CN104741773B - The welding method of tungsten titanium aluminum target material assembly - Google Patents
The welding method of tungsten titanium aluminum target material assembly Download PDFInfo
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- CN104741773B CN104741773B CN201310754922.7A CN201310754922A CN104741773B CN 104741773 B CN104741773 B CN 104741773B CN 201310754922 A CN201310754922 A CN 201310754922A CN 104741773 B CN104741773 B CN 104741773B
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- tungsten titanium
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/14—Preventing or minimising gas access, or using protective gases or vacuum during welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/021—Isostatic pressure welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/22—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded
- B23K20/227—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded with ferrous layer
- B23K20/2275—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded with ferrous layer the other layer being aluminium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/24—Preliminary treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/18—Dissimilar materials
Abstract
The welding method of a kind of tungsten titanium aluminum target material assembly, comprises the following steps: provide tungsten titanium target material, aluminum backboard, and described aluminum backboard has the groove accommodating the described tungsten titanium target material of part, and the degree of depth of described groove is 1～2mm；Being placed in by tungsten titanium target material in described groove, the junction to be welded of described tungsten titanium target material contacts with described groove floor, forms target material assembly blank；Described target material assembly blank is put into vacuum canning；Utilize heat and other static pressuring processes that the junction to be welded of described tungsten titanium target material is welded formation tungsten titanium aluminum target material assembly with described groove floor；After having welded, described vacuum canning is cooled down, remove described vacuum canning to obtain described tungsten titanium aluminum target material assembly.The method using the present invention is capable of the welding of target high intensity.
Description
Technical field
The present invention relates to semiconductor sputtering target material and manufacture field, particularly relate to a kind of tungsten titanium aluminum target material assembly
Welding method.
Background technology
In the semiconductor industry, target material assembly is the back of the body being combined with target by the target meeting sputtering performance
Plate is constituted.Backboard plays a supportive role in target material assembly, and has effect of conduction heat.
In sputter procedure, the working environment residing for target material assembly is more severe.Particularly as follows: target material assembly
Residing ambient temperature is higher, such as 300 DEG C to 600 DEG C；It addition, a side blow of target material assembly is with cooling
Water is the coldest, and opposite side is then in 10-9Under the high vacuum environment of Pa, therefore at relative the two of target material assembly
Side forms huge pressure differential；Furthermore, target material assembly is in high voltage electric field, magnetic field, can be by various
The bombardment of particle.Under such rugged environment, if welding between target with backboard in target material assembly
Intensity is poor, target will be caused to deform under heating condition, ftracture, makes sputtering be unable to reach sputtering all
Even effect, time serious, target can come off, in backboard, sputtering base station be caused damage.
For the target material assembly being made up of tungsten titanium target material and aluminum backboard, in prior art, tungsten titanium target material
Low with the weld strength of aluminum backboard, deflection is big, even cannot realize welding time serious, it is impossible to meet long
Phase steady production and the needs of use tungsten titanium aluminum target material assembly.
Summary of the invention
The technical problem to be solved in the present invention is back shaped with existing welding method welding tungsten titanium target material and aluminum
The weld strength of the target material assembly become is low, deflection big, even cannot realize welding, it is impossible to full time serious
Foot length phase steady production and the needs of use tungsten titanium aluminum target material assembly.
For solving above-mentioned technical problem, the present invention provides the welding method of a kind of tungsten titanium aluminum target material assembly, bag
Include following methods step:
Thering is provided tungsten titanium target material, aluminum backboard, described aluminum backboard has the groove accommodating the described tungsten titanium target material of part,
The degree of depth of described groove is 1～3mm；
Tungsten titanium target material is placed in described groove, the junction to be welded of described tungsten titanium target material and described groove floor
Contact, forms target material assembly blank；
Described target material assembly blank is put into vacuum canning；
Utilize heat and other static pressuring processes that with described groove floor, the junction to be welded of described tungsten titanium target material is welded formation
Tungsten titanium aluminum target material assembly；
After having welded, described vacuum canning is cooled down, remove described vacuum canning described to obtain
Tungsten titanium aluminum target material assembly.
Optionally, also include providing fixing target lasso, after described tungsten titanium target material being placed in described groove,
Before described target material assembly blank is put into vacuum canning, further comprising the steps of: the fixing target lasso of employing will
Carry out sheathed higher than the tungsten titanium target material of described groove.
Optionally, the material of described fixing target lasso is rustless steel.
Optionally, described tungsten titanium target material be shaped as cylinder, described fixing target lasso be shaped as circle
Ring cylinder.
Optionally, the mask to be welded of described tungsten titanium target material has bulge-structure.
Optionally, described fixing target lasso include in relative annular, annular lower surface and be positioned at annular
Outer shroud sidewall between upper, annular lower surface and interior ring-side wall,
The tungsten titanium target material using fixing target lasso to will be above described groove is carried out sheathed including: described fixing
Target lasso lower surface contacts with the reeded surface of tool of described aluminum backboard, and described interior ring-side wall is with described
Tungsten titanium target material sidewall has preset distance, the upper surface of described fixing target lasso and described tungsten titanium target material
To be sputtered equal, the opposite face that to be sputtered is described tungsten titanium target material junction to be welded of described tungsten titanium target material.
Optionally, described preset distance is 0.2 millimeter～0.5 millimeter.
Optionally, utilize heat and other static pressuring processes by the junction to be welded of described tungsten titanium target material and described groove floor
Welding forms the step of tungsten titanium aluminum target material assembly and includes:
Make the ambient temperature of vacuum canning for more than or equal to 400 DEG C and less than or equal to 500 DEG C, external rings
Border pressure is more than or equal to 95Mpa；
The described vacuum canning being pointed under described ambient temperature, environmental stress carries out being incubated, pressurize is more than
Equal to 3 and less than or equal to 5 hours.
Optionally, described vacuum canning is to be formed by the aluminum welding that thickness is 2.5mm～3.0mm；
After described target material assembly blank is put into vacuum canning, described vacuum canning is evacuated to vacuum
At least 10-3Pa, more described vacuum canning is sealed.
Groove floor, tungsten optionally, before tungsten titanium target material is placed in described groove, to described aluminum backboard
The junction to be welded of titanium target and fixing target lasso are carried out processing.
Compared with prior art, the advantage of technical scheme is:
The degree of depth of groove why 1～3mm.Reason is as follows: on the one hand can fix tungsten titanium target material and carry on the back with aluminum
The position of plate so that the junction to be welded of tungsten titanium target material is coaxial with the junction to be welded of aluminum backboard, meets vacuum and spatters
Shoot at the target material requirement.On the other hand, on the premise of ensureing that target correctly contacts with backboard, can be as far as possible
The thermal expansion of the minimizing aluminum backboard at high temperature horizontal direction impact on tungsten titanium target material, prevents in groove
Tungsten titanium target material is extruded and the situation of fragmentation occurs, thus realizes the high-intensity welding of tungsten titanium aluminum target material assembly.
By the setting of vacuum canning so that whole welding process is carried out under vacuum conditions, thus anti-
Only the surface of tungsten titanium target material and aluminum backboard is oxidized, and, hot isostatic press welding is unlike prior art
Limited by solder melt point, it is possible to well realize the atoms permeating of tungsten titanium and aluminum, therefore, the present invention's
Technical scheme can not only realize welding of tungsten titanium target material and aluminum backboard, the tungsten titanium aluminum target group that welding is formed
Part has higher weld strength.
Accompanying drawing explanation
Fig. 1 is the structural representation of the ingredient of the tungsten titanium aluminum target material assembly of the method formation of prior art；
Fig. 2 is that the structure of the tungsten titanium aluminum target material assembly blank ingredient in the specific embodiment of the present invention is shown
It is intended to；
Fig. 3 is the fixing target lasso perspective view in the specific embodiment of the invention；
Fig. 4 is the flat of the thread pattern of the junction to be welded formation of the tungsten titanium target material in the specific embodiment of the invention
Face enlarged diagram；
Fig. 5 is the cross section enlarged diagram in the AA direction along Fig. 4；
Fig. 6 is to carry out high temperature insostatic pressing (HIP) in the tungsten titanium aluminum target material assembly in the embodiment of the present invention is placed in vacuum canning
The schematic diagram of technique.
Detailed description of the invention
In prior art, the welding procedure of tungsten titanium target material and aluminum backboard is using tin solder or indium solder as weldering
The soldering processes of material.The fusing point of above-mentioned tin solder or indium solder is respectively less than 250 DEG C.Specific as follows:
With reference to Fig. 1, it is provided that tungsten titanium target material 11 and aluminum backboard 12.Tungsten titanium target material 11 is cylinder, including circle
Junction I to be welded to be sputtered the III relative with junction I to be welded, junction I to be welded and to be sputtered III are entered
The side IV that row connects.Described aluminum backboard 12 has the groove 121 accommodating described tungsten titanium target material 11.Groove 121
Sidewall Height more than tungsten titanium target material 11 side IV height.Then, solder is set at groove 121 bottom surface II
Layer 13.Then, tungsten titanium target material 11 is placed in described groove 13, and described tungsten titanium target material 11 is to be welded
Face I contacts with described groove 121 bottom surface II, finally, by junction I to be welded of tungsten titanium target material 11 and groove 121 end
Face carries out Welding and forms tungsten titanium aluminum target material assembly.
In prior art, tungsten titanium target material is low with the weld strength of aluminum backboard, and even some situation cannot realize
Welding, it is impossible to the reason of the needs meeting production steady in a long-term and use tungsten titanium aluminum target material assembly is as follows:
(1) tungsten titanium target material 11 differs greatly with the coefficient of expansion of aluminum backboard 12, wherein, and tungsten titanium target material 11
The coefficient of expansion is (5～7) × 10-6M/ DEG C, the thermal coefficient of expansion of aluminum backboard 12 is (22～25) × 10-6m/
℃.In welding process, the degree of thermal expansion of aluminum backboard 12 is far longer than the degree of thermal expansion of tungsten titanium target material 11,
So that groove 12 sidewall of aluminum backboard 12, bottom surface are simultaneously to tungsten titanium target material surrounding applying pressure, so,
Groove 121 can occur following deformation: recess sidewall and groove floor can bend thus tungsten titanium target material 11 is wrapped tightly
In interior.Due to, the toughness of tungsten titanium target material 11 is excessively poor, time serious, and the tungsten titanium extruded everywhere by groove 121
The easy fragmentation of target 11, thus welding of tungsten titanium target material 11 and aluminum backboard 12 cannot be realized.
(2) when using soldering processes to be welded with aluminum backboard 12 by tungsten titanium target material 11, tungsten titanium target material 11
Differ too big, such as with the fusing point of solder: the fusing point of tungsten is 3407 DEG C, the fusing point of titanium is 1668 DEG C, aluminum
Fusing point be 660 DEG C.Therefore, junction I to be welded of tungsten titanium target material and solder 13 are difficult to infiltration, merge,
Thus reduce tungsten titanium target material and the weld strength of aluminum backboard.
(3) after the method using prior art forms tungsten titanium aluminum target material assembly, by this tungsten titanium aluminum target material assembly
When being applied in the magnetron sputtering technique environment of High Temperature High Pressure, between tungsten titanium target material 11 and aluminum backboard 12
Solder easily melts, thus easily makes tungsten titanium target material come off mutually with aluminum backboard.
Therefore, present invention obtains the welding method of a kind of tungsten titanium aluminum target material assembly, above-mentioned skill can be avoided
Art problem.
Below in conjunction with the accompanying drawings the detailed description of the invention of the present invention is described in detail.In the following description
Elaborate a lot of detail so that fully understanding the present invention, but the present invention can also use other not
Being same as alternate manner described here to implement, therefore the present invention is not by following public specific embodiment
Limit.
First, with reference to Fig. 2, perform step S11, it is provided that tungsten titanium target material 21, aluminum backboard 22 and fixing target
Lasso 23, described aluminum backboard 22 has the groove 221 accommodating the described tungsten titanium target material of part 21, described recessed
The degree of depth 1～3mm of groove 221.
In the present embodiment, tungsten titanium target material 21 is cylinder, including circular junction I to be welded and junction to be welded
Relative for I to be sputtered III, the side IV that junction I to be welded and to be sputtered III are attached.
Aluminum backboard 22 is also cylinder, including upper surface, lower surface and the side between upper and lower surface.
Upper surface at aluminum backboard 22 has the groove 221 accommodating described tungsten titanium target material 11, described groove 221
Size is corresponding with described tungsten titanium target material 21.The bottom surface of groove 221 is junction II to be welded of aluminum backboard 22.
In the present embodiment, the degree of depth of groove 221 is 1～3mm.The degree of depth of groove 221 the most so sets,
Reason is as follows: on the one hand can fix the position of tungsten titanium target material 21 and aluminum backboard 22 so that tungsten titanium target material
Junction I to be welded of 21 is coaxial with junction II to be welded of aluminum backboard 22, meets sputtering requirement.On the other hand,
On the premise of ensureing that target correctly contacts with backboard, aluminum backboard at high temperature level can be reduced as far as possible
The thermal expansion in the direction impact on tungsten titanium target material, prevent the tungsten titanium target material 21 in groove 221 to be extruded and
Fragmentation.
Therefore, if the degree of depth of groove 221 is too big, under high temperature, the tungsten titanium target material 21 in groove 221 holds
Easily it is extruded and fragmentation.If the degree of depth of groove 221 is the least, it is not easy to the position of fixing tungsten titanium target material 21,
So that junction II to be welded of junction I to be welded of tungsten titanium target material 21 and aluminum backboard can not be coaxial, it is impossible to symbol
Close the requirement of vacuum sputtering target.
In the present embodiment, with reference to Fig. 3, fixing target lasso 23 is circle ring column, including annular upper surface
231 and annular lower surface 232, described annular upper surface 231 is relative with annular lower surface 232, fixing target
Material lasso 23 also includes the outer shroud sidewall 233 in annular, between annular lower surface and interior ring-side wall
234.In other embodiments, fixing target lasso is also provided with breach, and this breach can facilitate described solid
Removing and installing of targeting material lasso.
In the present embodiment, the external diameter of target lasso 23 is identical with the diameter of aluminum backboard 22.Target lasso 23
External diameter the most identical with the diameter of aluminum backboard 22, be because, the target material assembly blank being subsequently formed is put
When entering jacket, if the external diameter of target lasso 23 is too big, during high temperature insostatic pressing (HIP), unnecessary size
The easy vacuum canning of target lasso occurs local prominent, and local extrusion position pressurized is very big, thus easily
Vacuum canning is made to rupture.On the premise of the internal diameter of target lasso 23 is constant, the external diameter of target lasso 23
If the least, vacuum canning occurs local prominent equally, and local extrusion position pressurized is very big, thus holds
Vacuum canning is easily made to rupture.On the other hand, in the case of the external diameter of target lasso 23 is less than backboard diameter,
Can make and the jacket of target material assembly blank shape laminating, but this vacuum canning is not the cylinder of standard
Type, thus increase manufacture difficulty and the cost of manufacture of vacuum canning.
With continued reference to Fig. 2, perform step S12, tungsten titanium target material 21 is placed in described groove 221, institute
Junction I to be welded stating tungsten titanium target material 21 contacts with described groove 221 bottom surface, uses fixing target lasso 23
The tungsten titanium target material 21 that will be above described groove 221 carries out sheathed, forms target material assembly blank.
In the present embodiment, fixing target lasso 23 is used to will be above the tungsten titanium target material 21 of described groove 221
Carry out sheathed including: the annular lower surface 232 of described lasso 23 has groove with described aluminum backboard 22
The surface contact of 221, described interior ring-side wall 234 has preset distance with described tungsten titanium target material side IV,
The annular upper surface 231 of described fixing target lasso 23 and to be sputtered II phase of described tungsten titanium target material 21
Flat, the opposite face that to be sputtered II is described tungsten titanium target material junction I to be welded of described target.
In the present embodiment, the material of fixing target lasso 23 is rustless steel.Why select stainless steel material,
It is because stainless thermal coefficient of expansion less than aluminum.In other embodiments, fixing target lasso also may be used
Think the other materials that the coefficient of expansion is less than aluminum, the most constant steel, also known as invar alloy, permanent model steel,
Invar steel.In the present embodiment, the fixing target lasso 23 that stainless steel material makes is at follow-up high temperature insostatic pressing (HIP)
Deformation rate in technique also can be less.Therefore, the fixing target lasso 23 that rustless steel makes can substitute for aluminum
Groove fixes the position of tungsten titanium target material 21 so that the central shaft of tungsten titanium target material and the central shaft of aluminum backboard groove
Align, so that the target material assembly formed meets the requirement of vacuum sputtering target.
In the present embodiment, preset distance is 0.2 millimeter～0.5 millimeter.Too big, tungsten titanium target material 21 easily exists
Rock in fixing target lasso 23, it is impossible to play the effect of fixing tungsten titanium target material 21.The least, tungsten titanium target
Target lasso fixed by material 21 and rustless steel again can expansion contact after follow-up heat and other static pressuring processes so that crisp
The tungsten titanium of property is squeezed and causes fragmentation.
In the present embodiment, in order to improve tungsten titanium target material 21, the speed of welding of aluminum backboard 22, increase further
Tungsten titanium target material 21, the solder bond intensity of aluminum backboard 22, can use the method for machining to tungsten titanium target
Junction I to be welded of material 23 forms the bulge-structure being inserted into aluminum backboard junction to be welded 22, this bulge-structure
Cross section can in tip-angled shape, needle-like or boss-shaped.In subsequent technique, due to the quality of tungsten titanium target material 21
Softer than aluminum backboard 22, the above-mentioned bulge-structure of tungsten titanium target material 21 junction to be welded can be inserted directly into aluminum backboard
22, it is achieved aluminum backboard 22, the maximized void-free contact of tungsten titanium target material 21.Aluminum backboard in the present embodiment
22, the maximized void-free contact between tungsten titanium target material 21, in follow-up welding procedure, aluminum and tungsten
Gravitational force between atoms can be produced as soon as possible, so that there is atom phase counterdiffusion between aluminum with tungsten titanium between titanium.
Therefore, junction I to be welded of tungsten titanium target material 21 carries out above-mentioned patterned process, tungsten can not only be improved
Titanium target 21 and the speed of welding of aluminum backboard 22, and the welding that bond strength is high can also be realized.
Through performing creative labour, find that junction II to be welded at tungsten titanium target material 21 carries out machining formation
Following thread pattern, the solder bond of the tungsten titanium aluminum target material assembly that tungsten titanium target material 21 is formed with aluminum backboard 22
Intensity is the highest, and welding efficiency is the highest.
Fig. 4 is the plane enlarged diagram of the thread pattern of the junction I to be welded formation of tungsten titanium target material 21.Figure
5 is the cross section enlarged diagram in the AA direction along Fig. 4.Incorporated by reference to reference to Fig. 5 and Fig. 6, thread pattern
Protruding cross sectional shape is the isosceles triangle that multiple base angle is connected, and each triangular form is referred to as tooth form, screw thread
The thread height H1 of pattern is 0.19mm～0.43mm (including end points), and distance W1 on tooth form base is
0.44mm～0.7mm (includes end points).Angle between adjacent two tooth form sidewalls is that thread form angle α 1 is equal to 60
Degree, is the groove part of thread pattern between adjacent two tooth forms, and the distance between adjacent two tooth forms is spiral shell
Away from L1 equal to 0.44mm～0.7mm (including end points).
Use aqueous isopropanol to junction I to be welded of tungsten titanium target material 21, the junction to be welded of aluminum backboard 22 and not
Rust steel is fixed target lasso 23 and is carried out.The pollutant formed during for removing machining, and make
Target lasso 23 fixed by junction I to be welded of tungsten titanium target material 21, the junction to be welded of aluminum backboard 22 and rustless steel
Surface cleaning, prepares for follow-up welding procedure.Cleaning final vacuum is dried.Described drying time is
50～70min, baking temperature is 60～80 degrees Celsius.
In the present embodiment, why select to carry out machining in the junction to be welded of tungsten titanium target material 21, former
Because of as follows: the purity of aluminum backboard 22 is high, and quality is softer.Accordingly, with respect to aluminum backboard 22, tungsten titanium target material
21 have higher hardness, and the bulge-structure formed in the junction to be welded of tungsten titanium target material 21 is inserted into aluminum
In backboard 22.
In other embodiments, the junction to be welded of tungsten titanium target material does not carry out patterned process and forms protruding knot
The junction to be welded of the junction to be welded of tungsten titanium target material Yu aluminum backboard directly is carried out fitting falling within the present invention's by structure
Protection domain.
Then, with reference to Fig. 6, described target material assembly blank is put into vacuum canning 24.
The above-mentioned screw thread of the junction to be welded of tungsten titanium target material 21 inserts in aluminum backboard 22.Use fixing target set
The tungsten titanium target material 21 that circle 23 will be above described groove carries out sheathed, forms target material assembly blank.Afterwards,
This assembly to be welded is placed in vacuum canning 24.The acting as of vacuum canning 24 prevents assembly to be welded
Aoxidize in case of heating.It should be noted that the material of vacuum canning 24 selects to meet two
Individual condition, first condition is: the fusing point of vacuum canning 24 is higher than the temperature during subsequent heat, no
Then vacuum canning 24 can melt during subsequent heat；Second condition is: at follow-up tungsten titanium target material 21
With the welding process of aluminum backboard 22, the material of vacuum canning is capable of preferably pressure conduction, otherwise
Affect the welding quality of follow-up tungsten titanium target material and aluminum backboard, such as tungsten titanium target material 21 and aluminum backboard 22
Solder bond power is the best, and weld strength is the best.Preferably with the aluminium sheet being numbered 1060 in the present embodiment
The aluminum jacket that material makes.Why aluminium jacket, is because, for tungsten titanium target material with aluminum backboard,
The heat of aluminum jacket and the conducting effect of pressure are best.The thickness of vacuum canning 24 is 2.5mm～3.0mm.
If vacuum canning 24 is the thinnest, follow-up tungsten titanium target material and vacuum canning 24 in the welding process of aluminum backboard 22
Weld easily splits, and causes the phenomenon that assembly to be welded exposes and leaks gas；If vacuum canning 24 is the thickest,
Follow-up tungsten titanium target material 21 is not easily accomplished pressure conduction with vacuum canning 24 in the welding process of aluminum backboard 22.
Vacuum canning 24 can pass through Machine Design, such as CAD so that it is shape meets assembly to be welded
Shape, afterwards by seamless tubular goods or sheet material through splicing formation welded together, therefore, vacuum canning 24 can be tight
Target material assembly to be welded that closely connected conjunction is built-in and not by the size limitation of assembly to be welded, can weld
The welding of large-size target.Such as, in the present embodiment, vacuum canning 24 is by two rounded face and a side
Face is spliced into cylindrical shape, and this rounded face is identical with the area of the lower surface of aluminum backboard, vacuum canning 24
Side fits with the side of the side of aluminum backboard and fixing target lasso.As shown in Figure 6, this vacuum packet
Typically leave a hole 25 on set 24, may be used for drawing deaeration pipe from described vacuum canning 24, should
Deaeration pipe is connected with vaccum-pumping equipment.
Then, seal vacuum canning 14 and stay deaeration pipe.The technique sealed can be realized by argon arc welding,
Vacuum step is completed by deaeration pipe.
Being put in heating furnace by vacuum canning 24 and preheat, temperature is 100 DEG C～200 DEG C (including end points),
Then start limit heating edge evacuation, then carry out being incubated 1h～3h (including end points).Protect in described heating
During temperature, need vacuum canning 24 is continued evacuation, make the vacuum in vacuum canning 24 at least
Reach 10-3Pa.Inventor finds, target material assembly to be welded to tungsten titanium target material preheats, and is conducive to more preferably
Carry out evacuation process so that tungsten titanium target material 21 cannot be oxidized with aluminum backboard 22, thus improve after
The weld strength of continuous welding procedure.If heating-up temperature is too low, component to be welded is heated insufficient being unfavorable for
Follow-up welding operation nor the carrying out of beneficially evacuation；Heating-up temperature is too high, the crystalline substance of tungsten titanium target material
Grain is easily grown up, and crystallite dimension meeting over range, so that the tungsten titanium aluminum target material assembly formed does not meets and spatters
Penetrate the requirement of technique.Insulation 1h～3h can realize the inside temperature of whole tungsten titanium target material target material assembly to be welded
Degree reaches design temperature, uniformly if temperature retention time is too short, inside tungsten titanium target material target material assembly to be welded
Temperature can not thermally equivalent, impact be subsequently formed solder bond intensity；If temperature retention time is long, tungsten titanium
The crystal grain of target is easily grown up, and crystallite dimension meeting over range, the tungsten titanium aluminum target material assembly of formation does not meets and spatters
Penetrate the requirement of technique.Vacuum in vacuum canning 24 is if greater than 10-3Pa, the tungsten titanium in vacuum canning
Target target material assembly to be welded is oxidized easily in follow-up welding procedure；Vacuum in vacuum canning
The smaller the better.Vacuum in the present embodiment is the absolute pressure in given space, and conventional understand true
The concept of reciprocal of duty cycle is different.
Then, when continuing to keep vacuum canning 24 inner vacuum, vacuum canning 24 is closed
Gas technique, will close by deaeration pipe, makes vacuum canning be internally formed an airtight vacuum environment.Described
Technique of holding one's breath is to be realized by machining and welding, in the present embodiment, and can be with iron hammer by vacuum canning
The afterbody of deaeration pipe is pounded and flat is then sealed with argon arc welding.After technique of holding one's breath, the vacuum of described vacuum canning
At least 10-3Pa。
Limit heating edge continues the purpose of evacuation, on the one hand can increase the easness of lasting evacuation,
Improve the efficiency of evacuation；On the other hand, carry out holding one's breath under conditions of heating and thermal insulation technique time, degassing
Pipe meeting deliquescing, it is easier to the afterbody of deaeration pipe is shut.
Then to carry out welding procedure in vacuum canning 24 being placed in static pressure stove.
Then, with continued reference to Fig. 6, perform step S14, utilize heat and other static pressuring processes by described tungsten titanium target material
Junction to be welded weld with described groove floor formation tungsten titanium aluminum target material assembly.
So-called high temperature insostatic pressing (HIP) (hot isostatic pressing, HIP) is by target group to be welded for tungsten titanium target material
Part is placed in vacuum-packed vacuum canning, utilizes highly pressurised liquid or gases at high pressure the most under the high temperature conditions
Vacuum canning is applied each to impartial pressure, make vacuum canning keep one section in this high temperature and high pressure environment
Time is to weld together material tight to be welded.
Now, inside is provided with tungsten titanium target material 21, the vacuum canning 24 of aluminum backboard 22 is in High Temperature High Pressure ring
In border.Carried on the back with aluminum by tungsten titanium target material 21 in the target material assembly after selecting suitable technological parameter can make welding
Plate 22 has higher weld strength, concrete, inventor find to use following technological parameter it is achieved that
Ambient temperature residing for vacuum canning 24 is 400 DEG C～500 DEG C, utilizes highly pressurised liquid or gases at high pressure
Making the external environment condition pressure residing for vacuum canning 24 is more than or equal to 95Mpa, and, vacuum canning 24
This high temperature and high pressure environment keeps 3～5 hours.
The very thin thickness of vacuum canning 24, under the effect of outside environmental stress, vacuum canning 24 is permissible
Realize good pressure conduction so that the junction each to be welded of tungsten titanium target material 21, aluminum backboard 22 forms pressure, with
Time be positioned at for a long time in hot environment due to vacuum canning 24, tungsten titanium target material 21, respectively the treating of aluminum backboard 22
Solder side can occur plastic deformation and high-temerature creep to realize tungsten titanium target material 21 and the aluminum backboard 22 of little area
Between crystal grain contact, crystal grain contact area gradually expands under continuous effect, finally reaches to be welded
Place can realize crystal grain contact, so that form gravitational force between atoms between tungsten titanium and aluminum.
Then there is the atom phase counterdiffusion between tungsten titanium and aluminum at place to be welded, due to the tungsten titanium at place to be welded
Many spaces at place to be welded are made to disappear with the atom phase counterdiffusion between aluminum, meanwhile, place to be welded
Crystal boundary migration have left home position, even if reaching poised state, still has many little spaces to be retained in be welded
Meet place, cause the various crystal defect bulk depositions such as distortion of lattice, dislocation, room, place to be welded each
Junction energy to be welded significantly increases, and tungsten titanium and aluminum are in high level activation state, and then, tungsten titanium is former with aluminum
Sub-diffusive migration is very rapid, and quickly the tiny area at place to be welded is formed based on tungsten titanium-aluminum metal key
Want the joint of type of attachment, but the metallic bond at place to be welded reaches far away homogenization degree, weld strength
The highest.
So needing target material assembly to be welded for tungsten titanium target material in ambient temperature is 400 DEG C～500 DEG C, outward
Portion's environmental stress for more than or equal to carrying out under conditions of 95Mpa being incubated, pressurize 3～5 hours so that treating
The left space of connected components is wholly absent, and makes place to be welded all form metallic bond, i.e. realizes metallic bond
Homogenization, increases the weld strength treating aluminum weld assembly.Insulation, the dwell time if less than 3 hours,
The diffusion that can not make the metallic bond of tungsten titanium target material target material assembly to be welded is more uniform, and temperature retention time is such as
Fruit, more than 5 hours, can cause tungsten titanium target material crystal grain to grow up, can reduce the weld strength of metallic bond on the contrary.
If ambient temperature is less than 400 DEG C, aluminum or the atoms permeating of tungsten titanium can not be activated；External environment condition
If temperature is higher than 500 DEG C, cause the waste of cost, it addition, the crystal grain of tungsten titanium target material 21 can be made to grow up,
Do not meet the requirement of sputtering technology.If temperature continues to raise, tungsten titanium target material 21 and aluminum backboard 22 can be made
Fusing.If external environment condition pressure is less than 95Mpa, aluminum or the atoms permeating of tungsten titanium can not be activated equally；?
In the range of welding equipment allows, pressure is the biggest more is conducive to the atom between aluminum and the diffusion of tungsten titanium mutual
Diffusion, and then be more conducive to the carrying out of welding procedure.
Further, since vacuum canning 24 is not limited by target size and backboard size etc., can will be equipped with big
The vacuum canning 24 of size assembly to be welded is put in high temperature insostatic pressing (HIP) stove, uses the welding procedure of high temperature insostatic pressing (HIP)
I.e. under high temperature, condition of high voltage, vacuum canning 24 is applied each to equalization pressure to realize uniform large area
Welding, forms large-sized target material assembly.The weld welding rate of described large-sized target material assembly is high,
Weld strength is relatively big and is unlikely to deform.
Then, perform step S15, after having welded, vacuum canning is cooled down, remove vacuum canning
To obtain tungsten titanium aluminum target material assembly.
After having welded, vacuum canning 24 can be made to cool down in atmosphere, be cooled to less than 200 DEG C, then
By chemically or mechanically removing vacuum canning 24, and fixing target lasso can be taken off,
To obtain target material assembly, for example, it is possible to utilize turning process to be removed by vacuum canning 24, the most again
Through methods such as turning or line cuttings, thus prepare the target material assembly of final size.It should be noted that solid
Targeting material lasso is the most destroyed during welding, can reuse.
Finally, the welding situation of the present embodiment tungsten titanium aluminum target material assembly is detected:
C-SCAN (Water Immersion Ultrasonic C-scan system) is utilized to detect solder bond rate, should be by tungsten titanium target material
Its solder bond rate scope more than 99% of target material assembly and the solder bond intensity that are formed with aluminum backboard reach
More than 30Mpa.Result shows, uses the weldability of the target material assembly that welding method is obtained in the present invention
Can be the most reliable.
In other embodiments, if not using fixing target lasso can implement the present invention yet.
Although the present invention is open as above with preferred embodiment, but it is not for limiting the present invention, Ren Heben
Skilled person without departing from the spirit and scope of the present invention, the method that may be by the disclosure above
With technology contents, technical solution of the present invention is made possible variation and amendment, therefore, every without departing from this
The content of inventive technique scheme, according to the technical spirit of the present invention above example is made any simply
Amendment, equivalent variations and modification, belong to the protection domain of technical solution of the present invention.
Claims (9)
1. the welding method of a tungsten titanium aluminum target material assembly, it is characterised in that comprise the following steps:
Thering is provided tungsten titanium target material, aluminum backboard, described aluminum backboard has the groove accommodating the described tungsten titanium target material of part,
The degree of depth of described groove is 1～3mm；
Tungsten titanium target material is placed in described groove, the junction to be welded of described tungsten titanium target material and described groove floor
Contact, forms target material assembly blank；
Described target material assembly blank is put into vacuum canning；
Utilize heat and other static pressuring processes that with described groove floor, the junction to be welded of described tungsten titanium target material is welded formation
Tungsten titanium aluminum target material assembly；
After having welded, described vacuum canning is cooled down, remove described vacuum canning described to obtain
Tungsten titanium aluminum target material assembly；
Also include providing fixing target lasso, after being placed in by described tungsten titanium target material in described groove, by described
Before vacuum canning put into by target material assembly blank, further comprise the steps of: the fixing target lasso of employing and will be above institute
The tungsten titanium target material stating groove carries out sheathed.
Welding method the most according to claim 1, it is characterised in that the material of described fixing target lasso
For rustless steel.
Welding method the most according to claim 1, it is characterised in that being shaped as of described tungsten titanium target material is round
Cylinder, described fixing target lasso be shaped as circle ring column.
Welding method the most according to claim 1, it is characterised in that the junction to be welded of described tungsten titanium target material
There is bulge-structure.
Welding method the most according to claim 1, it is characterised in that described fixing target lasso includes phase
To annular on, annular lower surface and the outer shroud sidewall in annular, between annular lower surface and interior
Ring-side wall,
The tungsten titanium target material using fixing target lasso to will be above described groove is carried out sheathed including: described fixing
Target lasso lower surface contacts with the reeded surface of tool of described aluminum backboard, and described interior ring-side wall is with described
Tungsten titanium target material sidewall has preset distance, the upper surface of described fixing target lasso and described tungsten titanium target material
To be sputtered equal, the opposite face that to be sputtered is described tungsten titanium target material junction to be welded of described tungsten titanium target material.
Welding method the most according to claim 5, it is characterised in that described preset distance is 0.2 millimeter
～0.5 millimeter.
Welding method the most according to claim 1, it is characterised in that utilize heat and other static pressuring processes by described
The junction to be welded of tungsten titanium target material welds the step bag forming tungsten titanium aluminum target material assembly with described groove floor
Include:
Make the ambient temperature of vacuum canning for more than or equal to 400 DEG C and less than or equal to 500 DEG C, external rings
Border pressure is more than or equal to 95Mpa；
The described vacuum canning being pointed under described ambient temperature, environmental stress carries out being incubated, pressurize is more than
Equal to 3 and less than or equal to 5 hours.
Welding method the most according to claim 1, it is characterised in that described vacuum canning is to be by thickness
The aluminum welding of 2.5mm～3.0mm is formed；
After described target material assembly blank is put into vacuum canning, described vacuum canning is evacuated to vacuum
At least 10-3Pa, more described vacuum canning is sealed.
Welding method the most according to claim 1, it is characterised in that tungsten titanium target material is placed in described groove
Before, the groove floor of described aluminum backboard, the junction to be welded of tungsten titanium target material and fixing target lasso are entered
Row cleaning treatment.
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| CN109893263A (en) * | 2017-12-11 | 2019-06-18 | 无锡时代天使医疗器械科技有限公司 | Shelly-shaped dental appliance production method |
| CN108788655A (en) * | 2018-08-21 | 2018-11-13 | 北京航空航天大学 | A kind of method of nickel base superalloy annular element diffusion connection Kufil |
| CN111375881A (en) * | 2018-12-28 | 2020-07-07 | 宁波江丰电子材料股份有限公司 | Method for manufacturing target material |
| CN111001920A (en) * | 2019-12-25 | 2020-04-14 | 宁波江丰电子材料股份有限公司 | Hot isostatic pressing diffusion welding method |
| CN110977133A (en) * | 2019-12-25 | 2020-04-10 | 宁波江丰电子材料股份有限公司 | Diffusion welding method for ultrahigh-purity copper target |
| CN113020826A (en) * | 2021-03-16 | 2021-06-25 | 宁波江丰电子材料股份有限公司 | Diffusion welding method for nickel target and aluminum alloy back plate |
| CN113275731A (en) * | 2021-05-19 | 2021-08-20 | 宁波江丰电子材料股份有限公司 | Diffusion welding method for molybdenum target and back plate |
| CN114059028A (en) * | 2021-11-16 | 2022-02-18 | 宁波江丰电子材料股份有限公司 | Brazing structure of copper back plate and processing method thereof |
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| CN101537533A (en) * | 2009-04-15 | 2009-09-23 | 宁波江丰电子材料有限公司 | Welding structure and method of target and backing plate |
| CN101564793A (en) * | 2009-04-17 | 2009-10-28 | 宁波江丰电子材料有限公司 | Welding method of aluminum target blank and aluminum alloy backboard |
| CN102500908A (en) * | 2011-10-20 | 2012-06-20 | 宁波江丰电子材料有限公司 | Welding method of tungsten target assembly |
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| JP3905301B2 (en) * | 2000-10-31 | 2007-04-18 | 日鉱金属株式会社 | Tantalum or tungsten target-copper alloy backing plate assembly and manufacturing method thereof |
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| CN101537533A (en) * | 2009-04-15 | 2009-09-23 | 宁波江丰电子材料有限公司 | Welding structure and method of target and backing plate |
| CN101564793A (en) * | 2009-04-17 | 2009-10-28 | 宁波江丰电子材料有限公司 | Welding method of aluminum target blank and aluminum alloy backboard |
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