CN106206218B - A kind of manufacture method of angular asymmetric helical line slow-wave structure and the slow-wave structure - Google Patents

A kind of manufacture method of angular asymmetric helical line slow-wave structure and the slow-wave structure Download PDF

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Publication number
CN106206218B
CN106206218B CN201610554462.7A CN201610554462A CN106206218B CN 106206218 B CN106206218 B CN 106206218B CN 201610554462 A CN201610554462 A CN 201610554462A CN 106206218 B CN106206218 B CN 106206218B
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supporting rod
helix
wave structure
slow
metal loading
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CN106206218A (en
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蔡军
邬显平
李莉莉
冯进军
杜英华
潘攀
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CETC 12 Research Institute
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CETC 12 Research Institute
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J23/00Details of transit-time tubes of the types covered by group H01J25/00
    • H01J23/16Circuit elements, having distributed capacitance and inductance, structurally associated with the tube and interacting with the discharge
    • H01J23/24Slow-wave structures, e.g. delay systems
    • H01J23/26Helical slow-wave structures; Adjustment therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J25/00Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
    • H01J25/34Travelling-wave tubes; Tubes in which a travelling wave is simulated at spaced gaps

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  • Microwave Tubes (AREA)

Abstract

The invention discloses a kind of angular asymmetric helical line slow-wave structure, the slow-wave structure includes helix, supporting rod and shell;The madial wall of the lateral wall of the supporting rod and the shell is connected;It is connected in the supporting rod between the madial wall of part supporting rod and the helix by Metal loading;It is connected in the supporting rod between the madial wall of remainder supporting rod and the helix.The present invention between helix and patterned metal supporting rod by setting Metal loading, Metal loading causes slow-wave structure to have angular asymmetric characteristic, while ensure that helix dispersion curve π moulds stop-band suppresses backward wave oscillation, large area is realized between helix and patterned metal supporting rod effectively to contact, and greatly reduces the thermal contact resistance between helix and supporting rod.

Description

A kind of manufacture method of angular asymmetric helical line slow-wave structure and the slow-wave structure
Technical field
The present invention relates to vacuum electron device field, more particularly to a kind of angular asymmetric helical line slow-wave structure and this is slow The manufacture method of wave structure
Background technology
Travelling-wave tubes is a kind of a kind of electronic device wide variety of in national defence and national economy, have good power, Frequency band and gain performance.Slow-wave structure as travelling-wave tubes and backward wave oscillator etc. based on distribution interaction device core component, Play a part of reducing the phase velocity of electromagnetic wave, make electronics and electromagnetic wave that effective interaction occur.Therefore, slow-wave structure Shape and size determine the distribution phase spread speed of high frequency field, so as to determine the interaction effect of electronics note and ripple, to row The performance of wave duct plays conclusive influence.
Helix is the most frequently used slow-wave structure of travelling-wave tubes, as shown in Figure 1, 2, existing single geometry period spin line slow wave Structure is made up of the ˊ of Can 1, the ˊ of medium supporting rod 2 and the ˊ of helix 3, from the generally angular symmetrical structure in cross section.Its Middle supporting rod is angular symmetrically arranged three delta structures, and it was found from two dimension view, slow-wave structure is angular symmetrical structure, The way of contact between supporting rod and helix between plane and cambered surface, contact area very little, it is unfavorable for helix electronics and cuts Obtain the conduction diffusion for producing heat.
In high power work, there are two technical problem underlyings in the slow-wave structure:First, it is high-power to generally require high electricity Pressure or high current, in conventional helical line slow-wave structure, the high voltage transmission line point larger with backward wave line coupled impedance in dispersion intersects, High current also can easily produce backward wave oscillation, and destroying travelling-wave tubes can not normal work;Second, because the helix of routine is metal Band coiling forms, and optional position is all cambered surface on the outside of helix in terms of cross section, but the dielectric rod being attached thereto is planar junction Structure, contact area between the two is small, and thermal contact resistance is big, when intercepting and capturing electric current increase, is unfavorable for the export of heat, helix is easy Burn.
As shown in figure 3, Chinese patent:A kind of asymmetric Metal loading helical line slow-wave structure (application number: 201511020383.X), using the ˊ of asymmetrical loading metal structure 4 that large-size is loaded on Can, by close to spiral shell Spin line produces π mould stop-bands in dispersion curve, and this new construction is advantageous to overcome backward wave oscillation problem, but heat dissipation problem is still Do not improved.
For above-mentioned the deficiencies in the prior art, this just needs to provide a kind of new angular asymmetric helix slow-wave knot Structure, the new angular asymmetric helical line slow-wave structure will not only produce π mould stop-bands in dispersion, while also increase spiral shell Spin line and supporting rod contact area, solve the backward wave oscillation of high-power spiral line row wave tube and heat dissipation problem.
The content of the invention
The invention solves first technical problem be to provide a kind of angular asymmetric helical line slow-wave structure;The spiral For line slow-wave structure by setting Metal loading between helix and patterned metal supporting rod, Metal loading causes slow-wave structure With angular asymmetric characteristic, while ensure that helix dispersion curve π moulds stop-band suppresses backward wave oscillation, spiral Large area is realized between line and patterned metal supporting rod effectively to contact, and greatly reduces connecing between helix and supporting rod Thermal resistance is touched, the backward wave oscillation and heat dissipation problem for solving high-power spiral line row wave tube in the prior art so that angular asymmetric The heat-sinking capability of helical line slow-wave structure greatly improves.
The invention solves second technical problem be to provide a kind of above-mentioned angular asymmetric helical line slow-wave structure Manufacture method, the manufacture method is by technological means such as exposure imaging, patterned metal, micro- electroforming and clamping welding, in spiral Metal loading is introduced between line and supporting rod and forms angular asymmetric slow-wave structure, π mould stop-bands are produced in dispersion curve, Electromagnetic wave in the range of stop-band can not transmit, and avoid electronics note and interaction occurs with it, so as to suppress backward wave oscillation, And effective connection of helix and patterned metal supporting rod is realized by Metal loading, improve helix and supporting rod The capacity of heat transmission;The angular asymmetric helical line slow-wave structure obtained by this method, realize and suppress and improve in backward wave oscillation Lifted while this two important technology abilities that radiate, significantly improve performance of the helix TWT at high-power aspect.
To solve above-mentioned first technical problem, the present invention uses following technical proposals:
A kind of angular asymmetric helical line slow-wave structure, the slow-wave structure include helix, supporting rod and shell;It is described The madial wall of the lateral wall of supporting rod and the shell is connected;
It is connected in the supporting rod between the madial wall of part supporting rod and the helix by Metal loading;Institute State in supporting rod and be connected between the madial wall of remainder supporting rod and the helix.In helix slow-wave in the present invention Single or part supporting rod is selected in structure, the growth Metal loading structure between selected supporting rod and helix, shape Angulation is to asymmetric helical line slow-wave structure;The slow-wave structure ensure that helix dispersion curve π moulds stop-band suppress return While ripple vibrates, realize large area between helix and patterned metal supporting rod and effectively contact, greatly reduce spiral Thermal contact resistance between line and supporting rod.
Further, the supporting rod of patterned metal carries out size adjusting, the helix position according to Metal loading structure In the middle position of the slow-wave structure.
Further, it is provided with the madial wall of the supporting rod of connection corresponding with the Metal loading and passes through exposure photo-etching And the first metallization coating to metallize, the Metal loading are connected with the described first metallization coating.
Further, the helix wall after exposure photo-etching of the Metal loading corresponding thereto is connected.
Further, in the supporting rod madial wall of remainder supporting rod corresponding thereto after exposure photo-etching Helix wall be connected.
To solve above-mentioned second technical problem, the present invention uses following technical proposals:
A kind of preparation method for above-mentioned angular asymmetric helical line slow-wave structure, this method comprise the following steps:
S1, in helix resist coating;
S2, selected part supporting rod, remove the photoresist with the contact area of selected supporting rod on helix;
S3, effective contact area to selected supporting rod and Metal loading implement patterned metal;
S4, angular unsymmetrical metal loading is formed between helix and supporting rod using micro- electroforming, obtained after micro- electroforming The composite construction of helix, Metal loading and supporting rod;
Remaining photoresist on S5, removal helix;
S7, the composite construction to shell and above-mentioned obtained helix, Metal loading and supporting rod clamp, connection Shell and supporting rod, obtain angular asymmetric helical line slow-wave structure.
Further, this method further comprises the following steps:
S6, to effective contact area implementation figure on the remainder supporting rod madial wall do not chosen with helix contact surface Shape metallizes.
Further, the step S3 is specially:
S31, the size according to Metal loading, size adjusting is carried out to selected supporting rod, ensure that helix is located at institute State the middle position of slow-wave structure;
S32, to effective contact area exposure photo-etching on selected supporting rod madial wall with Metal loading, and welded Dot pattern;
S33, it is graphical after above-mentioned effectively contact area metallization.
Further, the step S4 is specially:Ensure the helix and selected after exposure imaging using jig Patterned metal after supporting rod relative position, formed using micro- electroforming between helix and supporting rod angular asymmetric Metal loading, the composite construction of helix, Metal loading and supporting rod is obtained after micro- electroforming.
The present invention compared with prior art, has following actively beneficial effective:
1st, the helical line slow-wave structure provided in the present invention between helix and patterned metal supporting rod by setting Metal loading is put, Metal loading causes slow-wave structure to have angular asymmetric characteristic, ensure that helix dispersion curve π moulds While stop-band suppresses backward wave oscillation, realize large area between helix and patterned metal supporting rod and effectively contact, The thermal contact resistance between helix and supporting rod is greatly reduced, solves returning for high-power spiral line row wave tube in the prior art Ripple vibrates and heat dissipation problem so that the heat-sinking capability of angular asymmetric helical line slow-wave structure greatly improves.
2nd, the manufacture method provided in the present invention passes through exposure imaging, patterned metal, micro- electroforming and clamping welding etc. Technological means, Metal loading is introduced between helix and supporting rod and forms angular asymmetric slow-wave structure, in dispersion curve π mould stop-bands are produced, the electromagnetic wave in the range of stop-band can not transmit, and avoid electronics note and interaction occurs with it, So as to suppress backward wave oscillation, and effective connection of helix and patterned metal supporting rod is realized by Metal loading, improved The capacity of heat transmission of helix and supporting rod;The angular asymmetric helical line slow-wave structure obtained by this method, is realized Backward wave oscillation suppresses and improved to be lifted while radiating this two important technology abilities, significantly improves helix TWT big Performance in terms of power.
3rd, the Metal loading in the present invention is obtained by exposure imaging and micro- electrocasting method, angular asymmetric in order to be formed Selected section supporting rod, Metal loading causes slow-wave structure to have angular asymmetric characteristic, because the structure of Metal loading is leaned on Nearly electronics note and the region of electromagnetic wave phase interaction, compared with prior art, can strengthen having for non-angular asymmetrical load influence Effect, while Metal loading is obtained with metallization supporting rod and preferably contacted.
4th, the present invention in Metal loading structure by microelectroforming technology in pinpoint helix and patterned metal Growth forms between supporting rod, ensure that the large area between helix and patterned metal supporting rod effectively contacts, solves The bottleneck of heat dissipation, heat-sinking capability greatly improve.
Brief description of the drawings
Fig. 1 is a kind of structural representation of conventional slow-wave structure.
Fig. 2 is A portions enlarged diagram in Fig. 1.
Fig. 3 is a kind of existing helical line slow-wave structure cross section signal that asymmetric metal structure is loaded on shell Figure.
Fig. 4 is a kind of dimensional structure diagram of angular asymmetric helical line slow-wave structure provided by the present invention.
Fig. 5 is a kind of main structure diagram of angular asymmetric helical line slow-wave structure provided by the present invention.
Fig. 6 is the schematic flow sheet figure one of manufacture method provided by the present invention.
Fig. 7 is the schematic flow sheet figure two of manufacture method provided by the present invention.
Fig. 8 is the schematic flow sheet figure three of manufacture method provided by the present invention.
Fig. 9 is the schematic flow sheet figure four of manufacture method provided by the present invention.
Figure 10 is the schematic flow sheet figure five of manufacture method provided by the present invention.
Figure 11 is the schematic flow sheet figure six of manufacture method provided by the present invention.
Figure 12 is the dispersion curve of slow-wave structure provided by the present invention and conventional single geometry period spin line slow-wave structure Comparison diagram.
Figure 13 is that slow-wave structure provided by the present invention couples with the axis of conventional single geometry period spin line slow-wave structure Impedance curve comparison diagram.
Embodiment
Illustrate the embodiment of the present invention below in conjunction with the accompanying drawings.
As shown in Figure 4 to 11, a kind of angular asymmetric helical line slow-wave structure, the slow-wave structure include helix 1, folder Bar 2 and shell 3 are held, the madial wall of the lateral wall of supporting rod 1 and the shell 3 is connected;Partly clamped in the supporting rod 2 Metal loading 4 is provided between the madial wall of bar 2 and the helix 1;Remainder supporting rod 2 is interior in the supporting rod 2 It is connected between side wall and the helix 1.
Metal loading 4 is only set in the present embodiment between single supporting rod 2 and helix 1;With the Metal loading 4 The madial wall of the supporting rod 2 of corresponding connection is provided with the first metallization coating by exposure photo-etching and metallization, the gold Category loading 4 is connected with the first metallization coating, the spiral shell after exposure photo-etching of the Metal loading 4 corresponding thereto The wall of spin line 1 is connected, and in the supporting rod 2 remainder supporting rod 2 madial wall corresponding thereto through overexposure The wall of helix 1 after photoetching is connected.
Further, the supporting rod 2 of patterned metal carries out size adjusting according to the structure of Metal loading 4, keeps the spiral shell Spin line 1 is located at the middle position of the slow-wave structure.
As further improved embodiment, in the supporting rod 2, the madial wall of remainder supporting rod 2, which is provided with, passes through exposure Light photoetching and the second metallization coating to metallize, the spiral shell after exposure photo-etching of the second metallization coating corresponding thereto The wall of spin line 1 is connected.
As shown in Figure 4 to 11, it is a kind of to be used for above-mentioned a kind of system of angular asymmetric helical line slow-wave structure in the present embodiment Method is made, this method comprises the following steps:
S1, as shown in fig. 6, in the resist coating of helix 1;
S2, as shown in fig. 7, selected part supporting rod 2, single supporting rod 2 is only chosen in the present embodiment Metal loading is set 4;Remove the photoresist with the contact area 11 of selected supporting rod on helix 1;Specifically, helix 1 is entered using mask Row photoetching, also need in helix 1 insert mould, prevent illumination to axial symmetry region, if choosing multiple supporting rods 2, enter The multiple photoetching of row, removes photoresist;
S3, as shown in figure 8, implementing figure to effective contact area 21 of selected single supporting rod 2 and Metal loading 4 Metallization, it is specially:
S31, the size according to Metal loading 4, size adjusting is carried out to selected supporting rod 2, ensure that helix 1 is located at The middle position of the slow-wave structure;
S32, to the exposure photo-etching of effective contact area 21 on the selected madial wall of supporting rod 2 with Metal loading 4, and To pad patterns;
S33, it is graphical after above-mentioned effectively contact area 21 metallize, obtain the first metallization coating;
S4, as shown in figure 9, utilize jig ensure exposure imaging after helix 1 and selected patterned metal The relative position of supporting rod 2 afterwards, angular unsymmetrical metal loading is formed between helix 1 and supporting rod 2 using micro- electroforming 4, because there is photoresist at other positions on helix 1, supporting rod 2 is as insulating dielectric materials, and 4 meetings of Metal loading are in spiral shell Pass through isotropism between effective contact area 21 after the surface exposed after removing photoresist of spin line 1 and the patterned metal of supporting rod 2 Growth is formed, and then the composite construction of helix 1, Metal loading 4 and supporting rod 2 is obtained after micro- electroforming;
S5, as shown in Figure 10, the remaining photoresist on removal helix 1;
S6, effective contact area on the madial wall of remainder supporting rod 2 do not chosen with the contact surface of helix 1 is implemented Patterned metal, and obtain the second metallization coating.
S7, as shown in figure 11, to shell 3 and above-mentioned obtained helix 1, the composite junction of Metal loading 4 and supporting rod 2 Structure is clamped, and connects shell 3 and supporting rod 2, that is, obtains the angular asymmetric helical line slow-wave structure of the invention to be obtained.
It is specifically square in millimeter wave band, a kind of angular asymmetric helical line slow-wave structure according to the goal of the invention of the present invention Following (the unit of the physical dimension of case:mm):Cycle 0.75, helix internal diameter 0.38, thickness 0.08, shell internal diameter 1.1, external diameter 1.3, isosceles triangle supporting rod is in 120 degree of uniform angular distributions, base length and wide by respectively 0.6 and 0.25, isosceles triangle supporting rod length With it is wide be respectively 0.39 and 0.25, Metal loading thickness be 0.05, patterned metalization clamping pole length than other accommodate bars it is short 0.05, it is Metal loading headspace, helix is placed centrally in slow-wave structure.Using microwave studio software to this hair A kind of bright angular asymmetric helical slow-wave structure is simulated, and is calculated dispersion curve and axis coupled impedance, and with it is same The cold characterisitic parameter of size conventional helical line slow-wave structure is contrasted, and the dispersion curve and axis coupled impedance of slow-wave structure are cold Simulated behavior result is as shown in Figure 12 and Figure 13.
Figure 12 gives conventional conventional helical line slow-wave structure and one kind provided by the present invention is new angular asymmetric The comparison diagram of the dispersion curve of helical line slow-wave structure.
The region intersecting as forward-wave and backward wave, in conventional helical line, and forward-wave it is synchronous pressure-wire it is inevitable and return Ripple intersects, and illustrates velocity of electrons herein and electromagnetic wave synchronization, because the feedback that backward wave is formed meets phase condition automatically, improves Voltage can increase the coupled impedance of synchronizing frequency, and increase electric current can reduce the threshold value of backward wave starting of oscillation, as raising helix traveling wave Two kinds of approach of tube power can all produce backward wave oscillation, normally amplify work so as to destroy travelling-wave tubes.
For the new angular asymmetric helical line slow-wave structure of one kind provided by the present invention, non-angular symmetrical metal adds Carry the dispersion characteristics in structural change forward-wave and the intersecting region of backward wave, 0.05mm Metal loading height can be in this example Periodic phase shifts are that π position produces the stop-band of 5.7GHz width, and stop-band width obtains with the increase of Metal loading size To further extension, but the dispersion characteristics influence on the other positions much smaller than phase shift π is relatively small, and Metal loading causes work Make the dispersion near area to decrease to a certain extent.
Figure 13 comparing result is shown, contrasts conventional conventional helical line slow-wave structure, provided by the present invention a kind of new Angularly the axis coupled impedance curve of asymmetric helical line slow-wave structure and the conventional helical line of routine are little in fundamental wave difference for type. The comparing result of complex chart 12 and Figure 13, it can be realized using Novel spiral cable architecture provided by the present invention high-power in acquisition While amplification, and successfully solves the problems, such as backward wave oscillation.
Simultaneously relative to shown in Fig. 3, the existing helical line slow-wave structure that asymmetric metal structure is loaded on shell, this Metal loading structure in invention be by microelectroforming technology between pinpoint helix and patterned metal supporting rod Growth forms, and it is more beneficial for vibration and suppressed, and ensure that the large area between helix and patterned metal supporting rod has Effect contact, solves the bottleneck of heat dissipation, and heat-sinking capability greatly improves;To sum up helical line slow-wave structure provided by the present invention is same When solve the above-mentioned two technical barrier of high-power spiral line row wave tube.
What the word " on ", " under " in description orientation, "left", "right" etc. were for explanation used by herein facilitates base For orientation in accompanying drawing shown in drawing, in actual device these orientation may due to device disposing way and It is different.
In summary, embodiment of the present invention only provides a kind of optimal embodiment, in technology of the invention Hold and technical characterstic has revealed that as above, but one skilled in the art scholar is still potentially based on disclosed content and made Various replacements and modification without departing substantially from creation spirit of the present invention;Therefore, protection scope of the present invention is not limited to disclosed in embodiment Technology contents, therefore equivalence changes that all shape under this invention, construction and principle are done, be encompassed by the protection model of the present invention In enclosing.

Claims (8)

1. a kind of preparation method of angular asymmetric helical line slow-wave structure, it is characterised in that the slow-wave structure includes spiral Line, supporting rod and shell;The madial wall of the lateral wall of the supporting rod and the shell is connected;
It is connected in the supporting rod between the madial wall of part supporting rod and the helix by Metal loading;The folder Hold in bar and be connected between the madial wall of remainder supporting rod and the helix;
The preparation method comprises the following steps:
S1, in helix resist coating;
S2, selected part supporting rod, remove the photoresist with the contact area of selected supporting rod on helix;
S3, effective contact area to selected supporting rod and Metal loading implement patterned metal;
S4, angular unsymmetrical metal loading is formed between helix and supporting rod using micro- electroforming, spiral is obtained after micro- electroforming The composite construction of line, Metal loading and supporting rod;
Remaining photoresist on S5, removal helix;
S7, the composite construction to shell and above-mentioned obtained helix, Metal loading and supporting rod clamp, and connect shell And supporting rod, obtain angular asymmetric helical line slow-wave structure.
A kind of 2. preparation method of angular asymmetric helical line slow-wave structure according to claim 1, it is characterised in that institute State the middle position that helix is located at the slow-wave structure.
A kind of 3. preparation method of angular asymmetric helical line slow-wave structure according to claim 1, it is characterised in that The madial wall of the supporting rod of connection corresponding with the Metal loading is provided with the first metal by exposure photo-etching and metallization Change coating, the Metal loading is connected with the described first metallization coating.
A kind of 4. preparation method of angular asymmetric helical line slow-wave structure according to claim 1, it is characterised in that institute The helix wall after exposure photo-etching of Metal loading corresponding thereto is stated to be connected.
A kind of 5. preparation method of angular asymmetric helical line slow-wave structure according to claim 1, it is characterised in that institute It is solid to state the connection of the helix wall after exposure photo-etching of the madial wall of remainder supporting rod in supporting rod corresponding thereto It is fixed.
A kind of 6. preparation method of angular asymmetric helical line slow-wave structure according to claim 1, it is characterised in that institute Method is stated further to comprise the following steps:
S6, figure gold is implemented to effective contact area on the remainder supporting rod madial wall do not chosen with helix contact surface Categoryization.
A kind of 7. preparation method of angular asymmetric helical line slow-wave structure according to claim 1, it is characterised in that institute Stating step S3 is specially:
S31, the size according to Metal loading, size adjusting is carried out to selected supporting rod, ensure helix positioned at described slow The middle position of wave structure;
S32, to effective contact area exposure photo-etching on selected supporting rod madial wall with Metal loading, and obtain solder joint figure Shape;
S33, it is graphical after above-mentioned effectively contact area metallization.
A kind of 8. preparation method of angular asymmetric helical line slow-wave structure according to claim 1, it is characterised in that institute Stating step S4 is specially:Ensure the helix after exposure imaging and the clamping after selected patterned metal using jig The relative position of bar, angular unsymmetrical metal loading is formed between helix and supporting rod using micro- electroforming, after micro- electroforming To the composite construction of helix, Metal loading and supporting rod.
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CN110335797A (en) * 2019-07-08 2019-10-15 电子科技大学 A kind of helical line for travelling wave tube slow-wave structure
CN112820609A (en) * 2020-12-31 2021-05-18 山东微波电真空技术有限公司 Integral type travelling wave tube

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US3475643A (en) * 1967-01-16 1969-10-28 Varian Associates Ceramic supported slow wave circuits with the ceramic support bonded to both the circuit and surrounding envelope
DE2205645C3 (en) * 1972-02-07 1975-05-07 Siemens Ag, 1000 Berlin Und 8000 Muenchen Selectively damped traveling wave tube
US4107575A (en) * 1976-10-04 1978-08-15 The United States Of America As Represented By The Secretary Of The Navy Frequency-selective loss technique for oscillation prevention in traveling-wave tubes
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