CN107662045A - The manufacture method of alloy product - Google Patents
The manufacture method of alloy product Download PDFInfo
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- CN107662045A CN107662045A CN201610624653.6A CN201610624653A CN107662045A CN 107662045 A CN107662045 A CN 107662045A CN 201610624653 A CN201610624653 A CN 201610624653A CN 107662045 A CN107662045 A CN 107662045A
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- solder side
- alloy product
- aluminium alloy
- manufacture method
- jacket
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/14—Preventing or minimising gas access, or using protective gases or vacuum during welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/24—Preliminary treatment
Abstract
The present invention provides a kind of manufacture method of alloy product, including：The first aluminium alloy plate and the second aluminium alloy plate are provided, the surface to be welded of the first aluminium alloy plate is the first solder side, and the surface to be welded of the second aluminium alloy plate is the second solder side；First solder side is plane, has groove in the second solder side；Or first be respectively provided with groove in solder side and the second solder side；First solder side and the second solder side are oppositely arranged and be bonded, and the channel structure surrounded by groove is formed between the first solder side and the second solder side, to form initial alloy product；After initial alloy product is loaded into jacket and processing is de-gassed to jacket to form vacuum canning, heat and other static pressuring processes are carried out to initial alloy product；Vacuum canning is removed, obtains alloy product.The present invention to initial alloy product by carrying out heat and other static pressuring processes, while the weld strength of the alloy product formed is improved, avoids channel structure from deforming or even block.
Description
Technical field
The present invention relates to semiconductor applications, more particularly to a kind of manufacture method of alloy product.
Background technology
6061 aluminium alloys are the high-quality aluminum alloy products of thermally treated pre-stretching technique productions, have processing characteristics pole
Indeformable, the fine and close zero defect of material after good, excellent weldability, plating resistance, corrosion resistance, high tenacity and processing, be easily polished,
The good characteristics such as colouring film is easy, oxidation effectiveness is splendid, have been widely used in automated machine part, Precision Machining, mould
Manufacture, electronics and precision instrument etc..
With the continuous upgrading of Product Process, many 6061 alloy products are in order to reach good high temperature deformation resistance
Can, inside is designed using complicated channel structure.During the use of 6061 alloy product, continuously cooling water
Flow into the channel structure, so that the substantial amounts of heat in 6061 alloy product surface can be taken away, realize that product is lasting
High temperature deformation resistance ability, it is cost-effective so as to improve the service life of 6061 alloy product.
But the yield of the alloy product of prior art formation has much room for improvement.
The content of the invention
It is of the invention to solve the problems, such as to be to provide a kind of manufacture method of alloy product, improve the yield of alloy product.
To solve the above problems, the present invention provides a kind of manufacture method of alloy product, including：First aluminium alloy is provided
Plate and the second aluminium alloy plate, the surface to be welded of first aluminium alloy plate is the first solder side, and second aluminium alloy plate is treated
Solder side is the second solder side；First solder side is plane, has groove in second solder side；Or described
Groove is respectively provided with one solder side and the second solder side；First solder side and the second solder side are oppositely arranged and are bonded,
And the channel structure surrounded by groove is formed between first solder side and the second solder side, produced with forming initial aluminium alloy
Product；After the initial alloy product is loaded into jacket and processing is de-gassed to the jacket to form vacuum canning, to institute
State initial alloy product and carry out heat and other static pressuring processes；The vacuum canning is removed, obtains alloy product.
Optionally, the material of first aluminium alloy plate and the second aluminium alloy plate is 6061 aluminium alloys.
Optionally, the step of heat and other static pressuring processes include：The vacuum canning is positioned in high temperature insostatic pressing (HIP) stove；Make
The high temperature insostatic pressing (HIP) stove is heated up, until reaching technological temperature；After heating, the high temperature insostatic pressing (HIP) stove is set to be boosted, directly
To reaching default environmental stress；Heat-insulation pressure keeping is carried out under the technological temperature and default environmental stress.
Optionally, the parameter of the heat and other static pressuring processes includes：Technological temperature is 530 DEG C to 630 DEG C, presets environmental stress
For 4MPa to 10MPa, the process time under the technological temperature and environmental stress is 2 hours to 5 hours.
Optionally, in the step of heat and other static pressuring processes, argon gas is passed through into the high temperature insostatic pressing (HIP) stove, for producing
4MPa to 10MPa air pressure.
Optionally, the step of being de-gassed processing to the jacket includes：The initial alloy product is positioned over bag
After set, processing is de-gassed to the jacket, the vacuum after degassing process in the vacuum canning is at least 1E-3Pa, and
The vacuum canning is set to keep sealing state during the heat and other static pressuring processes.
Optionally, the technological temperature of the degassing process is 100 DEG C to 120 DEG C, and degassing time is 2.5 hours to 3.5 small
When.
Optionally, it is described before being de-gassed processing to the jacket after the initial alloy product being loaded into jacket
Manufacture method also includes：The jacket is sealed by the way of argon arc welding；A deaeration pipe is drawn in the jacket；Described de-
In the step of gas disposal, the jacket is de-gassed by the deaeration pipe.
Optionally, after sealing the jacket by the way of the argon arc welding, before being de-gassed processing to the jacket, institute
Stating manufacture method also includes：The seal of the jacket after argon arc welding is detected using helium leak method.
Optionally, the material of the jacket is aluminium.
Optionally, after completing the heat and other static pressuring processes, before removing the vacuum canning, the manufacture method also includes：
Pressure cooling is carried out to the vacuum canning.
Optionally, there is provided after the first aluminium alloy plate and the second aluminium alloy plate, formed before the initial alloy product, institute
Stating manufacture method also includes：First solder side and the second solder side are machined respectively；The machinery is completed to add
After work, ultrasonic wave cleaning treatment is carried out to first aluminium alloy plate and the second aluminium alloy plate；Complete at the ultrasonic wave cleaning
After reason, processing is dried to first aluminium alloy plate and the second aluminium alloy plate.
Optionally, turnery processing is carried out to first solder side and the second solder side respectively using diamond blade, added
Work to the surface smoothness of first solder side and the second solder side is 0.4 μm to 0.8 μm.
Optionally, the step of carrying out ultrasonic wave cleaning treatment to first aluminium alloy plate and the second aluminium alloy plate includes：
First aluminium alloy plate and the second aluminium alloy plate are placed in progress ultrasonic wave cleaning treatment in alcohol, ultrasonic wave cleaning treatment
Time is 15 minutes to 25 minutes.
Optionally, first aluminium alloy plate and the withering step of the second aluminium alloy plate are included：Using true
Empty drying box carries out the drying process, and drying temperature is 25 DEG C to 35 DEG C, and the vacuum of the drying box is at least 1E-2Pa,
Drying time is 50 minutes to 70 minutes.
Optionally, first aluminium alloy plate and the second aluminium alloy plate are used to form target backboard；Obtain alloy product
The step of in, obtain the target backboard with channel structure.
Compared with prior art, technical scheme has advantages below：
Initial alloy product is loaded jacket and processing is de-gassed to the jacket to form vacuum canning by the present invention
Afterwards, by carrying out heat and other static pressuring processes to the initial alloy product, it is possible to achieve first aluminium alloy plate and the second aluminium
The large-area welding of alloy sheets；In addition, the pressure of the heat and other static pressuring processes, temperature and process time control are reasonable, improving
While the weld strength of the alloy product of formation, the channel structure is avoided to deform or even block, so as to carry
The yield and performance of the high alloy product, the solder bond rate of the alloy product of formation can be up to more than 95%, because
This can be avoided the alloy product that sealing-off occurs in use.
In alternative, there is provided after the first aluminium alloy plate and the second aluminium alloy plate, formed the initial alloy product it
Before, turnery processing is carried out to first solder side and the second solder side using diamond blade respectively, to improve described first
The surface smoothness of solder side and the second solder side, and first aluminium alloy plate and the second aluminium alloy plate are placed in alcohol
Row ultrasonic wave cleaning treatment, to remove surface and oil contaminant or impurity；Then using vacuum drying chamber to first aluminium alloy plate and
Processing is dried in second aluminium alloy plate, while drying purpose is reached, prevents first aluminium alloy plate and the second aluminium from closing
Golden plate surface is oxidized, and is follow-up heat and other static pressuring processes to improve the Surface atomic mobility of the first solder side and the second solder side
Good interfacial state is provided, so as to be advantageous to improve the solder bond intensity of first aluminium alloy plate and the second aluminium alloy plate.
Brief description of the drawings
Fig. 1 is the schematic flow sheet of the embodiment of manufacture method one of alloy product of the present invention；
Fig. 2 to Fig. 8 is the structural representation of each step in embodiment illustrated in fig. 1.
Embodiment
From background technology, the yield of alloy product has much room for improvement.Its reason is analyzed to be：
6061 alloy products in order to reach good high temperature deformation resistance performance, using complicated channel structure designed by inside.
During the use of 6061 alloy product, continuously cooling water is flowed into the channel structure, so as to
Take away the substantial amounts of heat of product surface.
Wherein, the welding generally use vacuum brazing of 6061 alloy products, fusing lead welding, intermediate layer connecting welding and liquid
The methods of phase diffusion welding (DW).6061 alloy products formed by above welding manner, make the welding of alloy product to be formed
When intensity is higher, easily causes channel structure to deform or even block, so as to cause water flowing underfed, influence product and dissipate
Heat, and then the problems such as easily cause the alloy product temperature too high and scrap；When solve the problems, such as water channel deformation or block
When, the problems such as weld strength is inadequate easily be present, so as to easily cause the alloy product that sealing-off occurs in use.
Accordingly, it is difficult to while weld strength requirement is met, water channel is deformed and carries out management and control.
In order to solve the above problems, the present invention provides a kind of manufacture method of alloy product, including：The conjunction of first aluminium is provided
Golden plate and the second aluminium alloy plate, the surface to be welded of first aluminium alloy plate is the first solder side, second aluminium alloy plate
Surface to be welded is the second solder side；First solder side is plane, has groove in second solder side；It is or described
Groove is respectively provided with first solder side and the second solder side；First solder side and the second solder side are oppositely arranged and pasted
Close, and the channel structure surrounded by groove is formed between first solder side and the second solder side, to form initial aluminum conjunction
Golden product；After the initial alloy product is loaded into jacket and processing is de-gassed to the jacket to form vacuum canning,
Heat and other static pressuring processes are carried out to the initial alloy product；The vacuum canning is removed, obtains alloy product.
Initial alloy product is loaded jacket and processing is de-gassed to the jacket to form vacuum canning by the present invention
Afterwards, by carrying out heat and other static pressuring processes to the initial alloy product, it is possible to achieve first aluminium alloy plate and the second aluminium
The large-area welding of alloy sheets；In addition, the pressure of the heat and other static pressuring processes, temperature and process time control are reasonable, improving
While the weld strength of the alloy product of formation, the channel structure is avoided to deform or even block, so as to carry
The yield and performance of the high alloy product, the solder bond rate of the alloy product of formation can be up to more than 95%, because
This can be avoided the alloy product that sealing-off occurs in use.
It is understandable to enable the above objects, features and advantages of the present invention to become apparent, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in detail.
It refer to Fig. 1, Fig. 1 is the schematic flow sheet of the embodiment of manufacture method one of alloy product of the present invention, this implementation
The manufacture method of example alloy product includes following basic step：
Step S1：There is provided the first aluminium alloy plate and the second aluminium alloy plate, the surface to be welded of first aluminium alloy plate is the
One solder side, the surface to be welded of second aluminium alloy plate is the second solder side；First solder side is plane, described second
There is groove in solder side；Or it is respectively provided with groove in first solder side and the second solder side；
Step S2：First solder side is oppositely arranged and is bonded with second solder side, and in the described first weldering
The channel structure surrounded by groove is formed between junction and the second solder side, to form initial alloy product；
Step S3：The initial alloy product is loaded in jacket, processing is then de-gassed to the jacket with shape
Into vacuum canning；
Step S4：After forming the vacuum canning, heat and other static pressuring processes are carried out to the initial alloy product；
Step S5：The vacuum canning is removed, obtains alloy product.
In order to which the manufacture method of the alloy product of the embodiment of the present invention is better described, below in conjunction with referring to figs. 2 to
Fig. 8, the specific embodiment of the present invention is further described.
With reference to referring to figs. 2 and 3 execution step S1, there is provided the first aluminium alloy plate 100 (as shown in Figure 2) and the second aluminium close
Golden plate 200 (as shown in Figure 3), the surface to be welded of first aluminium alloy plate 100 are the first solder side 101 (as shown in Figure 2), institute
The surface to be welded for stating the second aluminium alloy plate 200 is the second solder side 201 (as shown in Figure 3)；First solder side 101 is flat
Face, second solder side 201 is interior to have groove 210 (as shown in Figure 3).
The shape of cross section of first aluminium alloy plate 100 can be circle, rectangle, annular or other analogous shape (bags
Include regular shape and irregular shape) any of, the shape of cross section of second aluminium alloy plate 200 can be it is circular,
Any of rectangle, annular or other analogous shapes (including regular shape and irregular shape).In the present embodiment, described
One aluminium alloy plate 100 is identical with the shape of cross section of the second aluminium alloy plate 200, and the aluminium of the first aluminium alloy plate 100 and second closes
The shape of cross section of golden plate 200 is circle.
In the present embodiment, the material of the aluminium alloy plate 200 of the first aluminium alloy plate 100 and second is 6061 aluminium alloys.Its
In, 6061 aluminium alloys refer to doped with elements such as magnesium, silicon and form Mg2The aluminium alloy of Si phases；The aluminium alloy can also be mixed
It is miscellaneous to have copper or Zn-ef ficiency, to improve the intensity of the aluminium alloy.
6061 aluminium alloy has higher intensity, good corrosion resistance, weldability, and has preferable antioxygen
The property changed.In the present embodiment, the aluminium alloy plate 200 of the first aluminium alloy plate 100 and second is used to be formed after subsequent soldering processes
Target backboard.
In the present embodiment, first solder side 101 is plane, has groove 210 in second solder side 201, is used
After subsequently first solder side 101 and second solder side 201 are oppositely arranged and be bonded, in first solder side
101 and second form channel structure between solder side 201, the channel structure by the bottom of the groove 210 and side wall and
First solder side 101 surrounds.
In another embodiment, can also be：Groove is respectively provided with first solder side and the second solder side.Specifically
Ground, there is the first groove in first solder side, there is the second groove in second solder side, and first groove with
Second groove match；That is, the bearing of trend of first groove and the second groove is identical, and first groove and
The opening size of second groove is identical, described after first solder side and second solder side are oppositely arranged and be bonded
First groove and the second groove connect relatively, and accordingly, the channel structure is by the bottom of first groove and side wall and institute
The bottom and side wall for stating the second groove surround.
The shape of the groove 210 is depending on process requirements.In the present embodiment, the horizontal stroke of first aluminium alloy plate 100
Cross sectional shape is circle, and the groove 210 is shaped as spiral shape.In other embodiments, the groove can also be multiple
The groove of parallel arrangement.
It should be noted that after the aluminium alloy plate 200 of the first aluminium alloy plate 100 and second is provided, the manufacture method
Also include：The solder side 201 of the first solder side 101 and second is machined respectively；After completing the machining,
Ultrasonic wave cleaning treatment is carried out to the aluminium alloy plate 200 of the first aluminium alloy plate 100 and second；Complete at the ultrasonic wave cleaning
After reason, processing is dried to the aluminium alloy plate 200 of the first aluminium alloy plate 100 and second.
In the present embodiment, the aluminium alloy plate 200 of the first aluminium alloy plate 100 and second is machined to process requirements size
Afterwards, turnery processing is carried out to the solder side 201 of the first solder side 101 and second respectively using diamond blade, is machined to institute
The surface smoothness for stating the first solder side 101 and the second solder side 201 is 0.4 μm to 0.8 μm.
The diamond blade refers to the blade of the depositing diamond carbon film on ordinary rigid alloy blade, has high
Hardness and the advantages that wearability, low-friction coefficient, high elastic modulus, highly thermally conductive, low thermal coefficient of expansion, using the diamond
Blade carries out turning processing, and 101 and second solder side of the first solder side, 201 surfaces can be made smooth, in mirror status, from
And be advantageous to improve the contact effect of first solder side 101 and the second solder side 201, in follow-up heat and other static pressuring processes,
Be advantageous to the diffusion of contact surface atom, and then the combination that can improve the solder side 201 of the first solder side 101 and second is strong
Degree.
In the present embodiment, ultrasonic wave cleaning treatment is carried out to the aluminium alloy plate 200 of the first aluminium alloy plate 100 and second
Step includes：The aluminium alloy plate 200 of first aluminium alloy plate 100 and second is placed in progress ultrasonic wave cleaning treatment in alcohol.
By being placed in progress ultrasonic wave cleaning treatment in alcohol, first solder side 101 and second can be removed and welded
The surface and oil contaminant and impurity in face 201, so as to improve the bond strength of the follow-up solder side 201 of first solder side 101 and second.
If it should be noted that the alcohol concentration is too low, the DeGrain of surface and oil contaminant is removed, while can reduce
The Surface atomic mobility of the solder side 201 of first solder side 101 and second.Therefore, in the present embodiment, the alcohol is analysis
Absolute alcohol；It is the higher alcohol of concentration to analyze absolute alcohol, and alcohol concentration can reach 99.5%.
It should also be noted that, the time of the ultrasonic wave cleaning treatment is unsuitable too short, it is also unsuitable long.If when described
Between it is too short, remove the DeGrain of surface and oil contaminant；If the overlong time, easily cause process costs and the wave of time
Take；Prolonged ultrasonication can make the aluminium alloy plate 200 of the first aluminium alloy plate 100 and second generate heat simultaneously, and cause
The solder side 201 of first solder side 101 and second is aoxidized, and the expansion of surface atom can be hindered by aoxidizing the oxide-film of formation
Dissipate.Therefore, in the present embodiment, the time of the ultrasonic wave cleaning treatment is 15 minutes to 25 minutes.
In the present embodiment, to 100 and second aluminium alloy plate of the first aluminium alloy plate, the 200 withering step bag
Include：Processing is dried using vacuum drying chamber, the vacuum of the drying box is at least 1E-2Pa.
The drying process is carried out by using vacuum drying chamber, in the drying aluminium of the first aluminium alloy plate 100 and second
While alloy sheets 200, the surface of the aluminium alloy plate 200 of the first aluminium alloy plate 100 and second can be prevented to be oxidized, so as to
The Surface atomic mobility of the solder side 201 of the first solder side 101 and second can be improved, and then is advantageous to improve described first
The bond strength of the solder side 201 of solder side 101 and second.
It should be noted that in order to ensure the abundant drying of the aluminium alloy plate 200 of the first aluminium alloy plate 100 and second,
And avoid process costs and waste of time, in the present embodiment, drying temperature be 25 DEG C to 35 DEG C, drying time be 50 minutes extremely
70 minutes.
With reference to reference to figure 4 and Fig. 5, step S2 is performed, first solder side 101 and the second solder side 201 are set relatively
Put and be bonded, and formed between the solder side 201 of the first solder side 101 and second and surrounded by groove 210 (as shown in Figure 4)
Channel structure 300 (as shown in Figure 5), to form initial alloy product 400 (as shown in Figure 5).
The initial alloy product 400 provides Process ba- sis to be subsequently formed alloy product.
In the present embodiment, after first solder side 101 and the second solder side 201 are oppositely arranged and are bonded, described
Two solders side 201 surround hollow channel structure 300 with the groove 210；That is, form initial alloy product 400
Afterwards, the channel structure 300 is formed between the solder side 201 of the first solder side 101 and second.
After the follow-up aluminium alloy plate 200 of first aluminium alloy plate 100 and second completes welding to form alloy product,
During the use of the alloy product, make in the continuously cooling water inflow channel structure 300, it is described to take away
The substantial amounts of heat in alloy product surface, the lasting high temperature deformation resistance ability of the alloy product is realized, it is described so as to improve
The service life of alloy product, it is cost-effective.
With reference to figure 6, step S3 is performed, the initial alloy product 400 is loaded in jacket 501, then to the bag
Set 501 is de-gassed processing to form vacuum canning 501'.
By the degassing process, most gases in the vacuum canning 501' and lower boiling liquid are discharged
(such as aqueous vapor), vacuum, drying, the technique atmosphere of cleaning are formed in the vacuum canning 501', so as to be follow-up
Welding procedure provides good process environments.
It should be noted that after the initial alloy product 400 is loaded into jacket 501, the jacket 501 is taken off
Before gas disposal, the manufacture method also includes：The jacket 501 is sealed by the way of argon arc welding；In the jacket 501
Draw a deaeration pipe 505；Wherein, in the step of degassing process, the jacket 501 is carried out by the deaeration pipe 505
Degassing.
The jacket 501 includes jacket thin-walled 502, jacket lower cover 503 and jacket upper cover plate 504；The jacket 501 is logical
Welding fabrication is crossed, the wall thickness of the jacket 501 is 2mm to 3mm.
In the present embodiment, the material of the jacket 501 is aluminium, so as to avoid to the initial alloy product 400
Introduce excessive impurity.In another embodiment, stainless steel capsule can also be used.
Specifically, first the jacket thin-walled 502 and jacket lower cover 503 are welded by way of argon arc welding,
Then the initial alloy product 400 is loaded in the jacket 501 of the unwelded jacket upper cover plate 504, covered on jacket
The jacket upper cover plate 504 is soldered to the upper table of the jacket thin-walled 502 by way of argon arc welding again after cover plate 504
Face, to seal the jacket 501.
In the present embodiment, the deaeration pipe 505 is connected with vacuum equipment, the initial alloy product 400 will be housed
Jacket 501 be placed in heating furnace, open vacuum equipment the jacket 501 is de-gassed to form vacuum canning 501'；
After degassing process, the vacuum in the vacuum canning 501' is at least 1E-3Pa；After completing the degassing process, from heating furnace
It is middle to take out the vacuum canning 501', continuing to keep to close the deaeration pipe 505 in the state of its inner vacuum, making described true
Empty jacket 501' is internally formed a closed vacuum environment.
It should be noted that in order that the vacuum in the vacuum canning 501' reaches technological requirement, and can discharge
Lower boiling liquid, while in order to control process costs and time, in the present embodiment, the temperature of heating furnace is 100 DEG C to 120
DEG C, degassing time is 2.5 hours to 3.5 hours.
It should also be noted that, after sealing the jacket 501 by the way of the argon arc welding, the jacket 501 is carried out
Before degassing process, the manufacture method also includes：Using helium leak method detect argon arc welding after the jacket 501 it is closed
Property, to confirm whether the sealing of the jacket 501 is good.
With reference to figure 7, step S4 is performed, after forming the vacuum canning 501', the initial alloy product 400 is carried out
Heat and other static pressuring processes.
In the present embodiment, heat will be positioned over equipped with the initially alloy product 400 and the vacuum canning 501' to have held one's breath
In isostatic pressed stove, first heated up, until reaching technological temperature；Boosted after heating step, until reaching default ring
Border pressure；After boosting step, 2 hours to 5 hours are incubated under the technological temperature and default environmental stress.
In the present embodiment, the technological temperature is 530 DEG C to 630 DEG C, and the default environmental stress is 4MPa to 10MPa.
It should be noted that in the present embodiment, by way of first heating up and boosting afterwards, be advantageous to first solder side
101 and second solder side 201 uniform diffusion.Compared to the scheme of increasing temperature and pressure simultaneously, can avoid because first aluminium closes
Golden plate 100 starts to soften when temperature reaches more than 500 DEG C, and closes the first aluminium above the groove 210 (as shown in Figure 4)
Golden plate 100 because of the groove 210 of the space structure the problem of buckling deformation, and then can avoid under surface pressing effect
Harmful effect is produced to the atoms permeating of the solder side 201 of the first solder side 101 and second.
In the present embodiment, argon gas is passed through into the high temperature insostatic pressing (HIP) stove, for producing 4MPa to 10MPa air pressure, so as to
Make the vacuum canning 501' by from each gas pressure to impartial and comprehensive 4MPa to 10MPa.
It should be noted that in the present embodiment, technological temperature, environmental stress and soaking time taking for optimization has been done into
Match somebody with somebody.
When the technological temperature is less than 530 DEG C, because temperature is inadequate, first solder side 101 and second is caused to weld
The surface atom of junction 201 is difficult to obtain enough diffusion activation energies, i.e., the described solder side 201 of first solder side 101 and second
Material between be difficult to thoroughly be diffused, so as to which sealing-off occurs for the alloy product that easily results in；When the technique
When temperature is higher than 630 DEG C, too high technological temperature makes the vacuum canning 501' be in rugged environment, easily causes vacuum
Jacket 501' deformation or cracking, the vacuum canning 501' may what is more melted or makes the vacuum canning 501'
Reacted with the initial alloy product 400, cause scrapping for alloy product.
When the default environmental stress is less than 4MPa, because the power applied on the vacuum canning 501' is not big enough,
Cause to be difficult to thoroughly be diffused between the material of the solder side 201 of the first solder side 101 and second, so as to easily cause
Sealing-off occurs for the alloy product of formation；When the default environmental stress is more than 10MPa, for having completed best welding
The initial alloy product 400 of effect, it is difficult to further improve the combination of the solder side 201 of the first solder side 101 and second
Intensity, the energy is wasted on the contrary, or even too high environmental stress may make the vacuum canning 501' deform upon or ftracture；This
Outside, too high default environmental stress easily causes the channel structure 300 to deform or even block.
When the soaking time is less than 2 hours, fallen short of due to applying the stressed time under proper temperature and pressure,
The surface atom of first solder side 101 and the second solder side 201 is difficult to fully spread, so as to cause first solder side
101 is poor with the welding effect of the second solder side 201, and then sealing-off occurs for the alloy product easily resulted in；Work as insulation
When time is more than 5 hours, the initial alloy product 400 for having completed best welding effect, it is difficult to further improve
The bond strength of the solder side 201 of first solder side 101 and second, the energy is wasted on the contrary, reduces manufacture efficiency.
It should be noted that in the temperature-rise period, programming rate should not be excessively slow, also unsuitable too fast.If heating speed
Spend soon, the furnace temperature of the high temperature insostatic pressing (HIP) stove is not easy to spread, and easily causes the problem of furnace temperature is uneven, inclined so as to produce furnace temperature
Difference, and then influence follow-up welding effect；If programming rate is excessively slow, accordingly, the heating-up time is long, easily causes production effect
Rate declines.Therefore, in the present embodiment, programming rate is 5 DEG C/H to 10 DEG C/H.
It should also be noted that, in the boost process, the rate of rise should not be excessively slow, also unsuitable too fast.If boosting
Excessive velocities, the pressure for easily causing the vacuum canning 501' to be subject at a moment is excessive, so as to easily cause the vacuum
Jacket 501' deforms upon or ftractureed, and is also easy to cause the channel structure 300 to deform or even block；If the rate of rise
Cross slowly, accordingly, pressure rising time is long, easily causes production efficiency decline.Therefore, in the present embodiment, rate of rise 5MPa/
H to 7MPa/H.
It should also be noted that, the technological temperature of the heat and other static pressuring processes is 530 DEG C to 630 DEG C, the technological temperature
Close to the solidus of 6061 aluminium alloys (solidus temperature of 6061 aluminium alloys is 582 DEG C)；Simultaneously to the vacuum canning 501'
Upper application certain pressure, the pressure make the oxide-film of the solder side 201 of the first solder side 101 and second gradually be broken carefully
Change, now the magnesium elements in 6061 aluminium alloy and the oxide-film (Al of the refinement2O3) reduction reaction occurs, and with pressure
The lasting increase of power, the speed that is refined of surface film oxide increase therewith, so as to accelerate the reduction reaction, and then improve
The solder bond intensity of the solder side 201 of first solder side 101 and second.
Therefore, in the present embodiment, default environmental stress, technological temperature and the process time setting of the heat and other static pressuring processes
Rationally, the bond strength of first solder side 101 and the second solder side 201 is higher, and can avoid the channel structure 300
Deform or even block.After completing the heat and other static pressuring processes, the solder bond rate of the initial alloy product 400 is reachable
To more than 95%, the deflection of the channel structure 300 is can be controlled within 1%, is closed so as to improve the aluminium being subsequently formed
The yield and performance of golden product.
In the present embodiment, after completing the heat and other static pressuring processes, the manufacture method also includes：To the vacuum canning
501' carries out pressure cooling.
Specifically, after completing the heat and other static pressuring processes, high temperature insostatic pressing (HIP) stove is closed, is made using the method for furnace cooling described
Vacuum canning 501' goes to press and be cooled to 25 DEG C to 200 DEG C of room temperature naturally, and methods described avoids the rapid drawdown of temperature, to improve
State the weld strength of the initial alloy product 400 after heat and other static pressuring processes.
With reference to figure 8, step S8 is performed, it is as shown in Figure 7 to remove the vacuum canning 501'(), obtain alloy product 600.
Specifically, after going pressure to cool down the vacuum canning 501', by mechanical processing techniques such as turnery processings by described in
The vacuum canning 501' materials on initial alloy product 400 (as shown in Figure 7) surface remove, and obtain alloy product 600.
In the present embodiment, the alloy product 600 is the target backboard with channel structure 300, is subsequently also needed and target blankss
Welded, form target material assembly.
The present invention takes off initial alloy product 400 loading jacket 501 (as shown in Figure 6) and to the jacket 501
After gas disposal is to form vacuum canning 501', by carrying out heat and other static pressuring processes, Ke Yishi to the initial alloy product 400
Existing first aluminium alloy plate 100 (as shown in Figure 4) and the large-area welding of the second aluminium alloy plate 200 (as shown in Figure 4)；This
Outside, the pressure of the heat and other static pressuring processes, temperature and process time control are reasonable, are improving the alloy product 600 of formation (such as
Shown in Fig. 8) weld strength while, avoid the channel structure 300 (as shown in Figure 5) deform in addition block, so as to
The yield and performance of the alloy product 600 can be improved, the solder bond rate of the alloy product 600 of formation can be up to
More than 95%, therefore can avoid the alloy product 600 that sealing-off occurs in use.
Although oneself is disclosed as above the present invention with preferred embodiment, the present invention is not limited to this.Any art technology
Personnel, without departing from the spirit and scope of the present invention, it can make various changes or modifications, therefore protection scope of the present invention should
It is defined when by claim limited range.
Claims (16)
- A kind of 1. manufacture method of alloy product, it is characterised in that including：There is provided the first aluminium alloy plate and the second aluminium alloy plate, the surface to be welded of first aluminium alloy plate is the first solder side, institute The surface to be welded for stating the second aluminium alloy plate is the second solder side；First solder side is plane, is had in second solder side It is fluted；Or it is respectively provided with groove in first solder side and the second solder side；First solder side and the second solder side are oppositely arranged and be bonded, and in first solder side and the second solder side Between form the channel structure that is surrounded by groove, to form initial alloy product；After the initial alloy product is loaded into jacket and processing is de-gassed to the jacket to form vacuum canning, to institute State initial alloy product and carry out heat and other static pressuring processes；The vacuum canning is removed, obtains alloy product.
- 2. the manufacture method of alloy product as claimed in claim 1, it is characterised in that first aluminium alloy plate and second The material of aluminium alloy plate is 6061 aluminium alloys.
- 3. the manufacture method of alloy product as claimed in claim 1, it is characterised in that the step of the heat and other static pressuring processes Including：The vacuum canning is positioned in high temperature insostatic pressing (HIP) stove；The high temperature insostatic pressing (HIP) stove is set to be heated up, until reaching technological temperature；After heating, the high temperature insostatic pressing (HIP) stove is set to be boosted, until reaching default environmental stress；Heat-insulation pressure keeping is carried out under the technological temperature and default environmental stress.
- 4. the manufacture method of alloy product as claimed in claim 3, it is characterised in that the parameter of the heat and other static pressuring processes Including：Technological temperature is 530 DEG C to 630 DEG C, and it is 4MPa to 10MPa to preset environmental stress, in the technological temperature and default ring Process time under the pressure of border is 2 hours to 5 hours.
- 5. the manufacture method of alloy product as claimed in claim 4, it is characterised in that in the step of the heat and other static pressuring processes In rapid, argon gas is passed through into the high temperature insostatic pressing (HIP) stove, for producing 4MPa to 10MPa air pressure.
- 6. the manufacture method of alloy product as claimed in claim 3, it is characterised in that processing is de-gassed to the jacket The step of include：After the initial alloy product is positioned over into jacket, processing is de-gassed to the jacket, after degassing process Vacuum in the vacuum canning is at least 1E-3Pa, and protects the vacuum canning during the heat and other static pressuring processes Hold sealing state.
- 7. the manufacture method of alloy product as claimed in claim 1, it is characterised in that the technological temperature of the degassing process For 100 DEG C to 120 DEG C, degassing time is 2.5 hours to 3.5 hours.
- 8. the manufacture method of alloy product as claimed in claim 1, it is characterised in that fill the initial alloy product After entering jacket, before being de-gassed processing to the jacket, the manufacture method also includes：Sealed by the way of argon arc welding The jacket；A deaeration pipe is drawn in the jacket；In the step of degassing process, the jacket is de-gassed by the deaeration pipe.
- 9. the manufacture method of alloy product as claimed in claim 8, it is characterised in that sealed by the way of argon arc welding After the jacket, before being de-gassed processing to the jacket, the manufacture method also includes：Argon is detected using helium leak method The seal of the jacket after arc welding.
- 10. the manufacture method of alloy product as claimed in claim 1, it is characterised in that the material of the jacket is aluminium.
- 11. the manufacture method of alloy product as claimed in claim 1, it is characterised in that complete the heat and other static pressuring processes Afterwards, before removing the vacuum canning, the manufacture method also includes：Pressure cooling is carried out to the vacuum canning.
- 12. the manufacture method of alloy product as claimed in claim 1, it is characterised in that the first aluminium alloy plate and the are provided After two aluminium alloy plates, formed before the initial alloy product, the manufacture method also includes：Welded respectively to described first Face and the second solder side are machined；After completing the machining, ultrasonic wave cleaning treatment is carried out to first aluminium alloy plate and the second aluminium alloy plate；After completing the ultrasonic wave cleaning treatment, processing is dried to first aluminium alloy plate and the second aluminium alloy plate.
- 13. the manufacture method of alloy product as claimed in claim 12, it is characterised in that right respectively using diamond blade First solder side and the second solder side carry out turnery processing, are machined to the surface of first solder side and the second solder side Finish is 0.4 μm to 0.8 μm.
- 14. the manufacture method of alloy product as claimed in claim 12, it is characterised in that to first aluminium alloy plate and The step of second aluminium alloy plate progress ultrasonic wave cleaning treatment, includes：First aluminium alloy plate and the second aluminium alloy plate are placed in Ultrasonic wave cleaning treatment is carried out in alcohol, the time of ultrasonic wave cleaning treatment is 15 minutes to 25 minutes.
- 15. the manufacture method of alloy product as claimed in claim 12, it is characterised in that to first aluminium alloy plate and The withering step of second aluminium alloy plate includes：The drying process is carried out using vacuum drying chamber, drying temperature is 25 DEG C to 35 DEG C, the vacuum of the drying box is at least 1E-2Pa, and drying time is 50 minutes to 70 minutes.
- 16. the manufacture method of alloy product as claimed in claim 1, it is characterised in that first aluminium alloy plate and Two aluminium alloy plates are used to form target backboard；In the step of obtaining alloy product, the target backboard with channel structure is obtained.
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| CN108356407A (en) * | 2018-03-28 | 2018-08-03 | 北京航空航天大学 | A kind of nickel base superalloy multilevel access structure diffusion joint forming method |
| CN109108453A (en) * | 2018-10-09 | 2019-01-01 | 北京航空航天大学 | A kind of method of the efficient diffusion welding (DW) of nickel base superalloy channel design |
| CN110303264A (en) * | 2019-07-19 | 2019-10-08 | 宁波江丰电子材料股份有限公司 | The production method and cooling water channel of cooling water channel |
| CN110369897A (en) * | 2019-08-06 | 2019-10-25 | 宁波江丰电子材料股份有限公司 | A kind of welding method of target and backboard |
| CN111421258A (en) * | 2020-04-09 | 2020-07-17 | 宁波江丰电子材料股份有限公司 | Welding method of high-purity aluminum target |
| CN112453673A (en) * | 2020-11-05 | 2021-03-09 | 中国航发北京航空材料研究院 | Welding method for thin-wall close-packed hole column complex-structure laminate |
| CN114713962A (en) * | 2022-02-25 | 2022-07-08 | 北京华卓精科科技股份有限公司 | Diffusion welding tool, diffusion welding equipment and diffusion welding method |
| CN114918525A (en) * | 2022-05-25 | 2022-08-19 | 宁波江丰电子材料股份有限公司 | Target material cooling back plate and welding method thereof |
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| CN112453673A (en) * | 2020-11-05 | 2021-03-09 | 中国航发北京航空材料研究院 | Welding method for thin-wall close-packed hole column complex-structure laminate |
| CN114713962A (en) * | 2022-02-25 | 2022-07-08 | 北京华卓精科科技股份有限公司 | Diffusion welding tool, diffusion welding equipment and diffusion welding method |
| CN114918525A (en) * | 2022-05-25 | 2022-08-19 | 宁波江丰电子材料股份有限公司 | Target material cooling back plate and welding method thereof |
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