CN101907642B - 检查用夹具及检查用触头 - Google Patents

检查用夹具及检查用触头 Download PDF

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Publication number
CN101907642B
CN101907642B CN2010101933510A CN201010193351A CN101907642B CN 101907642 B CN101907642 B CN 101907642B CN 2010101933510 A CN2010101933510 A CN 2010101933510A CN 201010193351 A CN201010193351 A CN 201010193351A CN 101907642 B CN101907642 B CN 101907642B
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CN
China
Prior art keywords
cylindrical shell
inspection
contact
anchor clamps
pars
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CN2010101933510A
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English (en)
Chinese (zh)
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CN101907642A (zh
Inventor
春日部进
沼田清
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Nidec Corp
Nidec Read Corp
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Nidec Corp
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Publication of CN101907642A publication Critical patent/CN101907642A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CN2010101933510A 2009-06-02 2010-06-01 检查用夹具及检查用触头 Active CN101907642B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-133206 2009-06-02
JP2009133206A JP5504698B2 (ja) 2009-06-02 2009-06-02 検査用治具及び検査用接触子

Publications (2)

Publication Number Publication Date
CN101907642A CN101907642A (zh) 2010-12-08
CN101907642B true CN101907642B (zh) 2013-03-06

Family

ID=43263158

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010101933510A Active CN101907642B (zh) 2009-06-02 2010-06-01 检查用夹具及检查用触头

Country Status (4)

Country Link
JP (1) JP5504698B2 (ja)
KR (1) KR101127030B1 (ja)
CN (1) CN101907642B (ja)
TW (1) TWI434049B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI638163B (zh) * 2014-01-30 2018-10-11 風琴針股份有限公司 High current probe

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5776687B2 (ja) * 2010-04-19 2015-09-09 日本電産リード株式会社 検査用接触子及び検査用治具
JP5440486B2 (ja) 2010-12-17 2014-03-12 パナソニック株式会社 部品実装装置および部品実装装置における機種切替え方法
KR101795836B1 (ko) * 2011-02-10 2017-11-08 니혼덴산리드가부시키가이샤 검사 지그
JP5845678B2 (ja) * 2011-07-21 2016-01-20 日本電産リード株式会社 検査用接触子及び検査用治具
JP5821432B2 (ja) 2011-09-05 2015-11-24 日本電産リード株式会社 接続端子及び接続治具
JP6040532B2 (ja) * 2012-01-26 2016-12-07 日本電産リード株式会社 プローブ及び接続治具
JP2013190270A (ja) * 2012-03-13 2013-09-26 Nidec-Read Corp プローブ及び接続治具
CN102621354A (zh) * 2012-04-11 2012-08-01 游森溢 一种可拆式测试治具
TWI505659B (zh) * 2013-10-18 2015-10-21 Coiler Corp 行動通訊系統之轉發器及其信號監控方法
JP6411169B2 (ja) * 2014-10-22 2018-10-24 株式会社日本マイクロニクス 電気的接触子及び電気的接続装置
JP6496142B2 (ja) * 2014-12-26 2019-04-03 株式会社ヨコオ 交換用コンタクトユニット及び検査治具
JP2017142080A (ja) * 2016-02-08 2017-08-17 日本電産リード株式会社 接触端子、検査治具、及び検査装置
US10877085B2 (en) 2016-06-09 2020-12-29 Nidec Read Corporation Inspection jig and inspection device
JP6432017B2 (ja) * 2016-11-30 2018-12-05 日本電産リード株式会社 接触端子、検査治具、及び検査装置
JP6892277B2 (ja) * 2017-02-10 2021-06-23 株式会社日本マイクロニクス プローブ及び電気的接続装置
JP7023276B2 (ja) * 2017-03-29 2022-02-21 日本発條株式会社 プローブ、プローブユニット、およびプローブユニットを備える半導体検査装置
JP2018197714A (ja) * 2017-05-24 2018-12-13 山一電機株式会社 Ｍｅｍｓ型プローブ、及び、これを使用した電気検査用装置
JP2019074483A (ja) * 2017-10-19 2019-05-16 株式会社日本マイクロニクス 電気的接続装置
TWI748171B (zh) * 2018-04-27 2021-12-01 日商日本電產理德股份有限公司 筒狀體及其製造方法
CN114487518A (zh) * 2021-12-13 2022-05-13 渭南高新区木王科技有限公司 一种可以独立调节弹簧阻力的双头双动探针

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1816748A (zh) * 2003-07-02 2006-08-09 株式会社日立制作所 探针板及使用探针片或探针板的半导体检测装置及半导体装置的制造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3166028B2 (ja) * 1995-09-28 2001-05-14 三菱マテリアル株式会社 抵抗値測定装置
JP3165066B2 (ja) * 1997-04-15 2001-05-14 アルファテスト・コーポレーション 管状ばねを持つ弾性コネクタ
JP2001023744A (ja) * 1999-07-06 2001-01-26 Nippon Konekuto Kogyo Kk 多極コネクタ
JP2003194849A (ja) * 2001-12-27 2003-07-09 Takashima Sangyo Kk コンタクトプローブ
JP2005049163A (ja) * 2003-07-31 2005-02-24 Yokowo Co Ltd 高周波・高速用デバイスの検査治具および検査用プローブ
JP2005249447A (ja) * 2004-03-02 2005-09-15 Matsushita Electric Ind Co Ltd プローブピン
JP4031007B2 (ja) 2005-07-15 2008-01-09 日本電子材料株式会社 垂直コイルスプリングプローブ及びこれを用いたプローブユニット
JP3849948B1 (ja) * 2005-11-16 2006-11-22 日本電産リード株式会社 基板検査用治具及び検査用プローブ
JP2007271469A (ja) 2006-03-31 2007-10-18 Toppan Printing Co Ltd 検査冶具及びそれへのプローブの固定方法
WO2007116963A1 (ja) * 2006-04-07 2007-10-18 Nidec-Read Corporation 基板検査用接触子及びその製造方法
JP4041831B2 (ja) * 2006-05-15 2008-02-06 日本電産リード株式会社 基板検査用治具及びこの治具における接続電極部の電極構造
JP2008025833A (ja) 2006-06-21 2008-02-07 Luzcom:Kk Ｎｉ電鋳製コイル状超微細スプリング及びコイル状スプリング構造を一部に備えているＮｉ電鋳パイプ
KR100864185B1 (ko) * 2007-01-31 2008-10-17 한국기계연구원 가변강성 기능을 가진 수직형 미세 접촉 프로브
JP5070956B2 (ja) * 2007-06-29 2012-11-14 日本電産リード株式会社 基板検査用接触子及び基板検査用治具

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1816748A (zh) * 2003-07-02 2006-08-09 株式会社日立制作所 探针板及使用探针片或探针板的半导体检测装置及半导体装置的制造方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开2005-249447A 2005.09.15
JP特开平10-288626A 1998.10.27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI638163B (zh) * 2014-01-30 2018-10-11 風琴針股份有限公司 High current probe

Also Published As

Publication number Publication date
TW201102669A (en) 2011-01-16
TWI434049B (zh) 2014-04-11
JP2010281601A (ja) 2010-12-16
CN101907642A (zh) 2010-12-08
KR20100130160A (ko) 2010-12-10
JP5504698B2 (ja) 2014-05-28
KR101127030B1 (ko) 2012-03-26

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