CN106206218A - A kind of angular asymmetric helical line slow-wave structure and the manufacture method of this slow-wave structure - Google Patents
A kind of angular asymmetric helical line slow-wave structure and the manufacture method of this slow-wave structure Download PDFInfo
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- CN106206218A CN106206218A CN201610554462.7A CN201610554462A CN106206218A CN 106206218 A CN106206218 A CN 106206218A CN 201610554462 A CN201610554462 A CN 201610554462A CN 106206218 A CN106206218 A CN 106206218A
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- supporting rod
- helix
- wave structure
- slow
- helical line
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/16—Circuit elements, having distributed capacitance and inductance, structurally associated with the tube and interacting with the discharge
- H01J23/24—Slow-wave structures, e.g. delay systems
- H01J23/26—Helical slow-wave structures; Adjustment therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
- H01J25/34—Travelling-wave tubes; Tubes in which a travelling wave is simulated at spaced gaps
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Abstract
The invention discloses a kind of angular asymmetric helical line slow-wave structure, described slow-wave structure includes helix, supporting rod and shell;The lateral wall of described supporting rod is connected fixing with the medial wall of described shell;Described supporting rod is connected fixing between the medial wall of part supporting rod with described helix by Metal loading;Described supporting rod is connected fixing between the medial wall of remainder supporting rod with described helix.The present invention is by arranging Metal loading between helix and patterned metal supporting rod, Metal loading makes slow-wave structure have angular asymmetric characteristic, while ensure that helix dispersion curve π mould stop-band suppression backward wave oscillation, achieve large area between helix and patterned metal supporting rod effectively to contact, greatly reduce the thermal contact resistance between helix and supporting rod.
Description
Technical field
The present invention relates to vacuum electron device field, particularly to the angular asymmetric helical line slow-wave structure of one and this is slow
The manufacture method of wave structure
Background technology
Travelling-wave tube is a class wide variety of a kind of electronic device in national defence and national economy, have good power,
Frequency band and gain performance.Slow-wave structure as travelling-wave tube and backward wave oscillator etc. based on distribution interaction device core component,
Play the effect of the phase velocity reducing electromagnetic wave, make electronics and electromagnetic wave that effective interaction to occur.Therefore, slow-wave structure
Shape and size determine the distribution phase spread speed of radio-frequency field, thus determine the interaction effect of electronics note and ripple, to row
The performance of wave duct plays conclusive impact.
Helix is the slow-wave structure that travelling-wave tube is the most frequently used, as shown in Figure 1, 2, and existing single geometry period spin line slow wave
Structure is made up of Can 1, medium supporting rod 2 and helix 3, from the generally angular symmetrical structure of cross section.Its
Middle supporting rod is the most symmetrically arranged three delta structures, and knowable to two dimension view, slow-wave structure is angular symmetrical structure,
Being the way of contact between plane and cambered surface between supporting rod and helix, contact area is the least, is unfavorable for that helix electronics cuts
Obtain the conduction diffusion producing heat.
When high power work, there are two technical problem underlying in this slow-wave structure: first, high-power it is generally required to high electricity
Pressure or big electric current, in conventional helical line slow-wave structure, the point that high voltage transmission line is bigger with backward wave line coupled impedance in dispersion intersects,
Big electric current can the most easily produce backward wave oscillation, and destroying travelling-wave tube cannot normally work;Second, owing to conventional helix is metal
Band coiling forms, and in terms of cross section, outside helix, optional position is all cambered surface, but the dielectric rod being attached thereto is planar junction
Structure, contact area between the two is little, and thermal contact resistance is big, when intercepting and capturing electric current increase, is unfavorable for the derivation of heat, and helix is easy
Burn.
As it is shown on figure 3, Chinese patent: a kind of asymmetric Metal loading helical line slow-wave structure (application number:
201511020383.X), utilize the asymmetrical loading metal structure 4 loading large-size on Can, by near spiral shell
Spin line produces π mould stop-band in dispersion curve, and this new construction is conducive to overcoming backward wave oscillation problem, but heat dissipation problem is still
Do not improved.
For above-mentioned the deficiencies in the prior art, this is accomplished by providing a kind of novel angular asymmetric helix slow-wave to tie
Structure, this novel angular asymmetric helical line slow-wave structure not only to produce π mould stop-band, spiral shell to be increased in dispersion
Spin line and supporting rod contact area, solve backward wave oscillation and the heat dissipation problem of high-power spiral line row wave tube.
Summary of the invention
First technical problem that the invention solves the problems that is to provide a kind of angular asymmetric helical line slow-wave structure;This spiral
Line slow-wave structure is by arranging Metal loading between helix and patterned metal supporting rod, and Metal loading makes slow-wave structure
There is angular asymmetric characteristic, while ensure that helix dispersion curve π mould stop-band suppression backward wave oscillation, spiral
Achieve large area between line and patterned metal supporting rod effectively to contact, greatly reduce connecing between helix and supporting rod
Touch thermal resistance, solve backward wave oscillation and the heat dissipation problem of high-power spiral line row wave tube in prior art so that the most asymmetric
The heat-sinking capability of helical line slow-wave structure is greatly improved.
Second technical problem that the invention solves the problems that is to provide a kind of above-mentioned angular asymmetric helical line slow-wave structure
Manufacture method, this manufacture method is by technological means such as exposure imaging, patterned metal, micro-electroforming and clamping welding, at spiral
Introduce Metal loading between line and supporting rod and form angular asymmetric slow-wave structure, dispersion curve produces π mould stop-band,
Electromagnetic wave in the range of stop-band can not transmit, it is to avoid electronics note occurs interaction with it, thus suppresses backward wave oscillation,
And effective connection of helix and patterned metal supporting rod is achieved by Metal loading, improve helix and supporting rod
The capacity of heat transmission;The angular asymmetric helical line slow-wave structure obtained by the method, it is achieved that in backward wave oscillation suppression and improvement
Promote while these two important technology abilities of dispelling the heat, significantly improve the helix TWT performance at high-power aspect.
For solving above-mentioned first technical problem, the present invention uses following technical proposals:
A kind of angular asymmetric helical line slow-wave structure, described slow-wave structure includes helix, supporting rod and shell;Described
The lateral wall of supporting rod is connected fixing with the medial wall of described shell;
Described supporting rod is connected fixing between the medial wall of part supporting rod with described helix by Metal loading;Institute
State supporting rod is connected between the medial wall of remainder supporting rod with described helix and fix.At helix slow-wave in the present invention
Structure selects single or part supporting rod, the growth Metal loading structure between selected supporting rod and helix, shape
Angulation is to asymmetric helical line slow-wave structure;This slow-wave structure ensure that the suppression of helix dispersion curve π mould stop-band is returned
While ripple vibration, achieve large area between helix and patterned metal supporting rod and effectively contact, greatly reduce spiral
Thermal contact resistance between line and supporting rod.
Further, the supporting rod of patterned metal carries out size adjusting, described helix position according to Metal loading structure
Middle position in described slow-wave structure.
Further, the medial wall of the supporting rod of connection corresponding with described Metal loading is provided with passes through exposure photo-etching
And metallized first metallization coating, described Metal loading with described first metallize coating be connected.
Further, the described Metal loading helix wall after exposure photo-etching corresponding thereto connects fixing.
Further, in described supporting rod the medial wall of remainder supporting rod corresponding thereto after exposure photo-etching
Helix wall connect fixing.
For solving above-mentioned second technical problem, the present invention uses following technical proposals:
A kind of preparation method for above-mentioned angular asymmetric helical line slow-wave structure, the method comprises the steps:
S1, at helix resist coating;
S2, selected part supporting rod, remove the photoresist with the contact area of selected supporting rod on helix;
S3, effective contact area to selected supporting rod and Metal loading implement patterned metal;
S4, utilize micro-electroforming formed between helix and supporting rod angular unsymmetrical metal load, obtain after micro-electroforming
The composite construction of helix, Metal loading and supporting rod;
S5, the residue photoresist removed on helix;
S7, composite construction to shell and above-mentioned helix, Metal loading and the supporting rod obtained clamp, and connect
Shell and supporting rod, obtain angular asymmetric helical line slow-wave structure.
Further, the method further comprises the steps:
S6, to effective contact area enforcement figure with helix contact surface on the remainder supporting rod medial wall do not chosen
Shape metallizes.
Further, described step S3 particularly as follows:
S31, the size of foundation Metal loading, carry out size adjusting to selected supporting rod, it is ensured that helix is positioned at institute
State the middle position of slow-wave structure;
S32, to effective contact area exposure photo-etching with Metal loading on selected supporting rod medial wall, and welded
Dot pattern;
S33, graphical after the metallization of above-mentioned effective contact area.
Further, described step S4 is particularly as follows: utilize jig to ensure the helix after exposure imaging and selected
Patterned metal after the relative position of supporting rod, utilize micro-electroforming to be formed between helix and supporting rod the most asymmetric
Metal loading, obtains the composite construction of helix, Metal loading and supporting rod after micro-electroforming.
The present invention compared with prior art, has as follows the most useful effective:
1, the helical line slow-wave structure provided in the present invention is by setting between helix and patterned metal supporting rod
Putting Metal loading, Metal loading makes slow-wave structure have angular asymmetric characteristic, ensure that helix dispersion curve π mould
While stop-band suppression backward wave oscillation, achieve large area between helix and patterned metal supporting rod and effectively contact,
Greatly reduce the thermal contact resistance between helix and supporting rod, solve returning of high-power spiral line row wave tube in prior art
Ripple vibration and heat dissipation problem so that the heat-sinking capability of angular asymmetric helical line slow-wave structure is greatly improved.
2, the manufacture method provided in the present invention is by exposure imaging, patterned metal, micro-electroforming and clamping welding etc.
Technological means, introduces Metal loading between helix and supporting rod and forms angular asymmetric slow-wave structure, in dispersion curve
Producing π mould stop-band, the electromagnetic wave in the range of stop-band can not transmit, it is to avoid electronics note occurs interaction with it,
Thus suppress backward wave oscillation, and effective connection of helix and patterned metal supporting rod is achieved by Metal loading, improve
The capacity of heat transmission of helix and supporting rod;The angular asymmetric helical line slow-wave structure obtained by the method, it is achieved that
Promote while backward wave oscillation suppression and improvement these two important technology abilities of heat radiation, significantly improve helix TWT greatly
Performance in terms of power.
3, the Metal loading in the present invention is obtained, in order to form the most asymmetric by exposure imaging and micro-electrocasting method
Selecting part supporting rod, Metal loading makes slow-wave structure have angular asymmetric characteristic, owing to the structure of Metal loading is leaned on
Nearly electronics note and the region of electromagnetic wave phase interaction, compared with prior art, can strengthen having of non-angular asymmetrical load impact
Effect, Metal loading obtains with metallization supporting rod and preferably contacts simultaneously.
4, the Metal loading structure in the present invention passes through microelectroforming technology at pinpoint helix and patterned metal
Between supporting rod, growth forms, it is ensured that the large area between helix and patterned metal supporting rod effectively contacts, and solves
The bottleneck of heat dissipation, heat-sinking capability is greatly improved.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of conventional slow-wave structure.
Fig. 2 is A portion enlarged diagram in Fig. 1.
Fig. 3 is existing a kind of helical line slow-wave structure cross section signal loading asymmetric metal structure on shell
Figure.
Fig. 4 is the perspective view of a kind of angular asymmetric helical line slow-wave structure provided by the present invention.
Fig. 5 is the main TV structure schematic diagram of a kind of angular asymmetric helical line slow-wave structure provided by the present invention.
Fig. 6 is the schematic flow sheet figure one of manufacture method provided by the present invention.
Fig. 7 is the schematic flow sheet figure two of manufacture method provided by the present invention.
Fig. 8 is the schematic flow sheet figure three of manufacture method provided by the present invention.
Fig. 9 is the schematic flow sheet figure four of manufacture method provided by the present invention.
Figure 10 is the schematic flow sheet figure five of manufacture method provided by the present invention.
Figure 11 is the schematic flow sheet figure six of manufacture method provided by the present invention.
Figure 12 is the dispersion curve of slow-wave structure provided by the present invention and routine list geometry period spin line slow-wave structure
Comparison diagram.
Figure 13 is that slow-wave structure provided by the present invention couples with the axis of routine list geometry period spin line slow-wave structure
Impedance curve comparison diagram.
Detailed description of the invention
The detailed description of the invention of the present invention is described below in conjunction with the accompanying drawings.
As shown in Figure 4 to 11, a kind of angular asymmetric helical line slow-wave structure, described slow-wave structure includes helix 1, folder
Holding bar 2 and shell 3, the lateral wall of supporting rod 1 is connected fixing with the medial wall of described shell 3;Part clamping in described supporting rod 2
It is provided with Metal loading 4 between medial wall and the described helix 1 of bar 2;In described supporting rod 2, remainder supporting rod 2 is interior
It is connected fixing between sidewall with described helix 1.
The present embodiment only arranges Metal loading 4 between single supporting rod 2 and helix 1;With described Metal loading 4
The medial wall of the supporting rod 2 of corresponding connection is provided with by exposure photo-etching metallized first metallization coating, described gold
Belong to loading 4 and be connected fixing with this first metallization coating, described Metal loading 4 spiral shell after exposure photo-etching corresponding thereto
Spin line 1 wall connects fixing, and in described supporting rod 2 medial wall of remainder supporting rod 2 corresponding thereto through overexposure
Helix 1 wall after photoetching connects fixing.
Further, the supporting rod 2 of patterned metal carries out size adjusting according to Metal loading 4 structure, keeps described spiral shell
Spin line 1 is positioned at the middle position of described slow-wave structure.
As the embodiment improved further, in described supporting rod 2, the medial wall of remainder supporting rod 2 is provided with by exposing
Light photoetching metallized second metallization coating, this second metallization coating spiral shell after exposure photo-etching corresponding thereto
Spin line 1 wall connects fixing.
As shown in Figure 4 to 11, a kind of system of above-mentioned a kind of angular asymmetric helical line slow-wave structure in the present embodiment
Making method, the method comprises the steps:
S1, as shown in Figure 6, at helix 1 resist coating;
S2, as it is shown in fig. 7, selected part supporting rod 2, only chooses single supporting rod 2 and arranges Metal loading in the present embodiment
4;Remove the photoresist with the contact area 11 of selected supporting rod on helix 1;Specifically, utilize mask that helix 1 is entered
Row photoetching, also needs in helix 1 insert mould, preventing light from shining territory, axially symmetric region, if choosing multiple supporting rod 2, then entering
Row repeatedly photoetching, removes photoresist;
S3, as shown in Figure 8, implements figure to effective contact area 21 of selected single supporting rod 2 with Metal loading 4
Metallization, particularly as follows:
S31, the size of foundation Metal loading 4, carry out size adjusting to selected supporting rod 2, it is ensured that helix 1 is positioned at
The middle position of described slow-wave structure;
S32, to effective contact area 21 exposure photo-etching with Metal loading 4 on selected supporting rod 2 medial wall, and
To pad patterns;
S33, graphical after above-mentioned effective contact area 21 metallize, obtain the first metallization coating;
S4 is as it is shown in figure 9, utilize jig to ensure the helix 1 after exposure imaging and selected patterned metal
After the relative position of supporting rod 2, utilize micro-electroforming to form angular unsymmetrical metal between helix 1 and supporting rod 2 and load
4, owing to there is photoresist at other positions on helix 1, supporting rod 2 is as insulating dielectric materials, and 4 meetings of Metal loading are at spiral shell
Isotropism is passed through between effective contact area 21 after surface that spin line 1 is exposed after removing photoresist and supporting rod 2 patterned metal
Growth is formed, and then obtains helix 1, Metal loading 4 and the composite construction of supporting rod 2 after micro-electroforming;
S5, as shown in Figure 10, removes the residue photoresist on helix 1;
S6, implement with effective contact area of helix 1 contact surface on remainder supporting rod 2 medial wall do not chosen
Patterned metal, and obtain the second metallization coating.
S7, as shown in figure 11, to shell 3 and above-mentioned helix 1, Metal loading 4 and the composite junction of supporting rod 2 obtained
Structure clamps, and connects shell 3 and supporting rod 2, i.e. obtains the angular asymmetric helical line slow-wave structure that the present invention is to be obtained.
According to the goal of the invention of the present invention, at millimeter wave band, a kind of angular asymmetric helical line slow-wave structure specifically side
The physical dimension of case is following (unit: mm): cycle 0.75, helix internal diameter 0.38, thickness 0.08, shell internal diameter 1.1, external diameter
1.3, isosceles triangle supporting rod is 120 degree of uniform angular distribution, base length and wide be respectively 0.6 and 0.25, isosceles triangle supporting rod is long
Being respectively 0.39 and 0.25 with wide, Metal loading thickness is 0.05, and it is short that patterned metal supporting rod length accommodates bar than other
0.05, for Metal loading headspace, make helix be placed centrally in slow-wave structure.Utilize microwave studio software to this
The angular asymmetric helical slow-wave structure of bright one is simulated, and is calculated dispersion curve and axis coupled impedance, and with same
The cold characterisitic parameter of size conventional helical line slow-wave structure contrasts, and dispersion curve and the axis coupled impedance of slow-wave structure are cold
Simulated behavior result is as shown in Figure 12 and Figure 13.
Figure 12 gives conventional conventional helical line slow-wave structure and one provided by the present invention is novel the most asymmetric
The comparison diagram of the dispersion curve of helical line slow-wave structure.
The region intersected as forward-wave and backward wave, in conventional helical line, and the pressure-wire that forward-wave synchronizes necessarily and returns
Ripple intersects, and illustrates that velocity of electrons herein and electromagnetic wave synchronize, and the feedback formed due to backward wave meets phase condition automatically, improves
Voltage can increase the coupled impedance of synchronizing frequency, increases electric current and can reduce the threshold value of backward wave starting of oscillation, as improving helix row ripple
Two kinds of approach of tube power all can produce backward wave oscillation, thus destroy travelling-wave tube and normally amplify work.
Angular asymmetric helical line slow-wave structure novel for one provided by the present invention, the metal of non-angular symmetry adds
Carrying structural change forward-wave and the dispersion characteristics in region that backward wave intersects, in this example, the Metal loading height of 0.05mm can be
Periodic phase shifts is the leukorrhagia stopping of the position generation 5.7GHz width of π, and leukorrhagia stopping width obtains along with the increase of Metal loading size
To further extension, but on relatively small much smaller than the impact of the dispersion characteristics of other positions of phase shift π, Metal loading makes work
The dispersion of the vicinity making district decreases to a certain extent.
The comparing result of Figure 13 shows, the conventional helical line slow-wave structure that contrast is conventional, one provided by the present invention is new
The axis coupled impedance curve of the angular asymmetric helical line slow-wave structure of type is little in first-harmonic difference with conventional conventional helical line.
The comparing result of comprehensive Figure 12 and Figure 13, utilizes Novel spiral line structure provided by the present invention to can be implemented in acquisition high-power
While amplification, the problem the most successfully solving backward wave oscillation.
Simultaneously relative to shown in Fig. 3, the existing helical line slow-wave structure loading asymmetric metal structure on shell, this
Metal loading structure in invention be by microelectroforming technology between pinpoint helix and patterned metal supporting rod
Growth forms, and it is more beneficial for vibration suppression, and ensure that the large area between helix and patterned metal supporting rod has
Effect contact, solves the bottleneck of heat dissipation, and heat-sinking capability is greatly improved;Helical line slow-wave structure the most provided by the present invention is same
Time solve the above-mentioned two technical barrier of high-power spiral line row wave tube.
The word in the description orientation employed in Ben Wen " on ", D score, "left", "right" etc. be for explanation facilitate base
In accompanying drawing for the orientation shown in drawing, in actual device these orientation be likely to be due to device disposing way and
Different.
In sum, embodiment of the present invention only provides a kind of optimal embodiment, in the technology of the present invention
Hold and technical characterstic has revealed that as above, but one skilled in the art scholar is still potentially based on disclosed content and makees
The various replacements without departing substantially from creation spirit of the present invention and modification;Therefore, protection scope of the present invention is not limited to disclosed in embodiment
Technology contents, therefore all shapes under this invention, structure and principle done equivalence change, be encompassed by the protection model of the present invention
In enclosing.
Claims (9)
1. an angular asymmetric helical line slow-wave structure, it is characterised in that described slow-wave structure include helix, supporting rod and
Shell;The lateral wall of described supporting rod is connected fixing with the medial wall of described shell;
Described supporting rod is connected fixing between the medial wall of part supporting rod with described helix by Metal loading;Described folder
Hold bar is connected between the medial wall of remainder supporting rod with described helix and fix.
The angular asymmetric helical line slow-wave structure of one the most according to claim 1, it is characterised in that described helix position
Middle position in described slow-wave structure.
The angular asymmetric helical line slow-wave structure of one the most according to claim 1, it is characterised in that with described metal
The medial wall of the supporting rod loading corresponding connection is provided with by exposure photo-etching metallized first metallization coating, described
Metal loading is connected with described first metallization coating.
The angular asymmetric helical line slow-wave structure of one the most according to claim 1, it is characterised in that described Metal loading
The helix wall after exposure photo-etching corresponding thereto connects fixing.
The angular asymmetric helical line slow-wave structure of one the most according to claim 1, it is characterised in that in described supporting rod
The medial wall of the remainder supporting rod helix wall after exposure photo-etching corresponding thereto connects fixing.
6. the preparation method of an angular asymmetric helical line slow-wave structure, it is characterised in that the method comprises the steps:
S1, at helix resist coating;
S2, selected part supporting rod, remove the photoresist with the contact area of selected supporting rod on helix;
S3, effective contact area to selected supporting rod and Metal loading implement patterned metal;
S4, utilize micro-electroforming formed between helix and supporting rod angular unsymmetrical metal load, obtain spiral after micro-electroforming
The composite construction of line, Metal loading and supporting rod;
S5, the residue photoresist removed on helix;
S7, composite construction to shell and above-mentioned helix, Metal loading and the supporting rod obtained clamp, and connect shell
And supporting rod, obtain angular asymmetric helical line slow-wave structure.
The preparation method of a kind of angular asymmetric helical line slow-wave structure the most according to claim 6, it is characterised in that should
Method further comprises the steps:
S6, to implementing figure gold on the remainder supporting rod medial wall do not chosen with effective contact area of helix contact surface
Genusization.
The preparation method of a kind of angular asymmetric helical line slow-wave structure the most according to claim 6, it is characterised in that institute
State step S3 particularly as follows:
S31, according to the size of Metal loading, selected supporting rod is carried out size adjusting, it is ensured that helix be positioned at described slowly
The middle position of wave structure;
S32, to effective contact area exposure photo-etching with Metal loading on selected supporting rod medial wall, and obtain solder joint figure
Shape;
S33, graphical after the metallization of above-mentioned effective contact area.
The preparation method of a kind of angular asymmetric helical line slow-wave structure the most according to claim 6, it is characterised in that institute
State step S4 particularly as follows: utilize jig to ensure the helix after exposure imaging and the clamping after selected patterned metal
The relative position of bar, utilizes micro-electroforming to form angular unsymmetrical metal between helix and supporting rod and loads, after micro-electroforming
Composite construction to helix, Metal loading and supporting rod.
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CN110335797A (en) * | 2019-07-08 | 2019-10-15 | 电子科技大学 | A kind of helical line for travelling wave tube slow-wave structure |
CN112820609A (en) * | 2020-12-31 | 2021-05-18 | 山东微波电真空技术有限公司 | Integral type travelling wave tube |
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CN112820609A (en) * | 2020-12-31 | 2021-05-18 | 山东微波电真空技术有限公司 | Integral type travelling wave tube |
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