CN101579782B - Welding method of copper target blank and copper alloy backing plate - Google Patents
Welding method of copper target blank and copper alloy backing plate Download PDFInfo
- Publication number
- CN101579782B CN101579782B CN 200910135325 CN200910135325A CN101579782B CN 101579782 B CN101579782 B CN 101579782B CN 200910135325 CN200910135325 CN 200910135325 CN 200910135325 A CN200910135325 A CN 200910135325A CN 101579782 B CN101579782 B CN 101579782B
- Authority
- CN
- China
- Prior art keywords
- copper
- welding
- backing plate
- target blank
- copper alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003466 welding Methods 0.000 title claims abstract description 103
- 229910000881 Cu alloy Inorganic materials 0.000 title claims abstract description 71
- 239000010949 copper Substances 0.000 title claims abstract description 65
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 46
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims abstract description 44
- 238000009792 diffusion process Methods 0.000 claims abstract description 35
- 230000008569 process Effects 0.000 claims abstract description 23
- 238000001816 cooling Methods 0.000 claims abstract description 8
- 238000009924 canning Methods 0.000 claims description 41
- 239000013077 target material Substances 0.000 claims description 32
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 30
- 230000003068 static effect Effects 0.000 claims description 16
- 238000003754 machining Methods 0.000 claims description 12
- 238000004140 cleaning Methods 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 229910001209 Low-carbon steel Inorganic materials 0.000 claims description 6
- 230000006353 environmental stress Effects 0.000 claims description 6
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims description 6
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 239000002184 metal Substances 0.000 abstract description 7
- 238000001513 hot isostatic pressing Methods 0.000 abstract 2
- 238000005452 bending Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 6
- 230000000740 bleeding effect Effects 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000012856 packing Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000009461 vacuum packaging Methods 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052774 Proactinium Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Pressure Welding/Diffusion-Bonding (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200910135325 CN101579782B (en) | 2009-04-20 | 2009-04-20 | Welding method of copper target blank and copper alloy backing plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200910135325 CN101579782B (en) | 2009-04-20 | 2009-04-20 | Welding method of copper target blank and copper alloy backing plate |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101579782A CN101579782A (en) | 2009-11-18 |
CN101579782B true CN101579782B (en) | 2012-09-05 |
Family
ID=41362164
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 200910135325 Active CN101579782B (en) | 2009-04-20 | 2009-04-20 | Welding method of copper target blank and copper alloy backing plate |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101579782B (en) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101775583B (en) * | 2009-12-30 | 2012-09-26 | 宁波江丰电子材料有限公司 | Method for manufacturing copper target components |
CN102059449B (en) * | 2010-12-20 | 2012-09-05 | 武汉理工大学 | Diffusion welding method of tungsten alloy and tantalum alloy at low temperature |
CN102061405A (en) * | 2011-01-13 | 2011-05-18 | 罗铁威 | Metal-mixed vacuum sputtering alloy target material as well as manufacturing method and application thereof |
TWI404583B (en) * | 2011-03-22 | 2013-08-11 | Solar Applied Mat Tech Corp | A method for diffusion bonding |
CN102728944A (en) * | 2011-04-01 | 2012-10-17 | 光洋应用材料科技股份有限公司 | Diffusion bonding method |
CN102350588B (en) * | 2011-09-22 | 2013-06-26 | 航天材料及工艺研究所 | Isolating method for hot isostatic pressing diffusion welding |
CN102366856A (en) * | 2011-10-20 | 2012-03-07 | 宁波江丰电子材料有限公司 | Welding method of cobalt target assembly |
CN102489865A (en) * | 2011-11-11 | 2012-06-13 | 宁波江丰电子材料有限公司 | Welding method for copper back plate and target |
CN102554455B (en) * | 2011-12-31 | 2015-07-08 | 宁波江丰电子材料股份有限公司 | Diffusion welding method for tungsten-titanium alloy target and copper alloy back plate |
CN103658898B (en) * | 2012-09-20 | 2016-03-16 | 宁波江丰电子材料股份有限公司 | Welding method of target assembly |
CN103801820A (en) * | 2012-11-13 | 2014-05-21 | 宁波江丰电子材料有限公司 | Hot isostatic pressure diffusion welding method for tantalum target and aluminum back plate |
CN103071791B (en) * | 2013-01-18 | 2015-02-11 | 航天材料及工艺研究所 | Forming method of TiAl pipe target material in large length-diameter ratio |
CN103143834A (en) * | 2013-03-20 | 2013-06-12 | 先进储能材料国家工程研究中心有限责任公司 | Method for producing structural member with porous metal materials and metal materials |
CN105463389A (en) * | 2014-09-03 | 2016-04-06 | 宁波江丰电子材料股份有限公司 | Improving method for backboard defects |
CN105624622B (en) * | 2014-11-26 | 2018-02-09 | 宁波江丰电子材料股份有限公司 | The manufacture method of target material assembly |
CN106271148A (en) * | 2015-05-12 | 2017-01-04 | 宁波江丰电子材料股份有限公司 | The welding method of target material assembly |
CN105328326A (en) * | 2015-11-16 | 2016-02-17 | 东莞市康德威变压器有限公司 | Welding method for low-voltage winding copper foil and copper bar of transformer |
CN107096994A (en) * | 2017-04-25 | 2017-08-29 | 南京云启金锐新材料有限公司 | The diffusion welding (DW) fitting and its production method of a kind of high-purity zirconia composite ceramics and red copper |
TWI731799B (en) * | 2020-10-06 | 2021-06-21 | 中國鋼鐵股份有限公司 | Method for manufacturing high purity target |
CN112643188B (en) * | 2020-12-30 | 2022-09-16 | 浙江最成半导体科技有限公司 | Vacuum diffusion bonding method for target and back plate |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1419608A (en) * | 2000-01-20 | 2003-05-21 | 霍尼韦尔国际公司 | Method of diffusion bonding targets to backing plates |
CN1970209A (en) * | 2006-12-01 | 2007-05-30 | 宁波江丰电子材料有限公司 | Diffusion welding method |
CN101407907A (en) * | 2008-11-28 | 2009-04-15 | 株洲冶炼集团股份有限公司 | Sheath for producing target material by hot isostatic pressing and method for producing target material |
-
2009
- 2009-04-20 CN CN 200910135325 patent/CN101579782B/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1419608A (en) * | 2000-01-20 | 2003-05-21 | 霍尼韦尔国际公司 | Method of diffusion bonding targets to backing plates |
CN1970209A (en) * | 2006-12-01 | 2007-05-30 | 宁波江丰电子材料有限公司 | Diffusion welding method |
CN101407907A (en) * | 2008-11-28 | 2009-04-15 | 株洲冶炼集团股份有限公司 | Sheath for producing target material by hot isostatic pressing and method for producing target material |
Non-Patent Citations (1)
Title |
---|
JP特开平5-104258A 1993.04.27 |
Also Published As
Publication number | Publication date |
---|---|
CN101579782A (en) | 2009-11-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101579782B (en) | Welding method of copper target blank and copper alloy backing plate | |
CN101564793A (en) | Welding method of aluminum target blank and aluminum alloy backboard | |
CN104551381B (en) | The welding method of tungsten target material assembly | |
CN102554455A (en) | Diffusion welding method for tungsten-titanium alloy target and copper alloy back plate | |
CN101543937A (en) | Method for welding target material and back board | |
CN104259644B (en) | A kind of welding method of tungsten-titanium alloy target | |
CN102500908A (en) | Welding method of tungsten target assembly | |
CN102489865A (en) | Welding method for copper back plate and target | |
CN103801820A (en) | Hot isostatic pressure diffusion welding method for tantalum target and aluminum back plate | |
CN108461380B (en) | Control structure and control method for sintering voidage of large-area integrated circuit chip | |
CN100542730C (en) | A kind of diffusion welding method | |
CN102366856A (en) | Welding method of cobalt target assembly | |
CN102366833B (en) | Production method of tungsten-titanium target blank | |
CN101648320B (en) | Welding method of target materials and back plates | |
CN101543924A (en) | Method for welding target material and back board | |
CN107971620A (en) | A kind of tungsten target material diffusion welding method and target material assembly | |
CN105798409A (en) | Welding method of target module | |
CN102513789B (en) | Manufacturing method of tungsten target material | |
CN101648303A (en) | Welding method of target materials and back plates | |
CN101537533A (en) | Welding structure and method of target and backing plate | |
CN106271148A (en) | The welding method of target material assembly | |
CN101648316A (en) | Welding structure and welding method of target materials and back plates | |
CN101176960A (en) | Method for coupling metallic target material and target holder | |
CN106941769B (en) | Heat dissipation structural part with good comprehensive performance and preparation process thereof | |
CN108202180A (en) | The manufacturing method of target material assembly |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Welding method of copper target blank and copper alloy backing plate Effective date of registration: 20121113 Granted publication date: 20120905 Pledgee: Export Import Bank of China Pledgor: Ningbo Jiangfeng Electronic Materials Co., Ltd. Registration number: 2012990000688 |
|
PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20131206 Granted publication date: 20120905 Pledgee: Export Import Bank of China Pledgor: Ningbo Jiangfeng Electronic Materials Co., Ltd. Registration number: 2012990000688 |
|
PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Welding method of copper target blank and copper alloy backing plate Effective date of registration: 20131220 Granted publication date: 20120905 Pledgee: Export Import Bank of China Pledgor: Ningbo Jiangfeng Electronic Materials Co., Ltd. Registration number: 2013990001013 |
|
PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 315400 Zhejiang Province, Yuyao City Yangming science and Technology Industrial Park No. 1 Jiang Feng Lu Patentee after: NINGBO JIANGFENG ELECTRONIC MATERIAL CO., LTD. Address before: 315400 Zhejiang Province, Yuyao City Yangming science and Technology Industrial Park No. 1 Jiang Feng Lu Patentee before: Ningbo Jiangfeng Electronic Materials Co., Ltd. |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20170505 Granted publication date: 20120905 Pledgee: Export Import Bank of China Pledgor: Ningbo Jiangfeng Electronic Materials Co., Ltd. Registration number: 2013990001013 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Welding method of copper target blank and copper alloy backing plate Effective date of registration: 20170510 Granted publication date: 20120905 Pledgee: Bank of China Limited by Share Ltd Yuyao branch Pledgor: NINGBO JIANGFENG ELECTRONIC MATERIAL CO., LTD. Registration number: 2017330000038 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20180316 Granted publication date: 20120905 Pledgee: Bank of China Limited by Share Ltd Yuyao branch Pledgor: NINGBO JIANGFENG ELECTRONIC MATERIAL CO., LTD. Registration number: 2017330000038 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Welding method of copper target blank and copper alloy backing plate Effective date of registration: 20180320 Granted publication date: 20120905 Pledgee: Bank of China Limited by Share Ltd Yuyao branch Pledgor: NINGBO JIANGFENG ELECTRONIC MATERIAL CO., LTD. Registration number: 2018330000064 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20200825 Granted publication date: 20120905 Pledgee: Bank of China Limited by Share Ltd. Yuyao branch Pledgor: KONFOONG MATERIALS INTERNATIONAL Co.,Ltd. Registration number: 2018330000064 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Welding method of copper target blank and copper alloy back plate Effective date of registration: 20200908 Granted publication date: 20120905 Pledgee: Bank of China Limited by Share Ltd. Yuyao branch Pledgor: KONFOONG MATERIALS INTERNATIONAL Co.,Ltd. Registration number: Y2020330000675 |