CN106158562A - The slow-wave structure of a kind of helix TWT and the preparation method of this slow-wave structure - Google Patents
The slow-wave structure of a kind of helix TWT and the preparation method of this slow-wave structure Download PDFInfo
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- CN106158562A CN106158562A CN201610740867.XA CN201610740867A CN106158562A CN 106158562 A CN106158562 A CN 106158562A CN 201610740867 A CN201610740867 A CN 201610740867A CN 106158562 A CN106158562 A CN 106158562A
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- helix
- supporting rod
- slow
- wave structure
- plane
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/16—Circuit elements, having distributed capacitance and inductance, structurally associated with the tube and interacting with the discharge
- H01J23/24—Slow-wave structures, e.g. delay systems
- H01J23/26—Helical slow-wave structures; Adjustment therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
- H01J25/34—Travelling-wave tubes; Tubes in which a travelling wave is simulated at spaced gaps
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Abstract
The invention discloses the slow-wave structure of a kind of helix TWT and the preparation method of this slow-wave structure, including being from inside to outside sequentially connected with fixing helix, supporting rod and shell；It is provided with active metallization layer on the face, effective coverage contacted with helix on supporting rod internal face；The joint face fixing for connection corresponding with supporting rod internal face in helix outside wall surface is that plane is arranged；Along the axis direction of helix, the outside wall surface of supporting rod is that the first inclined-plane is arranged；The internal face of shell is provided with second inclined-plane corresponding with the outside wall surface of supporting rod.The present invention is by using brazing metal so that after welding, solder can fill supporting rod and the slight void on helix contact surface so that it is being in close contact completely, its thermal resistance is the least；And by the preparation method of slow-wave structure provided by the present invention, the slow-wave structure obtained can be used in high-power spiral line row wave tube, has and can reduce thermal contact resistance, improve the advantages such as slow-wave structure radiating efficiency.
Description
Technical field
The present invention relates to vacuum electron device field, particularly to slow-wave structure and this slow wave of a kind of helix TWT
The preparation method of structure.
Background technology
Spiral line type travelling-wave tube is widely used in the multiple neck such as radar system, communication system because having wide band characteristic
Territory, but the heat-sinking capability of this kind of travelling-wave tube slow-wave structure is limited, restricts the raising of its mean power.
The slow-wave structure of conventional helical line travelling-wave tube is generally led to by helix, equally distributed three supporting rods and shell
Cross certain clamp method to combine.The pole shoe of high power travelling wave tube slow wave system many employings pure iron material closes with ambrose alloy at present
The shell that the gasket ring of gold copper-base alloy is welded, clamp method is in the cold state helix and supporting rod to be fixed post-heating shell
Make it slightly expand, utilize mould by helix and supporting rod assembly quick insertion shell.Helix and clamping in the method
Bar is that plane contact connects, and due to the impossible minute surface completely of contact surface on microcosmic, therefore certainly exists space, the biggest heat in space
Hindering the biggest, interface temperature rise is the biggest, and heat-sinking capability is the poorest；And affected by piece surface is coarse, use this chucking method to form
Slow wave system is meeting forming part space between helix and supporting rod interface, thus produces bigger thermal contact resistance, affects slow wave
The radiating efficiency of system.When mean power promotes further, travelling-wave tube prepared by the method easily occurs that helix is burned out
With job insecurity phenomenon.
Summary of the invention
First technical problem that the invention solves the problems that is to provide the slow-wave structure of a kind of helix TWT；This slow wave is tied
Structure is by using brazing metal so that after welding, solder can fill supporting rod and the slight void on helix contact surface so that it is
Being in close contact completely, thermal resistance is the least, can be considered and eliminates hot interface between helix and supporting rod, and on helix, all heats are equal
Can conduct to supporting rod, significantly reduce the thermal contact resistance between helix and supporting rod, substantially increase helix
The heat-sinking capability of travelling-wave tube slow-wave structure and radiating efficiency, while ensure that slow-wave structure has good axiality, also
Ensure that travelling-wave tube has higher Beam transmission；And slow-wave structure provided by the present invention is also by changing supporting rod
With the structure of shell, for make helix, supporting rod and shell in clamping process first prepackage so that a step complete integral installation
Join and provide prerequisite.
Second technical problem that the invention solves the problems that is to provide the preparation side of the slow-wave structure of a kind of helix TWT
Method；This preparation method by helix structure, supporting rod structure and the improvement of shell structure, at high temperature utilize " helix-
Supporting rod " interference fit between assembly and Can, three's weld interface is formed certain pressure, thus ties at slow wave
Structure clamping process realizes Can and pottery the welding of supporting rod, and while clamping, realizes supporting rod and helix
Welding, it is wrong with solder side on supporting rod that the slow-wave structure obtained by this preparation method is not susceptible to helix in welding process
Position, welds and clamping process can a step complete, and the slow-wave structure obtained by the method can be used for high-power spiral line row wave tube
In, and have and can reduce thermal contact resistance, improve the advantages such as slow-wave structure radiating efficiency.
For solving above-mentioned first technical problem, the present invention uses following technical proposals:
The slow-wave structure of a kind of helix TWT, described slow-wave structure includes from inside to outside being sequentially connected with fixing spiral
Line, supporting rod and shell；
It is provided with active metallization on the face, effective coverage contacted with described helix on described supporting rod internal face
Layer；
The joint face fixing with the described corresponding connection of supporting rod internal face that be used in described helix outside wall surface is flat
Face is arranged；
Along the axis direction of described helix, the outside wall surface of described supporting rod is that the first inclined-plane is arranged；Described shell interior
Wall is provided with second inclined-plane corresponding with the outside wall surface of described supporting rod, and described first inclined-plane mates with described second inclined-plane
Be connected and fixed.
Further, described active metallization layer includes the first metal layer, the second metal from inside to outside set gradually
Change layer and the 3rd metal layer；The material of described first metal layer is titanium, and thickness is 0.02-0.03 μm；Described second metal
The material changing layer is molybdenum, and thickness is 0.04-0.05 μm；The material of described 3rd metal layer is copper, and thickness is 4-5 μm.
Owing to supporting rod is ceramic material, the metal layer on tradition supporting rod only has one layer of spelter solder, with ceramic material
Bonding insecure.This patent have employed active metal titanium can produce chemical reaction, as metallization as ground floor, titanium and pottery
The substrate of layer can be more firm with ceramic bonding, and the swell increment that molybdenum is because molybdenum as the second layer is less, close with pottery, permissible
Between the pottery that the bigger copper of swell increment and swell increment are less, play transitional function, prevent owing to layers of copper expands the metal caused
Change pull-up to fall.
Further, along the axis front end of helix to axis after extreme direction, the incline direction on described first inclined-plane is in leaning on
The axis direction of nearly helix tilts.
Further, described slow-wave structure includes along described helix circumferential direction in three structures that uniformly arrangement is arranged
Identical supporting rod.
For solving above-mentioned second technical problem, the present invention uses following technical proposals:
The preparation method of the slow-wave structure of a kind of helix TWT, the method comprises the steps:
S1, the outside wall surface of supporting rod is processed into inclined-plane, obtains the first inclined-plane；
S2, according to the magnitude of interference, the internal face of the shell corresponding with the outside wall surface of supporting rod processes and described
The second inclined-plane that one inclined-plane coupling is corresponding；
S3, on described supporting rod internal face sputter active metallization layer；
S4, the joint face processing that being used in helix outside wall surface is fixed with the described corresponding connection of supporting rod internal face
Become plane；
S6, in the cold state, by the first inclined-plane and the cooperation on the second inclined-plane, along the axis direction of described helix, by spiral shell
Spin line, supporting rod and shell are fitted together in advance；Specifically, limit the relative position of shell one end, helix and clamping with mould
Bar inserts from the shell other end.
S7, add heat pipe shell, by fully-inserted to helix and supporting rod shell, it is thus achieved that the slow-wave structure of helix TWT.
Due to the position, face, effective coverage contacted with described helix on supporting rod internal face and helix outside wall surface in the present invention
In corresponding setting, and then after the fully-inserted shell of helix and supporting rod, it is possible to ensure the face, effective coverage on supporting rod
With the relative position between helix joint face.
Further, the method further comprises the steps:
S5, the active metallization layer removed on the non-active area face not contacted with helix on supporting rod internal face.
Further, described step S7 particularly as follows:
Add heat pipe shell, after its temperature rises to 900-950 DEG C, by fully-inserted to helix and supporting rod shell, insulation
3-5 minute, after cooling, i.e. obtain the slow-wave structure of helix TWT.
Further, described step S3 particularly as follows:
Beryllium oxide supporting rod is loaded in mask mould, only exposes the internal face contacted with helix on supporting rod,
First sputter one layer of titanium film, redeposited one layer of molybdenum film on this supporting rod internal face, finally sputter one layer of layers of copper, and then in supporting rod
Active metallization layer is formed on wall.
Further, the described magnitude of interference is 0.01mm.
The present invention compared with prior art, has a following actively beneficial effect:
1, slow-wave structure provided by the present invention by use brazing metal so that after welding solder can fill supporting rod with
Slight void on helix contact surface so that it is be in close contact completely, thermal resistance is the least, can be considered and eliminates helix and supporting rod
Between hot interface, on helix, all heats all can conduct to supporting rod, significantly reduce helix and supporting rod it
Between thermal contact resistance, substantially increase heat-sinking capability and the radiating efficiency of helix TWT slow wave structure, ensure that slow wave
While structure has good axiality, also ensure travelling-wave tube and there is higher Beam transmission.
2, being ceramic material due to supporting rod, the metal layer on tradition supporting rod only has one layer of spelter solder, with pottery material
Expect bonding insecure.This patent have employed active metal titanium can produce chemical reaction, as metal as ground floor, titanium and pottery
The substrate changing layer can be more firm with ceramic bonding, and the swell increment that molybdenum is because molybdenum as the second layer is less, close with pottery, can
Play transitional function with between the pottery that the copper bigger in swell increment and swell increment are less, prevent owing to layers of copper expands the gold caused
Genusization pull-up falls.
3, the preparation method of slow-wave structure provided by the present invention, by helix structure, supporting rod structure and shell
The improvement of structure, at high temperature utilizes " helix-supporting rod " interference fit between assembly and Can, welds three
Form certain pressure on interface, thus in slow-wave structure clamping process, realize welding of Can and ceramic supporting rod, and
Realizing welding of supporting rod and helix while clamping, the slow-wave structure obtained by this preparation method can be used for high-power
In helix TWT, have and can reduce thermal contact resistance, improve the advantages such as slow-wave structure radiating efficiency.
4, the preparation method of slow-wave structure provided by the present invention, uses in the cold state, oblique by the first inclined-plane and second
The cooperation in face, along the axis direction of described helix, is fitted together in advance by helix, supporting rod and shell, and the advantage of prepackage exists
In welding process, it is not susceptible to helix can a step complete with solder side dislocation on supporting rod, welding and clamping process.
Accompanying drawing explanation
Fig. 1 is the perspective view of helix in the present invention.
Fig. 2 is the structural front view of helix in the present invention.
Fig. 3 is one of perspective view of supporting rod in the present invention.
Fig. 4 is the structural front view of supporting rod in the present invention.
Fig. 5 is in the present invention the two of the perspective view of supporting rod.
Fig. 6 is in the present invention the three of the perspective view of supporting rod.
Fig. 7 is the structural representation of shell in the present invention.
Fig. 8 is the structural representation in inner wall of tube shell face in the present invention.
Fig. 9 is the Rotating fields schematic diagram of active metallization layer in the present invention.
Figure 10 is the schematic diagram that in the present invention, helix, supporting rod and shell are fitted together in advance.
Figure 11 is the overall structure schematic diagram of the present invention.
Figure 12 is the integrally-built axial view of the present invention.
Figure 13 is the interface internal-external temperature difference comparison diagram of slow-wave structure provided by the present invention and tradition slow-wave structure.
Figure 14 is the preparation method FB(flow block) of slow-wave structure provided by the present invention.
Detailed description of the invention
The detailed description of the invention of the present invention is described below in conjunction with the accompanying drawings.
As Fig. 1 is to shown in 13, and the slow-wave structure of a kind of helix TWT, described slow-wave structure includes the most successively
Connect fixing helix 1, supporting rod 2 and shell 3；Slow-wave structure described in the present embodiment includes along described helix 1 circumference
The supporting rod 2 that direction is identical in three structures that uniformly arrangement is arranged.
Activity gold it is provided with on the face, effective coverage 21 contacted with described helix 1 on described supporting rod 2 internal face
Genusization layer 4；The joint face 11 being used for fixing with the described supporting rod 2 corresponding connection of internal face in described helix 1 outside wall surface
Arrange for plane；Extreme direction after along axis 12 front end of helix 1 to axis 12, the outside wall surface of described supporting rod 2 is first oblique
Face 22 is arranged, and the incline direction on this first inclined-plane 22 tilts near axis 12 direction of helix 1；In described shell 3
Wall is provided with second inclined-plane 31 corresponding with the outside wall surface of described supporting rod 2, and described first inclined-plane 22 is second oblique with described
Face 31 is connected and fixed matchingly.
Further, described active metallization layer 4 includes first metal layer the 41, second gold medal from inside to outside set gradually
Genusization layer 42 and the 3rd metal layer 43；The material of described first metal layer 41 is titanium, and thickness is 0.02-0.03 μm；Described
The material of the second metal layer 42 is molybdenum, and thickness is 0.04-0.05 μm；The material of described 3rd metal layer 43 is copper, thickness
For 4-5 μm.
As Fig. 1 is to shown in 14, and a kind of preparation method of above-mentioned slow-wave structure in the present embodiment, the method includes as follows
Step:
S1, the outside wall surface of supporting rod 2 is processed into inclined-plane, obtains the first inclined-plane 22；
S2, according to the magnitude of interference, the internal face of the shell 3 corresponding with the outside wall surface of supporting rod 2 processes with described
First inclined-plane 22 mates the second inclined-plane 31 of correspondence；Described in the present embodiment, the magnitude of interference is specially 0.01mm；
S3, on described supporting rod 2 internal face sputter active metallization layer 4；Specifically, beryllium oxide supporting rod 2 is loaded
In mask mould, only expose the internal face contacted with helix 1 on supporting rod 2, this supporting rod 2 internal face first sputters one
Layer the first metal layer 41 titanium film, redeposited one layer of second metal layer 42 molybdenum film, finally one layer of the 3rd metal layer 43 of sputtering
Layers of copper, and then on supporting rod 2 internal face, form active metallization layer 4；
S4, the joint face 11 fixing with the described supporting rod 2 corresponding connection of internal face will be used in helix 1 outside wall surface
It is processed into plane；Wherein joint face 11 is 0.03-0.05mm with the difference in height of outside wall surface of helix that other are arcuation；
S5, pitch dimension according to helix 1, utilize blue laser remove on supporting rod 2 internal face not with helix 1 phase
Active metallization layer 4 on the non-active area face 23 of contact；And then the activity on face, effective coverage 21 on supporting rod 2 internal face
Metal layer 4 forms the solder side corresponding with the joint face 11 being processed to plane on helix 1；
S6, in the cold state, by coordinating, along axis 12 side of described helix 1 of the first inclined-plane 22 and the second inclined-plane 31
To, helix 1, supporting rod 2 and shell 3 are fitted together in advance；Specifically, limit the relative position of shell 3 one end, spiral shell with mould
Spin line 1 is inserted from the other end with supporting rod 2, owing to shell 3 inner chamber is taper, and the helix of insertion and the maximum of supporting rod assembly
Diameter is larger than remaining shell diameter, usually 0.005-0.01mm, so when prepackage, helix 1 and supporting rod 2 from
The other end insert until limit position.
S7, add heat pipe shell 3, after shell 3 temperature rises to 900 DEG C, by the most quick to helix 1 and supporting rod 2
Insert shell 3, be incubated 3-5 minute, after cooling, i.e. obtain the slow-wave structure of helix TWT.
It is a feature of the present invention that the copper by sputtered titanium on supporting rod 2, molybdenum with as solder forms active metallization
Layer 4, substitutes traditional single metal layer, and the combination between the active metallization layer and the beryllium oxide ceramics supporting rod 2 that make is more firm
Gu；And while clamping, realize welding of supporting rod 2 and helix 1, overcome conventional mounting arrangements, i.e. helix 1 with press from both sides
Hold bar 2 after shell 3 external welding is integral, loads the defect existing for shell 3；The present invention uses laser by active metal simultaneously
Change redundance on layer to remove, the high-frequency loss that chemical corrosion method brings can be avoided, by the attached present invention illustrated in fig. 13
The slow-wave structure provided and the interface internal-external temperature difference comparison diagram of tradition slow-wave structure, from figure, comparing result understands, the present invention
The slow-wave structure interface internal-external temperature difference provided is less than the interface internal-external temperature difference of tradition slow-wave structure, and interface internal-external temperature difference gets over novel
Bright thermal resistance is the least, and heat dispersion is the best, and then the slow-wave structure obtained by the present invention effectively reduces helix and supporting rod circle
Thermal contact resistance on face, is greatly improved its heat-sinking capability and radiating efficiency.
The word in the description orientation employed in Ben Wen " on ", D score, "left", "right" etc. be for explanation facilitate base
In accompanying drawing for the orientation shown in drawing, in actual device these orientation be likely to be due to device disposing way and
Different.
In sum, embodiment of the present invention only provides a kind of optimal embodiment, in the technology of the present invention
Hold and technical characterstic has revealed that as above, but one skilled in the art scholar is still potentially based on disclosed content and makees
The various replacements without departing substantially from creation spirit of the present invention and modification；Therefore, protection scope of the present invention is not limited to disclosed in embodiment
Technology contents, therefore all shapes under this invention, structure and principle done equivalence change, be encompassed by the protection model of the present invention
In enclosing.
Claims (9)
1. the slow-wave structure of a helix TWT, it is characterised in that described slow-wave structure includes from inside to outside being sequentially connected with
Fixing helix, supporting rod and shell；
It is provided with active metallization layer on the face, effective coverage contacted with described helix on described supporting rod internal face；
The joint face fixing with the described corresponding connection of supporting rod internal face that be used in described helix outside wall surface is that plane sets
Put；
Along the axis direction of described helix, the outside wall surface of described supporting rod is that the first inclined-plane is arranged；The internal face of described shell
Being provided with second inclined-plane corresponding with the outside wall surface of described supporting rod, described first inclined-plane connects matchingly with described second inclined-plane
Connect and be fixed together.
The slow-wave structure of a kind of helix TWT the most according to claim 1, it is characterised in that preferably, described work
Property metal layer includes the first metal layer, the second metal layer and the 3rd metal layer from inside to outside set gradually；Described
The material of the first metal layer is titanium, and thickness is 0.02-0.03 μm；The material of described second metal layer is molybdenum, and thickness is
0.04-0.05μm；The material of described 3rd metal layer is copper, and thickness is 4-5 μm.
The slow-wave structure of a kind of helix TWT the most according to claim 1, it is characterised in that preferably, along spiral
The axis front end of line tilts to extreme direction after axis, the incline direction on described first inclined-plane in the axis direction near helix.
The slow-wave structure of a kind of helix TWT the most according to claim 1, it is characterised in that preferably, described slowly
Wave structure includes along the supporting rod that described helix circumferential direction is identical in three structures that uniformly arrangement is arranged.
5. the preparation method of the slow-wave structure of a helix TWT, it is characterised in that the method comprises the steps:
S1, the outside wall surface of supporting rod is processed into inclined-plane, obtains the first inclined-plane；
S2, according to the magnitude of interference, the internal face of the shell corresponding with the outside wall surface of supporting rod processes first oblique with described
The second inclined-plane that face coupling is corresponding；
S3, on described supporting rod internal face sputter active metallization layer；
S4, the joint face fixing with the described corresponding connection of supporting rod internal face that be used in helix outside wall surface is processed into flat
Face；
S6, in the cold state, by the first inclined-plane and the cooperation on the second inclined-plane, along the axis direction of described helix, by helix,
Supporting rod and shell are fitted together in advance；
S7, add heat pipe shell, by fully-inserted to helix and supporting rod shell, it is thus achieved that the slow-wave structure of helix TWT.
Preparation method the most according to claim 5, it is characterised in that preferably, the method further includes walking as follows
Rapid:
S5, the active metallization layer removed on the non-active area face not contacted with helix on supporting rod internal face.
Preparation method the most according to claim 5, it is characterised in that preferably, described step S7 particularly as follows:
Adding heat pipe shell, after its temperature rises to 900-950 DEG C, by fully-inserted to helix and supporting rod shell, insulation 3-5 divides
Clock, i.e. obtains the slow-wave structure of helix TWT after cooling.
Preparation method the most according to claim 5, it is characterised in that preferably, described step S3 particularly as follows:
Beryllium oxide supporting rod is loaded in mask mould, only exposes the internal face contacted with helix on supporting rod, at this folder
Hold and on bar internal face, first sputter one layer of titanium film, redeposited one layer of molybdenum film, finally one layer of layers of copper of sputtering, and then at supporting rod internal face
Upper formation active metallization layer.
Preparation method the most according to claim 5, it is characterised in that the described magnitude of interference is 0.01mm.
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| CN201610740867.XA CN106158562B (en) | 2016-08-26 | 2016-08-26 | A kind of slow-wave structure of helix TWT and the preparation method of the slow-wave structure |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106777552A (en) * | 2016-11-29 | 2017-05-31 | 电子科技大学 | A kind of thermally matched Optimization Design of energy coupler |
| CN110335797A (en) * | 2019-07-08 | 2019-10-15 | 电子科技大学 | A kind of helical line for travelling wave tube slow-wave structure |
| CN110774217A (en) * | 2019-09-27 | 2020-02-11 | 南京三乐集团有限公司 | Cold extrusion tool for helical line slow wave system and assembly method thereof |
| CN114980540A (en) * | 2022-05-16 | 2022-08-30 | 南京三乐集团有限公司 | Preparation method of welding helix slow-wave circuit of broadband high-power pulse traveling wave tube |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110335797A (en) * | 2019-07-08 | 2019-10-15 | 电子科技大学 | A kind of helical line for travelling wave tube slow-wave structure |
| CN110774217A (en) * | 2019-09-27 | 2020-02-11 | 南京三乐集团有限公司 | Cold extrusion tool for helical line slow wave system and assembly method thereof |
| CN114980540A (en) * | 2022-05-16 | 2022-08-30 | 南京三乐集团有限公司 | Preparation method of welding helix slow-wave circuit of broadband high-power pulse traveling wave tube |
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