CN101520327B - 物理量测定装置以及电子设备 - Google Patents
物理量测定装置以及电子设备 Download PDFInfo
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- CN101520327B CN101520327B CN2009101185396A CN200910118539A CN101520327B CN 101520327 B CN101520327 B CN 101520327B CN 2009101185396 A CN2009101185396 A CN 2009101185396A CN 200910118539 A CN200910118539 A CN 200910118539A CN 101520327 B CN101520327 B CN 101520327B
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Adjustment Of Camera Lenses (AREA)
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008049286 | 2008-02-29 | ||
| JP2008049286 | 2008-02-29 | ||
| JP2008-049286 | 2008-02-29 | ||
| JP2008-307619 | 2008-12-02 | ||
| JP2008307619 | 2008-12-02 | ||
| JP2008307619A JP5365173B2 (ja) | 2008-02-29 | 2008-12-02 | 物理量測定装置および電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101520327A CN101520327A (zh) | 2009-09-02 |
| CN101520327B true CN101520327B (zh) | 2012-04-04 |
Family
ID=41012165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101185396A Expired - Fee Related CN101520327B (zh) | 2008-02-29 | 2009-02-26 | 物理量测定装置以及电子设备 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8186218B2 (enExample) |
| JP (1) | JP5365173B2 (enExample) |
| CN (1) | CN101520327B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI576679B (zh) * | 2014-06-11 | 2017-04-01 | 宇能電科技股份有限公司 | 偏移電壓自動補償系統 |
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|---|---|---|---|---|
| JP2009244019A (ja) * | 2008-03-31 | 2009-10-22 | Seiko Npc Corp | 角速度検出装置 |
| JP2010169532A (ja) * | 2009-01-22 | 2010-08-05 | Panasonic Corp | 駆動回路、物理量センサ装置 |
| US8714012B2 (en) * | 2010-02-16 | 2014-05-06 | Stmicroelectronics S.R.L. | Microelectromechanical gyroscope with inversion of actuation forces, and method for actuating a microelectromechanical gyroscope |
| CN102753937B (zh) * | 2010-02-17 | 2016-03-02 | 株式会社村田制作所 | 振动型惯性力传感器 |
| JP5717376B2 (ja) * | 2010-03-31 | 2015-05-13 | シチズンホールディングス株式会社 | 物理量センサ |
| JP2011226941A (ja) * | 2010-04-21 | 2011-11-10 | Seiko Epson Corp | 振動型力検出センサー、及び振動型力検出装置 |
| US8378756B2 (en) * | 2010-05-18 | 2013-02-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Drive loop for MEMS oscillator |
| JP5569245B2 (ja) * | 2010-08-17 | 2014-08-13 | セイコーエプソン株式会社 | 集積回路装置及び電子機器 |
| DE112011103124B4 (de) | 2010-09-18 | 2025-10-30 | Fairchild Semiconductor Corporation | Biegelager zum Verringern von Quadratur für mitschwingende mikromechanische Vorrichtungen |
| WO2012037540A2 (en) | 2010-09-18 | 2012-03-22 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
| KR20130057485A (ko) | 2010-09-18 | 2013-05-31 | 페어차일드 세미컨덕터 코포레이션 | 미세 전자 기계 시스템에 미치는 응력을 감소시키기 위한 패키징 |
| US8813564B2 (en) | 2010-09-18 | 2014-08-26 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope with central suspension and gimbal structure |
| CN103221779B (zh) | 2010-09-18 | 2017-05-31 | 快捷半导体公司 | 微机械整体式六轴惯性传感器 |
| KR101332701B1 (ko) | 2010-09-20 | 2013-11-25 | 페어차일드 세미컨덕터 코포레이션 | 기준 커패시터를 포함하는 미소 전자기계 압력 센서 |
| JP5975601B2 (ja) | 2011-02-25 | 2016-08-23 | セイコーエプソン株式会社 | 検出回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器 |
| JP5638419B2 (ja) * | 2011-02-25 | 2014-12-10 | セイコーエプソン株式会社 | 信号処理回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器 |
| JP5559733B2 (ja) * | 2011-03-31 | 2014-07-23 | シチズンホールディングス株式会社 | 物理量センサ |
| JP2012227762A (ja) * | 2011-04-20 | 2012-11-15 | Seiko Epson Corp | 発振回路 |
| JP5561237B2 (ja) * | 2011-04-27 | 2014-07-30 | 株式会社デンソー | 振動子駆動回路 |
| US9091539B2 (en) * | 2011-06-10 | 2015-07-28 | Honeywell International Inc. | Gyroscope dynamic motor amplitude compensation for enhanced rate estimation during startup |
| LU91839B1 (en) * | 2011-07-08 | 2013-01-09 | Iee Sarl | Impedance measurement system |
| US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
| KR102058489B1 (ko) | 2012-04-05 | 2019-12-23 | 페어차일드 세미컨덕터 코포레이션 | 멤스 장치 프론트 엔드 전하 증폭기 |
| EP2647955B8 (en) | 2012-04-05 | 2018-12-19 | Fairchild Semiconductor Corporation | MEMS device quadrature phase shift cancellation |
| EP2647952B1 (en) | 2012-04-05 | 2017-11-15 | Fairchild Semiconductor Corporation | Mems device automatic-gain control loop for mechanical amplitude drive |
| US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
| KR101354782B1 (ko) * | 2012-05-25 | 2014-01-22 | 삼성전기주식회사 | 자이로 센서 신호 탐지 장치 및 그 방법 |
| DE102013014881B4 (de) | 2012-09-12 | 2023-05-04 | Fairchild Semiconductor Corporation | Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien |
| ITTO20121116A1 (it) * | 2012-12-20 | 2014-06-21 | St Microelectronics Srl | Circuito e metodo di compensazione dinamica dell'offset per un dispositivo sensore mems |
| US9109901B2 (en) * | 2013-03-08 | 2015-08-18 | Freescale Semiconductor Inc. | System and method for monitoring a gyroscope |
| US9459274B2 (en) | 2013-03-13 | 2016-10-04 | Invensense, Inc. | Round-robin sensing device and method of use |
| US9644963B2 (en) | 2013-03-15 | 2017-05-09 | Fairchild Semiconductor Corporation | Apparatus and methods for PLL-based gyroscope gain control, quadrature cancellation and demodulation |
| JP6197323B2 (ja) * | 2013-03-22 | 2017-09-20 | セイコーエプソン株式会社 | 検出装置、センサー、ジャイロセンサー、電子機器及び移動体 |
| JP6222423B2 (ja) | 2013-03-28 | 2017-11-01 | セイコーエプソン株式会社 | 物理量センサー、電子機器及び移動体 |
| JP6222426B2 (ja) | 2013-04-24 | 2017-11-01 | セイコーエプソン株式会社 | 物理量検出回路、物理量検出装置、電子機器及び移動体 |
| JP6197347B2 (ja) | 2013-04-24 | 2017-09-20 | セイコーエプソン株式会社 | 電子機器及び物理量検出装置 |
| JP6222425B2 (ja) | 2013-04-24 | 2017-11-01 | セイコーエプソン株式会社 | 物理量検出回路、物理量検出装置、電子機器及び移動体 |
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| KR20150015932A (ko) * | 2013-08-02 | 2015-02-11 | 삼성전기주식회사 | 자이로 센서의 구동장치 및 그 제어방법 |
| US9332369B2 (en) * | 2013-10-22 | 2016-05-03 | Infineon Technologies Ag | System and method for automatic calibration of a transducer |
| JP6213165B2 (ja) * | 2013-11-07 | 2017-10-18 | セイコーエプソン株式会社 | 検出装置、センサー、電子機器及び移動体 |
| JP6303411B2 (ja) * | 2013-11-07 | 2018-04-04 | セイコーエプソン株式会社 | 検出装置、センサー、電子機器及び移動体 |
| JP6307840B2 (ja) * | 2013-11-07 | 2018-04-11 | セイコーエプソン株式会社 | 検出装置、センサー、電子機器及び移動体 |
| JP6206113B2 (ja) * | 2013-11-20 | 2017-10-04 | 株式会社村田製作所 | 振動子駆動回路 |
| JP6287151B2 (ja) * | 2013-12-11 | 2018-03-07 | セイコーエプソン株式会社 | 検出装置、センサー、電子機器及び移動体 |
| JP6187305B2 (ja) * | 2014-02-18 | 2017-08-30 | 株式会社デンソー | ジャイロセンサ |
| CN104848847B (zh) * | 2014-02-19 | 2017-11-03 | 无锡华润上华科技有限公司 | 一种陀螺仪传感器控制电路和电子装置 |
| CN103791897B (zh) * | 2014-02-20 | 2016-05-11 | 北京华力创通科技股份有限公司 | 促使微机械陀螺快速起振的电路 |
| US10036652B2 (en) * | 2014-02-24 | 2018-07-31 | The Regents Of The University Of California | Utilization of mechanical quadrature in silicon MEMS vibratory gyroscope to increase and expand the long term in-run bias stability |
| US9835647B2 (en) | 2014-03-18 | 2017-12-05 | Fairchild Semiconductor Corporation | Apparatus and method for extending analog front end sense range of a high-Q MEMS sensor |
| JP5811239B2 (ja) * | 2014-06-25 | 2015-11-11 | セイコーエプソン株式会社 | 集積回路装置及び電子機器 |
| DE102014010056B4 (de) * | 2014-07-07 | 2016-02-25 | Northrop Grumman Litef Gmbh | Steuervorrichtung und Verfahren zur Minimierung von Skalenfaktorfehlern eines Drehratensensors |
| JP2016171493A (ja) * | 2015-03-13 | 2016-09-23 | セイコーエプソン株式会社 | 回路装置、電子機器及び移動体 |
| US10458839B1 (en) | 2015-11-04 | 2019-10-29 | General Electric Company | Methods and systems for monitoring a dynamic system |
| CN105466427A (zh) * | 2015-12-22 | 2016-04-06 | 无锡信大气象传感网科技有限公司 | 一种基于放大滤波电路的载体移动轨迹检测系统 |
| CN105651282A (zh) * | 2015-12-22 | 2016-06-08 | 无锡信大气象传感网科技有限公司 | 一种基于射频识别的载体移动轨迹检测系统 |
| CN105403220A (zh) * | 2015-12-22 | 2016-03-16 | 无锡信大气象传感网科技有限公司 | 一种基于载体的移动轨迹检测系统 |
| JP6705283B2 (ja) * | 2016-05-20 | 2020-06-03 | 株式会社デンソー | ジャイロセンサ装置 |
| JP6571064B2 (ja) * | 2016-11-21 | 2019-09-04 | 株式会社東芝 | 検出装置およびセンサ装置 |
| CN107036589B (zh) * | 2017-04-20 | 2018-02-23 | 中国人民解放军国防科学技术大学 | 一种用于mems陀螺仪的角度测量系统及其方法 |
| IT201700103058A1 (it) * | 2017-09-14 | 2019-03-14 | St Microelectronics Srl | Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems |
| CN108332732B (zh) * | 2018-01-26 | 2020-05-19 | 珠海全志科技股份有限公司 | 微机械单振子三轴陀螺仪的驱动和检测装置 |
| CN108332733B (zh) * | 2018-01-26 | 2020-05-19 | 珠海全志科技股份有限公司 | 微机械单振子三轴陀螺仪的驱动和检测装置 |
| JP2021071382A (ja) * | 2019-10-31 | 2021-05-06 | セイコーエプソン株式会社 | 物理量センサー、電子機器及び移動体 |
| CN110946572B (zh) * | 2019-12-18 | 2022-04-15 | 郑州轻工业大学 | 无线心电图(ecg)采集监测装置 |
| CN112146638B (zh) * | 2020-09-11 | 2022-10-28 | 中国船舶重工集团公司第七0七研究所 | 一种谐振陀螺仪稳幅激励有效值检测电路及其方法 |
| CN120468518A (zh) * | 2025-04-28 | 2025-08-12 | 上海鹏普静电科技有限公司 | 一种静电检测系统 |
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| US7216538B2 (en) * | 2004-08-05 | 2007-05-15 | Denso Corporation | Vibratory angular rate sensor |
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| JP4449972B2 (ja) * | 2006-11-10 | 2010-04-14 | セイコーエプソン株式会社 | 検出装置、センサ及び電子機器 |
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| JP2008209182A (ja) | 2007-02-26 | 2008-09-11 | Seiko Epson Corp | 検出装置、センサ及び電子機器 |
-
2008
- 2008-12-02 JP JP2008307619A patent/JP5365173B2/ja not_active Expired - Fee Related
-
2009
- 2009-02-26 CN CN2009101185396A patent/CN101520327B/zh not_active Expired - Fee Related
- 2009-02-27 US US12/395,359 patent/US8186218B2/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7216538B2 (en) * | 2004-08-05 | 2007-05-15 | Denso Corporation | Vibratory angular rate sensor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI576679B (zh) * | 2014-06-11 | 2017-04-01 | 宇能電科技股份有限公司 | 偏移電壓自動補償系統 |
Also Published As
| Publication number | Publication date |
|---|---|
| US8186218B2 (en) | 2012-05-29 |
| CN101520327A (zh) | 2009-09-02 |
| JP2009229447A (ja) | 2009-10-08 |
| US20090217757A1 (en) | 2009-09-03 |
| JP5365173B2 (ja) | 2013-12-11 |
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