CN101035725B - 基板输送装置 - Google Patents

基板输送装置 Download PDF

Info

Publication number
CN101035725B
CN101035725B CN2005800338407A CN200580033840A CN101035725B CN 101035725 B CN101035725 B CN 101035725B CN 2005800338407 A CN2005800338407 A CN 2005800338407A CN 200580033840 A CN200580033840 A CN 200580033840A CN 101035725 B CN101035725 B CN 101035725B
Authority
CN
China
Prior art keywords
substrate
mentioned
processing
transfer hand
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2005800338407A
Other languages
English (en)
Chinese (zh)
Other versions
CN101035725A (zh
Inventor
平田贤辅
村山晋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
Ishikawajima Harima Heavy Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishikawajima Harima Heavy Industries Co Ltd filed Critical Ishikawajima Harima Heavy Industries Co Ltd
Publication of CN101035725A publication Critical patent/CN101035725A/zh
Application granted granted Critical
Publication of CN101035725B publication Critical patent/CN101035725B/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0294—Vehicle bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Specific Conveyance Elements (AREA)
  • Warehouses Or Storage Devices (AREA)
CN2005800338407A 2005-06-02 2005-10-17 基板输送装置 Expired - Lifetime CN101035725B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP162225/2005 2005-06-02
JP2005162225A JP4904722B2 (ja) 2005-06-02 2005-06-02 基板搬送装置
PCT/JP2005/019021 WO2006129385A1 (ja) 2005-06-02 2005-10-17 基板搬送装置

Publications (2)

Publication Number Publication Date
CN101035725A CN101035725A (zh) 2007-09-12
CN101035725B true CN101035725B (zh) 2011-04-20

Family

ID=37481322

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2005800338407A Expired - Lifetime CN101035725B (zh) 2005-06-02 2005-10-17 基板输送装置

Country Status (5)

Country Link
JP (1) JP4904722B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR101226733B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN (1) CN101035725B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW200642933A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
WO (1) WO2006129385A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4840595B2 (ja) * 2007-02-20 2011-12-21 株式会社Ｉｈｉ 基板搬送機
KR100973190B1 (ko) * 2008-08-22 2010-07-30 주식회사 에스에프에이 기판 이송용 카세트 및 기판 이송용 로봇, 그리고 그것들을구비한 기판 이송용 카세트 시스템
KR101037063B1 (ko) * 2008-12-30 2011-05-26 에이펫(주) 기판처리장치
JP2011051748A (ja) * 2009-09-03 2011-03-17 Murata Machinery Ltd ローダアンローダと搬送車と装置間のロードアンロード方法
JP5480605B2 (ja) * 2009-12-01 2014-04-23 東京エレクトロン株式会社 基板搬送装置および基板処理システム
TWI422521B (zh) * 2011-03-02 2014-01-11 Au Optronics Corp 玻璃基板傳送裝置
JP5575689B2 (ja) * 2011-04-01 2014-08-20 株式会社 ハリーズ 薄板状物加工装置及び薄板状部材の製造方法
KR101520744B1 (ko) 2013-11-04 2015-05-15 코닝정밀소재 주식회사 비접촉 진동 억제장치 및 대상물 가공방법
CN103950716B (zh) * 2014-05-21 2016-07-27 芜湖万辰电光源科技有限公司 一种玻璃条镀膜载台的输送机构
JP6297989B2 (ja) * 2015-01-27 2018-03-20 光洋サーモシステム株式会社 搬送装置
CN107818938B (zh) * 2016-09-13 2021-07-30 台湾积体电路制造股份有限公司 运送系统及运送加工元件的方法
CN108502543B (zh) * 2017-02-28 2020-01-24 上海微电子装备（集团）股份有限公司 一种基板传输装置及方法
CN111347341A (zh) * 2020-04-01 2020-06-30 长江存储科技有限责任公司 半导体制备装置和具有其的化学机械研磨设备
CN112158604A (zh) * 2020-10-13 2021-01-01 南京多脉智能设备有限公司 联排气浮式无摩擦玻璃面板转移机器人
JP7342840B2 (ja) * 2020-11-05 2023-09-12 トヨタ自動車株式会社 薄板材の搬送方法、及び搬送装置
CN118062576B (zh) * 2024-04-25 2024-06-21 肇庆南玻节能玻璃有限公司 应用于玻璃生产的柔性输送系统

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4558983A (en) * 1983-10-24 1985-12-17 Usm Corporation Automatic board handling mechanism

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153306A (ja) * 1984-01-21 1985-08-12 Fujitsu Ltd プリント板給排装置
CA1234924A (en) * 1984-01-21 1988-04-05 Hideo Sakamoto Printed circuit board load-unload system with bypass route
JPH11227943A (ja) * 1998-02-09 1999-08-24 Ishikawajima Harima Heavy Ind Co Ltd 基板移載装置
JP4474672B2 (ja) * 2000-04-24 2010-06-09 株式会社Ｉｈｉ 基板移載装置
JP4153812B2 (ja) * 2002-07-22 2008-09-24 大日本印刷株式会社 カラーフィルター製造ラインシステム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4558983A (en) * 1983-10-24 1985-12-17 Usm Corporation Automatic board handling mechanism

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
JP昭60-153306A 1985.08.12
JP昭60-153308A 1985.08.12
JP特开2004-109968A 2004.04.08
JP特开平11-227943A 1999.08.24
JP特开平6－211311A 1994.08.02

Also Published As

Publication number Publication date
KR20080016518A (ko) 2008-02-21
TW200642933A (en) 2006-12-16
CN101035725A (zh) 2007-09-12
JP4904722B2 (ja) 2012-03-28
WO2006129385A1 (ja) 2006-12-07
KR101226733B1 (ko) 2013-01-25
JP2006335518A (ja) 2006-12-14
TWI307675B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2009-03-21

Similar Documents

Publication Publication Date Title
CN101035725B (zh) 基板输送装置
CN101512747B (zh) 基板运送装置以及基板运送方法
KR102296010B1 (ko) 기판 처리 장치
JP5152469B2 (ja) 基板搬送装置
JP2599571B2 (ja) 基板搬送ロボット
CN101511709B (zh) 基板输送系统
JP2004284698A (ja) ワーク搬送装置
CN100578750C (zh) 容器搬送装置及容器搬送系统
JP2008166348A (ja) 基板搬送装置
JP4387416B2 (ja) 加工テーブル
CN102205911B (zh) 基板处理装置、转换方法
JP4957133B2 (ja) 基板搬送装置及び基板搬送方法
CN212639041U (zh) 一种翻面抓取机构及上料装置
JP2005212943A (ja) ガラス基板の搬送システム
CN102177003A (zh) 基板输送机器人及系统
CN112786504B (zh) 基板处理装置和基板收纳容器保管方法
JP2008159784A (ja) ステージ装置
JP2006176255A (ja) 搬送システム
WO2000003428A1 (fr) Dispositif de transfert de substrat et son procede de fonctionnement
KR100633848B1 (ko) 기판 반입출 장치 및 기판 반입출 방법, 기판 반송장치 및기판 반송방법
JP2005064431A (ja) 基板搬送装置及び基板搬送方法
JP2006347752A (ja) 搬送システム
JPWO2008129603A1 (ja) 基板搬送システム
JP4602838B2 (ja) 半導体チップの実装装置
JP2005145713A (ja) 基板の搬送装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant