CN101563620A - 电子元件测试装置及电子元件的测试方法 - Google Patents

电子元件测试装置及电子元件的测试方法 Download PDF

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Publication number
CN101563620A
CN101563620A CNA2006800567097A CN200680056709A CN101563620A CN 101563620 A CN101563620 A CN 101563620A CN A2006800567097 A CNA2006800567097 A CN A2006800567097A CN 200680056709 A CN200680056709 A CN 200680056709A CN 101563620 A CN101563620 A CN 101563620A
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CN
China
Prior art keywords
pallet
conveyance
electronic component
test
towards
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2006800567097A
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English (en)
Chinese (zh)
Inventor
金子裕史
山下和之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
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Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of CN101563620A publication Critical patent/CN101563620A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
CNA2006800567097A 2006-12-21 2006-12-21 电子元件测试装置及电子元件的测试方法 Pending CN101563620A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2006/325542 WO2008075439A1 (ja) 2006-12-21 2006-12-21 電子部品試験装置及び電子部品の試験方法

Publications (1)

Publication Number Publication Date
CN101563620A true CN101563620A (zh) 2009-10-21

Family

ID=39536078

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2006800567097A Pending CN101563620A (zh) 2006-12-21 2006-12-21 电子元件测试装置及电子元件的测试方法

Country Status (5)

Country Link
JP (1) JP5022381B2 (ja)
KR (1) KR101158064B1 (ja)
CN (1) CN101563620A (ja)
TW (1) TW200827726A (ja)
WO (1) WO2008075439A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103185813A (zh) * 2011-12-28 2013-07-03 株式会社爱德万测试 电子元件移载装置、电子元件操作装置以及电子元件测试装置
CN103852710A (zh) * 2012-11-29 2014-06-11 鸿劲科技股份有限公司 对置式电子组件作业设备
TWI624672B (zh) * 2011-09-06 2018-05-21 精工愛普生股份有限公司 處理器及零件檢查裝置
CN111153129A (zh) * 2018-11-07 2020-05-15 泰克元有限公司 搬运机

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5840403B2 (ja) * 2011-07-11 2016-01-06 オリオン機械株式会社 環境試験装置
KR101644481B1 (ko) * 2011-12-08 2016-08-02 (주)테크윙 테스트핸들러
KR102254494B1 (ko) * 2015-04-30 2021-05-24 (주)테크윙 반도체소자 테스트용 핸들러
KR102252638B1 (ko) * 2015-05-04 2021-05-17 (주)테크윙 테스트핸들러용 인서트
CN105548787B (zh) * 2015-11-30 2018-12-28 东莞市冠佳电子设备有限公司 电源自动测试系统
KR102461321B1 (ko) * 2017-08-18 2022-11-02 (주)테크윙 전자부품 테스트용 핸들러
JP7561534B2 (ja) * 2020-07-21 2024-10-04 株式会社アドバンテスト 電子部品ハンドリング装置及び電子部品試験装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH079825U (ja) * 1993-06-16 1995-02-10 村田機械株式会社 リトライ機能付きコンベア装置
JPH1138083A (ja) * 1997-07-14 1999-02-12 Advantest Corp Ｉｃテストハンドラ
TW533317B (en) * 1999-01-11 2003-05-21 Advantest Corp Testing device for electronic device substrate
JP4164182B2 (ja) * 1999-01-11 2008-10-08 株式会社アドバンテスト トレイ移送装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI624672B (zh) * 2011-09-06 2018-05-21 精工愛普生股份有限公司 處理器及零件檢查裝置
TWI655445B (zh) * 2011-09-06 2019-04-01 日商精工愛普生股份有限公司 處理器及零件檢查裝置
CN103185813A (zh) * 2011-12-28 2013-07-03 株式会社爱德万测试 电子元件移载装置、电子元件操作装置以及电子元件测试装置
CN103185813B (zh) * 2011-12-28 2016-05-11 株式会社爱德万测试 电子元件移载装置、电子元件操作装置以及电子元件测试装置
CN103852710A (zh) * 2012-11-29 2014-06-11 鸿劲科技股份有限公司 对置式电子组件作业设备
CN111153129A (zh) * 2018-11-07 2020-05-15 泰克元有限公司 搬运机
CN111153129B (zh) * 2018-11-07 2021-11-05 泰克元有限公司 搬运机

Also Published As

Publication number Publication date
KR101158064B1 (ko) 2012-06-18
TWI359273B (ja) 2012-03-01
KR20090095617A (ko) 2009-09-09
WO2008075439A1 (ja) 2008-06-26
JPWO2008075439A1 (ja) 2010-04-08
TW200827726A (en) 2008-07-01
JP5022381B2 (ja) 2012-09-12

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Open date: 20091021