CN101520327B - 物理量测定装置以及电子设备 - Google Patents

物理量测定装置以及电子设备 Download PDF

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Publication number
CN101520327B
CN101520327B CN2009101185396A CN200910118539A CN101520327B CN 101520327 B CN101520327 B CN 101520327B CN 2009101185396 A CN2009101185396 A CN 2009101185396A CN 200910118539 A CN200910118539 A CN 200910118539A CN 101520327 B CN101520327 B CN 101520327B
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circuit
amplitude
signal
converter
driving
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CN101520327A (zh
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野泽俊之
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Seiko Epson Corp
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Seiko Epson Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Adjustment Of Camera Lenses (AREA)
CN2009101185396A 2008-02-29 2009-02-26 物理量测定装置以及电子设备 Expired - Fee Related CN101520327B (zh)

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JP2008049286 2008-02-29
JP2008049286 2008-02-29
JP2008-049286 2008-02-29
JP2008-307619 2008-12-02
JP2008307619 2008-12-02
JP2008307619A JP5365173B2 (ja) 2008-02-29 2008-12-02 物理量測定装置および電子機器

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CN101520327A CN101520327A (zh) 2009-09-02
CN101520327B true CN101520327B (zh) 2012-04-04

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JP (1) JP5365173B2 (enExample)
CN (1) CN101520327B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI576679B (zh) * 2014-06-11 2017-04-01 宇能電科技股份有限公司 偏移電壓自動補償系統

Families Citing this family (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009244019A (ja) * 2008-03-31 2009-10-22 Seiko Npc Corp 角速度検出装置
JP2010169532A (ja) * 2009-01-22 2010-08-05 Panasonic Corp 駆動回路、物理量センサ装置
US8714012B2 (en) * 2010-02-16 2014-05-06 Stmicroelectronics S.R.L. Microelectromechanical gyroscope with inversion of actuation forces, and method for actuating a microelectromechanical gyroscope
CN102753937B (zh) * 2010-02-17 2016-03-02 株式会社村田制作所 振动型惯性力传感器
JP5717376B2 (ja) * 2010-03-31 2015-05-13 シチズンホールディングス株式会社 物理量センサ
JP2011226941A (ja) * 2010-04-21 2011-11-10 Seiko Epson Corp 振動型力検出センサー、及び振動型力検出装置
US8378756B2 (en) * 2010-05-18 2013-02-19 Taiwan Semiconductor Manufacturing Company, Ltd. Drive loop for MEMS oscillator
JP5569245B2 (ja) * 2010-08-17 2014-08-13 セイコーエプソン株式会社 集積回路装置及び電子機器
DE112011103124B4 (de) 2010-09-18 2025-10-30 Fairchild Semiconductor Corporation Biegelager zum Verringern von Quadratur für mitschwingende mikromechanische Vorrichtungen
WO2012037540A2 (en) 2010-09-18 2012-03-22 Fairchild Semiconductor Corporation Micromachined monolithic 3-axis gyroscope with single drive
KR20130057485A (ko) 2010-09-18 2013-05-31 페어차일드 세미컨덕터 코포레이션 미세 전자 기계 시스템에 미치는 응력을 감소시키기 위한 패키징
US8813564B2 (en) 2010-09-18 2014-08-26 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope with central suspension and gimbal structure
CN103221779B (zh) 2010-09-18 2017-05-31 快捷半导体公司 微机械整体式六轴惯性传感器
KR101332701B1 (ko) 2010-09-20 2013-11-25 페어차일드 세미컨덕터 코포레이션 기준 커패시터를 포함하는 미소 전자기계 압력 센서
JP5975601B2 (ja) 2011-02-25 2016-08-23 セイコーエプソン株式会社 検出回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器
JP5638419B2 (ja) * 2011-02-25 2014-12-10 セイコーエプソン株式会社 信号処理回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器
JP5559733B2 (ja) * 2011-03-31 2014-07-23 シチズンホールディングス株式会社 物理量センサ
JP2012227762A (ja) * 2011-04-20 2012-11-15 Seiko Epson Corp 発振回路
JP5561237B2 (ja) * 2011-04-27 2014-07-30 株式会社デンソー 振動子駆動回路
US9091539B2 (en) * 2011-06-10 2015-07-28 Honeywell International Inc. Gyroscope dynamic motor amplitude compensation for enhanced rate estimation during startup
LU91839B1 (en) * 2011-07-08 2013-01-09 Iee Sarl Impedance measurement system
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
KR102058489B1 (ko) 2012-04-05 2019-12-23 페어차일드 세미컨덕터 코포레이션 멤스 장치 프론트 엔드 전하 증폭기
EP2647955B8 (en) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS device quadrature phase shift cancellation
EP2647952B1 (en) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Mems device automatic-gain control loop for mechanical amplitude drive
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
KR101354782B1 (ko) * 2012-05-25 2014-01-22 삼성전기주식회사 자이로 센서 신호 탐지 장치 및 그 방법
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
ITTO20121116A1 (it) * 2012-12-20 2014-06-21 St Microelectronics Srl Circuito e metodo di compensazione dinamica dell'offset per un dispositivo sensore mems
US9109901B2 (en) * 2013-03-08 2015-08-18 Freescale Semiconductor Inc. System and method for monitoring a gyroscope
US9459274B2 (en) 2013-03-13 2016-10-04 Invensense, Inc. Round-robin sensing device and method of use
US9644963B2 (en) 2013-03-15 2017-05-09 Fairchild Semiconductor Corporation Apparatus and methods for PLL-based gyroscope gain control, quadrature cancellation and demodulation
JP6197323B2 (ja) * 2013-03-22 2017-09-20 セイコーエプソン株式会社 検出装置、センサー、ジャイロセンサー、電子機器及び移動体
JP6222423B2 (ja) 2013-03-28 2017-11-01 セイコーエプソン株式会社 物理量センサー、電子機器及び移動体
JP6222426B2 (ja) 2013-04-24 2017-11-01 セイコーエプソン株式会社 物理量検出回路、物理量検出装置、電子機器及び移動体
JP6197347B2 (ja) 2013-04-24 2017-09-20 セイコーエプソン株式会社 電子機器及び物理量検出装置
JP6222425B2 (ja) 2013-04-24 2017-11-01 セイコーエプソン株式会社 物理量検出回路、物理量検出装置、電子機器及び移動体
US9109894B2 (en) 2013-04-26 2015-08-18 Maxim Integrated Products, Inc. Gyroscope shock and disturbance detection circuit
KR20150015932A (ko) * 2013-08-02 2015-02-11 삼성전기주식회사 자이로 센서의 구동장치 및 그 제어방법
US9332369B2 (en) * 2013-10-22 2016-05-03 Infineon Technologies Ag System and method for automatic calibration of a transducer
JP6213165B2 (ja) * 2013-11-07 2017-10-18 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
JP6303411B2 (ja) * 2013-11-07 2018-04-04 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
JP6307840B2 (ja) * 2013-11-07 2018-04-11 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
JP6206113B2 (ja) * 2013-11-20 2017-10-04 株式会社村田製作所 振動子駆動回路
JP6287151B2 (ja) * 2013-12-11 2018-03-07 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
JP6187305B2 (ja) * 2014-02-18 2017-08-30 株式会社デンソー ジャイロセンサ
CN104848847B (zh) * 2014-02-19 2017-11-03 无锡华润上华科技有限公司 一种陀螺仪传感器控制电路和电子装置
CN103791897B (zh) * 2014-02-20 2016-05-11 北京华力创通科技股份有限公司 促使微机械陀螺快速起振的电路
US10036652B2 (en) * 2014-02-24 2018-07-31 The Regents Of The University Of California Utilization of mechanical quadrature in silicon MEMS vibratory gyroscope to increase and expand the long term in-run bias stability
US9835647B2 (en) 2014-03-18 2017-12-05 Fairchild Semiconductor Corporation Apparatus and method for extending analog front end sense range of a high-Q MEMS sensor
JP5811239B2 (ja) * 2014-06-25 2015-11-11 セイコーエプソン株式会社 集積回路装置及び電子機器
DE102014010056B4 (de) * 2014-07-07 2016-02-25 Northrop Grumman Litef Gmbh Steuervorrichtung und Verfahren zur Minimierung von Skalenfaktorfehlern eines Drehratensensors
JP2016171493A (ja) * 2015-03-13 2016-09-23 セイコーエプソン株式会社 回路装置、電子機器及び移動体
US10458839B1 (en) 2015-11-04 2019-10-29 General Electric Company Methods and systems for monitoring a dynamic system
CN105466427A (zh) * 2015-12-22 2016-04-06 无锡信大气象传感网科技有限公司 一种基于放大滤波电路的载体移动轨迹检测系统
CN105651282A (zh) * 2015-12-22 2016-06-08 无锡信大气象传感网科技有限公司 一种基于射频识别的载体移动轨迹检测系统
CN105403220A (zh) * 2015-12-22 2016-03-16 无锡信大气象传感网科技有限公司 一种基于载体的移动轨迹检测系统
JP6705283B2 (ja) * 2016-05-20 2020-06-03 株式会社デンソー ジャイロセンサ装置
JP6571064B2 (ja) * 2016-11-21 2019-09-04 株式会社東芝 検出装置およびセンサ装置
CN107036589B (zh) * 2017-04-20 2018-02-23 中国人民解放军国防科学技术大学 一种用于mems陀螺仪的角度测量系统及其方法
IT201700103058A1 (it) * 2017-09-14 2019-03-14 St Microelectronics Srl Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems
CN108332732B (zh) * 2018-01-26 2020-05-19 珠海全志科技股份有限公司 微机械单振子三轴陀螺仪的驱动和检测装置
CN108332733B (zh) * 2018-01-26 2020-05-19 珠海全志科技股份有限公司 微机械单振子三轴陀螺仪的驱动和检测装置
JP2021071382A (ja) * 2019-10-31 2021-05-06 セイコーエプソン株式会社 物理量センサー、電子機器及び移動体
CN110946572B (zh) * 2019-12-18 2022-04-15 郑州轻工业大学 无线心电图(ecg)采集监测装置
CN112146638B (zh) * 2020-09-11 2022-10-28 中国船舶重工集团公司第七0七研究所 一种谐振陀螺仪稳幅激励有效值检测电路及其方法
CN120468518A (zh) * 2025-04-28 2025-08-12 上海鹏普静电科技有限公司 一种静电检测系统

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7216538B2 (en) * 2004-08-05 2007-05-15 Denso Corporation Vibratory angular rate sensor

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61258110A (ja) * 1985-05-13 1986-11-15 Hitachi Ltd 角速度センサ
JPH06194178A (ja) * 1992-10-12 1994-07-15 Nippon Soken Inc 角速度センサ
JPH0736613A (ja) * 1993-07-07 1995-02-07 Tokin Corp データ入力装置
JPH0875473A (ja) * 1994-09-08 1996-03-22 Nissan Motor Co Ltd 振動ジャイロ装置
JPH1144540A (ja) * 1997-07-25 1999-02-16 Denso Corp 振動型角速度センサ
US6508122B1 (en) * 1999-09-16 2003-01-21 American Gnc Corporation Microelectromechanical system for measuring angular rate
JP3520821B2 (ja) * 1999-10-29 2004-04-19 株式会社村田製作所 振動ジャイロ用自己診断回路
WO2001069266A1 (en) * 2000-03-13 2001-09-20 Microsensors, Inc. Method of driving mems sensor with balanced four-phase comb drive
JP4668407B2 (ja) 2000-12-08 2011-04-13 京セラキンセキ株式会社 角速度センサ
US6564636B2 (en) * 2001-08-22 2003-05-20 Honeywell International Inc. Wide band digital phase locked loop (PLL) with a half-frequency output
JP2004053396A (ja) * 2002-07-19 2004-02-19 Matsushita Electric Ind Co Ltd 角速度センサおよびそれを用いた自動車
JP2005241625A (ja) * 2004-01-27 2005-09-08 Seiko Epson Corp クロック生成装置、振動式ジャイロセンサ、ナビゲーション装置、撮像装置および電子機器
JP4258466B2 (ja) * 2004-12-16 2009-04-30 セイコーエプソン株式会社 圧電ジャイロ素子及び圧電ジャイロスコープ
JP2008089577A (ja) * 2006-09-08 2008-04-17 Seiko Epson Corp 駆動装置、物理量測定装置及び電子機器
JP4211840B2 (ja) * 2006-11-10 2009-01-21 セイコーエプソン株式会社 検出装置、センサ及び電子機器
JP4449972B2 (ja) * 2006-11-10 2010-04-14 セイコーエプソン株式会社 検出装置、センサ及び電子機器
US7779688B2 (en) * 2006-12-20 2010-08-24 Epson Toyocom Corporation Vibration gyro sensor
JP2008209182A (ja) 2007-02-26 2008-09-11 Seiko Epson Corp 検出装置、センサ及び電子機器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7216538B2 (en) * 2004-08-05 2007-05-15 Denso Corporation Vibratory angular rate sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI576679B (zh) * 2014-06-11 2017-04-01 宇能電科技股份有限公司 偏移電壓自動補償系統

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US8186218B2 (en) 2012-05-29
CN101520327A (zh) 2009-09-02
JP2009229447A (ja) 2009-10-08
US20090217757A1 (en) 2009-09-03
JP5365173B2 (ja) 2013-12-11

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