CN101146885A - 各向异性导电性粘结剂及使用了该粘结剂的电极连接方法 - Google Patents

各向异性导电性粘结剂及使用了该粘结剂的电极连接方法 Download PDF

Info

Publication number
CN101146885A
CN101146885A CNA200680007085XA CN200680007085A CN101146885A CN 101146885 A CN101146885 A CN 101146885A CN A200680007085X A CNA200680007085X A CN A200680007085XA CN 200680007085 A CN200680007085 A CN 200680007085A CN 101146885 A CN101146885 A CN 101146885A
Authority
CN
China
Prior art keywords
anisotropic conductive
binding agent
adhesive film
insulativity
foaming ingredient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CNA200680007085XA
Other languages
English (en)
Other versions
CN101146885B (zh
Inventor
小西美佐夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dexerials Corp
Original Assignee
Sony Chemical and Information Device Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Chemical and Information Device Corp filed Critical Sony Chemical and Information Device Corp
Publication of CN101146885A publication Critical patent/CN101146885A/zh
Application granted granted Critical
Publication of CN101146885B publication Critical patent/CN101146885B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L24/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J9/00Adhesives characterised by their physical nature or the effects produced, e.g. glue sticks
    • C09J9/02Electrically-conducting adhesives
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J5/00Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
    • C09J5/08Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers using foamed adhesives
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J9/00Adhesives characterised by their physical nature or the effects produced, e.g. glue sticks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R4/00Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
    • H01R4/04Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation using electrically conductive adhesives
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/321Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
    • H05K3/323Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001Core members of the layer connector
    • H01L2224/29075Plural core members
    • H01L2224/2908Plural core members being stacked
    • H01L2224/29082Two-layer arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001Core members of the layer connector
    • H01L2224/29099Material
    • H01L2224/2919Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001Core members of the layer connector
    • H01L2224/29099Material
    • H01L2224/29198Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
    • H01L2224/29199Material of the matrix
    • H01L2224/2929Material of the matrix with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001Core members of the layer connector
    • H01L2224/29099Material
    • H01L2224/29198Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
    • H01L2224/29298Fillers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001Core members of the layer connector
    • H01L2224/29099Material
    • H01L2224/29198Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
    • H01L2224/29298Fillers
    • H01L2224/29499Shape or distribution of the fillers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/325Material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/8119Arrangement of the bump connectors prior to mounting
    • H01L2224/81191Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed only on the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/818Bonding techniques
    • H01L2224/81801Soldering or alloying
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/819Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector with the bump connector not providing any mechanical bonding
    • H01L2224/81901Pressing the bump connector against the bonding areas by means of another connector
    • H01L2224/81903Pressing the bump connector against the bonding areas by means of another connector by means of a layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/831Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
    • H01L2224/83101Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • H01L2224/83194Lateral distribution of the layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838Bonding techniques
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838Bonding techniques
    • H01L2224/8385Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
    • H01L2224/83851Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester being an anisotropic conductive adhesive
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92Specific sequence of method steps
    • H01L2224/921Connecting a surface with connectors of different types
    • H01L2224/9211Parallel connecting processes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00011Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00013Fully indexed content
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01004Beryllium [Be]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01005Boron [B]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01006Carbon [C]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01013Aluminum [Al]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01027Cobalt [Co]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01033Arsenic [As]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01049Indium [In]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/0105Tin [Sn]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01078Platinum [Pt]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01079Gold [Au]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/06Polymers
    • H01L2924/0665Epoxy resin
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/06Polymers
    • H01L2924/078Adhesive characteristics other than chemical
    • H01L2924/07802Adhesive characteristics other than chemical not being an ohmic electrical conductor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/06Polymers
    • H01L2924/078Adhesive characteristics other than chemical
    • H01L2924/0781Adhesive characteristics other than chemical being an ohmic electrical conductor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/06Polymers
    • H01L2924/078Adhesive characteristics other than chemical
    • H01L2924/0781Adhesive characteristics other than chemical being an ohmic electrical conductor
    • H01L2924/07811Extrinsic, i.e. with electrical conductive fillers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/156Material
    • H01L2924/15786Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15788Glasses, e.g. amorphous oxides, nitrides or fluorides
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0104Properties and characteristics in general
    • H05K2201/0116Porous, e.g. foam
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1163Chemical reaction, e.g. heating solder by exothermic reaction
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1178Means for venting or for letting gases escape

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Non-Insulated Conductors (AREA)
  • Wire Bonding (AREA)
  • Conductive Materials (AREA)
  • Adhesive Tapes (AREA)
  • Connections Effected By Soldering, Adhesion, Or Permanent Deformation (AREA)

Abstract

本发明提供相对于微细间距的连接端子能够确实地连接的各向异性导电性粘结剂及使用了该粘结剂的电极连接方法。本发明的各向异性导电性粘结薄膜1是在绝缘性粘结剂树脂6中分散有通过加热表现发泡性的发泡成分8和导电粒子7的粘结薄膜。该发泡成分8以形成独立状态的泡部的方式分散在绝缘性粘结剂树脂6中。作为发泡成分8使用含有将有机溶剂密封在热塑性微胶囊中的微粒子的发泡成分。

Description

各向异性导电性粘结剂及使用了该粘结剂的电极连接方法
技术领域
本发明涉及例如在显示装置和电路基板间的电连接中使用的各向异性导电性粘结剂以及使用了该粘结剂的电极连接方法。
背景技术
一直以来,作为电连接例如液晶显示装置和集成电路基板等的方法,使用各向异性导电粘结剂。
该各向异性导电粘结剂例如以粘结挠性印刷电路基板(FPC)或IC芯片端子与形成在LCD面板的玻璃基板上的ITO(氧化铟锡)电极端子的情况为代表,在粘结各种端子之间的同时进行电连接的情况中使用。
在这种各向异性导电性粘结薄膜中,近年来随着连接端子的微细间距化,产生了各种问题。
例如,具有由于热压接时基板的翘曲而发生连接故障的问题、由于液晶显示装置的窄边化而在连接部分发生短路的问题、由于连接用凸点的微小化而使导电粒子的捕获性降低等的问题。
专利文献1:日本特开平11-60899号
发明内容
发明所要解决的技术问题
本发明是为了解决这种现有技术问题而完成,其目的在于提供相对于微细间距化的连接端子能够确实连接的各向异性导电性粘结剂及使用了该粘结剂的电极连接方法。
用于解决技术问题的方法
为了达成上述目的而完成的本发明是在绝缘性粘结剂成分中分散有通过加热会表现发泡性的发泡成分、和导电粒子的各向异性导电性粘结剂。
本发明是在绝缘性粘结剂成分中分散有通过加热表现发泡性的发泡成分和导电粒子、形成为薄膜状的各向异性导电性粘结薄膜。
上述发明中,发泡成分以能够形成独立状态的泡部的方式分散在上述绝缘性粘结剂成分中。
上述发明中,上述发泡成分含有将有机溶剂密封在热塑性微胶囊中的微粒子。
本发明为上述发明中绝缘性粘结薄膜层压而成的各向异性导电性粘结薄膜。
本发明为上述发明中不含上述发泡成分的各向异性导电性粘结薄膜与含有上述发泡成分的绝缘性粘结薄膜层压而成的各向异性导电性粘结薄膜。
本发明为具有通过使具有连接用电极的多个连接构件与上述电极之间相对配置,在上述多个连接构件之间配置各向异性导电性粘结剂进行加热和加压,从而在粘结上述连接构件之间的同时将上述电极之间电连接的工序的电极连接方法,作为上述各向异性导电性粘结剂,使用在绝缘性粘结剂成分中分散有通过加热表现发泡性的发泡成分和导电粒子的粘结剂构件。
上述发明中,使用在上述绝缘性粘结剂成分中以形成独立状态的泡部的方式而分散有上述发泡成分的各向异性导电性粘结剂。
上述发明中,使用上述发泡成分含有将有机溶剂密封在热塑性微胶囊中的微粒子的各向异性导电性粘结剂。
上述发明中,作为上述各向异性导电性粘结剂使用形成为薄膜状的各向异性导电性粘结薄膜。
上述发明中,作为上述各向异性导电性粘结剂使用在上述各向异性导电性粘结薄膜上层压有绝缘性粘结薄膜的粘结剂。
上述发明中,上述各向异性导电性粘结剂使用层压了不含上述发泡成分的各向异性导电性粘结薄膜和含有上述发泡成分的绝缘性粘结薄膜的粘结剂。
本发明中,将这种各向异性导电性粘结剂配置在电极间,进行加热和加压,则表现出发泡成分的发泡性,各向异性导电性粘结剂膨胀、其体积增加。
结果,相邻电极间的导电粒子的密度降低,由此绝缘特性提高。
特别是,根据本发明,即便是厚度小于电极高度的各向异性导电性粘结剂也可以填充到连接构件之间,而且由于阻止了导电粒子流入相邻的电极间,因此可以提高微细间距的相邻电极间的绝缘性。
而且,由于与现有技术相比粘结剂中的树脂成分相对地减少,因此可以降低线膨胀系数和弹性率,由此可以减轻热压接时的连接构件的翘曲。
另一方面,在本发明中,当发泡成分例如使用将有机溶剂密封在热塑性微胶囊中的微粒子、以形成独立状态的泡部的方式而分散时,可以提供连接构件之间的粘结力高、且没有水分等的浸入、导通可靠性高的各向异性导电性粘结剂。
而且,如果使用在本发明的各向异性导电性粘结薄膜上层压有绝缘性粘结薄膜的产物作为各向异性导电性粘结剂,则可以减少与电连接无关的导电粒子的数量,因此可以谋求导电粒子的有效利用。
如果使用将不含发泡成分的各向异性导电性粘结薄膜和含有发泡成分的绝缘性粘结薄膜层压所得的产物作为各向异性导电性粘结剂,则不仅可以谋求导电粒子的有效利用,还可以使含有发泡成分的层变薄,因此在相对的连接构件的电极间夹入发泡成分的可能性降低,结果可以拓宽热压接条件的自由度。
发明效果
通过本发明,可以提供能够确实地连接于微细间距的连接端子的各向异性导电性粘结剂及使用了该粘结剂的电极连接方法。
附图说明
图1(a)~(c)为使用了本发明的电极连接方法实施方式的示意图。
图2(a)(b)为热压接时本发明的各向异性导电性粘结剂状态的示意图。
图3(a)(b)为使用了本发明其它实施方式的电极连接方法的示意图。
图4(a)(b)为使用了本发明另一个其它实施方式的电极连接方法的示意图。
符号说明
1各向异性导电性粘结薄膜
2电路基板
3电极
4  IC芯片
5凸点(电极)
6绝缘性粘结剂树脂
7导电粒子
8发泡成分
9气泡
具体实施方式
以下参照附图详细地说明本发明的各向异性导电性粘结剂及使用了该粘结剂的电极连接方法的优选实施方式。
需要说明的是,本发明还可以适用于浆状或薄膜状的各向异性导电性粘结剂的任一种。
图1(a)~(c)是使用了本发明的电极连接方法实施方式的示意图,图2(a)(b)为热压接时本发明的各向异性导电性粘结剂状态的示意图。
如图1(a)和图2(a)所示,本发明的各向异性导电性粘结薄膜1例如用于电路基板(连接构件)2的电极3与IC芯片(连接构件)4的凸点(电极)5的电连接,因此在薄膜状的绝缘性粘结剂树脂6中分散有导电粒子7。
本发明的情况下可以使用以往公知的各种物质作为导电粒子7。
另一方面,绝缘性粘结剂树脂6没有特别限定,但从提高连接可靠性的观点出发,优选使用含有环氧树脂和苯氧树脂和固化剂的组合物、含有(甲基)丙烯酸单体和引发剂的组合物。
而且,本发明的各向异性导电性粘结薄膜1在绝缘性粘结剂树脂6中分散有通过加热膨胀表现发泡性的发泡成分8。
本发明中,从提高导通可靠性的观点出发,优选以形成独立状态的泡部的方式分散发泡成分8。
由此观点出发,在本发明中,可以优选使用含有将有机溶剂密封在热塑性微胶囊中的微粒子的各向异性导电性粘结薄膜。
另外,通过加热表现发泡性的发泡成分8的混合量没有特别限定,从充分地发挥本发明效果而降低粘结强度的观点出发,优选在绝缘性粘结剂树脂6中含有2~20重量%、更优选5~20重量%的通过加热表现发泡性的发泡成分8。
使用本实施方式的各向异性导电性粘结薄膜1连接电路基板2的电极3和IC芯片4的凸点5时,如图1(a)所示,将电路基板2的电极3与IC芯片4的凸点5相对配置,在其间配置各向异性导电性粘结薄膜1。然后,如图1(b)所示,使用热压接头10向电路基板2挤压IC芯片4,进行预压接。
在该预压接工序中,例如优选在绝缘性粘结剂树脂6发生某种程度软化的温度(例如40~70℃)下进行加热。
如图2(a)所示,此时上述发泡成分8并未发生变化。
然后,使用热压接头10在规定温度(例如90~180℃)下进行对绝缘性粘结剂树脂6进行加热,从而进行正式压接。
此时,利用热压接头10进行加压和加热,直至IC芯片4的凸点5和电路基板2的电极3附近的绝缘性粘结剂树脂6发生固化、电极3和凸点5被电连接,确实地粘结上。
之后,如图1(c)所示,解除利用热压接头10的加压,从而如图2(b)所示,电极3和凸点5附近以外的发泡成分8膨胀发泡,在绝缘性粘结剂树脂6中产生分别独立状态的气泡9。
由于该气泡9的产生,绝缘性粘结剂树脂6的体积增加,在电路基板2和IC芯片4之间填充各向异性导电性粘结薄膜1,由此IC芯片4完全地粘结在电路基板2上。
根据以上说明的本实施方式,由于在热压接时各向异性导电性粘结薄膜1膨胀,其体积增加,因此相邻电极3和凸点5之间的导电粒子7的密度降低,由此可以提高绝缘特性。
另外,根据本实施方式,即便是厚度小于凸点5高度的各向异性导电性粘结薄膜1也可以填充到电路基板2和IC芯片4之间,而且阻止了导电粒子7流入相邻的电极3和凸点5之间,因而可以提高相邻电极3和凸点5之间的绝缘性。
而且,由于与现有技术相比绝缘性粘结剂树脂6中的树脂成分相对地减少,因此可以降低线膨胀系数和弹性率,由此可以减轻热压接时的电路基板2的翘曲。
另外,在本实施方式中,由于使用将有机溶剂密封在热塑性微胶囊的微粒子、以形成独立状态的泡部的方式而分散发泡成分,因此可以提供粘结力高、且不会有水分等的浸入、导通可靠性高的各向异性导电性粘结薄膜1。
图3(a)(b)是使用了本发明其它实施方式的电极连接方法的示意图,图4(a)(b)是使用了本发明其它实施方式的电极连接方法的示意图。
本发明中,还可以将在绝缘性粘结剂树脂6中分散有上述发泡成分8的层、和在绝缘性粘结剂树脂6中未分散上述发泡成分8的层层压。
以下,对于与上述实施方式共通的部分带有相同的符号,省略其详细的说明,例如图3(a)(b)所示的各向异性导电性粘结薄膜1A层压有含有上述发泡成分8的各向异性导电性粘结薄膜10、和不含上述发泡成分8的绝缘性粘结剂薄膜11。
此时,优选将各向异性导电性粘结薄膜1A配置在电路基板2上,使得绝缘性粘结剂薄膜11与IC芯片4相对。
根据具有这种构成的本实施方式,由于特别可以减少与IC芯片4侧、即挤压侧的电连接无关的导电粒子7的数量,因此可以谋求导电粒子7的有效利用。
另一发明,图4(a)(b)所示的各向异性导电性粘结薄膜1B层压有不含上述发泡成分8的各向异性导电性粘结薄膜12、和含有上述发泡成分8的绝缘性粘结剂薄膜1 3。
此时,优选将各向异性导电性粘结薄膜1B配置在电路基板2上,使得含有发泡成分8的绝缘性粘结剂薄膜1 3与IC芯片4相对。
根据具有这种构成的本实施方式,不仅可以与上述实施方式同样地谋求导电粒子7的有效利用,而且可以使含有发泡成分8的层变薄,因此在IC芯片4的凸点5与电路基板2的电极3之间夹入发泡成分8的可能性降低,结果可以拓宽热压接条件的自由度。
本发明中,不仅为上述2层结构,还可以采用3层以上的层压结构。
对于其它的构成及作用效果,由于与上述实施方式相同,因此省略其详细说明。
实施例
以下与比较例一起详细地说明本发明的实施例。
<实施例1>
使用作为溶剂的甲苯20重量份、乙酸乙酯20重量份,利用混合机将作为绝缘性粘结剂树脂的苯氧树脂(东都化成公司生产YP50)40重量份、液状环氧树脂(日本环氧树脂公司生产EP828)30重量份、导电粒子(直径4μm、镀Ni/Au树脂粒子)20重量份、微胶囊型环氧固化剂(旭化成公司生产HX3941HP)、作为通过加热表现发泡性的发泡成分的发泡剂A(松本油脂公司生产F30VSD膨胀初始温度:约80℃该温度为通过在预压接工序中稍有发泡从而在之后的正式压接工序中促进发泡的温度。)4重量份溶解、混合。
需要说明的是,发泡剂使用通过孔径10μm的筛的筛分合格品。
在施有剥离处理的PET薄膜上涂抹上述浆,在设定为65℃的电炉中加热4分钟,制作干燥膜厚为10μm的各向异性导电性粘结薄膜的样品。
<实施例2>
作为发泡剂使用膨胀初始温度约为150℃的发泡剂B(松本油脂公司生产F80GSD),除此之外通过与实施例1相同的方法制作样品。
<实施例3>
作为发泡剂使用膨胀初始温度约为150℃的发泡剂C(松本油脂公司生产F80VSD),除此之外通过与实施例1相同的方法制作样品。
<实施例4>
除了将干燥膜厚调整为15μm之外,通过与实施例3相同的方法制作样品。
<比较例1>
除了不添加发泡剂之外,通过与实施例1相同的方法制作样品。
<比较例2>
除了将干燥膜厚调整为30μm之外,通过与比较例1相同的方法制作样品。
<评价>
使用实施例和比较例的样品,将IC芯片热压接在玻璃基板上使各向异性导电性粘结薄膜固化(温度190℃、时间20秒)。
此时,IC芯片的凸点的尺寸为30μm×85μm、凸点间的空间为20μm、凸点的高度为22μm。
然后从玻璃基板侧通过目视分别确认和计算各向异性导电性粘结薄膜的填充性、被捕获到凸点上的导电粒子数、堵塞在凸点间的导电粒子的状态。结果示于表1中。
表1实施例和比较例的评价结果
    发泡剂     干燥膜厚(μm)     填充性     粒子捕获数平均值(个/凸点)     凸点间粒子堵塞
  实施例1     A     10     ○     19     ○
  实施例2     B     10     ○     19.5     ○
  实施例3     C     10     Δ     20     ○
  实施例4     C     15     ○     19     ○
  比较例1     无     10     ×     19.5     Δ
  比较例2     无     30     ○     16.5     ×
[填充性]○:充分地填充×:有未填充的部分
[凸点间粒子堵塞]○:没有堵塞  Δ:没有堵塞但存在很多粒子
×:有堵塞
[评价结果]
如表1所示,实施例1~4的各向异性导电性粘结薄膜的填充性良好,也没有凸点间的导电粒子堵塞。需要说明的是,对于实施例1~4的各向异性导电性粘结薄膜,当使发泡剂的混合量为12重量份时,得到了基本相同的结果。
另一方面,当为未添加发泡剂的比较例1的各向异性导电性粘结薄膜时,产生了未填充的部分,另外,在凸点间存在很多导电粒子。
而且,对于未添加发泡剂使干燥膜厚为30μm的比较例2的各向异性导电性粘结薄膜,在凸点间发生了导电粒子的堵塞。

Claims (14)

1.一种各向异性导电性粘结剂,其中,在绝缘性粘结剂成分中分散有通过加热表现发泡性的发泡成分和导电粒子。
2.权利要求1所述的各向异性导电性粘结剂,其中,所述发泡成分以形成独立状态的泡部的方式分散在所述绝缘性粘结剂成分中。
3.权利要求1所述的各向异性导电性粘结剂,其中,所述发泡成分含有将有机溶剂密封在热塑性微胶囊中的微粒子。
4.一种各向异性导电性粘结薄膜,其中,在绝缘性粘结剂成分中分散有通过加热表现发泡性的发泡成分和导电粒子。
5.权利要求4所述的各向异性导电性粘结剂,其中,所述发泡成分以形成独立状态的泡部的方式分散在所述绝缘性粘结剂成分中。
6.权利要求4所述的各向异性导电性粘结剂,其中,所述发泡成分含有将有机溶剂密封在热塑性微胶囊中的微粒子。
7.权利要求4所述的各向异性导电性粘结薄膜,其中,层压有绝缘性粘结薄膜层压而成。
8.权利要求4所述的各向异性导电性粘结薄膜,其中,层压有不含所述发泡成分的各向异性导电性粘结薄膜、和含有所述发泡成分的绝缘性粘结薄膜。
9.一种电极连接方法,其具有使具有连接用电极的多个连接构件与所述电极之间相对配置,在所述多个连接构件之间配置各向异性导电性粘结剂进行加热和加压,从而在粘结所述连接构件之间的同时将所述电极之间电连接的工序;
作为所述各向异性导电性粘结剂,使用在绝缘性粘结剂成分中分散有通过加热表现发泡性的发泡成分和导电粒子的粘结剂。
10.权利要求9所述的电极连接方法,其使用在所述绝缘性粘结剂成分中以形成独立状态的泡部的方式分散有所述发泡成分的各向异性导电性粘结剂。
11.权利要求9所述的电极连接方法,其使用所述发泡成分含有将有机溶剂封闭在热塑性微胶囊中的微粒子的各向异性导电性粘结剂。
12.权利要求9所述的电极连接方法,其中,作为所述各向异性导电性粘结剂使用形成为薄膜状的各向异性导电性粘结薄膜。
13.权利要求12所述的电极连接方法,其中,作为所述各向异性导电性粘结剂使用在所述各向异性导电性粘结薄膜上层压有绝缘性粘结薄膜的粘结剂。
14.权利要求12所述的电极连接方法,构件作为所述各向异性导电性粘结剂使用层压有不含所述发泡成分的各向异性导电性粘结薄膜和含有所述发泡成分的绝缘性粘结薄膜的粘结剂。
CN200680007085XA 2005-03-04 2006-03-06 各向异性导电性粘结剂及使用了该粘结剂的电极连接方法 Expired - Fee Related CN101146885B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005060290 2005-03-04
JP060290/2005 2005-03-04
PCT/JP2006/304278 WO2006093315A1 (ja) 2005-03-04 2006-03-06 異方導電性接着剤及びこれを用いた電極の接続方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN2011101543567A Division CN102277096A (zh) 2005-03-04 2006-03-06 各向异性导电性粘结剂及使用了该粘结剂的电极连接方法

Publications (2)

Publication Number Publication Date
CN101146885A true CN101146885A (zh) 2008-03-19
CN101146885B CN101146885B (zh) 2012-09-05

Family

ID=36941343

Family Applications (2)

Application Number Title Priority Date Filing Date
CN200680007085XA Expired - Fee Related CN101146885B (zh) 2005-03-04 2006-03-06 各向异性导电性粘结剂及使用了该粘结剂的电极连接方法
CN2011101543567A Pending CN102277096A (zh) 2005-03-04 2006-03-06 各向异性导电性粘结剂及使用了该粘结剂的电极连接方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN2011101543567A Pending CN102277096A (zh) 2005-03-04 2006-03-06 各向异性导电性粘结剂及使用了该粘结剂的电极连接方法

Country Status (6)

Country Link
JP (1) JP4891895B2 (zh)
KR (1) KR101298829B1 (zh)
CN (2) CN101146885B (zh)
HK (1) HK1116511A1 (zh)
TW (1) TWI347348B (zh)
WO (1) WO2006093315A1 (zh)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101874089A (zh) * 2007-11-26 2010-10-27 3M创新有限公司 粘合片及其制造方法
CN102823084A (zh) * 2010-04-12 2012-12-12 索尼化学&信息部件株式会社 发光装置的制造方法
CN103013370A (zh) * 2012-12-14 2013-04-03 京东方科技集团股份有限公司 一种各向异性导电胶膜及电子装置
CN103079343A (zh) * 2011-10-26 2013-05-01 日立化成工业株式会社 电路零件
CN107304334A (zh) * 2016-04-19 2017-10-31 三星显示有限公司 用于印刷电路板的保护带和包括保护带的显示装置
CN110832045A (zh) * 2017-08-16 2020-02-21 Dic株式会社 粘接带、物品以及物品的制造方法

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100608533B1 (ko) 2005-05-13 2006-08-08 쓰리엠 이노베이티브 프로퍼티즈 캄파니 전기 전도성이 우수한 고분자 수지 및 그 제조방법
KR100888404B1 (ko) * 2007-06-22 2009-03-13 삼성전기주식회사 도전성 페이스트와 이를 이용한 인쇄회로기판 및 그제조방법
JP5083076B2 (ja) * 2008-07-09 2012-11-28 株式会社デンソー 電子装置の製造方法
WO2010004793A1 (ja) * 2008-07-11 2010-01-14 ソニーケミカル&インフォメーションデバイス株式会社 異方性導電フィルム
JP5695881B2 (ja) * 2010-10-28 2015-04-08 デクセリアルズ株式会社 電子部品の接続方法及び接続構造体
JPWO2013171918A1 (ja) * 2012-05-15 2016-01-07 京セラ株式会社 圧電アクチュエータ、圧電振動装置および携帯端末
KR101686892B1 (ko) * 2012-05-30 2016-12-15 니폰샤신인사츠가부시키가이샤 시인성과 내구성이 우수한 정전 용량 투명 터치 시트
JP6151412B2 (ja) * 2012-09-18 2017-06-21 デクセリアルズ株式会社 異方性導電フィルム、異方性導電フィルムの製造方法、接続体の製造方法、及び接続方法
JP5972844B2 (ja) 2012-09-18 2016-08-17 デクセリアルズ株式会社 異方性導電フィルム、異方性導電フィルムの製造方法、接続体の製造方法、及び接続方法
JP6289831B2 (ja) * 2013-07-29 2018-03-07 デクセリアルズ株式会社 導電性接着フィルムの製造方法、導電性接着フィルム、接続体の製造方法
CN204130702U (zh) * 2014-05-23 2015-01-28 西安中兴新软件有限责任公司 连接agps模块和主板的部件及无线接入终端
WO2016052130A1 (ja) * 2014-09-30 2016-04-07 デクセリアルズ株式会社 異方性導電フィルム、及び接続方法
DE102015112967A1 (de) * 2015-08-06 2017-02-09 Osram Opto Semiconductors Gmbh Verfahren zum Herstellen eines optoelektronischen Bauelements und optoelektronisches Bauelement
KR102126679B1 (ko) * 2016-08-18 2020-06-25 주식회사 엘지화학 그물구조 전도체의 제조방법
KR101800367B1 (ko) * 2016-08-24 2017-11-28 한국기계연구원 마이크로 소자 전사방법 및 마이크로 소자 전사방법으로 제조된 마이크로 소자 기판
CN108574158B (zh) * 2017-03-14 2020-10-09 群创光电股份有限公司 显示装置及其制造方法
DE102017210704A1 (de) * 2017-06-26 2018-12-27 Siemens Aktiengesellschaft Elektrische Baugruppe und Verfahren zu deren Herstellung
JP7085919B2 (ja) * 2018-06-29 2022-06-17 リンテック株式会社 実装装置および実装方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51109936A (en) * 1975-03-25 1976-09-29 Suwa Seikosha Kk Dodenihoseiomotsu setsuchakuzai
JPS51114439A (en) * 1975-04-02 1976-10-08 Seiko Epson Corp An adhesive having anisotropic electroconductivity
JPS51135938A (en) * 1975-05-21 1976-11-25 Seiko Epson Corp Anisotropic electroconductive adhesive
WO2000013190A1 (fr) * 1998-08-28 2000-03-09 Matsushita Electric Industrial Co., Ltd. Colle electroconductrice, structure electroconductrice utilisant cette colle, piece electrique, module et carte a circuit, connexion electrique, fabrication de carte a circuit et de piece electronique ceramique
JP3650546B2 (ja) * 1998-08-28 2005-05-18 松下電器産業株式会社 導電性ペースト、およびそれを用いた導電性構造、セラミック電子部品、電子部品、実装体、回路基板、電気的接続方法、回路基板の製造方法、及びセラミック電子部品の製造方法
JP3748095B2 (ja) * 1999-03-10 2006-02-22 東洋紡績株式会社 導電性ペースト
JP2001107019A (ja) * 1999-10-07 2001-04-17 Matsushita Electric Ind Co Ltd 発泡性ペースト、電子部品実装体および電子部品剥離方法

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101874089A (zh) * 2007-11-26 2010-10-27 3M创新有限公司 粘合片及其制造方法
CN102823084A (zh) * 2010-04-12 2012-12-12 索尼化学&信息部件株式会社 发光装置的制造方法
CN102823084B (zh) * 2010-04-12 2015-11-25 迪睿合电子材料有限公司 发光装置的制造方法
CN103079343A (zh) * 2011-10-26 2013-05-01 日立化成工业株式会社 电路零件
CN103013370A (zh) * 2012-12-14 2013-04-03 京东方科技集团股份有限公司 一种各向异性导电胶膜及电子装置
CN103013370B (zh) * 2012-12-14 2014-12-10 京东方科技集团股份有限公司 一种各向异性导电胶膜及电子装置
US9796884B2 (en) 2012-12-14 2017-10-24 Boe Technology Group Co., Ltd. Anisotropic conductive adhesive film and electronic device
CN107304334A (zh) * 2016-04-19 2017-10-31 三星显示有限公司 用于印刷电路板的保护带和包括保护带的显示装置
US11034128B2 (en) 2016-04-19 2021-06-15 Samsung Display Co., Ltd. Protection tape for printed circuit board and display device including the same
US11987031B2 (en) 2016-04-19 2024-05-21 Samsung Display Co., Ltd. Protection tape for printed circuit board and display device including the same
CN110832045A (zh) * 2017-08-16 2020-02-21 Dic株式会社 粘接带、物品以及物品的制造方法

Also Published As

Publication number Publication date
WO2006093315A1 (ja) 2006-09-08
TWI347348B (en) 2011-08-21
CN101146885B (zh) 2012-09-05
KR20070116808A (ko) 2007-12-11
HK1116511A1 (en) 2008-12-24
CN102277096A (zh) 2011-12-14
JPWO2006093315A1 (ja) 2008-08-07
TW200632068A (en) 2006-09-16
JP4891895B2 (ja) 2012-03-07
KR101298829B1 (ko) 2013-08-23

Similar Documents

Publication Publication Date Title
CN101146885B (zh) 各向异性导电性粘结剂及使用了该粘结剂的电极连接方法
JP5010990B2 (ja) 接続方法
JP3342703B2 (ja) 回路接続用フィルム状接着剤及び回路板
TWI386475B (zh) 接著薄膜、連接方法及接合體
WO1996042107A1 (en) Semiconductor device, wiring board for mounting semiconductor and method of production of semiconductor device
JPH07230840A (ja) 接続部材及びこれを用いた電極の接続構造
CN101953026A (zh) 各向异性导电膜
JP2003282636A (ja) 接続構造体の製造方法
JP2009242508A (ja) 接着剤及び接合体
JPWO2004038793A1 (ja) 非接触idカード類及びその製造方法
KR20190087365A (ko) 실장체의 제조 방법, 접속 방법 및 이방성 도전막
CN107613675A (zh) 一种柔性电路板的压合方法、集成电路板及移动终端
CN103502379B (zh) 各向异性导电连接材料、膜层叠体、连接方法及连接结构体
US8470438B2 (en) Electrode-connecting structure, conductive adhesive used for the same, and electronic apparatus
JP2003049152A (ja) 回路接続用接着剤及びそれを用いた接続方法、接続構造体
KR102106996B1 (ko) 솔더입자를 포함한 시트를 사용한 부품 실장 방법
JP2003238935A (ja) 接着剤及び電気装置
JP4155470B2 (ja) 接続部材を用いた電極の接続法
JP4702566B2 (ja) 接続材料
JPH05235096A (ja) 電子部品の基板への実装方法
JPH11241050A (ja) 回路接続用フィルム状接着剤、回路板及びicカード
JPH1125760A (ja) 異方性導電フィルム
JP4821477B2 (ja) 構造体およびその製造方法
KR100877264B1 (ko) 저압 본딩용 전극을 구비한 반도체 디바이스 및 이를이용한 반도체 패키지
JP4381272B2 (ja) 異方性導電接着剤及びそれを用いた異方性導電接着剤シート

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
REG Reference to a national code

Ref country code: HK

Ref legal event code: DE

Ref document number: 1116511

Country of ref document: HK

C14 Grant of patent or utility model
GR01 Patent grant
REG Reference to a national code

Ref country code: HK

Ref legal event code: GR

Ref document number: 1116511

Country of ref document: HK

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120905

Termination date: 20170306