CN101989648B - 发光装置的制造方法 - Google Patents
发光装置的制造方法 Download PDFInfo
- Publication number
- CN101989648B CN101989648B CN201010243496.7A CN201010243496A CN101989648B CN 101989648 B CN101989648 B CN 101989648B CN 201010243496 A CN201010243496 A CN 201010243496A CN 101989648 B CN101989648 B CN 101989648B
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- Prior art keywords
- spaced walls
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- plasma
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- emitting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims abstract description 93
- 238000000034 method Methods 0.000 claims description 40
- 238000004519 manufacturing process Methods 0.000 claims description 32
- 230000001678 irradiating effect Effects 0.000 claims description 16
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 claims 2
- 238000005192 partition Methods 0.000 abstract description 230
- 239000010410 layer Substances 0.000 description 120
- 239000007788 liquid Substances 0.000 description 35
- 238000011282 treatment Methods 0.000 description 34
- 210000002381 plasma Anatomy 0.000 description 32
- 238000010586 diagram Methods 0.000 description 19
- 239000011229 interlayer Substances 0.000 description 17
- 239000000463 material Substances 0.000 description 11
- 239000000126 substance Substances 0.000 description 11
- 238000002347 injection Methods 0.000 description 10
- 239000007924 injection Substances 0.000 description 10
- 238000007639 printing Methods 0.000 description 10
- 238000004381 surface treatment Methods 0.000 description 10
- CXWXQJXEFPUFDZ-UHFFFAOYSA-N tetralin Chemical compound C1=CC=C2CCCCC2=C1 CXWXQJXEFPUFDZ-UHFFFAOYSA-N 0.000 description 9
- 238000001035 drying Methods 0.000 description 8
- 238000009832 plasma treatment Methods 0.000 description 7
- 239000000956 alloy Substances 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- UOHMMEJUHBCKEE-UHFFFAOYSA-N prehnitene Chemical compound CC1=CC=C(C)C(C)=C1C UOHMMEJUHBCKEE-UHFFFAOYSA-N 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
- 239000003125 aqueous solvent Substances 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- 239000011810 insulating material Substances 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 238000004108 freeze drying Methods 0.000 description 4
- 238000007641 inkjet printing Methods 0.000 description 4
- 229920000620 organic polymer Polymers 0.000 description 4
- 239000002861 polymer material Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000005871 repellent Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000012447 hatching Effects 0.000 description 3
- AUHZEENZYGFFBQ-UHFFFAOYSA-N mesitylene Substances CC1=CC(C)=CC(C)=C1 AUHZEENZYGFFBQ-UHFFFAOYSA-N 0.000 description 3
- 125000001827 mesitylenyl group Chemical group [H]C1=C(C(*)=C(C([H])=C1C([H])([H])[H])C([H])([H])[H])C([H])([H])[H] 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 230000001846 repelling effect Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000008096 xylene Substances 0.000 description 3
- 229910017150 AlTi Inorganic materials 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000007646 gravure printing Methods 0.000 description 2
- 238000007644 letterpress printing Methods 0.000 description 2
- 238000007645 offset printing Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- -1 polyparaphenylene vinylene Polymers 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 229920000265 Polyparaphenylene Polymers 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229920002098 polyfluorene Polymers 0.000 description 1
- 230000002940 repellent Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- NLVXSWCKKBEXTG-UHFFFAOYSA-N vinylsulfonic acid Chemical compound OS(=O)(=O)C=C NLVXSWCKKBEXTG-UHFFFAOYSA-N 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009180187A JP2011034814A (ja) | 2009-07-31 | 2009-07-31 | 発光装置、表示装置、及び、発光装置の製造方法 |
| JP180187/2009 | 2009-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101989648A CN101989648A (zh) | 2011-03-23 |
| CN101989648B true CN101989648B (zh) | 2014-10-01 |
Family
ID=43526320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010243496.7A Expired - Fee Related CN101989648B (zh) | 2009-07-31 | 2010-07-30 | 发光装置的制造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8282436B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2011034814A (cg-RX-API-DMAC7.html) |
| KR (1) | KR20110013289A (cg-RX-API-DMAC7.html) |
| CN (1) | CN101989648B (cg-RX-API-DMAC7.html) |
| TW (1) | TWI439168B (cg-RX-API-DMAC7.html) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103164791B (zh) * | 2011-12-13 | 2016-04-06 | 阿里巴巴集团控股有限公司 | 一种通过电子终端实现安全支付的方法和装置 |
| WO2013111300A1 (ja) * | 2012-01-26 | 2013-08-01 | パイオニア株式会社 | 有機elパネル及びその製造方法 |
| WO2013116779A1 (en) * | 2012-02-01 | 2013-08-08 | Futurewei Technologies, Inc. | System and method for organizing multimedia content |
| KR101924606B1 (ko) * | 2012-04-27 | 2018-12-04 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치와, 이의 제조 방법 |
| US20130346301A1 (en) * | 2012-06-22 | 2013-12-26 | Paychief Llc. | Systems and methods for billing via a symbology |
| JP2014222642A (ja) * | 2013-05-14 | 2014-11-27 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | 有機el表示装置の製造方法及び製造装置 |
| CN104599121B (zh) * | 2013-10-30 | 2017-04-12 | 腾讯科技(深圳)有限公司 | 一种信息传输方法、装置和系统 |
| WO2015133086A1 (ja) * | 2014-03-04 | 2015-09-11 | 株式会社Joled | 有機el表示パネル及び有機el表示装置 |
| CN108251846A (zh) * | 2018-01-12 | 2018-07-06 | 大连理工大学 | 一种无掩膜制备图案化润湿性表面的方法 |
| KR102689217B1 (ko) * | 2018-12-14 | 2024-07-26 | 엘지디스플레이 주식회사 | 전계발광 표시장치 |
| KR102268603B1 (ko) * | 2019-07-10 | 2021-06-22 | 세메스 주식회사 | 기판, 디스플레이 패널 및 기판 제조 방법 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101355097A (zh) * | 2007-07-23 | 2009-01-28 | 精工爱普生株式会社 | 电光装置、电子设备、电光装置的制造方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1793650B1 (en) | 1998-03-17 | 2014-03-05 | Seiko Epson Corporation | Method for manufacturing a flat panel display |
| JP2002075640A (ja) | 2000-08-30 | 2002-03-15 | Dainippon Screen Mfg Co Ltd | 有機el表示装置の製造方法およびその製造装置 |
| US6852524B2 (en) * | 2001-04-27 | 2005-02-08 | Canon Kabushiki Kaisha | Probe carrier, probe fixing carrier and method of manufacturing the same |
| JP5304417B2 (ja) * | 2001-12-18 | 2013-10-02 | セイコーエプソン株式会社 | 表示装置 |
| US7910271B2 (en) * | 2004-10-13 | 2011-03-22 | Sharp Kabushiki Kaisha | Functional substrate |
| EP1666258B1 (en) * | 2004-12-01 | 2011-10-05 | FUJIFILM Corporation | Repellency increasing structure and method of producing the same, liquid ejection head and method of producing the same, and stain-resistant film |
| JP2006286309A (ja) * | 2005-03-31 | 2006-10-19 | Toppan Printing Co Ltd | 有機el表示装置とその製造方法 |
| JP4872288B2 (ja) * | 2005-09-22 | 2012-02-08 | 凸版印刷株式会社 | 有機el素子及びその製造方法 |
| JP4175397B2 (ja) * | 2006-06-28 | 2008-11-05 | セイコーエプソン株式会社 | 有機エレクトロルミネセンス装置の製造方法 |
| JP4878228B2 (ja) * | 2006-06-28 | 2012-02-15 | 大日本スクリーン製造株式会社 | テープ剥離装置、塗布システムおよびテープ剥離方法 |
| JP2009026671A (ja) * | 2007-07-23 | 2009-02-05 | Seiko Epson Corp | 電気光学装置、電子機器、電気光学装置の製造方法 |
| JP2009070899A (ja) * | 2007-09-11 | 2009-04-02 | Sharp Corp | プラズマ処理装置およびプラズマ処理方法 |
| JP4497185B2 (ja) * | 2007-09-18 | 2010-07-07 | カシオ計算機株式会社 | 表示装置の製造方法 |
| JP5131446B2 (ja) * | 2007-09-19 | 2013-01-30 | カシオ計算機株式会社 | 表示パネル及びその製造方法 |
| JP2010080086A (ja) * | 2008-09-24 | 2010-04-08 | Sumitomo Chemical Co Ltd | パターン塗布用基板および有機el素子 |
| JP2010176938A (ja) * | 2009-01-28 | 2010-08-12 | Seiko Epson Corp | 電気光学装置、電気光学装置の製造方法、及び電子機器 |
-
2009
- 2009-07-31 JP JP2009180187A patent/JP2011034814A/ja active Pending
-
2010
- 2010-07-29 KR KR1020100073124A patent/KR20110013289A/ko not_active Ceased
- 2010-07-30 CN CN201010243496.7A patent/CN101989648B/zh not_active Expired - Fee Related
- 2010-07-30 US US12/846,881 patent/US8282436B2/en not_active Expired - Fee Related
- 2010-07-30 TW TW099125232A patent/TWI439168B/zh not_active IP Right Cessation
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101355097A (zh) * | 2007-07-23 | 2009-01-28 | 精工爱普生株式会社 | 电光装置、电子设备、电光装置的制造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20110013289A (ko) | 2011-02-09 |
| US20110025189A1 (en) | 2011-02-03 |
| TW201117639A (en) | 2011-05-16 |
| US8282436B2 (en) | 2012-10-09 |
| CN101989648A (zh) | 2011-03-23 |
| JP2011034814A (ja) | 2011-02-17 |
| TWI439168B (zh) | 2014-05-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170124 Address after: Irish Ross Kang Wangjun Patentee after: Soras OLED Address before: Tokyo, Japan Patentee before: CASIO COMPUTER Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141001 Termination date: 20210730 |