CN101701886B - 金相腐蚀剂、铜的腐蚀方法及其金相组织的显示方法 - Google Patents
金相腐蚀剂、铜的腐蚀方法及其金相组织的显示方法 Download PDFInfo
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- CN101701886B CN101701886B CN 200910211885 CN200910211885A CN101701886B CN 101701886 B CN101701886 B CN 101701886B CN 200910211885 CN200910211885 CN 200910211885 CN 200910211885 A CN200910211885 A CN 200910211885A CN 101701886 B CN101701886 B CN 101701886B
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- 239000010949 copper Substances 0.000 title claims abstract description 123
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 122
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 122
- 238000000034 method Methods 0.000 title abstract description 19
- 230000008520 organization Effects 0.000 title abstract 4
- 230000003628 erosive effect Effects 0.000 title abstract 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 29
- 238000005498 polishing Methods 0.000 claims abstract description 24
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229960002163 hydrogen peroxide Drugs 0.000 claims abstract description 19
- 239000011259 mixed solution Substances 0.000 claims abstract description 10
- 239000003795 chemical substances by application Substances 0.000 claims description 42
- 238000005530 etching Methods 0.000 claims description 40
- 235000011114 ammonium hydroxide Nutrition 0.000 claims description 17
- 238000012856 packing Methods 0.000 claims description 14
- 244000137852 Petrea volubilis Species 0.000 claims description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 8
- 239000000080 wetting agent Substances 0.000 claims description 7
- 229910003460 diamond Inorganic materials 0.000 claims description 4
- 239000010432 diamond Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 abstract description 16
- 230000000694 effects Effects 0.000 abstract description 15
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract 4
- 229910000881 Cu alloy Inorganic materials 0.000 abstract 2
- 229910021529 ammonia Inorganic materials 0.000 abstract 2
- 230000002349 favourable effect Effects 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 230000007797 corrosion Effects 0.000 description 13
- 238000005260 corrosion Methods 0.000 description 13
- 239000000956 alloy Substances 0.000 description 10
- 229910045601 alloy Inorganic materials 0.000 description 10
- 239000000243 solution Substances 0.000 description 7
- 239000003518 caustics Substances 0.000 description 6
- 239000002253 acid Substances 0.000 description 4
- 238000007654 immersion Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000005088 metallography Methods 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- 231100000206 health hazard Toxicity 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000009736 wetting Methods 0.000 description 2
- 206010058490 Hyperoxia Diseases 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 239000005308 flint glass Substances 0.000 description 1
- 235000013312 flour Nutrition 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N hydrochloric acid Substances Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 230000000222 hyperoxic effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
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CN 200910211885 CN101701886B (zh) | 2009-11-09 | 2009-11-09 | 金相腐蚀剂、铜的腐蚀方法及其金相组织的显示方法 |
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CN 200910211885 CN101701886B (zh) | 2009-11-09 | 2009-11-09 | 金相腐蚀剂、铜的腐蚀方法及其金相组织的显示方法 |
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CN101701886A CN101701886A (zh) | 2010-05-05 |
CN101701886B true CN101701886B (zh) | 2012-03-07 |
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Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102519776A (zh) * | 2011-12-02 | 2012-06-27 | 宁波江丰电子材料有限公司 | 金相腐蚀剂、钨的腐蚀方法及其金相组织显示方法 |
CN102706720A (zh) * | 2012-06-01 | 2012-10-03 | 内蒙古包钢钢联股份有限公司 | 一种显示硬质相组织的方法 |
CN102866048A (zh) * | 2012-09-28 | 2013-01-09 | 昆明理工大学 | 一种Ti-Cu层状复合材料金相显示样品的制备方法 |
CN103575585B (zh) * | 2013-10-11 | 2016-08-31 | 西北稀有金属材料研究院 | 一种低铍铜合金金相腐蚀剂及低铍铜合金金相组织的显示方法 |
CN103866325A (zh) * | 2014-03-18 | 2014-06-18 | 重庆市科学技术研究院 | 双相WC-Ni硬质合金微观组织暴露剂及微观组织观察方法 |
CN106346344A (zh) * | 2015-07-15 | 2017-01-25 | 宁波江丰电子材料股份有限公司 | 铜靶材表面的处理方法 |
CN105112917B (zh) * | 2015-08-27 | 2017-12-19 | 河南科技大学 | 一种金属间化合物腐蚀剂及Cu6Sn5金属间化合物三维形貌显示方法 |
CN105177577A (zh) * | 2015-09-30 | 2015-12-23 | 金川集团股份有限公司 | 一种用于小规格紫铜棒的腐蚀方法 |
CN106501060B (zh) * | 2016-11-02 | 2020-11-06 | 九牧厨卫股份有限公司 | 一种无铅铸造硅黄铜宏观金相组织的显示方法 |
CN109580614A (zh) * | 2017-09-29 | 2019-04-05 | 富士康(昆山)电脑接插件有限公司 | 金相腐蚀剂、压接芯线的金相组织显示方法 |
CN109580315A (zh) * | 2017-09-29 | 2019-04-05 | 富士康(昆山)电脑接插件有限公司 | 金相腐蚀剂、铜及铜合金的金相组织显示方法 |
CN111537318A (zh) * | 2020-03-31 | 2020-08-14 | 先导薄膜材料(广东)有限公司 | 一种铜镓合金的金相显示方法 |
CN112609183A (zh) * | 2020-12-07 | 2021-04-06 | 太仓市何氏电路板有限公司 | 一种具有保护功能的led铝面蚀刻药水及其制备方法 |
CN113758783A (zh) * | 2021-08-11 | 2021-12-07 | 重庆材料研究院有限公司 | 一种显示铂的金相组织的方法 |
CN114062076A (zh) * | 2021-11-04 | 2022-02-18 | 九江德福科技股份有限公司 | 一种用于铜箔晶体分析的样品制备方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1967197A (zh) * | 2006-11-02 | 2007-05-23 | 宁波江丰电子材料有限公司 | 一种制备铝硅铜系合金金相样品及显示组织的方法 |
CN101183053A (zh) * | 2007-12-04 | 2008-05-21 | 北京有色金属研究总院 | 一种高纯铝铜系合金金相样品的制备方法 |
CN101509850A (zh) * | 2009-03-20 | 2009-08-19 | 北京科技大学 | 一种制备电铸铜金相样品及显示组织的方法 |
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- 2009-11-09 CN CN 200910211885 patent/CN101701886B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1967197A (zh) * | 2006-11-02 | 2007-05-23 | 宁波江丰电子材料有限公司 | 一种制备铝硅铜系合金金相样品及显示组织的方法 |
CN101183053A (zh) * | 2007-12-04 | 2008-05-21 | 北京有色金属研究总院 | 一种高纯铝铜系合金金相样品的制备方法 |
CN101509850A (zh) * | 2009-03-20 | 2009-08-19 | 北京科技大学 | 一种制备电铸铜金相样品及显示组织的方法 |
Non-Patent Citations (3)
Title |
---|
岗特• |
岗特•裴卓.金相浸蚀手册.《金相浸蚀手册》.1982,67-70. * |
裴卓.金相浸蚀手册.《金相浸蚀手册》.1982,67-70. |
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