CN101772705A - 对称差动电容式传感器及其制造方法 - Google Patents

对称差动电容式传感器及其制造方法 Download PDF

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Publication number
CN101772705A
CN101772705A CN200880101859A CN200880101859A CN101772705A CN 101772705 A CN101772705 A CN 101772705A CN 200880101859 A CN200880101859 A CN 200880101859A CN 200880101859 A CN200880101859 A CN 200880101859A CN 101772705 A CN101772705 A CN 101772705A
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China
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electrode
aperture
configuration
movable element
axis
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CN200880101859A
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Chinese (zh)
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林一贞
马尔科·富尔曼
安德鲁·C·麦克耐尔
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NXP USA Inc
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Freescale Semiconductor Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
CN200880101859A 2007-08-03 2008-06-25 对称差动电容式传感器及其制造方法 Pending CN101772705A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/833,476 2007-08-03
US11/833,476 US7578190B2 (en) 2007-08-03 2007-08-03 Symmetrical differential capacitive sensor and method of making same
PCT/US2008/068080 WO2009020716A1 (en) 2007-08-03 2008-06-25 Symmetrical differential capacitive sensor and method of making same

Publications (1)

Publication Number Publication Date
CN101772705A true CN101772705A (zh) 2010-07-07

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CN200880101859A Pending CN101772705A (zh) 2007-08-03 2008-06-25 对称差动电容式传感器及其制造方法

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US (1) US7578190B2 (enExample)
JP (1) JP5557336B2 (enExample)
CN (1) CN101772705A (enExample)
TW (1) TWI439693B (enExample)
WO (1) WO2009020716A1 (enExample)

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CN102645550A (zh) * 2011-02-18 2012-08-22 精工爱普生株式会社 物理量传感器及电子设备
CN102667496A (zh) * 2009-11-24 2012-09-12 松下电器产业株式会社 加速度传感器
CN103226153A (zh) * 2012-01-30 2013-07-31 精工爱普生株式会社 物理量传感器以及电子设备
CN103364591A (zh) * 2012-04-09 2013-10-23 精工爱普生株式会社 物理量传感器以及电子设备
CN103364592A (zh) * 2012-04-10 2013-10-23 精工爱普生株式会社 物理量传感器及其制造方法、以及电子设备
CN103364589A (zh) * 2012-04-06 2013-10-23 精工爱普生株式会社 物理量传感器和电子设备
CN104297524A (zh) * 2013-07-17 2015-01-21 精工爱普生株式会社 功能元件、电子设备、以及移动体
CN104345167A (zh) * 2013-07-31 2015-02-11 霍尼韦尔国际公司 稳健操作通过严重冲击和加速的mems装置机构增强
CN104407172A (zh) * 2014-12-11 2015-03-11 歌尔声学股份有限公司 一种新型的加速度计的z轴结构
CN104515870A (zh) * 2013-10-03 2015-04-15 精工爱普生株式会社 物理量检测元件、以及物理量检测装置、电子设备、移动体
CN104849493A (zh) * 2014-02-17 2015-08-19 罗伯特·博世有限公司 用于微机械z传感器的摆杆装置
CN105712292A (zh) * 2014-12-22 2016-06-29 德尔福芒斯公司 具有可移动厚隔膜的微机电系统结构
CN103364591B (zh) * 2012-04-09 2018-08-31 精工爱普生株式会社 物理量传感器以及电子设备
CN111410167A (zh) * 2019-01-08 2020-07-14 意法半导体股份有限公司 具有优化几何结构以降低辐射效应引起的偏移的mems设备
WO2025015549A1 (en) * 2023-07-19 2025-01-23 Huawei Technologies Co., Ltd. Designs and methods for maufacturing out-of-plane rotation stops for mems devices

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CN102667496A (zh) * 2009-11-24 2012-09-12 松下电器产业株式会社 加速度传感器
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CN102645550A (zh) * 2011-02-18 2012-08-22 精工爱普生株式会社 物理量传感器及电子设备
CN102645550B (zh) * 2011-02-18 2016-04-13 精工爱普生株式会社 物理量传感器及电子设备
CN103226153A (zh) * 2012-01-30 2013-07-31 精工爱普生株式会社 物理量传感器以及电子设备
CN103364589A (zh) * 2012-04-06 2013-10-23 精工爱普生株式会社 物理量传感器和电子设备
CN103364589B (zh) * 2012-04-06 2017-07-18 精工爱普生株式会社 物理量传感器和电子设备
CN103364591B (zh) * 2012-04-09 2018-08-31 精工爱普生株式会社 物理量传感器以及电子设备
CN103364591A (zh) * 2012-04-09 2013-10-23 精工爱普生株式会社 物理量传感器以及电子设备
CN103364592A (zh) * 2012-04-10 2013-10-23 精工爱普生株式会社 物理量传感器及其制造方法、以及电子设备
CN103364592B (zh) * 2012-04-10 2018-09-14 精工爱普生株式会社 物理量传感器及其制造方法、以及电子设备
CN104297524A (zh) * 2013-07-17 2015-01-21 精工爱普生株式会社 功能元件、电子设备、以及移动体
CN104297524B (zh) * 2013-07-17 2019-10-29 精工爱普生株式会社 功能元件、电子设备、以及移动体
CN104345167A (zh) * 2013-07-31 2015-02-11 霍尼韦尔国际公司 稳健操作通过严重冲击和加速的mems装置机构增强
CN104515870A (zh) * 2013-10-03 2015-04-15 精工爱普生株式会社 物理量检测元件、以及物理量检测装置、电子设备、移动体
CN104849493A (zh) * 2014-02-17 2015-08-19 罗伯特·博世有限公司 用于微机械z传感器的摆杆装置
CN104407172A (zh) * 2014-12-11 2015-03-11 歌尔声学股份有限公司 一种新型的加速度计的z轴结构
CN105712292A (zh) * 2014-12-22 2016-06-29 德尔福芒斯公司 具有可移动厚隔膜的微机电系统结构
CN111410167A (zh) * 2019-01-08 2020-07-14 意法半导体股份有限公司 具有优化几何结构以降低辐射效应引起的偏移的mems设备
WO2025015549A1 (en) * 2023-07-19 2025-01-23 Huawei Technologies Co., Ltd. Designs and methods for maufacturing out-of-plane rotation stops for mems devices

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Publication number Publication date
US20090031809A1 (en) 2009-02-05
US7578190B2 (en) 2009-08-25
WO2009020716A1 (en) 2009-02-12
TWI439693B (zh) 2014-06-01
JP2010536036A (ja) 2010-11-25
TW200912318A (en) 2009-03-16
JP5557336B2 (ja) 2014-07-23

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Application publication date: 20100707