TW200624357A - Gas bearing substrate-loading mechanism for vacuum process systems - Google Patents

Gas bearing substrate-loading mechanism for vacuum process systems

Info

Publication number
TW200624357A
TW200624357A TW094123153A TW94123153A TW200624357A TW 200624357 A TW200624357 A TW 200624357A TW 094123153 A TW094123153 A TW 094123153A TW 94123153 A TW94123153 A TW 94123153A TW 200624357 A TW200624357 A TW 200624357A
Authority
TW
Taiwan
Prior art keywords
loading mechanism
gas bearing
vacuum process
bearing substrate
process systems
Prior art date
Application number
TW094123153A
Other languages
English (en)
Chinese (zh)
Inventor
Valerick Cassagne
Original Assignee
Unaxis Balzers Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unaxis Balzers Ag filed Critical Unaxis Balzers Ag
Publication of TW200624357A publication Critical patent/TW200624357A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
TW094123153A 2004-07-09 2005-07-08 Gas bearing substrate-loading mechanism for vacuum process systems TW200624357A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US58664504P 2004-07-09 2004-07-09

Publications (1)

Publication Number Publication Date
TW200624357A true TW200624357A (en) 2006-07-16

Family

ID=34971820

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094123153A TW200624357A (en) 2004-07-09 2005-07-08 Gas bearing substrate-loading mechanism for vacuum process systems

Country Status (9)

Country Link
US (1) US20070215437A1 (enExample)
EP (1) EP1768921A1 (enExample)
JP (1) JP2008505041A (enExample)
KR (1) KR20070037741A (enExample)
CN (1) CN101023011A (enExample)
AU (1) AU2005262191A1 (enExample)
IL (1) IL180080A0 (enExample)
TW (1) TW200624357A (enExample)
WO (1) WO2006005214A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107655788A (zh) * 2017-11-16 2018-02-02 合肥工业大学 一种用于测量玻璃基板气浮系统节流板节流参数的装置

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100962810B1 (ko) 2006-02-28 2010-06-10 파나소닉 주식회사 플라즈마 디스플레이 장치
US20090291209A1 (en) 2008-05-20 2009-11-26 Asm International N.V. Apparatus and method for high-throughput atomic layer deposition
US9238867B2 (en) * 2008-05-20 2016-01-19 Asm International N.V. Apparatus and method for high-throughput atomic layer deposition
EP2281300A4 (en) * 2008-05-30 2013-07-17 Alta Devices Inc METHOD AND DEVICE FOR A CHEMICAL STEAM SEPARATION REACTOR
KR100876337B1 (ko) * 2008-06-25 2008-12-29 이재성 흡입력을 갖는 비접촉식 반송 플레이트
JP5399153B2 (ja) * 2008-12-12 2014-01-29 東京エレクトロン株式会社 真空処理装置、真空処理システムおよび処理方法
JP2010143733A (ja) * 2008-12-19 2010-07-01 Sumitomo Heavy Ind Ltd 基板ハンドリングシステム及び基板ハンドリング方法
KR101142959B1 (ko) * 2009-06-29 2012-05-08 김영태 평판 정밀 플로팅 시스템
JP5536516B2 (ja) * 2010-04-14 2014-07-02 オイレス工業株式会社 非接触搬送装置
JP5465595B2 (ja) * 2010-05-10 2014-04-09 オイレス工業株式会社 非接触搬送装置
KR101293289B1 (ko) * 2010-06-04 2013-08-09 김영태 비접촉식 이송장치
CN102020115B (zh) * 2010-11-26 2013-01-30 认知精密制造（苏州）有限公司 装载及移送lcd机架部件用空气上升型载体
JP6039260B2 (ja) * 2012-06-21 2016-12-07 川崎重工業株式会社 基板搬送システム
DE102012219332B4 (de) * 2012-10-23 2014-11-13 Mdi Schott Advanced Processing Gmbh Vorrichtung und Verfahren zum Lagern und Fixieren einer Glasscheibe
KR101978147B1 (ko) 2012-11-15 2019-05-15 (주)아모레퍼시픽 복분자딸기의 향취를 재현한 향료 조성물
KR101451506B1 (ko) * 2013-04-17 2014-10-17 삼성전기주식회사 비접촉 기판이송 반전기
JP2014133655A (ja) * 2014-03-17 2014-07-24 Oiles Ind Co Ltd 非接触搬送装置
JP2015218055A (ja) * 2014-05-20 2015-12-07 オイレス工業株式会社 搬送用レールおよび浮上搬送装置
US9506147B2 (en) 2015-02-13 2016-11-29 Eastman Kodak Company Atomic-layer deposition apparatus using compound gas jet
US9499906B2 (en) 2015-02-13 2016-11-22 Eastman Kodak Company Coating substrate using bernoulli atomic-layer deposition
US9499908B2 (en) 2015-02-13 2016-11-22 Eastman Kodak Company Atomic layer deposition apparatus
US9528184B2 (en) 2015-02-13 2016-12-27 Eastman Kodak Company Atomic-layer deposition method using compound gas jet
KR102298805B1 (ko) 2015-03-05 2021-09-08 (주)아모레퍼시픽 은목서의 향취를 재현한 향료 조성물
CN104659039B (zh) * 2015-03-13 2017-10-27 京东方科技集团股份有限公司 承载基板、柔性显示装置制作方法
KR102610348B1 (ko) 2015-10-30 2023-12-06 (주)아모레퍼시픽 함박꽃의 향취를 재현한 향료 조성물
KR20170138834A (ko) * 2016-06-08 2017-12-18 코닝 인코포레이티드 라미네이팅 장치
CN109982950B (zh) * 2016-09-13 2022-04-08 康宁股份有限公司 用于处理玻璃基材的设备和方法
US9889995B1 (en) * 2017-03-15 2018-02-13 Core Flow Ltd. Noncontact support platform with blockage detection
CN110498233B (zh) * 2019-07-26 2021-04-27 江苏科技大学 二维无接触输送平台装置
US11335585B2 (en) * 2020-05-08 2022-05-17 Taiwan Semiconductor Manufacturing Co., Ltd. Vacuum wafer chuck for manufacturing semiconductor devices
KR102578464B1 (ko) * 2020-06-10 2023-09-14 세메스 주식회사 기판 이송 모듈 및 이를 포함하는 다이 본딩 장치
CN114538111B (zh) * 2022-03-21 2024-03-08 江苏威尔赛科技有限公司 一种带自动消毒功能的垃圾被服回收系统
CN119117690B (zh) * 2024-11-12 2025-02-07 合肥浩普智能装备科技有限公司 一种气浮式倒包输送机

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2080083A (en) * 1934-06-08 1937-05-11 Assurex Le Roi Des Verres De S Manufacture of hardened or tempered glass plates
US2905768A (en) * 1954-09-24 1959-09-22 Ibm Air head
NL137693C (enExample) * 1964-03-25
GB1137555A (en) * 1965-10-22 1968-12-27 Pilkington Brothers Ltd Improvements in or relating to the transporting of sheet materials
US3455669A (en) * 1966-05-09 1969-07-15 Permaglass Apparatus for heat treating glass on a fluid support
FR1527937A (fr) * 1967-03-31 1968-06-07 Saint Gobain Dispositif de transport d'un matériau en forme de feuille sur un coussin gazeux
US3517958A (en) * 1968-06-17 1970-06-30 Ibm Vacuum pick-up with air shield
US4014576A (en) * 1975-06-19 1977-03-29 International Business Machines Corporation Article carrier
US4521268A (en) * 1981-08-26 1985-06-04 Edward Bok Apparatus for deposition of fluid and gaseous media on substrates
US4773687A (en) * 1987-05-22 1988-09-27 American Telephone And Telegraph Company, At&T Technologies, Inc. Wafer handler
JP2865690B2 (ja) * 1989-02-17 1999-03-08 株式会社日立製作所 嵌合挿入装置
JPH0818678B2 (ja) * 1989-09-05 1996-02-28 日本板硝子株式会社 エアベッド搬送装置
JP3128709B2 (ja) * 1992-08-04 2001-01-29 株式会社新川 非接触型移動テーブル
US5634636A (en) * 1996-01-11 1997-06-03 Xerox Corporation Flexible object handling system using feedback controlled air jets
DE19649488A1 (de) * 1996-11-29 1997-11-06 Schott Glaswerke Vorrichtung zur Handhabung von dünnen Glasscheiben
JP4354039B2 (ja) * 1999-04-02 2009-10-28 東京エレクトロン株式会社 駆動装置
US6491435B1 (en) * 2000-07-24 2002-12-10 Moore Epitaxial, Inc. Linear robot
DE10148038A1 (de) * 2001-09-28 2003-04-17 Grenzebach Maschb Gmbh Einrichtung zur Plattenübergabe von einem Plattenförderer auf ein Stapelgestell oder dergleichen
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107655788A (zh) * 2017-11-16 2018-02-02 合肥工业大学 一种用于测量玻璃基板气浮系统节流板节流参数的装置
CN107655788B (zh) * 2017-11-16 2019-10-01 合肥工业大学 一种用于测量玻璃基板气浮系统节流板节流参数的装置

Also Published As

Publication number Publication date
JP2008505041A (ja) 2008-02-21
WO2006005214A1 (en) 2006-01-19
EP1768921A1 (en) 2007-04-04
IL180080A0 (en) 2007-05-15
US20070215437A1 (en) 2007-09-20
KR20070037741A (ko) 2007-04-06
CN101023011A (zh) 2007-08-22
AU2005262191A1 (en) 2006-01-19

Similar Documents

Publication Publication Date Title
TW200624357A (en) Gas bearing substrate-loading mechanism for vacuum process systems
JP2008505041A5 (enExample)
TW200710955A (en) Vapor phase growing apparatus and vapor phase growing method
JP2005511303A5 (enExample)
WO2008044706A1 (fr) dispositif de transport d'un matériau en forme de feuille
EP2027257A4 (en) BIOACTIVE SURFACE FOR HEPATOCYTE-BASED APPLICATIONS
IL192071A0 (en) Device and method for the surface treatment of substrates
TW200609374A (en) Vertical cvd apparatus and cvd method using the same
WO2007150039A3 (en) Method and apparatus for transporting substrates
TW200625504A (en) Substrate holder, stage device and exposure device
WO2007124879A3 (de) Vorrichtung und verfahren zur homogenen pvd-beschichtung
MY142184A (en) Method and apparatus for transporting a substrate using non-newtonian fluid
TW200725696A (en) Supporting mechanism and mask carrier using the same
TW200619115A (en) Substrate transferring apparatus
EP2465972A3 (en) Method and system for thin film deposition
MY142309A (en) Transport device, in particular for transporting two-dimensional substrates through a coating system
TW200736143A (en) Apparatus and method for transferring a glass substrate
TW200638480A (en) Plasma treatment apparatus
TW200638098A (en) Treatment system
TWI352056B (enExample)
TW200730419A (en) Substrate delivery apparatus
EP2465980A3 (en) Apparatus and method for manufacturing silicon carbide single crystal
TW200705597A (en) Holder for fabricating organic light emitting display
DK1564166T3 (da) Fastholdelsesindretning for en rulle i et båndtransportanlæg eller et transportanlæg med bærelister
TW200732105A (en) Method and apparatus for handling and aligning glass substrates