CN102037163B - 使用低等硅原料制成半导体晶锭的方法和系统 - Google Patents

使用低等硅原料制成半导体晶锭的方法和系统 Download PDF

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Publication number
CN102037163B
CN102037163B CN2008801096076A CN200880109607A CN102037163B CN 102037163 B CN102037163 B CN 102037163B CN 2008801096076 A CN2008801096076 A CN 2008801096076A CN 200880109607 A CN200880109607 A CN 200880109607A CN 102037163 B CN102037163 B CN 102037163B
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silicon
molten silicon
molten
low
grade
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Expired - Fee Related
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Chinese (zh)
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CN102037163A (zh
Inventor
F·基尔希特
M·豪雅
V·阿布罗斯莫娃
D·林克
J·P·拉克特里拉
K·安拉杰拉
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Silicor Materials Inc
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Silicor Materials Inc
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/121—The active layers comprising only Group IV materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state

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  • Silicon Compounds (AREA)
  • Photovoltaic Devices (AREA)
CN2008801096076A 2007-07-26 2008-07-25 使用低等硅原料制成半导体晶锭的方法和系统 Expired - Fee Related CN102037163B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/828,734 US7955433B2 (en) 2007-07-26 2007-07-26 Method and system for forming a silicon ingot using a low-grade silicon feedstock
US11/828,734 2007-07-26
PCT/US2008/071234 WO2009015356A1 (en) 2007-07-26 2008-07-25 Method and system for forming a silicon ingot using a low-grade silicon feedstock

Publications (2)

Publication Number Publication Date
CN102037163A CN102037163A (zh) 2011-04-27
CN102037163B true CN102037163B (zh) 2013-01-30

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CN2008801096076A Expired - Fee Related CN102037163B (zh) 2007-07-26 2008-07-25 使用低等硅原料制成半导体晶锭的方法和系统

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US (2) US7955433B2 (enExample)
EP (1) EP2179078B1 (enExample)
JP (1) JP5462988B2 (enExample)
CN (1) CN102037163B (enExample)
AT (1) ATE548487T1 (enExample)
ES (1) ES2383928T3 (enExample)
WO (1) WO2009015356A1 (enExample)

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US7955433B2 (en) 2007-07-26 2011-06-07 Calisolar, Inc. Method and system for forming a silicon ingot using a low-grade silicon feedstock
DE112009001990B4 (de) * 2008-08-15 2018-01-25 Ulvac, Inc. Verfahren zum Reinigen von Silizium
WO2010036807A1 (en) * 2008-09-24 2010-04-01 The Board Of Trustees Of The University Of Illinois Arrays of ultrathin silicon solar microcells
US20100213643A1 (en) * 2009-02-26 2010-08-26 Gadgil Prasad N Rapid synthesis of polycrystalline silicon sheets for photo-voltaic solar cell manufacturing
TWI379430B (en) * 2009-04-16 2012-12-11 Atomic Energy Council A method of fabricating a thin interface for internal light reflection and impurities isolation
CN101575733B (zh) * 2009-05-22 2011-07-27 北京航空航天大学 一种工业化生产太阳能级多晶硅的方法
CN101775650B (zh) * 2010-03-12 2013-01-30 厦门大学 一种太阳能多晶硅铸锭的制备方法
CN102021650B (zh) * 2010-12-31 2012-06-06 常州天合光能有限公司 一种大型多晶锭的生产方法
KR20140017604A (ko) 2011-03-15 2014-02-11 지티에이티 코포레이션 결정성장 장치용 자동 비전 시스템
JP5512647B2 (ja) * 2011-12-22 2014-06-04 シャープ株式会社 シリコンの精製方法、吸収ユニット、およびシリコン精製装置
CN103266351B (zh) * 2013-05-31 2015-08-12 大连理工大学 多晶硅铸锭硅固液分离方法及设备
US10402360B2 (en) * 2016-06-10 2019-09-03 Johnson Controls Technology Company Building management system with automatic equipment discovery and equipment model distribution
JP6919633B2 (ja) * 2018-08-29 2021-08-18 信越半導体株式会社 単結晶育成方法
JP7052645B2 (ja) * 2018-08-29 2022-04-12 信越半導体株式会社 単結晶育成方法
EP3847131B1 (de) * 2019-04-30 2023-03-01 Wacker Chemie AG Verfahren zur raffination von rohsilicium-schmelzen mittels eines partikulären mediators

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US3012865A (en) * 1957-11-25 1961-12-12 Du Pont Silicon purification process
US4871517A (en) * 1986-06-06 1989-10-03 Siemens Aktiengesellschaft Apparatus for parting wafer-shaped silicon bodies, useful for solar cells, from a silicon tape manufactured in a horizontal tape-drawing method
US5961944A (en) * 1996-10-14 1999-10-05 Kawasaki Steel Corporation Process and apparatus for manufacturing polycrystalline silicon, and process for manufacturing silicon wafer for solar cell
US6231826B1 (en) * 1996-03-19 2001-05-15 Kawasaki Steel Corporation Process and apparatus for refining silicon
US20060048698A1 (en) * 2002-09-27 2006-03-09 Ge Energy (Usa) Llc Methods and systems for purifying elements

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FR2430917A1 (fr) * 1978-07-11 1980-02-08 Comp Generale Electricite Procede et dispositif d'elaboration de silicium polycristallin
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DE3411955A1 (de) 1984-03-30 1985-10-10 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zum abtrennen fester bestandteile aus fluessigem silicium
EP0221051A1 (en) * 1985-04-16 1987-05-13 Energy Materials Corporation Method and apparatus for growing single crystal bodies
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US5580171A (en) * 1995-07-24 1996-12-03 Lim; John C. Solids mixing, storing and conveying system for use with a furnace for single crystal silicon production
CA2232777C (en) 1997-03-24 2001-05-15 Hiroyuki Baba Method for producing silicon for use in solar cells
JP3520957B2 (ja) * 1997-06-23 2004-04-19 シャープ株式会社 多結晶半導体インゴットの製造方法および装置
WO2001064976A1 (en) * 2000-03-03 2001-09-07 Shin-Etsu Handotai Co.,Ltd. Saucer for escaped melt in apparatus for pulling up single crystal
FR2808809B1 (fr) 2000-05-11 2003-06-27 Emix Installation de fabrication en continu de barreau de silicium multicristallin
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US20050139148A1 (en) 2002-02-04 2005-06-30 Hiroyasu Fujiwara Silicon purifying method, slag for purifying silicon and purified silicon
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JP4947455B2 (ja) 2005-08-16 2012-06-06 則近 山内 電子ビームを用いたシリコンの精錬方法及び装置
JP4817761B2 (ja) * 2005-08-30 2011-11-16 京セラ株式会社 半導体インゴット及び太陽電池素子の製造方法
US8262797B1 (en) * 2007-03-13 2012-09-11 Solaicx, Inc. Weir design providing optimal purge gas flow, melt control, and temperature stabilization for improved single crystal growth in a continuous Czochralski process
US7955433B2 (en) 2007-07-26 2011-06-07 Calisolar, Inc. Method and system for forming a silicon ingot using a low-grade silicon feedstock
US8475591B2 (en) * 2008-08-15 2013-07-02 Varian Semiconductor Equipment Associates, Inc. Method of controlling a thickness of a sheet formed from a melt
US7998224B2 (en) * 2008-10-21 2011-08-16 Varian Semiconductor Equipment Associates, Inc. Removal of a sheet from a production apparatus
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Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3012865A (en) * 1957-11-25 1961-12-12 Du Pont Silicon purification process
US4871517A (en) * 1986-06-06 1989-10-03 Siemens Aktiengesellschaft Apparatus for parting wafer-shaped silicon bodies, useful for solar cells, from a silicon tape manufactured in a horizontal tape-drawing method
US6231826B1 (en) * 1996-03-19 2001-05-15 Kawasaki Steel Corporation Process and apparatus for refining silicon
US5961944A (en) * 1996-10-14 1999-10-05 Kawasaki Steel Corporation Process and apparatus for manufacturing polycrystalline silicon, and process for manufacturing silicon wafer for solar cell
US20060048698A1 (en) * 2002-09-27 2006-03-09 Ge Energy (Usa) Llc Methods and systems for purifying elements

Also Published As

Publication number Publication date
EP2179078A4 (en) 2010-08-04
US8882912B2 (en) 2014-11-11
EP2179078A1 (en) 2010-04-28
CN102037163A (zh) 2011-04-27
US7955433B2 (en) 2011-06-07
US20090028773A1 (en) 2009-01-29
WO2009015356A1 (en) 2009-01-29
JP2010534614A (ja) 2010-11-11
EP2179078B1 (en) 2012-03-07
JP5462988B2 (ja) 2014-04-02
US20110211995A1 (en) 2011-09-01
ATE548487T1 (de) 2012-03-15
ES2383928T3 (es) 2012-06-27

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Applicant after: Calisolar Inc.

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