CN101971320A - 用来输送扁平的输送物品的、具有至少一个传送带的传送带系统及方法 - Google Patents
用来输送扁平的输送物品的、具有至少一个传送带的传送带系统及方法 Download PDFInfo
- Publication number
- CN101971320A CN101971320A CN2009801091166A CN200980109116A CN101971320A CN 101971320 A CN101971320 A CN 101971320A CN 2009801091166 A CN2009801091166 A CN 2009801091166A CN 200980109116 A CN200980109116 A CN 200980109116A CN 101971320 A CN101971320 A CN 101971320A
- Authority
- CN
- China
- Prior art keywords
- conveyer belt
- belt
- substrate
- longitudinal edge
- negative pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 67
- 230000000694 effects Effects 0.000 claims abstract description 33
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 9
- 239000010703 silicon Substances 0.000 claims abstract description 9
- 230000005540 biological transmission Effects 0.000 claims description 30
- 239000012530 fluid Substances 0.000 claims description 14
- 230000033001 locomotion Effects 0.000 claims description 8
- 238000010521 absorption reaction Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 abstract 1
- 230000001133 acceleration Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
- B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
- B65G21/2027—Suction retaining means
- B65G21/2036—Suction retaining means for retaining the load on the load-carrying surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Fluid Mechanics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Structure Of Belt Conveyors (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE202008003610U DE202008003610U1 (de) | 2008-03-16 | 2008-03-16 | Transportbandsystem mit mindestens einem Transportband zum Transportieren von flachem Transportgut, insbesondere von Substraten wie Siliziumwafer und Solarzellen |
DE202008003610.0 | 2008-03-16 | ||
PCT/DE2009/000105 WO2009115068A1 (de) | 2008-03-16 | 2009-01-26 | Verfahren und transportbandsystem mit mindestens einem transportband zum transportieren von flachem transportgut |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101971320A true CN101971320A (zh) | 2011-02-09 |
CN101971320B CN101971320B (zh) | 2012-12-19 |
Family
ID=39432409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009801091166A Expired - Fee Related CN101971320B (zh) | 2008-03-16 | 2009-01-26 | 用来输送扁平的输送物品的、具有至少一个传送带的传送带系统及方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20110005899A1 (zh) |
EP (1) | EP2257976A1 (zh) |
KR (1) | KR20100122938A (zh) |
CN (1) | CN101971320B (zh) |
CA (1) | CA2718290A1 (zh) |
DE (2) | DE202008003610U1 (zh) |
RU (1) | RU2010142275A (zh) |
WO (1) | WO2009115068A1 (zh) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103587953A (zh) * | 2013-10-18 | 2014-02-19 | 易兵 | 一种玻璃运输的导向装置 |
CN105752686A (zh) * | 2012-04-03 | 2016-07-13 | 株式会社尼康 | 基板处理装置 |
CN107546142A (zh) * | 2016-06-28 | 2018-01-05 | 南京卓胜自动化设备有限公司 | 一种连续型硅片或电池片检测分类装置 |
CN108638202A (zh) * | 2018-05-10 | 2018-10-12 | 重庆佑威电子有限公司 | 绝缘片成型设备 |
CN109671659A (zh) * | 2018-12-24 | 2019-04-23 | 苏州沃特维自动化系统有限公司 | 电池片连续悬浮上料系统 |
CN109690754A (zh) * | 2016-07-29 | 2019-04-26 | 亚席斯自动化系统有限公司 | 用于抓取和运输基底的装置 |
CN110509179A (zh) * | 2018-05-21 | 2019-11-29 | 株式会社荏原制作所 | 基板保持装置、基板研磨装置、弹性构件以及基板保持装置的制造方法 |
CN111319971A (zh) * | 2020-03-09 | 2020-06-23 | 无锡先导智能装备股份有限公司 | 极片输送装置 |
CN113666110A (zh) * | 2021-08-04 | 2021-11-19 | 上海君诺包装技术有限公司 | 一种药板传送装置 |
CN113874305A (zh) * | 2019-03-21 | 2021-12-31 | 鲍勃斯脱梅克斯股份有限公司 | 用于打印单独片材的喷墨打印机器 |
CN116534565A (zh) * | 2023-07-07 | 2023-08-04 | 光子(深圳)精密科技有限公司 | 一种高速分料设备 |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008041250A1 (de) * | 2008-08-13 | 2010-02-25 | Ers Electronic Gmbh | Verfahren und Vorrichtung zum thermischen Bearbeiten von Kunststoffscheiben, insbesondere Moldwafern |
IT1395196B1 (it) * | 2009-07-29 | 2012-09-05 | Skg S R L | Centro di lavoro verticale per lastre piane di vetro |
US10088431B2 (en) | 2011-05-17 | 2018-10-02 | Gii Acquisition, Llc | Method and system for optically inspecting headed manufactured parts |
US9228957B2 (en) | 2013-05-24 | 2016-01-05 | Gii Acquisition, Llc | High speed method and system for inspecting a stream of parts |
US10094785B2 (en) | 2011-05-17 | 2018-10-09 | Gii Acquisition, Llc | Method and system for optically inspecting headed manufactured parts |
WO2016018509A1 (en) * | 2014-08-01 | 2016-02-04 | Gii Acquisition, Llc Dba General Inspection, Llc | High speed method and system for inspecting a stream of parts |
US8998553B2 (en) * | 2011-12-07 | 2015-04-07 | Intevac, Inc. | High throughput load lock for solar wafers |
US9486840B2 (en) | 2013-05-24 | 2016-11-08 | Gii Acquisition, Llc | High-speed, triangulation-based, 3-D method and system for inspecting manufactured parts and sorting the inspected parts |
US9539619B2 (en) | 2013-05-24 | 2017-01-10 | Gii Acquisition, Llc | High speed method and system for inspecting a stream of parts at a pair of inspection stations |
US10207297B2 (en) | 2013-05-24 | 2019-02-19 | GII Inspection, LLC | Method and system for inspecting a manufactured part at an inspection station |
PT107381B (pt) * | 2013-12-23 | 2018-07-04 | Inst Superior Tecnico | Processo de oligomerização catalítica utilizando um reactor catalítico para a oligomerização de olefinas em c4-c7 |
US10300510B2 (en) * | 2014-08-01 | 2019-05-28 | General Inspection Llc | High speed method and system for inspecting a stream of parts |
DE202015002724U1 (de) | 2015-04-14 | 2015-05-06 | Mühlbauer Gmbh & Co. Kg | Vorrichtung zum Bereitstellen und Bevorraten von folienartigen Bauelementen |
DE102016214095A1 (de) * | 2016-07-29 | 2018-02-01 | Asys Automatisierungssysteme Gmbh | Vorrichtung zum Greifen und Transportieren von Substraten |
DE102018106544B3 (de) * | 2018-03-20 | 2019-06-27 | Mühlbauer Gmbh & Co. Kg | Verfahren und Vorrichtung zum Transport einer Anordnung flexibler Schaltungssubstrate während der Herstellung eines Verbunds daraus |
CN108749013B (zh) * | 2018-05-10 | 2020-02-07 | 重庆佑威电子有限公司 | 一种自定位的多层贴合机 |
CN108820704B (zh) * | 2018-05-10 | 2020-01-17 | 深圳市志凌伟业技术股份有限公司 | 一种设置于传送带上防止产品划伤的承载板 |
DE102019003333A1 (de) | 2019-05-10 | 2020-11-12 | Mühlbauer Gmbh & Co. Kg | Fertigungssystem für Dünnschicht-Solarzellenanordnungen |
CN111977375B (zh) * | 2019-05-21 | 2022-01-18 | 晶彩科技股份有限公司 | 薄板输送装置及其方法 |
CN114733795A (zh) * | 2022-05-09 | 2022-07-12 | 苏州天准科技股份有限公司 | 碎料检测剔除装置、检测剔除方法和分选系统 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2128953B (en) * | 1982-10-28 | 1986-04-09 | Bishopbarn Ltd | Conveyor with suction means for holding articles in contact therewith |
US4589398A (en) * | 1984-02-27 | 1986-05-20 | Pate Ronald C | Combustion initiation system employing hard discharge ignition |
IT1224629B (it) * | 1988-05-24 | 1990-10-04 | Simimpianti Srl | Rispettivamente lo scaricamento di dispositivo per il caricamento una pressa per il trattamento dipannelli. |
US5127511A (en) * | 1991-01-31 | 1992-07-07 | Philip Morris Incorporated | Methods and apparatus for feeding and assembling cylindrical articles from bulk at high speed |
US6102191A (en) * | 1996-04-15 | 2000-08-15 | Tridelta Magnetsysteme Gmbh | Device for transporting flat, especially plate-like objects |
CA2251771C (en) * | 1996-04-15 | 2005-04-05 | Klaus Janzen | Device for conveying flat, in particular platelike objects |
US5878868A (en) * | 1996-05-06 | 1999-03-09 | Ikegami Tsushinki Co., Ltd. | Object inspection apparatus |
DE19727361C5 (de) * | 1997-06-27 | 2004-02-05 | Wemhöner Fördertechnik GmbH & Co KG | Fördervorrichtung |
US6008476A (en) * | 1997-08-04 | 1999-12-28 | Motorola, Inc. | Apparatus for indexing and affixing components to a substrate |
CN1160230C (zh) * | 1999-03-22 | 2004-08-04 | 阿斯科尔公司 | 真空移动梁装置 |
US6227541B1 (en) * | 1999-07-01 | 2001-05-08 | Kimberly-Clark Worldwide, Inc. | Multiple conveyor assembly and method for rotating and placing a strip of material on a substrate |
DE19942498B4 (de) * | 1999-09-06 | 2008-02-07 | Nsm Magnettechnik Gmbh & Co. Kg | Bandfördereinrichtung für den insbesondere hängenden Transport von Transportgütern mittels Unterdruck |
DE10062011B4 (de) * | 2000-12-13 | 2005-02-24 | Infineon Technologies Ag | Halteeinrichtung |
DE10104510B4 (de) * | 2001-01-31 | 2005-06-23 | Neuhäuser GmbH | Vorrichtung zum Transport von Werkstücken |
EP1266852B1 (de) * | 2001-06-15 | 2004-09-15 | LTG Mailänder GmbH | Vorrichtung zum Transportieren und Stapeln von insbesondere tafelförmigen Gütern und entsprechendes Verfahren |
US7296792B2 (en) * | 2004-01-19 | 2007-11-20 | Marquip, Llc | Self-valving vacuum distribution for a belt-driven sheet conveyor |
NL1025595C2 (nl) * | 2004-02-12 | 2005-08-15 | Beiler Beheer Bv | Werkwijze en inrichting voor het transporteren van een vel. |
US7866662B2 (en) * | 2004-11-12 | 2011-01-11 | Osi Machinerie Inc. | Synchronized vacuum belt feeder |
JP4413789B2 (ja) * | 2005-01-24 | 2010-02-10 | 東京エレクトロン株式会社 | ステージ装置および塗布処理装置 |
FI120446B (fi) * | 2007-08-29 | 2009-10-30 | Raute Oyj | Imuhihnakuljetin |
-
2008
- 2008-03-16 DE DE202008003610U patent/DE202008003610U1/de not_active Expired - Lifetime
-
2009
- 2009-01-26 DE DE112009001183T patent/DE112009001183A5/de not_active Withdrawn
- 2009-01-26 CA CA2718290A patent/CA2718290A1/en not_active Abandoned
- 2009-01-26 KR KR1020107021437A patent/KR20100122938A/ko not_active Application Discontinuation
- 2009-01-26 CN CN2009801091166A patent/CN101971320B/zh not_active Expired - Fee Related
- 2009-01-26 RU RU2010142275/28A patent/RU2010142275A/ru unknown
- 2009-01-26 EP EP09722581A patent/EP2257976A1/de not_active Withdrawn
- 2009-01-26 US US12/922,623 patent/US20110005899A1/en not_active Abandoned
- 2009-01-26 WO PCT/DE2009/000105 patent/WO2009115068A1/de active Application Filing
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105752686A (zh) * | 2012-04-03 | 2016-07-13 | 株式会社尼康 | 基板处理装置 |
CN103587953A (zh) * | 2013-10-18 | 2014-02-19 | 易兵 | 一种玻璃运输的导向装置 |
CN107546142A (zh) * | 2016-06-28 | 2018-01-05 | 南京卓胜自动化设备有限公司 | 一种连续型硅片或电池片检测分类装置 |
CN107546142B (zh) * | 2016-06-28 | 2024-03-29 | 南京卓胜自动化设备有限公司 | 一种连续型硅片或电池片检测分类装置 |
CN109690754A (zh) * | 2016-07-29 | 2019-04-26 | 亚席斯自动化系统有限公司 | 用于抓取和运输基底的装置 |
CN108638202A (zh) * | 2018-05-10 | 2018-10-12 | 重庆佑威电子有限公司 | 绝缘片成型设备 |
CN108638202B (zh) * | 2018-05-10 | 2020-02-07 | 重庆佑威电子有限公司 | 绝缘片成型设备 |
CN110509179A (zh) * | 2018-05-21 | 2019-11-29 | 株式会社荏原制作所 | 基板保持装置、基板研磨装置、弹性构件以及基板保持装置的制造方法 |
CN110509179B (zh) * | 2018-05-21 | 2023-03-10 | 株式会社荏原制作所 | 基板保持装置、基板研磨装置、弹性构件以及基板保持装置的制造方法 |
CN109671659A (zh) * | 2018-12-24 | 2019-04-23 | 苏州沃特维自动化系统有限公司 | 电池片连续悬浮上料系统 |
US11801695B2 (en) | 2019-03-21 | 2023-10-31 | Bobst Mex Sa | Inkjet printing machine for printing individual sheets |
CN113874305A (zh) * | 2019-03-21 | 2021-12-31 | 鲍勃斯脱梅克斯股份有限公司 | 用于打印单独片材的喷墨打印机器 |
US11890868B2 (en) | 2019-03-21 | 2024-02-06 | Bobst Mex Sa | Machine for processing individual sheets |
CN113874305B (zh) * | 2019-03-21 | 2023-08-15 | 鲍勃斯脱梅克斯股份有限公司 | 用于打印单独片材的喷墨打印机器 |
CN111319971A (zh) * | 2020-03-09 | 2020-06-23 | 无锡先导智能装备股份有限公司 | 极片输送装置 |
CN113666110A (zh) * | 2021-08-04 | 2021-11-19 | 上海君诺包装技术有限公司 | 一种药板传送装置 |
CN116534565A (zh) * | 2023-07-07 | 2023-08-04 | 光子(深圳)精密科技有限公司 | 一种高速分料设备 |
Also Published As
Publication number | Publication date |
---|---|
DE202008003610U1 (de) | 2008-05-21 |
CN101971320B (zh) | 2012-12-19 |
CA2718290A1 (en) | 2009-09-24 |
WO2009115068A1 (de) | 2009-09-24 |
DE112009001183A5 (de) | 2011-02-17 |
KR20100122938A (ko) | 2010-11-23 |
RU2010142275A (ru) | 2012-04-27 |
US20110005899A1 (en) | 2011-01-13 |
EP2257976A1 (de) | 2010-12-08 |
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