CN106158562B - A kind of slow-wave structure of helix TWT and the preparation method of the slow-wave structure - Google Patents
A kind of slow-wave structure of helix TWT and the preparation method of the slow-wave structure Download PDFInfo
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- CN106158562B CN106158562B CN201610740867.XA CN201610740867A CN106158562B CN 106158562 B CN106158562 B CN 106158562B CN 201610740867 A CN201610740867 A CN 201610740867A CN 106158562 B CN106158562 B CN 106158562B
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- helix
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- wave structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/16—Circuit elements, having distributed capacitance and inductance, structurally associated with the tube and interacting with the discharge
- H01J23/24—Slow-wave structures, e.g. delay systems
- H01J23/26—Helical slow-wave structures; Adjustment therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
- H01J25/34—Travelling-wave tubes; Tubes in which a travelling wave is simulated at spaced gaps
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Abstract
The invention discloses a kind of slow-wave structure of helix TWT and the preparation method of the slow-wave structure, including fixed helix, supporting rod and shell are sequentially connected from inside to outside；Active metallization layer is provided with the effective coverage face being in contact with helix on supporting rod internal face；The joint face being connected corresponding with supporting rod internal face that is used in helix outside wall surface is set for plane；Along the axis direction of helix, the outside wall surface of supporting rod is set in the first inclined-plane；The internal face of shell is provided with second inclined-plane corresponding with the outside wall surface of supporting rod.The present invention is by using brazing metal so that solder can fill supporting rod and the slight void on helix contact surface after welding, it is in close contact completely, its thermal resistance very little；And by the preparation method of slow-wave structure provided by the present invention, obtained slow-wave structure can be used in high-power spiral line row wave tube, thermal contact resistance can be reduced by having, the advantages that improving slow-wave structure radiating efficiency.
Description
Technical field
The present invention relates to vacuum electron device field, the slow-wave structure and the slow wave of more particularly to a kind of helix TWT
The preparation method of structure.
Background technology
Spiral line type travelling-wave tubes with wide band characteristic because being widely used in a variety of necks such as radar system, communication system
Domain, but the heat-sinking capability of this kind of travelling-wave tube slow-wave structure is limited, restricts the raising of its mean power.
The slow-wave structure of conventional helical line travelling-wave tubes is generally led to by helix, equally distributed three supporting rods and shell
Certain clamp method is crossed to combine.High power travelling wave tube slow wave system is closed using the pole shoe and ambrose alloy of pure iron material more at present
The shell that the gasket ring of golden material is welded, clamp method are to heat shell after in the cold state fixing helix and supporting rod
It is set slightly to expand, using mould by helix and clamping bar assembly quick insertion shell.Helix and clamping in this method
Bar is plane contact connection, it is microcosmic it is upper due to contact surface can not possibly complete minute surface, therefore certainly exist space, the bigger heat in space
Resistance is bigger, and interface temperature rise is bigger, and heat-sinking capability is poorer；And influenceed by piece surface is coarse, using this chucking method composition
Slow wave system can form portion void between helix and supporting rod interface, so as to produce larger thermal contact resistance, influence slow wave
The radiating efficiency of system.When mean power is further lifted, easily there is helix and is burned out in the travelling-wave tubes of the method preparation
With job insecurity phenomenon.
The content of the invention
The invention solves first technical problem be to provide a kind of slow-wave structure of helix TWT；The slow wave knot
Structure is by using brazing metal so that solder can fill supporting rod and the slight void on helix contact surface after welding, make it
It is in close contact completely, thermal resistance very little, can be considered and eliminate hot interface between helix and supporting rod, all heats are equal on helix
It can conduct to supporting rod, significantly reduce the thermal contact resistance between helix and supporting rod, substantially increase helix
The heat-sinking capability and radiating efficiency of travelling-wave tube slow-wave structure, while ensure that slow-wave structure has good axiality, also
It ensure that travelling-wave tubes has higher Beam transmission；And slow-wave structure provided by the present invention is also by changing supporting rod
With the structure of shell, make it that prepackage and then a step complete overall dress first in clamping process for helix, supporting rod and shell
With providing prerequisite.
The invention solves second technical problem be to provide a kind of preparation side of the slow-wave structure of helix TWT
Method；The preparation method by the improvement to helix structure, supporting rod structure and shell structure, utilize at high temperature " helix-
Interference fit between supporting rod " component and Can, certain pressure is formed on three's weld interface, so as in slow wave knot
Realize the welding of Can and ceramic supporting rod in structure clamping process, and realize while clamping supporting rod and helix
Welding, it is wrong with solder side on supporting rod that the slow-wave structure obtained by this preparation method is not susceptible to helix in welding process
Position, welding and clamping process can a step complete, the slow-wave structure obtained by this method can be used for high-power spiral line row wave tube
In, and there is the advantages that can reducing thermal contact resistance, improving slow-wave structure radiating efficiency.
To solve above-mentioned first technical problem, the present invention uses following technical proposals：
A kind of slow-wave structure of helix TWT, the slow-wave structure include being sequentially connected fixed spiral from inside to outside
Line, supporting rod and shell；
Active metallization is provided with the effective coverage face being in contact with the helix on the supporting rod internal face
Layer；
In the helix outside wall surface is flat for the joint face being connected corresponding with the supporting rod internal face
Face is set；
Along the axis direction of the helix, the outside wall surface of the supporting rod is set in the first inclined-plane；The shell it is interior
Wall is provided with second inclined-plane corresponding with the outside wall surface of the supporting rod, and first inclined-plane matches with second inclined-plane
Ground is connected and fixed.
Further, the active metallization layer includes the first metal layer, the second metal set gradually from inside to outside
Change layer and the 3rd metal layer；The material of first metal layer is titanium, and thickness is 0.02-0.03 μm；Second metal
The material for changing layer is molybdenum, and thickness is 0.04-0.05 μm；The material of 3rd metal layer is copper, and thickness is 4-5 μm.
Because supporting rod is ceramic material, the metal layer on traditional supporting rod only has one layer of spelter solder, with ceramic material
It is bonded insecure.This patent employs active metal titanium as first layer, and titanium can produce chemical reaction with ceramics, as metallization
The substrate of layer can be more firm with ceramic bonding, molybdenum as the second layer be because of molybdenum swell increment it is smaller, approached with ceramics, can be with
Transitional function is played between the less ceramics of the larger copper of swell increment and swell increment, prevents the metal caused by layers of copper expands
Change layer to come off.
Further, it is in lean on along extreme direction after axis front end to the axis of helix, the incline direction on first inclined-plane
The axis direction of nearly helix tilts.
Further, the slow-wave structure is included along the helix circumferential direction in three structures that uniformly arrangement is set
Identical supporting rod.
To solve above-mentioned second technical problem, the present invention uses following technical proposals：
A kind of preparation method of the slow-wave structure of helix TWT, this method comprise the following steps：
S1, the outside wall surface of supporting rod is processed into inclined-plane, obtains the first inclined-plane；
S2, according to the magnitude of interference, processed on the internal face of the shell corresponding with the outside wall surface of supporting rod and described
Second inclined-plane corresponding to the matching of one inclined-plane；
S3, active metallization layer is sputtered on the supporting rod internal face；
S4, the joint face processing being connected corresponding with the supporting rod internal face will be used in helix outside wall surface
Into plane；
S6, in the cold state, by the cooperation on the first inclined-plane and the second inclined-plane, along the axis direction of the helix, by spiral shell
Spin line, supporting rod and shell are fitted together in advance；Specifically, the relative position of shell one end is limited with mould, helix and clamping
Bar inserts from the shell other end.
S7, heating shell, by helix and the fully-inserted shell of supporting rod, obtain the slow-wave structure of helix TWT.
Due to the effective coverage face position being in contact with the helix on supporting rod internal face and helix outside wall surface in the present invention
In corresponding setting, and then after helix and the fully-inserted shell of supporting rod, the effective coverage face on supporting rod can be ensured
With the relative position between helix joint face.
Further, this method further comprises the following steps：
The active metallization layer on non-active area face not being in contact on S5, removal supporting rod internal face with helix.
Further, the step S7 is specially：
Shell is heated, after its temperature rises to 900-950 DEG C, by helix and the fully-inserted shell of supporting rod, insulation
3-5 minutes, the slow-wave structure of helix TWT is obtained after cooling.
Further, the step S3 is specially：
Beryllium oxide supporting rod is fitted into mask mould, only exposes the internal face being in contact on supporting rod with helix,
One layer of titanium film is first sputtered on the supporting rod internal face, redeposited one layer of molybdenum film, finally sputters one layer of layers of copper, and then in supporting rod
Active metallization layer is formed on wall.
Further, the magnitude of interference is 0.01mm.
The present invention compared with prior art, has following positive beneficial effect：
1st, slow-wave structure provided by the present invention is by using brazing metal so that after welding solder can fill supporting rod with
Slight void on helix contact surface, makes it be in close contact completely, thermal resistance very little, can be considered and eliminates helix and supporting rod
Between hot interface, all heats can be conducted to supporting rod on helix, significantly reduce helix and supporting rod it
Between thermal contact resistance, substantially increase the heat-sinking capability and radiating efficiency of helix TWT slow wave structure, ensure that slow wave
While structure has good axiality, also ensuring travelling-wave tubes has higher Beam transmission.
2nd, because supporting rod is ceramic material, the metal layer on traditional supporting rod only has one layer of spelter solder, with ceramic material
Material bonding is insecure.This patent employs active metal titanium as first layer, and titanium can produce chemical reaction with ceramics, as metal
The substrate for changing layer can be more firm with ceramic bonding, and molybdenum is because the swell increment of molybdenum is smaller as the second layer, is approached with ceramics, can
To play transitional function between the less ceramics of the larger copper of swell increment and swell increment, the gold caused by layers of copper expands is prevented
Categoryization layer comes off.
3rd, the preparation method of slow-wave structure provided by the present invention, by helix structure, supporting rod structure and shell
The improvement of structure, the interference fit of " helix-supporting rod " between component and Can is utilized at high temperature, is welded in three
Certain pressure is formed on interface, so as to realize the welding of Can and ceramic supporting rod in slow-wave structure clamping process, and
The welding of supporting rod and helix is realized while clamping, the slow-wave structure obtained by this preparation method can be used for high-power
In helix TWT, thermal contact resistance can be reduced by having, the advantages that improving slow-wave structure radiating efficiency.
4th, the preparation method of slow-wave structure provided by the present invention, it is oblique by the first inclined-plane and second using in the cold state
The cooperation in face, along the axis direction of the helix, helix, supporting rod and shell are fitted together in advance, the advantages of prepackage
It is not susceptible to helix in welding process to misplace with solder side on supporting rod, welding and clamping process can step completions.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of helix in the present invention.
Fig. 2 is the structural front view of helix in the present invention.
Fig. 3 is one of dimensional structure diagram of supporting rod in the present invention.
Fig. 4 is the structural front view of supporting rod in the present invention.
Fig. 5 is two of the dimensional structure diagram of supporting rod in the present invention.
Fig. 6 is three of the dimensional structure diagram of supporting rod in the present invention.
Fig. 7 is the structural representation of shell in the present invention.
Fig. 8 is the structural representation of shell internal face in the present invention.
Fig. 9 is the Rotating fields schematic diagram of active metallization layer in the present invention.
Figure 10 is the schematic diagram that helix, supporting rod and shell are fitted together in advance in the present invention.
Figure 11 is the overall structure diagram of the present invention.
Figure 12 is the integrally-built axial view of the present invention.
Figure 13 is the interface internal-external temperature difference comparison diagram of slow-wave structure provided by the present invention and traditional slow-wave structure.
Figure 14 is the preparation method FB(flow block) of slow-wave structure provided by the present invention.
Embodiment
Illustrate the embodiment of the present invention below in conjunction with the accompanying drawings.
As shown in Fig. 1 to 13, a kind of slow-wave structure of helix TWT, the slow-wave structure is included from inside to outside successively
Helix 1, supporting rod 2 and the shell 3 being connected；Slow-wave structure described in the present embodiment includes circumferential along the helix 1
Direction is in three structure identical supporting rods 2 that uniformly arrangement is set.
Activity gold is provided with the effective coverage face 21 being in contact with the helix 1 on the internal face of supporting rod 2
Categoryization layer 4；It is used for the joint face 11 being connected corresponding with the internal face of supporting rod 2 in the outside wall surface of helix 1
Set for plane；Extreme direction after along the front end of axis 12 of helix 1 to axis 12, the outside wall surface of the supporting rod 2 are oblique in first
Face 22 is set, and the incline direction on first inclined-plane 22 is in be tilted close to the direction of axis 12 of helix 1；In the shell 3
Wall is provided with second inclined-plane 31 corresponding with the outside wall surface of the supporting rod 2, first inclined-plane 22 and described second oblique
Face 31 is matchingly connected and fixed.
Further, the active metallization layer 4 includes the first metal layer 41, the second gold medal set gradually from inside to outside
The metal layer 43 of categoryization layer 42 and the 3rd；The material of first metal layer 41 is titanium, and thickness is 0.02-0.03 μm；It is described
The material of second metal layer 42 is molybdenum, and thickness is 0.04-0.05 μm；The material of 3rd metal layer 43 is copper, thickness
For 4-5 μm.
As shown in Fig. 1 to 14, a kind of preparation method for being used for above-mentioned slow-wave structure in the present embodiment, this method includes as follows
Step：
S1, the outside wall surface of supporting rod 2 is processed into inclined-plane, obtains the first inclined-plane 22；
S2, according to the magnitude of interference, processed on the internal face of the shell 3 corresponding with the outside wall surface of supporting rod 2 with it is described
First inclined-plane 22 matches corresponding second inclined-plane 31；The magnitude of interference described in the present embodiment is specially 0.01mm；
S3, active metallization layer 4 is sputtered on the internal face of supporting rod 2；Specifically, beryllium oxide supporting rod 2 is loaded
In mask mould, only expose the internal face being in contact on supporting rod 2 with helix 1, one is first sputtered on the internal face of supporting rod 2
The layer titanium film of the first metal layer 41, redeposited one layer of second molybdenum film of metal layer 42, finally sputters one layer of the 3rd metal layer 43
Layers of copper, and then active metallization layer 4 is formed on the internal face of supporting rod 2；
S4, the joint face 11 being connected corresponding with the internal face of supporting rod 2 will be used in the outside wall surface of helix 1
It is processed into plane；Wherein joint face 11 is 0.03-0.05mm in the difference in height of the outside wall surface of the helix of arcuation with other；
S5, the pitch dimension according to helix 1, using blue laser remove the internal face of supporting rod 2 on not with the phase of helix 1
Active metallization layer 4 on the non-active area face 23 of contact；And then the activity on the internal face of supporting rod 2 on effective coverage face 21
Metal layer 4 forms the solder side corresponding with being processed to the joint face 11 of plane on helix 1；
S6, in the cold state, by the cooperation on the first inclined-plane 22 and the second inclined-plane 31, along the side of axis 12 of the helix 1
To helix 1, supporting rod 2 and shell 3 are fitted together in advance；Specifically, the relative position of the one end of shell 3, spiral shell are limited with mould
Spin line 1 is inserted with supporting rod 2 from the other end, because the inner chamber of shell 3 is taper, the helix of insertion and the maximum for clamping bar assembly
Diameter is larger than remaining shell diameter, usually 0.005-0.01mm, so in prepackage, helix 1 and supporting rod 2 from
Other end insertion is until the position limited.
S7, heating shell 3, it is after the temperature of shell 3 rises to 900 DEG C, helix 1 and supporting rod 2 is completely quick
Shell 3 is inserted, is incubated 3-5 minutes, the slow-wave structure of helix TWT is obtained after cooling.
It is a feature of the present invention that pass through sputtered titanium, molybdenum and the copper formation active metallization for being used as solder on supporting rod 2
Layer 4, substitutes traditional single metal layer, the combination between the active metallization layer and beryllium oxide ceramics supporting rod 2 that make is more firm
Gu；And the welding of supporting rod 2 and helix 1 is realized while clamping, overcome conventional mounting arrangements, i.e. helix 1 and folder
Hold bar 2 the external welding of shell 3 integrally afterwards load shell 3 present in the defects of；The present invention uses laser by active metal simultaneously
Change redundance on layer to remove, the high-frequency loss that chemical corrosion method can be avoided to bring, pass through the attached present invention illustrated in fig. 13
The interface internal-external temperature difference comparison diagram of the slow-wave structure provided and traditional slow-wave structure, from figure it was found from comparing result, the present invention
The slow-wave structure interface internal-external temperature difference provided is less than the interface internal-external temperature difference of traditional slow-wave structure, and interface internal-external temperature difference gets over novel
Bright thermal resistance is smaller, and heat dispersion is better, and then the slow-wave structure obtained by the present invention effectively reduces helix and supporting rod circle
Thermal contact resistance on face, greatly improve its heat-sinking capability and radiating efficiency.
What the word " on ", " under " in description orientation, "left", "right" etc. were for explanation used by herein facilitates base
For orientation in accompanying drawing shown in drawing, in actual device these orientation may due to device disposing way and
It is different.
In summary, embodiment of the present invention only provides a kind of optimal embodiment, in technology of the invention
Hold and technical characterstic has revealed that as above, but one skilled in the art scholar is still potentially based on disclosed content and made
Various replacements and modification without departing substantially from creation spirit of the present invention；Therefore, protection scope of the present invention is not limited to disclosed in embodiment
Technology contents, therefore equivalence changes that all shape under this invention, construction and principle are done, be encompassed by the protection model of the present invention
In enclosing.
Claims (9)
1. a kind of slow-wave structure of helix TWT, it is characterised in that the slow-wave structure includes being sequentially connected from inside to outside
Fixed helix, supporting rod and shell；
Active metallization layer is provided with the effective coverage face being in contact with the helix on the supporting rod internal face；
Being set for the joint face being connected corresponding with the supporting rod internal face for plane in the helix outside wall surface
Put；
Along the axis direction of the helix, the outside wall surface of the supporting rod is set in the first inclined-plane；The internal face of the shell
Second inclined-plane corresponding with the outside wall surface of the supporting rod is provided with, first inclined-plane matchingly connects with second inclined-plane
Connect and be fixed together.
A kind of 2. slow-wave structure of helix TWT according to claim 1, it is characterised in that the active metallization
Layer includes the first metal layer, the second metal layer and the 3rd metal layer set gradually from inside to outside；First metal
The material for changing layer is titanium, and thickness is 0.02-0.03 μm；The material of second metal layer is molybdenum, and thickness is 0.04-0.05 μ
m；The material of 3rd metal layer is copper, and thickness is 4-5 μm.
3. the slow-wave structure of a kind of helix TWT according to claim 1, it is characterised in that along the axis of helix
Extreme direction after front end to axis, the incline direction on first inclined-plane are in the axis direction inclination close to helix.
A kind of 4. slow-wave structure of helix TWT according to claim 1, it is characterised in that the slow-wave structure bag
Include along the helix circumferential direction in three structure identical supporting rods that uniformly arrangement is set.
5. a kind of preparation method of the slow-wave structure of helix TWT, it is characterised in that this method comprises the following steps：
S1, the outside wall surface of supporting rod is processed into inclined-plane, obtains the first inclined-plane；Along the axis direction of the helix, described
The incline direction on one inclined-plane is in the axis direction inclination close to helix；
S2, according to the magnitude of interference, processed on the internal face of the shell corresponding with the outside wall surface of supporting rod with it is described first oblique
Second inclined-plane corresponding to the matching of face；
S3, active metallization layer is sputtered on the supporting rod internal face；
S4, will be processed into helix outside wall surface for the joint face being connected corresponding with the supporting rod internal face it is flat
Face；
S6, in the cold state, by the cooperation on the first inclined-plane and the second inclined-plane, along the axis direction of the helix, by helix,
Supporting rod and shell are fitted together in advance；
S7, heating shell, by helix and the fully-inserted shell of supporting rod, obtain the slow-wave structure of helix TWT.
6. preparation method according to claim 5, it is characterised in that this method further comprises the following steps：
The active metallization layer on non-active area face not being in contact on S5, removal supporting rod internal face with helix.
7. preparation method according to claim 5, it is characterised in that the step S7 is specially：
Shell is heated, after its temperature rises to 900-950 DEG C, by helix and the fully-inserted shell of supporting rod, 3-5 points of insulation
Clock, the slow-wave structure of helix TWT is obtained after cooling.
8. preparation method according to claim 5, it is characterised in that the step S3 is specially：
Beryllium oxide supporting rod is fitted into mask mould, only exposes the internal face being in contact on supporting rod with helix, in the folder
Hold and one layer of titanium film is first sputtered on bar internal face, redeposited one layer of molybdenum film, finally sputter one layer of layers of copper, and then in supporting rod internal face
Upper formation active metallization layer.
9. preparation method according to claim 5, it is characterised in that the magnitude of interference is 0.01mm.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106777552A (en) * | 2016-11-29 | 2017-05-31 | 电子科技大学 | A kind of thermally matched Optimization Design of energy coupler |
| CN110335797A (en) * | 2019-07-08 | 2019-10-15 | 电子科技大学 | A kind of helical line for travelling wave tube slow-wave structure |
| CN110774217B (en) * | 2019-09-27 | 2021-07-27 | 南京三乐集团有限公司 | Cold extrusion tool for helical line slow wave system and assembly method thereof |
| CN110838426A (en) * | 2019-12-16 | 2020-02-25 | 安泰德智能装备（深圳）有限公司 | Pre-assembly jig for spiral line and clamping rod |
| CN114980540B (en) * | 2022-05-16 | 2024-09-10 | 南京三乐集团有限公司 | Preparation method of broadband high-power pulse traveling wave tube welding spiral line slow wave circuit |
| CN115472478A (en) * | 2022-10-13 | 2022-12-13 | 中国电子科技集团公司第十二研究所 | Double-path helix slow wave interaction structure and traveling wave tube |
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| US2948828A (en) * | 1956-11-21 | 1960-08-09 | Bell Telephone Labor Inc | Traveling wave tube interaction circuit |
| GB984607A (en) * | 1962-07-19 | 1965-02-24 | Ferranti Ltd | Improvements relating to travelling-wave tubes |
| US3374388A (en) * | 1964-11-13 | 1968-03-19 | Navy Usa | Traveling wave tube having tapered grooves and shims for improved thermal contact between metal envelope, support rods and slow wave helix |
| FR2422265A2 (en) * | 1976-09-21 | 1979-11-02 | Thomson Csf | Wave propagation tube with hyperfrequency delay line - having triangular section with three equally inclined flat plates and is supported in tube by bars |
| FR2365218A1 (en) * | 1976-09-21 | 1978-04-14 | Thomson Csf | HYPERFREQUENCY DELAY LINE AND WAVE PROPAGATION TUBE CONTAINING SUCH A LINE |
| US4947467A (en) * | 1988-03-24 | 1990-08-07 | Manoly Arthur E | Traveling-wave tube slow-wave structure with integral conductively-loaded barrel and method of making same |
| JPH02168539A (en) * | 1988-12-21 | 1990-06-28 | Mitsubishi Electric Corp | Progressive wave tube device |
| JPH065215A (en) * | 1992-06-18 | 1994-01-14 | Nec Corp | Helix type slow-wave circuit |
| CN201966173U (en) * | 2010-12-24 | 2011-09-07 | 北京有色金属研究总院 | Low-resistivity composite coating of spiral line for traveling-wave tube |
| US8823262B2 (en) * | 2012-01-06 | 2014-09-02 | University Of Electronic Science And Technology Of China | Helical slow-wave structure including a helix of rectagular cross-section having grooves therein adapted to receive supporting rods therein |
| CN103325645B (en) * | 2013-06-19 | 2016-12-28 | 中国电子科技集团公司第十二研究所 | A kind of diamond for travelling-wave tube-electro-coppering combined type supporting rod and manufacture method thereof |
| CN205992521U (en) * | 2016-08-26 | 2017-03-01 | 中国电子科技集团公司第十二研究所 | A kind of slow-wave structure of helix TWT |
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