CN101023011A - 气体支撑的基底承载机构 - Google Patents

气体支撑的基底承载机构 Download PDF

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Publication number
CN101023011A
CN101023011A CNA2005800232489A CN200580023248A CN101023011A CN 101023011 A CN101023011 A CN 101023011A CN A2005800232489 A CNA2005800232489 A CN A2005800232489A CN 200580023248 A CN200580023248 A CN 200580023248A CN 101023011 A CN101023011 A CN 101023011A
Authority
CN
China
Prior art keywords
substrate
vacuum
gas
equipment
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005800232489A
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English (en)
Chinese (zh)
Inventor
V·卡萨格尼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TEL Solar Services AG
Original Assignee
OC Oerlikon Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OC Oerlikon Balzers AG filed Critical OC Oerlikon Balzers AG
Publication of CN101023011A publication Critical patent/CN101023011A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
CNA2005800232489A 2004-07-09 2005-07-07 气体支撑的基底承载机构 Pending CN101023011A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US58664504P 2004-07-09 2004-07-09
US60/586,645 2004-07-09

Publications (1)

Publication Number Publication Date
CN101023011A true CN101023011A (zh) 2007-08-22

Family

ID=34971820

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005800232489A Pending CN101023011A (zh) 2004-07-09 2005-07-07 气体支撑的基底承载机构

Country Status (9)

Country Link
US (1) US20070215437A1 (enExample)
EP (1) EP1768921A1 (enExample)
JP (1) JP2008505041A (enExample)
KR (1) KR20070037741A (enExample)
CN (1) CN101023011A (enExample)
AU (1) AU2005262191A1 (enExample)
IL (1) IL180080A0 (enExample)
TW (1) TW200624357A (enExample)
WO (1) WO2006005214A1 (enExample)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102020115A (zh) * 2010-11-26 2011-04-20 认知精密制造（苏州）有限公司 装载及移送lcd机架部件用空气上升型载体
CN102484089A (zh) * 2009-06-29 2012-05-30 英泰克普拉斯有限公司 平板精密悬浮系统
CN104364891A (zh) * 2012-06-21 2015-02-18 川崎重工业株式会社 基板搬运系统
CN104659039A (zh) * 2015-03-13 2015-05-27 京东方科技集团股份有限公司 承载基板、柔性显示装置制作方法
CN109641440A (zh) * 2016-06-08 2019-04-16 康宁股份有限公司 层压设备
CN110498233A (zh) * 2019-07-26 2019-11-26 江苏科技大学 二维无接触输送平台装置
CN113113344A (zh) * 2020-05-08 2021-07-13 台湾积体电路制造股份有限公司 半导体制造系统、衬底位移组合件和处理半导体衬底方法
CN114538111A (zh) * 2022-03-21 2022-05-27 江苏威尔赛科技有限公司 一种带自动消毒功能的垃圾被服回收系统
CN119117690A (zh) * 2024-11-12 2024-12-13 合肥浩普智能装备科技有限公司 一种气浮式倒包输送机

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WO2007105481A1 (ja) 2006-02-28 2007-09-20 Matsushita Electric Industrial Co., Ltd. プラズマディスプレイ装置
US9238867B2 (en) * 2008-05-20 2016-01-19 Asm International N.V. Apparatus and method for high-throughput atomic layer deposition
US20090291209A1 (en) 2008-05-20 2009-11-26 Asm International N.V. Apparatus and method for high-throughput atomic layer deposition
US20090325367A1 (en) * 2008-05-30 2009-12-31 Alta Devices, Inc. Methods and apparatus for a chemical vapor deposition reactor
KR100876337B1 (ko) * 2008-06-25 2008-12-29 이재성 흡입력을 갖는 비접촉식 반송 플레이트
JP5399153B2 (ja) * 2008-12-12 2014-01-29 東京エレクトロン株式会社 真空処理装置、真空処理システムおよび処理方法
JP2010143733A (ja) * 2008-12-19 2010-07-01 Sumitomo Heavy Ind Ltd 基板ハンドリングシステム及び基板ハンドリング方法
JP5536516B2 (ja) * 2010-04-14 2014-07-02 オイレス工業株式会社 非接触搬送装置
JP5465595B2 (ja) * 2010-05-10 2014-04-09 オイレス工業株式会社 非接触搬送装置
KR101293289B1 (ko) * 2010-06-04 2013-08-09 김영태 비접촉식 이송장치
DE102012219332B4 (de) * 2012-10-23 2014-11-13 Mdi Schott Advanced Processing Gmbh Vorrichtung und Verfahren zum Lagern und Fixieren einer Glasscheibe
KR101978147B1 (ko) 2012-11-15 2019-05-15 (주)아모레퍼시픽 복분자딸기의 향취를 재현한 향료 조성물
KR101451506B1 (ko) * 2013-04-17 2014-10-17 삼성전기주식회사 비접촉 기판이송 반전기
JP2014133655A (ja) * 2014-03-17 2014-07-24 Oiles Ind Co Ltd 非接触搬送装置
JP2015218055A (ja) * 2014-05-20 2015-12-07 オイレス工業株式会社 搬送用レールおよび浮上搬送装置
US9499908B2 (en) 2015-02-13 2016-11-22 Eastman Kodak Company Atomic layer deposition apparatus
US9528184B2 (en) 2015-02-13 2016-12-27 Eastman Kodak Company Atomic-layer deposition method using compound gas jet
US9506147B2 (en) 2015-02-13 2016-11-29 Eastman Kodak Company Atomic-layer deposition apparatus using compound gas jet
US9499906B2 (en) 2015-02-13 2016-11-22 Eastman Kodak Company Coating substrate using bernoulli atomic-layer deposition
KR102298805B1 (ko) 2015-03-05 2021-09-08 (주)아모레퍼시픽 은목서의 향취를 재현한 향료 조성물
KR102610348B1 (ko) 2015-10-30 2023-12-06 (주)아모레퍼시픽 함박꽃의 향취를 재현한 향료 조성물
JP7002824B2 (ja) * 2016-09-13 2022-01-20 コーニング インコーポレイテッド ガラス基板を加工する装置および方法
US9889995B1 (en) * 2017-03-15 2018-02-13 Core Flow Ltd. Noncontact support platform with blockage detection
CN107655788B (zh) * 2017-11-16 2019-10-01 合肥工业大学 一种用于测量玻璃基板气浮系统节流板节流参数的装置
KR102578464B1 (ko) * 2020-06-10 2023-09-14 세메스 주식회사 기판 이송 모듈 및 이를 포함하는 다이 본딩 장치

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102484089A (zh) * 2009-06-29 2012-05-30 英泰克普拉斯有限公司 平板精密悬浮系统
CN102484089B (zh) * 2009-06-29 2015-03-25 英泰克普拉斯有限公司 平板精密悬浮系统
CN102020115A (zh) * 2010-11-26 2011-04-20 认知精密制造（苏州）有限公司 装载及移送lcd机架部件用空气上升型载体
CN102020115B (zh) * 2010-11-26 2013-01-30 认知精密制造（苏州）有限公司 装载及移送lcd机架部件用空气上升型载体
CN104364891A (zh) * 2012-06-21 2015-02-18 川崎重工业株式会社 基板搬运系统
CN104659039B (zh) * 2015-03-13 2017-10-27 京东方科技集团股份有限公司 承载基板、柔性显示装置制作方法
CN104659039A (zh) * 2015-03-13 2015-05-27 京东方科技集团股份有限公司 承载基板、柔性显示装置制作方法
CN109641440A (zh) * 2016-06-08 2019-04-16 康宁股份有限公司 层压设备
CN110498233A (zh) * 2019-07-26 2019-11-26 江苏科技大学 二维无接触输送平台装置
CN110498233B (zh) * 2019-07-26 2021-04-27 江苏科技大学 二维无接触输送平台装置
CN113113344A (zh) * 2020-05-08 2021-07-13 台湾积体电路制造股份有限公司 半导体制造系统、衬底位移组合件和处理半导体衬底方法
CN114538111A (zh) * 2022-03-21 2022-05-27 江苏威尔赛科技有限公司 一种带自动消毒功能的垃圾被服回收系统
CN114538111B (zh) * 2022-03-21 2024-03-08 江苏威尔赛科技有限公司 一种带自动消毒功能的垃圾被服回收系统
CN119117690A (zh) * 2024-11-12 2024-12-13 合肥浩普智能装备科技有限公司 一种气浮式倒包输送机
CN119117690B (zh) * 2024-11-12 2025-02-07 合肥浩普智能装备科技有限公司 一种气浮式倒包输送机

Also Published As

Publication number Publication date
EP1768921A1 (en) 2007-04-04
TW200624357A (en) 2006-07-16
WO2006005214A1 (en) 2006-01-19
JP2008505041A (ja) 2008-02-21
US20070215437A1 (en) 2007-09-20
KR20070037741A (ko) 2007-04-06
IL180080A0 (en) 2007-05-15
AU2005262191A1 (en) 2006-01-19

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Owner name: OERLIKON SUN IP STOCK CO., LTD. (TELVBAHE)

Free format text: FORMER OWNER: OC OERLIKON BALZERS AG

Effective date: 20091204

C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20091204

Address after: Swiss Te Lui Bach

Applicant after: Oerlikon Solar IP AG. Truebbach

Address before: Liechtenstein Barr Che J

Applicant before: OC Oerlikon Balzers AG

C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Open date: 20070822