CN101896977B - 半导体存储器器件和存储器基元电压施加方法 - Google Patents
半导体存储器器件和存储器基元电压施加方法 Download PDFInfo
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- CN101896977B CN101896977B CN200880119865.2A CN200880119865A CN101896977B CN 101896977 B CN101896977 B CN 101896977B CN 200880119865 A CN200880119865 A CN 200880119865A CN 101896977 B CN101896977 B CN 101896977B
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Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C7/00—Arrangements for writing information into, or reading information out from, a digital store
- G11C7/12—Bit line control circuits, e.g. drivers, boosters, pull-up circuits, pull-down circuits, precharging circuits, equalising circuits, for bit lines
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0004—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising amorphous/crystalline phase transition cells
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0009—RRAM elements whose operation depends upon chemical change
- G11C13/0011—RRAM elements whose operation depends upon chemical change comprising conductive bridging RAM [CBRAM] or programming metallization cells [PMCs]
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/004—Reading or sensing circuits or methods
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/0069—Writing or programming circuits or methods
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/0069—Writing or programming circuits or methods
- G11C2013/0076—Write operation performed depending on read result
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/10—Resistive cells; Technology aspects
- G11C2213/11—Metal ion trapping, i.e. using memory material including cavities, pores or spaces in form of tunnels or channels wherein metal ions can be trapped but do not react and form an electro-deposit creating filaments or dendrites
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/10—Resistive cells; Technology aspects
- G11C2213/12—Non-metal ion trapping, i.e. using memory material trapping non-metal ions given by the electrode or another layer during a write operation, e.g. trapping, doping
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/70—Resistive array aspects
- G11C2213/72—Array wherein the access device being a diode
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Semiconductor Memories (AREA)
- Read Only Memory (AREA)
Abstract
Description
Claims (20)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310217179.1A CN103310837B (zh) | 2007-12-10 | 2008-09-09 | 半导体存储器器件和存储器基元电压施加方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP317992/2007 | 2007-12-10 | ||
JP2007317992A JP5072564B2 (ja) | 2007-12-10 | 2007-12-10 | 半導体記憶装置及びメモリセル電圧印加方法 |
PCT/JP2008/066795 WO2009075130A1 (en) | 2007-12-10 | 2008-09-09 | Semiconductor memory device and memory cell voltage application method |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310217179.1A Division CN103310837B (zh) | 2007-12-10 | 2008-09-09 | 半导体存储器器件和存储器基元电压施加方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101896977A CN101896977A (zh) | 2010-11-24 |
CN101896977B true CN101896977B (zh) | 2013-07-03 |
Family
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Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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CN200880119865.2A Expired - Fee Related CN101896977B (zh) | 2007-12-10 | 2008-09-09 | 半导体存储器器件和存储器基元电压施加方法 |
CN201310217179.1A Expired - Fee Related CN103310837B (zh) | 2007-12-10 | 2008-09-09 | 半导体存储器器件和存储器基元电压施加方法 |
Family Applications After (1)
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---|---|---|---|
CN201310217179.1A Expired - Fee Related CN103310837B (zh) | 2007-12-10 | 2008-09-09 | 半导体存储器器件和存储器基元电压施加方法 |
Country Status (7)
Country | Link |
---|---|
US (2) | US8467225B2 (zh) |
EP (1) | EP2240935B1 (zh) |
JP (1) | JP5072564B2 (zh) |
KR (1) | KR20100093559A (zh) |
CN (2) | CN101896977B (zh) |
TW (2) | TWI408696B (zh) |
WO (1) | WO2009075130A1 (zh) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5072564B2 (ja) * | 2007-12-10 | 2012-11-14 | 株式会社東芝 | 半導体記憶装置及びメモリセル電圧印加方法 |
US7944728B2 (en) * | 2008-12-19 | 2011-05-17 | Sandisk 3D Llc | Programming a memory cell with a diode in series by applying reverse bias |
JP5426438B2 (ja) * | 2009-04-30 | 2014-02-26 | 株式会社東芝 | 不揮発性半導体記憶装置 |
US9058857B2 (en) | 2011-10-10 | 2015-06-16 | Micron Technology, Inc. | Cross-point memory compensation |
US9019747B2 (en) | 2011-12-01 | 2015-04-28 | Panasonic Intellectual Property Management Co., Ltd. | Nonvolatile semiconductor memory device and write method for the same |
US9053784B2 (en) | 2012-04-12 | 2015-06-09 | Micron Technology, Inc. | Apparatuses and methods for providing set and reset voltages at the same time |
JP5774556B2 (ja) * | 2012-08-03 | 2015-09-09 | 株式会社東芝 | 半導体記憶装置 |
US9728251B2 (en) | 2013-04-24 | 2017-08-08 | Micron Technology, Inc. | Resistance variable memory sensing using programming signals |
US9711213B2 (en) | 2014-09-04 | 2017-07-18 | Micron Technology, Inc. | Operational signals generated from capacitive stored charge |
US9412449B2 (en) | 2014-12-22 | 2016-08-09 | Kabushiki Kaisha Toshiba | Semiconductor storage device |
CN107967929B (zh) * | 2017-11-30 | 2020-07-17 | 上海华力微电子有限公司 | 一种存储单元及其存储阵列结构、操作方法 |
JP2020144959A (ja) * | 2019-03-06 | 2020-09-10 | キオクシア株式会社 | 半導体記憶装置 |
US10896726B2 (en) | 2019-04-02 | 2021-01-19 | Junsung KIM | Method for reading a cross-point type memory array comprising a two-terminal switching material |
CN114171086A (zh) * | 2019-08-02 | 2022-03-11 | 北京大学 | 阻变式存储器的操作电路及操作方法 |
JP2021044041A (ja) * | 2019-09-12 | 2021-03-18 | キオクシア株式会社 | 半導体記憶装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1487529A (zh) * | 2002-08-05 | 2004-04-07 | ض� | 一个相变材料存储设备的刷新存储器单元 |
CN1574076A (zh) * | 2003-06-12 | 2005-02-02 | 夏普株式会社 | 非易失性半导体存储装置及其控制方法 |
CN1983618A (zh) * | 2005-12-12 | 2007-06-20 | 日立环球储存科技荷兰有限公司 | 单极电阻随机存取存储器及垂直堆叠架构 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2004A (en) * | 1841-03-12 | Improvement in the manner of constructing and propelling steam-vessels | ||
US2006A (en) * | 1841-03-16 | Clamp for crimping leather | ||
US4795657A (en) | 1984-04-13 | 1989-01-03 | Energy Conversion Devices, Inc. | Method of fabricating a programmable array |
DE69325714T2 (de) | 1993-12-31 | 2000-03-02 | Stmicroelectronics S.R.L., Agrate Brianza | Spannungsregler für nichtflüchtige Halbleiterspeicheranordnungen |
US6034882A (en) | 1998-11-16 | 2000-03-07 | Matrix Semiconductor, Inc. | Vertically stacked field programmable nonvolatile memory and method of fabrication |
JP2002216482A (ja) * | 2000-11-17 | 2002-08-02 | Toshiba Corp | 半導体メモリ集積回路 |
US6480438B1 (en) * | 2001-06-12 | 2002-11-12 | Ovonyx, Inc. | Providing equal cell programming conditions across a large and high density array of phase-change memory cells |
KR100642186B1 (ko) | 2002-04-04 | 2006-11-10 | 가부시끼가이샤 도시바 | 상-변화 메모리 디바이스 |
JP4282314B2 (ja) | 2002-06-25 | 2009-06-17 | シャープ株式会社 | 記憶装置 |
US6753561B1 (en) | 2002-08-02 | 2004-06-22 | Unity Semiconductor Corporation | Cross point memory array using multiple thin films |
JP4205938B2 (ja) | 2002-12-05 | 2009-01-07 | シャープ株式会社 | 不揮発性メモリ装置 |
TWI283408B (en) * | 2004-05-14 | 2007-07-01 | Samsung Electronics Co Ltd | Circuit and method for controlling boosting voltage |
JP4148210B2 (ja) * | 2004-09-30 | 2008-09-10 | ソニー株式会社 | 記憶装置及び半導体装置 |
KR100670701B1 (ko) * | 2004-10-30 | 2007-01-17 | 주식회사 하이닉스반도체 | 저 전압용 반도체 메모리 장치 |
KR100659502B1 (ko) | 2005-02-04 | 2006-12-20 | 삼성전자주식회사 | 플래쉬 셀로 구현한 퓨즈 어레이 회로 |
KR100587694B1 (ko) * | 2005-02-16 | 2006-06-08 | 삼성전자주식회사 | 리키지 전류 보상 가능한 반도체 메모리 장치 |
JP4469319B2 (ja) | 2005-06-17 | 2010-05-26 | シャープ株式会社 | 半導体記憶装置 |
JP4684297B2 (ja) * | 2005-10-19 | 2011-05-18 | 富士通株式会社 | 不揮発性半導体記憶装置の書き込み方法 |
JP4054347B2 (ja) | 2005-12-16 | 2008-02-27 | シャープ株式会社 | 不揮発性半導体記憶装置 |
KR101333503B1 (ko) * | 2006-02-03 | 2013-11-28 | 삼성전자주식회사 | 프로그램 셀의 수에 따라 프로그램 전압을 조절하는 반도체메모리 장치 및 그것의 프로그램 방법 |
KR100764738B1 (ko) * | 2006-04-06 | 2007-10-09 | 삼성전자주식회사 | 향상된 신뢰성을 갖는 상변화 메모리 장치, 그것의 쓰기방법, 그리고 그것을 포함한 시스템 |
KR101509836B1 (ko) * | 2007-11-13 | 2015-04-06 | 애플 인크. | 멀티 유닛 메모리 디바이스에서의 메모리 유닛의 최적화된 선택 |
JP5072564B2 (ja) * | 2007-12-10 | 2012-11-14 | 株式会社東芝 | 半導体記憶装置及びメモリセル電圧印加方法 |
-
2007
- 2007-12-10 JP JP2007317992A patent/JP5072564B2/ja not_active Expired - Fee Related
-
2008
- 2008-09-09 CN CN200880119865.2A patent/CN101896977B/zh not_active Expired - Fee Related
- 2008-09-09 KR KR1020107012706A patent/KR20100093559A/ko not_active Application Discontinuation
- 2008-09-09 CN CN201310217179.1A patent/CN103310837B/zh not_active Expired - Fee Related
- 2008-09-09 EP EP08858679A patent/EP2240935B1/en not_active Not-in-force
- 2008-09-09 WO PCT/JP2008/066795 patent/WO2009075130A1/en active Application Filing
- 2008-09-09 US US12/747,290 patent/US8467225B2/en active Active
- 2008-09-16 TW TW097135507A patent/TWI408696B/zh not_active IP Right Cessation
- 2008-09-16 TW TW102130342A patent/TWI521542B/zh not_active IP Right Cessation
-
2013
- 2013-05-31 US US13/906,650 patent/US8724371B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1487529A (zh) * | 2002-08-05 | 2004-04-07 | ض� | 一个相变材料存储设备的刷新存储器单元 |
CN1574076A (zh) * | 2003-06-12 | 2005-02-02 | 夏普株式会社 | 非易失性半导体存储装置及其控制方法 |
CN1983618A (zh) * | 2005-12-12 | 2007-06-20 | 日立环球储存科技荷兰有限公司 | 单极电阻随机存取存储器及垂直堆叠架构 |
Also Published As
Publication number | Publication date |
---|---|
EP2240935A4 (en) | 2011-03-23 |
US20100321978A1 (en) | 2010-12-23 |
US8467225B2 (en) | 2013-06-18 |
EP2240935A1 (en) | 2010-10-20 |
TWI408696B (zh) | 2013-09-11 |
CN103310837B (zh) | 2016-05-11 |
TW200931440A (en) | 2009-07-16 |
TWI521542B (zh) | 2016-02-11 |
EP2240935B1 (en) | 2012-10-24 |
KR20100093559A (ko) | 2010-08-25 |
TW201351432A (zh) | 2013-12-16 |
WO2009075130A1 (en) | 2009-06-18 |
US8724371B2 (en) | 2014-05-13 |
CN103310837A (zh) | 2013-09-18 |
CN101896977A (zh) | 2010-11-24 |
US20130265816A1 (en) | 2013-10-10 |
JP5072564B2 (ja) | 2012-11-14 |
JP2009140593A (ja) | 2009-06-25 |
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