ja) * 2004-11-23 2006-06-08 E I Du Pont De Nemours & Co 低温硬化型感光性組成物
JP2009091573A (ja) * 2007-09-20 2009-04-30 Ube Ind Ltd ポリイミド膜の製造方法、及びポリアミック酸溶液組成物

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3170174B2 (ja) * 1995-04-18 2001-05-28 日本ゼオン株式会社 ポリイミド系樹脂組成物
JPH09302225A (ja) * 1996-03-14 1997-11-25 Toshiba Corp ポリイミド前駆体組成物、ポリイミド膜の形成方法、電子部品および液晶素子
JPH09319082A (ja) * 1996-05-27 1997-12-12 Hitachi Ltd ポジ型感光性樹脂組成物及びそれを用いた電子装置
US6001517A (en) 1996-10-31 1999-12-14 Kabushiki Kaisha Toshiba Positive photosensitive polymer composition, method of forming a pattern and electronic parts
JP3425343B2 (ja) * 1996-10-31 2003-07-14 株式会社東芝 ポジ型感光性ポリマー樹脂組成物、これを用いたパターン形成方法、および電子部品
JP3651529B2 (ja) * 1997-02-13 2005-05-25 富士通株式会社 感光性樹脂組成物
JPH1124266A (ja) * 1997-07-04 1999-01-29 Hitachi Chem Co Ltd 感光性樹脂組成物及びこれを用いたレリーフパターンの製造法
JPH11279404A (ja) * 1997-09-22 1999-10-12 Nippon Zeon Co Ltd ポリアミド酸、感光性樹脂組成物、及びパターン形成方法
JP3677191B2 (ja) 1999-03-15 2005-07-27 株式会社東芝 感光性ポリイミド用現像液、ポリイミド膜パターン形成方法、及び電子部品
JP4058873B2 (ja) * 2000-01-31 2008-03-12 宇部興産株式会社 イミド系感光性樹脂組成物、絶縁膜およびその形成法
US6511789B2 (en) * 2000-06-26 2003-01-28 Arch Specialty Chemicals, Inc. Photosensitive polyimide precursor compositions
US20040235992A1 (en) * 2001-05-30 2004-11-25 Koji Okada Photosensitive resin composition and photosensitive dry film resist and photosensitive coverlay film produced therefrom
KR100559153B1 (ko) * 2002-02-28 2006-03-10 히다치 가세고교 가부시끼가이샤 전극의 접속방법, 그것에 사용되는 표면처리 배선판 및접착필름 및 전극의 접속구조
JP4517640B2 (ja) * 2003-09-04 2010-08-04 日立化成デュポンマイクロシステムズ株式会社 耐熱性感光性ポリイミド前駆体組成物及びそれを用いたパターン製造方法並びに電子部品
US7579134B2 (en) * 2005-03-15 2009-08-25 E. I. Dupont De Nemours And Company Polyimide composite coverlays and methods and compositions relating thereto
EP1861749A4 (en) * 2005-03-25 2010-10-06 Fujifilm Electronic Materials NEW PHOTOSENSITIVE RESIN COMPOSITIONS
US7635551B2 (en) * 2005-07-27 2009-12-22 Sony Corporation Poly (imide-azomethine) copolymer, poly (amic acid-azomethine) copolymer, and positive photosensitive resin composition
JP2007233319A (ja) * 2006-01-31 2007-09-13 Kaneka Corp 感光性樹脂組成物およびその利用
KR100963376B1 (ko) * 2007-02-09 2010-06-14 주식회사 엘지화학 폴리이미드 제조방법 및 이에 의하여 제조된 폴리이미드
US8361605B2 (en) * 2007-04-24 2013-01-29 Mitsui Chemicals, Inc. Photosensitive resin composition, dry film, and processed product made using the same
TWI426345B (zh) * 2007-08-20 2014-02-11 Ｌｇ化學公司 鹼溶性感光樹脂組成物以及使用其所製得之乾膜
JP2009091413A (ja) * 2007-10-05 2009-04-30 Ist Corp ポリイミド前駆体組成物、感光性ポリイミド前駆体組成物及びこれを用いた電子部品並びに被膜形成方法
JP5577591B2 (ja) * 2007-12-27 2014-08-27 Ｊｎｃ株式会社 液晶配向剤、液晶配向膜及び液晶表示素子
JP2009157326A (ja) * 2007-12-28 2009-07-16 Ist Corp 感光性ポリイミド前駆体組成物及びこれを用いた電子部品

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1556939A (zh) * 2001-09-26 2004-12-22 日产化学工业株式会社 正感光性聚酰亚胺树脂组合物
JP2006146244A (ja) * 2004-11-23 2006-06-08 E I Du Pont De Nemours & Co 低温硬化型感光性組成物
JP2009091573A (ja) * 2007-09-20 2009-04-30 Ube Ind Ltd ポリイミド膜の製造方法、及びポリアミック酸溶液組成物

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KR20110023814A (ko) 2011-03-08
KR101021947B1 (ko) 2011-03-16
WO2011025307A2 (ko) 2011-03-03
JP2012527009A (ja) 2012-11-01
US8288656B2 (en) 2012-10-16
US20110067907A1 (en) 2011-03-24
WO2011025307A3 (ko) 2011-07-07
JP5707394B2 (ja) 2015-04-30

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