CN101719486B - 半导体器件及其制造方法和半导体模块制造方法 - Google Patents

半导体器件及其制造方法和半导体模块制造方法 Download PDF

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CN101719486B
CN101719486B CN200910178994.5A CN200910178994A CN101719486B CN 101719486 B CN101719486 B CN 101719486B CN 200910178994 A CN200910178994 A CN 200910178994A CN 101719486 B CN101719486 B CN 101719486B
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solder
wiring substrate
group
semiconductor device
solder balls
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CN101719486A (zh
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林义成
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Renesas Electronics Corp
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Renesas Electronics Corp
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    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65—Shapes or dispositions of interconnections
    • H—ELECTRICITY
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    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341—Surface mounted components
    • H05K3/3431—Leadless components
    • H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
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    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09372—Pads and lands
    • H05K2201/094—Array of pads or lands differing from one another, e.g. in size, pitch or thickness; Using different connections on the pads
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    • H10W46/601—Marks applied to devices, e.g. for alignment or identification for use after dicing
    • H10W46/607—Located on parts of packages, e.g. on encapsulations or on package substrates
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    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
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    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65—Shapes or dispositions of interconnections
    • H10W70/654—Top-view layouts
    • H10W70/656—Fan-in layouts
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    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
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    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07351—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting
    • H10W72/07352—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting changes in structures or sizes
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/251—Materials
    • H10W72/252—Materials comprising solid metals or solid metalloids, e.g. PbSn, Ag or Cu
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
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    • H10W72/00—Interconnections or connectors in packages
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    • H10W72/321—Structures or relative sizes of die-attach connectors
    • H10W72/325—Die-attach connectors having a filler embedded in a matrix
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    • H10W72/00—Interconnections or connectors in packages
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    • H10W72/351—Materials of die-attach connectors
    • H10W72/352—Materials of die-attach connectors comprising metals or metalloids, e.g. solders
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    • H10W72/50—Bond wires
    • H10W72/541—Dispositions of bond wires
    • H10W72/5445—Dispositions of bond wires being orthogonal to a side surface of the chip, e.g. parallel arrangements
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    • H10W72/551—Materials of bond wires
    • H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5522—Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
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    • H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
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    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/732—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between stacked chips
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    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
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    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Wire Bonding (AREA)
  • Semiconductor Integrated Circuits (AREA)
CN200910178994.5A 2008-10-09 2009-10-09 半导体器件及其制造方法和半导体模块制造方法 Expired - Fee Related CN101719486B (zh)

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Application Number Priority Date Filing Date Title
JP2008-262682 2008-10-09
JP2008262682A JP2010093109A (ja) 2008-10-09 2008-10-09 半導体装置、半導体装置の製造方法および半導体モジュールの製造方法

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CN101719486A CN101719486A (zh) 2010-06-02
CN101719486B true CN101719486B (zh) 2014-04-16

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JP2010238995A (ja) * 2009-03-31 2010-10-21 Sanyo Electric Co Ltd 半導体モジュールおよびこれを搭載したカメラモジュール
EP2337068A1 (en) * 2009-12-18 2011-06-22 Nxp B.V. Pre-soldered leadless package
JP5807834B2 (ja) * 2010-05-27 2015-11-10 日本精機株式会社 制御回路
KR101744756B1 (ko) * 2010-06-08 2017-06-09 삼성전자 주식회사 반도체 패키지
US8716873B2 (en) * 2010-07-01 2014-05-06 United Test And Assembly Center Ltd. Semiconductor packages and methods of packaging semiconductor devices
JP2012028519A (ja) * 2010-07-22 2012-02-09 Denso Corp 半導体パッケージ
US20120032327A1 (en) * 2010-08-09 2012-02-09 Fujitsu Limited Systems and methods for reinforcing chip packages
US8759689B2 (en) * 2011-01-04 2014-06-24 Alcatel Lucent Land pattern for 0201 components on a 0.8 mm pitch array
TWI445155B (zh) * 2011-01-06 2014-07-11 日月光半導體製造股份有限公司 堆疊式封裝結構及其製造方法
US8502363B2 (en) 2011-07-06 2013-08-06 Advanced Semiconductor Engineering, Inc. Semiconductor device packages with solder joint enhancement element and related methods
CN102263079B (zh) * 2011-07-18 2017-06-09 日月光半导体制造股份有限公司 半导体封装结构
JP2013030712A (ja) * 2011-07-29 2013-02-07 Toshiba Corp 半導体モジュールおよび半導体モジュールの製造方法
US20130044448A1 (en) * 2011-08-18 2013-02-21 Biotronik Se & Co. Kg Method for Mounting a Component to an Electric Circuit Board, Electric Circuit Board and Electric Circuit Board Arrangement
US8659141B2 (en) 2011-10-03 2014-02-25 Invensas Corporation Stub minimization using duplicate sets of terminals for wirebond assemblies without windows
US8659142B2 (en) 2011-10-03 2014-02-25 Invensas Corporation Stub minimization for wirebond assemblies without windows
US8659140B2 (en) * 2011-10-03 2014-02-25 Invensas Corporation Stub minimization using duplicate sets of signal terminals in assemblies without wirebonds to package substrate
US8791579B2 (en) 2011-11-17 2014-07-29 Taiwan Semiconductor Manufacturing Company, Ltd. Adjusting sizes of connectors of package components
US20130234317A1 (en) 2012-03-09 2013-09-12 Taiwan Semiconductor Manufacturing Company, Ltd. Packaging Methods and Packaged Semiconductor Devices
US9263412B2 (en) 2012-03-09 2016-02-16 Taiwan Semiconductor Manufacturing Company, Ltd. Packaging methods and packaged semiconductor devices
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