CN105977120B - A kind of manufacture method of high heat conduction helical line slow-wave structure - Google Patents
A kind of manufacture method of high heat conduction helical line slow-wave structure Download PDFInfo
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- CN105977120B CN105977120B CN201610553164.6A CN201610553164A CN105977120B CN 105977120 B CN105977120 B CN 105977120B CN 201610553164 A CN201610553164 A CN 201610553164A CN 105977120 B CN105977120 B CN 105977120B
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- Prior art keywords
- helix
- supporting rod
- heat conduction
- wave structure
- high heat
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/16—Circuit elements, having distributed capacitance and inductance, structurally associated with the tube and interacting with the discharge
- H01J23/24—Slow-wave structures, e.g. delay systems
- H01J23/26—Helical slow-wave structures; Adjustment therefor
- H01J23/27—Helix-derived slow-wave structures
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Abstract
The invention discloses a kind of manufacture method of high heat conduction helical line slow-wave structure, comprise the following steps：S1, by helix resist coating；S2, the quantity according to supporting rod, remove the photoresist with supporting rod contact area on helix；S3, patterned metal is implemented to effective contact area on supporting rod madial wall with helix contact surface；S4, metal connection is formed between helix and supporting rod using micro- electroforming, obtain the composite construction of helix and supporting rod；Remaining photoresist on S5, removal helix；S6, shell and the composite construction of above-mentioned obtained helix and supporting rod are clamped, connect shell and supporting rod, obtain high heat conduction helical line slow-wave structure.Manufacture method provided by the present invention fundamentally realizes the greater area of effectively connection of helix and patterned metal supporting rod, improves the capacity of heat transmission of helix and supporting rod.
Description
Technical field
The present invention relates to vacuum electron device field, more particularly to a kind of manufacturer of high heat conduction helical line slow-wave structure
Method.
Background technology
Travelling-wave tubes is a kind of a kind of vacuum electron device most widely used in national defence and national economy, is had well
Power, frequency band and gain performance.Wherein, helix TWT is most important work(during satellite communication, radar and electronic warfare are applied
Rate amplifier.
As a kind of the most frequently used slow-wave structure, as shown in Figure 1, 2, helical line slow-wave structure is by the ˊ of Can 1, medium
The ˊ of the bar 2 and ˊ of wire spiral 3 compositions, supporting rod is angular symmetrically arranged three delta structures in Fig. 1,2, this kind of slow wave knot
Structure has the characteristics that big power, bandwidth and high-gain.However, it was found from two dimension view, this kind of slow-wave structure helix slow-wave
The heat-sinking capability Shortcomings of structure, helix is formed by metal tape coiling, and optional position is all in terms of cross section, on the outside of helix
For cambered surface, but the dielectric rod being attached thereto is planar structure, the contact area between the structure of heat clamping latter two different materials
Small, thermal contact resistance is big, when intercepting and capturing electric current increase, is unfavorable for the export of heat, helix easily burns.
In view of the shortcomings of the prior art, it is necessary to propose a kind of manufacture method of new helical line slow-wave structure, and then from root
Solves helical line slow-wave structure heat dissipation problem in sheet.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of manufacture method of high heat conduction helical line slow-wave structure；This method
For in the prior art, traditional helical line slow-wave structure heat dissipation ability deficiency, the defects of Brazing helix technology is immature,
By technological means such as exposure imaging, patterned metal, micro- electroforming, metal connection knot is introduced between helix and supporting rod
Structure, fundamentally realize the greater area of effectively connection of helix and patterned metal supporting rod, improve helix and
The capacity of heat transmission of supporting rod, and significantly improve performance of the helix TWT at high-power aspect.
In order to solve the above technical problems, the present invention uses following technical proposals：
A kind of manufacture method of high heat conduction helical line slow-wave structure, methods described comprise the following steps：
S1, by helix resist coating；
S2, the quantity according to supporting rod, remove the photoresist with supporting rod contact area on helix；
S3, patterned metal is implemented to effective contact area on supporting rod with helix contact surface；
S4, metal connection is formed between helix and supporting rod using micro- electroforming, obtain answering for helix and supporting rod
Close structure；
Remaining photoresist on S5, removal helix；
S6, shell and the composite construction of above-mentioned obtained helix and supporting rod are clamped, connect shell and folder
Bar is held, obtains high heat conduction helical line slow-wave structure.
Further, the step S2 is specially：According to the quantity of supporting rod, developed using multiexposure, multiple exposure and remove helix
Upper and supporting rod contact area photoresist.
Further, the step S3 is specially：To effective contact zone on supporting rod madial wall with helix contact surface
Domain exposure photo-etching, and obtain pad patterns；Above-mentioned effectively contact area metallization after graphical.
Further, the step S4 is specially：Ensure the helix after exposure imaging and figure gold using jig
The relative position of supporting rod after categoryization, metal connection is formed between helix and supporting rod using micro- electroforming, obtains spiral
The composite construction of line and supporting rod.
The present invention using by the technological means such as exposure imaging, patterned metal, micro- electroforming, helix and supporting rod it
Between introduce metal connecting structure, and the growth metal connection using the method for photoetching and micro- electroforming between supporting rod and helix
Structure, both contacts area are increased, it is strong to increase both quality of connection, fundamentally realize helix and patterned metal supporting rod
It is greater area of effectively connection, improve the capacity of heat transmission of helix and supporting rod, and significantly improve helix TWT
In the performance of high-power aspect.
Brief description of the drawings
Fig. 1 is the structural representation of conventional slow-wave structure.
Fig. 2 is the A portions enlarged diagram in Fig. 1.
Fig. 3 is the structural representation using helical line slow-wave structure made of the present invention.
Fig. 4 is the B portions enlarged diagram in Fig. 3.
Fig. 5 is the schematic flow sheet figure one of manufacture method provided by the present invention.
Fig. 6 is the schematic flow sheet figure two of manufacture method provided by the present invention.
Fig. 7 is the schematic flow sheet figure three of manufacture method provided by the present invention.
Fig. 8 is the schematic flow sheet figure four of manufacture method provided by the present invention.
Fig. 9 is the schematic flow sheet figure five of manufacture method provided by the present invention.
Figure 10 is the schematic flow sheet figure six of manufacture method provided by the present invention.
Figure 11 is the process blocks schematic diagram of the present invention.
Embodiment
Illustrate the embodiment of the present invention below in conjunction with the accompanying drawings.
As shown in Fig. 3 to 11, a kind of manufacture method of high heat conduction helical line slow-wave structure, methods described includes following step
Suddenly：
S1, the resist coating of helix 1, photoresist need to be selected into positive photoresist；
S2, the quantity according to supporting rod 2, using multiexposure, multiple exposure develop remove helix 1 on the contact area 11 of supporting rod 2
Photoresist；Also need to insert mould in helix 1 during exposure imaging, prevent axial symmetry region of the illumination to helix 1；
S3, to the exposure photo-etching of effective contact area 21 on the madial wall of supporting rod 2 with the contact surface of helix 1, and welded
Dot pattern；Above-mentioned effectively contact area metallization after graphical；
S4, utilize the madial wall of supporting rod 2 after the helix 1 and patterned metal after jig guarantee exposure imaging
Relative position, because there is photoresist at other positions of helix 1, supporting rod 2 only can be in helix as dielectric material, metal
After 1 exposed surface (that is, on helix with the contact area 11 of supporting rod) and the patterned metal of supporting rod 2 on madial wall
Formed by isotropic growth between effective contact area 21, and formed using micro- electroforming between helix 1 and supporting rod 2
Metal connects, and obtains the composite construction of helix 1 and supporting rod 2；
Remaining photoresist on S5, removal helix 1；
S6, shell 3 and the composite construction of above-mentioned obtained helix 1 and supporting rod 2 are clamped, connect shell 3
With supporting rod 2, high heat conduction helical line slow-wave structure is obtained.
The large area that the present invention obtains supporting rod and helix by exposure imaging and micro- electrocasting method effectively connects, and realizes
Helix is substantially improved with supporting rod heat-sinking capability.
What the word " on ", " under " in description orientation, "left", "right" etc. were for explanation used by herein facilitates base
For orientation in accompanying drawing shown in drawing, in actual device these orientation may due to device disposing way and
It is different.
In summary, embodiment of the present invention only provides a kind of optimal embodiment, in technology of the invention
Hold and technical characterstic has revealed that as above, but one skilled in the art scholar is still potentially based on disclosed content and made
Various replacements and modification without departing substantially from creation spirit of the present invention；Therefore, protection scope of the present invention is not limited to disclosed in embodiment
Technology contents, therefore equivalence changes that all shape under this invention, construction and principle are done, be encompassed by the protection model of the present invention
In enclosing.
Claims (4)
1. a kind of manufacture method of high heat conduction helical line slow-wave structure, it is characterised in that methods described comprises the following steps：
S1, by helix resist coating；
S2, the quantity according to supporting rod, remove the photoresist with supporting rod contact area on helix；
S3, patterned metal is implemented to effective contact area on supporting rod madial wall with helix contact surface；
S4, metal connection is formed between helix and supporting rod using micro- electroforming, obtain the composite junction of helix and supporting rod
Structure；
Remaining photoresist on S5, removal helix；
S6, shell and the composite construction of above-mentioned obtained helix and supporting rod are clamped, connect shell and supporting rod,
Obtain high heat conduction helical line slow-wave structure.
A kind of 2. manufacture method of high heat conduction helical line slow-wave structure according to claim 1, it is characterised in that the step
Suddenly S2 is specially：According to the quantity of supporting rod, developed the light removed on helix with supporting rod contact area using multiexposure, multiple exposure
Photoresist.
A kind of 3. manufacture method of high heat conduction helical line slow-wave structure according to claim 1, it is characterised in that the step
Suddenly S3 is specially：To effective contact area exposure photo-etching on supporting rod madial wall with helix contact surface, and obtain solder joint figure
Shape；Above-mentioned effectively contact area metallization after graphical.
A kind of 4. manufacture method of high heat conduction helical line slow-wave structure according to claim 1, it is characterised in that the step
Suddenly S4 is specially：Ensure the relative position of the supporting rod after the helix and patterned metal after exposure imaging using jig
Put, form metal connection between helix and supporting rod using micro- electroforming, obtain the composite construction of helix and supporting rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610553164.6A CN105977120B (en) | 2016-07-14 | 2016-07-14 | A kind of manufacture method of high heat conduction helical line slow-wave structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610553164.6A CN105977120B (en) | 2016-07-14 | 2016-07-14 | A kind of manufacture method of high heat conduction helical line slow-wave structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105977120A CN105977120A (en) | 2016-09-28 |
| CN105977120B true CN105977120B (en) | 2018-01-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610553164.6A Active CN105977120B (en) | 2016-07-14 | 2016-07-14 | A kind of manufacture method of high heat conduction helical line slow-wave structure |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110828257A (en) * | 2019-12-07 | 2020-02-21 | 安泰德智能装备（深圳）有限公司 | Traction device for assembling spiral line and clamping rod |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5887734A (en) * | 1981-11-18 | 1983-05-25 | Toshiba Corp | Manufacture of slow-wave circuit structure for traveling-wave tube |
| GB2141370B (en) * | 1983-06-17 | 1987-02-04 | Standard Telephones Cables Ltd | Bonding metal to ceramic |
| JPH01311542A (en) * | 1988-06-10 | 1989-12-15 | Toshiba Corp | Helix type slow-wave structure |
| JP2000215819A (en) * | 1999-01-22 | 2000-08-04 | Nec Corp | Traveling wave tube |
| US6917162B2 (en) * | 2002-02-13 | 2005-07-12 | Genvac Aerospace Corporation | Traveling wave tube |
| CN103325645B (en) * | 2013-06-19 | 2016-12-28 | 中国电子科技集团公司第十二研究所 | A kind of diamond for travelling-wave tube-electro-coppering combined type supporting rod and manufacture method thereof |
| CN203690248U (en) * | 2013-12-16 | 2014-07-02 | 成都国光电气股份有限公司 | Welding helix structure of travelling wave tube |
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2016
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