CN101564793A - Welding method of aluminum target blank and aluminum alloy backboard - Google Patents
Welding method of aluminum target blank and aluminum alloy backboard Download PDFInfo
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- CN101564793A CN101564793A CNA2009101353156A CN200910135315A CN101564793A CN 101564793 A CN101564793 A CN 101564793A CN A2009101353156 A CNA2009101353156 A CN A2009101353156A CN 200910135315 A CN200910135315 A CN 200910135315A CN 101564793 A CN101564793 A CN 101564793A
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Abstract
A welding method of aluminum blank and aluminum alloy backboard comprises the following steps: providing an aluminum target blank and an aluminum alloy backboard; placing the aluminum target blank and the aluminum alloy backboard into a vacuum sheath and transferring into a welding device; adopting a hot isostatic pressing technique for diffusion welding, welding the aluminum target material blank to the aluminum alloy backboard for forming a target material assembly; and after the welding, executing air cooling and detaching the vacuum sheath and taking the target material assembly out. The invention adopts the vacuum sheath for realizing the isolation of target material from the backboard and the air. The oxidization on the surface of the metal in welding is effectively prevented and the cost of vacuum device is reduced. On the other hand, the hot isostatic pressing technique is used for the diffusion welding. The bonding strength between the aluminum target blank and the aluminum alloy backboard is effectively increased, and furthermore the bending deformation after bonding is little.
Description
Technical field
The present invention relates to the manufacturing of semiconductor applications sputtering target material, relate in particular to the welding method of aluminum target blank and aluminum alloy back plate.
Background technology
In semi-conductor industry, target material assembly is to constitute by the target that meets sputtering performance with backboard that described target combined, had certain intensity.Backboard can be assembled in the sputter base station at described target material assembly and play a supporting role, and has the effect of conduction heat.At present, mainly use metal tantalum (Ta) or aluminium (Al) by physical vaporous deposition (PVD) plated film and form the barrier layer, in sputter procedure, use magnetron sputtering as target; Need to use to have sufficient intensity, and the also higher copper of heat conduction, electric conductivity or aluminum are as back veneer material.
With raffinal target blank and aluminum alloy back plate through processing, welding fabrication, make the employed target material assembly of semi-conductor industry after, be installed in then on the sputter board, under magnetic field, electric field action, effectively carry out sputter control.In the existing sputtering technology, the working environment very severe of target material assembly, at first, the target material assembly operating temperature up to 300 ℃ to 500 ℃; Secondly, a side of target material assembly is filled with cooling water cold by force, and opposite side then is in 10
-9Under the high vacuum environment of pa, be formed with huge pressure differential in the both sides up and down of target material assembly thus; Simultaneously, target material assembly is in high voltage electric field, the magnetic field, is subjected to the bombardment of various particles.If the welding quality in the target material assembly between target and the backboard is relatively poor, will cause target under heating condition, to be out of shape, to ftracture even come off from backboard, not only can't reach the sputter effect of uniform, also may cause the sputter base station to damage simultaneously.
Therefore, need to select a kind of effective welding manner, make target and backboard realize reliable connection, satisfy long-term stability and produce, use the needs of target to seem very necessary.
Existing a kind of diffusion welding method is widely used in the welding of target blank and backboard.So-called Diffusion Welding is the material surface that is in contact with one another, and is close under uniform temperature, pressure effect, local generation plastic deformation, and phase counterdiffusion between atom is forming new diffusion layer at the interface, and realizes reliable the connection finishing welding process.
Yet when aluminum target blank and aluminum alloy back plate are carried out Diffusion Welding, because the fusing point lower (650 ℃ of aluminium fusing points) of metallic aluminium and alloy thereof, and chemical property is comparatively active, adopt conventional welding equipment to carry out Diffusion Welding, when temperature is heated to more than 200 ℃, the oxidation of face of weld is very serious, thereby makes Metal Contact face atom effectively not spread, and is difficult to the welding effect that reaches desirable.Therefore need a kind of new diffusion technology for welding of research, improve welding back gained combination of components rate and intensity.
Summary of the invention
The problem that the present invention solves provides the welding method of a kind of aluminum target blank and aluminum alloy back plate, solve in the diffusion technology for welding because aluminum target blank and aluminum alloy back plate easy oxidation of contact-making surface under heated condition, and influence the welding effect of gained target material assembly.
For addressing the above problem, the invention provides the welding method of a kind of aluminum target blank and aluminum alloy back plate, comprising:
Aluminum target blank and aluminum alloy back plate are provided;
Aluminum target blank and aluminum alloy back plate are placed into vacuum canning send into welding equipment; Described vacuum canning adopts 1.0mm～2.0mm mild steel or aluminium alloy welding fabrication, is evacuated to 10 behind pack into target blank and the backboard
-3～10
-5Holder is sealing again;
Adopt heat and other static pressuring processes to carry out Diffusion Welding, aluminum target blank is soldered to aluminum alloy back plate forms target material assembly; The concrete parametric optimization of described heat and other static pressuring processes is: welding temperature is 200 ℃～450 ℃, and environmental stress is 50～160Mpa, and is incubated 3～5 hours under this temperature pressure;
After finishing welding, carry out air cooling and remove vacuum canning taking-up target material assembly.
Compared with prior art, the present invention has the following advantages: adopting heat and other static pressuring processes to weld can be fine as to combine with two kinds of metal covering opposites, thereby can realize target and backboard are implemented the large tracts of land welding; Because heat and other static pressuring processes of the present invention is to weld in vacuum canning, has therefore prevented that effectively metal to be welded is oxidized, and reduced the vacuum equipment cost.Weld by the inventive method and to make aluminum target blank and aluminum alloy back plate higher in the mutual diffusion of contact-making surface, bond strength can reach more than the 40Mpa, also has advantages such as the non-deformability of being heated is strong.
Description of drawings
Fig. 1 is the specific embodiment flow chart of aluminum target blank of the present invention and aluminum alloy back plate welding method;
Fig. 2 to Fig. 5 is that schematic diagram is implemented in the welding of aluminum target blank of the present invention and aluminum alloy back plate.
The specific embodiment
Fig. 1 is the diffusion welding method specific embodiment flow chart of target of the present invention and backboard, describes in conjunction with the enforcement schematic diagram of Fig. 2 to Fig. 5, and key step of the present invention is as follows:
S1, provide aluminum target blank and aluminum alloy back plate.
The aluminum target blank that provides, its shape is according to the actual requirement of applied environment, sputtering equipment, can be in circle, rectangle, annular, taper shape or other analogous shapes (comprising regular shape and irregularly shaped) any, and its thickness is generally 1mm～80mm, and the face size is according to the different not fixed ranges of the applied equipment of target.In addition, the target blank that is actually used in welding need be reserved 2～5mm surplus on the setting size, to adapt to the dilatancy of welding back metal.As shown in Figure 2, the present invention needs for explanation, all selects a kind of typical aluminum target blank 10 at the aftermentioned specific embodiment, is shaped as circle, and diameter is 350mm, and thickness is 10mm.And the shape of aluminum alloy back plate 20 is determined by sputtering equipment.
S2, machining Chemical cleaning is then carried out on the surface of aluminum target blank and aluminum alloy back plate;
Wherein machining is carried out on the surface of aluminum target blank and aluminum alloy back plate and make it light, especially make both contact-making surfaces reach necessary fineness,, prevent to form in the welding process defectives such as projection or groove so that fit closely.
The cleaning on aluminum target blank and aluminum alloy back plate surface all can directly be used the organic washing solvent clean, removes the soluble impurity on surface, can prevent that equally the defective in the welding process from forming.
S3, aluminum target blank and aluminum alloy back plate are placed into vacuum canning send into welding equipment;
As shown in Figure 3,20 assemblings of aluminum target blank 10 and aluminum alloy back plate are fixing, make the face of weld is fitted that in the vacuum canning 30 by 1.0mm～2.0mm mild steel or aluminium alloy welding fabrication of packing into then, the bleeding point 31 by vacuum canning is evacuated to 10 again
-3～10
-5Bleeding point 31 is sealed in holder at last, forms vacuum environment in vacuum canning 30; Above-mentioned vacuum canning 30 is sent into welding equipment together with built-in target blank and backboard integral body to be welded.
S4, employing heat and other static pressuring processes carry out Diffusion Welding, aluminum target blank is soldered to aluminum alloy back plate forms target material assembly;
Described heat and other static pressuring processes is under hot conditions, utilizes press equipment to adopt modes such as liquid or gas medium to form the High Voltage environment around workpiece to be welded, welds.
As shown in Figure 4, aluminum target blank 10 and aluminum alloy back plate 20 weld in vacuum canning 30, and the vacuum canning 30 outside high temperature and high pressure environments that form.Be shaped because vacuum canning 30 is thin walled welds, so vacuum canning can fit tightly built-in target material assembly, extraneous High Voltage can directly be passed to aluminum target blank 10 and aluminum alloy back plate 20, and each forms pressure to contact-making surface at both.What vacuum canning 30 played only is secluding air, and carries out the effect that heat is transmitted.
The concrete parameter of heat and other static pressuring processes is as follows: welding temperature is 200 ℃～450 ℃, and environmental stress is 50～160Mpa, and is incubated 3～5 hours under this temperature pressure;
Under these conditions, aluminum target blank and aluminum alloy back plate produce plastic deformation on contact-making surface, and phase counterdiffusion between atom is forming new diffusion layer at the interface, and final the realization finished welding process reliable the connection.
S5, air cooling are finished welding with the cooling target material assembly.
As shown in Figure 5, remove jacket 30, obtain to finish the target material assembly of Diffusion Welding.
The present invention adopts heat and other static pressuring processes that aluminum target blank and aluminum alloy back plate are implemented large-area butt welding; Because described Diffusion Welding is to carry out in vacuum canning, completely cut off air, therefore can prevent effectively that the contact-making surface of weld metal is oxidized, improved the bond strength between aluminum target blank and the aluminum alloy back plate, avoid target disengaging backboard in the sputter procedure, thereby normally carry out sputter coating.Formed target material assembly has the bonding tightness height, the advantages such as non-deformability is strong of being heated.
Below in conjunction with preferred embodiment the present invention is further introduced.
Embodiment one
Below be processing step and the welding result that 99.995% high-purity Al target blank and 6061Al alloy backboard carry out Diffusion Welding:
(1) Surface Machining of target blank, backboard: Al target blank surface and 6061Al alloy back plate surface are carried out machining make it light, especially make the fineness of both contact-making surfaces reach 0.2um.
(2) Chemical cleaning of target blank, backboard: Al target blank and 6061Al alloy backboard are adopted the organic solvent clean surface, remove the soluble impurity on surface.Described organic solvent then can be any among isobutanol IBA, isopropyl alcohol IPA or the mixed propyl alcohol IPB, preferably, chooses isopropyl alcohol IPA.
(3) target blank, backboard are packed into vacuum canning:
In the vacuum canning that the thin walled welds of earlier Al target blank and 6061Al alloy backboard being packed into is shaped, described vacuum canning is 1.0mm～2.0mm mild steel or aluminium alloy welding fabrication, is evacuated to 10 then
-3～10
-5Holder, wherein 1 holder=1 millimetres of mercury=133.32 Pascals shut the bleeding point employing mechanical means of vacuum canning again, finish the vacuum packaging of target blank to be welded and backboard, and last integral body is sent in the welding equipment and is welded.
(4) utilize heat and other static pressuring processes to carry out Diffusion Welding to target blank is soldered to backboard:
To go up packaged product of step sends in the welding equipment, at first utilize forcing press to adopt the gas medium pressurization, the gas medium pressurization has each characteristic to the pressure same sex than the liquid pressurization, the welding of many contact-making surfaces when being fit to butt welding makes that the pressure on interior Al target blank of vacuum canning and the 6061Al alloy backboard contact-making surface reaches 150MPa;
And then welding temperature is promoted to 450 ℃, and under this environmental stress and temperature, kept 5 hours, make the mutual thermal diffusion of contact-making surface of Al target blank and 6061Al alloy backboard, combine the formation target material assembly.
(5) finish heat and other static pressuring processes after, target material assembly is carried out air cooling, remove vacuum canning, finally obtain the product after the Diffusion Welding.
At last, welding condition detection: utilize C-SCAN to detect the solder bond rate, its solder bond rate of target material assembly that should be made up of Al target blank and 6061Al alloy backboard reaches 98%, test its hot strength again, the mean intensity of its Diffusion Welding is 100Mpa, the result shows, adopts the obtained target material assembly welding performance of diffusion welding method of the present invention very reliable.
Embodiment two
Below be processing step and the welding result that 99.99% high-purity Al target blank and 6061Al alloy backboard carry out Diffusion Welding:
(1) Surface Machining of target blank, backboard: Al target blank surface and 6061Al alloy back plate surface are carried out machining make it light, especially make the fineness of both contact-making surfaces reach 3.2um.
(2) Chemical cleaning of target blank, backboard: Al target blank and 6061Al alloy backboard are adopted the organic solvent clean surface, remove the soluble impurity on surface.Described organic solvent then can be any among isobutanol IBA, isopropyl alcohol IPA or the mixed propyl alcohol IPB, preferably, chooses isopropyl alcohol IPA.
(3) target blank, backboard are packed into vacuum canning:
In the vacuum canning that the thin walled welds of earlier Al target blank and 6061Al alloy backboard being packed into is shaped, described vacuum canning is 1.0mm～2.0mm mild steel or aluminium alloy welding fabrication, is evacuated to 10 then
-3～10
-5Holder, the bleeding point with vacuum canning adopts mechanical means to shut again, finishes the vacuum packaging of target blank to be welded and backboard, and last integral body is sent in the welding equipment and is welded.
(4) utilize heat and other static pressuring processes to carry out Diffusion Welding to target blank is soldered to backboard:
To go up packaged product of step sends in the welding equipment, at first utilize forcing press to adopt the gas medium pressurization, the gas medium pressurization has each characteristic to the pressure same sex than the liquid pressurization, the welding of many contact-making surfaces when being fit to butt welding makes that the pressure on interior Al target blank of vacuum canning and the 6061Al alloy backboard contact-making surface reaches 50MPa;
And then welding temperature is promoted to 200 ℃, and under this environmental stress and temperature, kept 3 hours, make the mutual thermal diffusion of contact-making surface of Al target blank and 6061Al alloy backboard, combine the formation target material assembly.
(5) finish heat and other static pressuring processes after, target material assembly is carried out air cooling, remove vacuum canning, finally obtain the product after the Diffusion Welding.
At last, welding condition detection: utilize C-SCAN to detect the solder bond rate, its solder bond rate of target material assembly that should be made up of Al target blank and 6061Al alloy backboard reaches 95%, test its hot strength again, the mean intensity of its Diffusion Welding is 40Mpa, the result shows, adopts the obtained target material assembly welding performance of diffusion welding method of the present invention very reliable.
Embodiment three
Below be processing step and the welding result that 99.99% high-purity Al target blank and ZL105AL alloy backboard carry out Diffusion Welding:
(1) Surface Machining of target blank, backboard: Al target blank surface and ZL105AL alloy back plate surface are carried out machining make it light, especially make the fineness of both contact-making surfaces reach 1.6um.
(2) Chemical cleaning of target blank, backboard: Al target blank and ZL105AL alloy backboard are adopted the organic solvent clean surface, remove the soluble impurity on surface.Described organic solvent then can be any among isobutanol IBA, isopropyl alcohol IPA or the mixed propyl alcohol IPB, preferably, chooses isopropyl alcohol IPA.
(3) target blank, backboard are packed into vacuum canning:
In the vacuum canning that the thin walled welds of earlier Al target blank and ZL105AL alloy backboard being packed into is shaped, described vacuum canning is 1.0mm～2.0mm mild steel or aluminium alloy welding fabrication, is evacuated to 10 then
-3～10
-5Holder, the bleeding point with vacuum canning adopts mechanical means to shut again, finishes the vacuum packaging of target blank to be welded and backboard, and last integral body is sent in the welding equipment and is welded.
(4) utilize heat and other static pressuring processes to carry out Diffusion Welding to target blank is soldered to backboard:
To go up packaged product of step sends in the welding equipment, at first utilize forcing press to adopt the gas medium pressurization, the gas medium pressurization has each characteristic to the pressure same sex than the liquid pressurization, the welding of many contact-making surfaces when being fit to butt welding makes that the pressure on interior Al target blank of vacuum canning and the ZL105Al alloy backboard contact-making surface reaches 100MPa;
And then welding temperature is promoted to 300 ℃, and under this environmental stress and temperature, kept 4 hours, make the mutual thermal diffusion of contact-making surface of Al target blank and ZL105Al alloy backboard, combine the formation target material assembly.
(5) finish heat and other static pressuring processes after, target material assembly is carried out air cooling, remove vacuum canning, finally obtain the product after the Diffusion Welding.
At last, welding condition detection: utilize C-SCAN to detect the solder bond rate, its solder bond rate of target material assembly that should be made up of Al target blank and ZL105Al alloy backboard reaches 97%, test its hot strength again, the mean intensity of its Diffusion Welding is 80Mpa, the result shows, adopts the obtained target material assembly welding performance of diffusion welding method of the present invention very reliable.
Though the present invention with preferred embodiment openly as above; but it is not to be used for limiting the present invention; any those skilled in the art without departing from the spirit and scope of the present invention; can make possible change and modification, so protection scope of the present invention should be as the criterion with the scope that claim of the present invention was defined.
Claims (6)
1. the welding method of aluminum target blank and aluminum alloy back plate is characterized in that, comprising:
Aluminum target blank and aluminum alloy back plate are provided;
Aluminum target blank and aluminum alloy back plate are placed into vacuum canning send into welding equipment;
Adopt heat and other static pressuring processes to carry out Diffusion Welding, aluminum target blank is soldered to aluminum alloy back plate forms target material assembly;
After finishing welding, carry out air cooling and remove vacuum canning taking-up target material assembly.
2. the welding method of aluminum target blank according to claim 1 and aluminum alloy back plate, it is characterized in that, the concrete parametric optimization of described heat and other static pressuring processes is: 200 ℃～450 ℃ of welding temperatures, and environmental stress 50～160Mpa, and under this temperature pressure, be incubated 3～5 hours.
3. the welding method of aluminum target blank according to claim 1 and aluminum alloy back plate is characterized in that, described vacuum canning employing 1.0mm～2.0mm mild steel or aluminium alloy welding fabrication, be evacuated to 10 behind pack into target blank and the backboard
-3～10
-5Holder, sealing again.
4. the welding method of aluminum target blank according to claim 1 and aluminum alloy back plate is characterized in that, before being placed into vacuum canning, also needs aluminum target blank and aluminum alloy back plate are carried out machining Chemical cleaning more earlier.
5. the welding method of aluminum target blank according to claim 4 and aluminum alloy back plate is characterized in that, machining makes the fineness of target and back plate surface reach 0.2～3.2um.
6. the welding method of aluminum target blank according to claim 4 and aluminum alloy back plate, it is characterized in that, described Chemical cleaning is specially uses the organic washing solvent clean, and the organic washing solvent is any among isobutanol IBA, isopropyl alcohol IPA or the mixed propyl alcohol IPB.
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