WO2007124879A3 - Vorrichtung und verfahren zur homogenen pvd-beschichtung - Google Patents

Vorrichtung und verfahren zur homogenen pvd-beschichtung Download PDF

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Publication number
WO2007124879A3
WO2007124879A3 PCT/EP2007/003523 EP2007003523W WO2007124879A3 WO 2007124879 A3 WO2007124879 A3 WO 2007124879A3 EP 2007003523 W EP2007003523 W EP 2007003523W WO 2007124879 A3 WO2007124879 A3 WO 2007124879A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrates
cathodes
pvd coating
anode
coating chamber
Prior art date
Application number
PCT/EP2007/003523
Other languages
English (en)
French (fr)
Other versions
WO2007124879A2 (de
Inventor
Wolf-Dieter Muenz
Stefan Kunkel
Juergen Mangold
Dieter Hofmann
Original Assignee
Systec System Und Anlagentechn
Wolf-Dieter Muenz
Stefan Kunkel
Juergen Mangold
Dieter Hofmann
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Systec System Und Anlagentechn, Wolf-Dieter Muenz, Stefan Kunkel, Juergen Mangold, Dieter Hofmann filed Critical Systec System Und Anlagentechn
Priority to EP07724453A priority Critical patent/EP2013374A2/de
Publication of WO2007124879A2 publication Critical patent/WO2007124879A2/de
Publication of WO2007124879A3 publication Critical patent/WO2007124879A3/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

Vorrichtung und Verfahren zur PVD-Beschichtung von Substraten. Die Vorrichtung (1) umfasst eine Beschichtungskammer (2), zwei oder mehrere peripher innerhalb der Beschichtungskammer angeordnete Kathoden (3), Substratträger (6) zur Halterung der Substrate (4), Vakuumpumpen (8) und Spannungsquellen (15, 16, 17), wobei eine einzelne Anode (5) zentrisch zwischen den Kathoden (3) in der Beschichtungskammer (2) angeordnet ist und die Substrate (4) zwischen der Anode (5) und den Kathoden (3) positioniert sind. Bei dem Verfahren zur PVD-Beschichtung wird zwischen der einzelnen Anode (5) und den Kathoden (3) jeweils eine Gasentladung mit einem Plasma (14) gezündet. Die Substrate (4) werden stationär gehalten oder um eine oder mehrere Achsen gedreht und dabei den Plasmen (14) ausgesetzt.
PCT/EP2007/003523 2006-04-26 2007-04-23 Vorrichtung und verfahren zur homogenen pvd-beschichtung WO2007124879A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP07724453A EP2013374A2 (de) 2006-04-26 2007-04-23 Vorrichtung und verfahren zur homogenen pvd-beschichtung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006020004.7 2006-04-26
DE200610020004 DE102006020004B4 (de) 2006-04-26 2006-04-26 Vorrichtung und Verfahren zur homogenen PVD-Beschichtung

Publications (2)

Publication Number Publication Date
WO2007124879A2 WO2007124879A2 (de) 2007-11-08
WO2007124879A3 true WO2007124879A3 (de) 2008-07-17

Family

ID=38325449

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/003523 WO2007124879A2 (de) 2006-04-26 2007-04-23 Vorrichtung und verfahren zur homogenen pvd-beschichtung

Country Status (3)

Country Link
EP (1) EP2013374A2 (de)
DE (1) DE102006020004B4 (de)
WO (1) WO2007124879A2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2159820B1 (de) * 2008-08-25 2018-04-11 Oerlikon Surface Solutions AG, Pfäffikon Vorrichtung zur Beschichtung durch Ablagerung physikalischer Dämpfe sowie Verfahren zur Ablagerung physikalischer Dämpfe
DE102008050499B4 (de) 2008-10-07 2014-02-06 Systec System- Und Anlagentechnik Gmbh & Co. Kg PVD-Beschichtungsverfahren, Vorrichtung zur Durchführung des Verfahrens und nach dem Verfahren beschichtete Substrate
DE102008062332A1 (de) 2008-12-15 2010-06-17 Gühring Ohg Vorrichtung zur Oberflächenbehandlung und/oder -beschichtung von Substratkomponenten
DE102009015477A1 (de) 2009-03-26 2010-09-30 Roth & Rau Ag PVD-Beschichtungsverfahren
DE102009015478A1 (de) 2009-03-26 2010-09-30 Roth & Rau Ag Verfahren zur Herstellung von Hartstoffschichten
CZ304905B6 (cs) * 2009-11-23 2015-01-14 Shm, S.R.O. Způsob vytváření PVD vrstev s pomocí rotační cylindrické katody a zařízení k provádění tohoto způsobu
US9793098B2 (en) 2012-09-14 2017-10-17 Vapor Technologies, Inc. Low pressure arc plasma immersion coating vapor deposition and ion treatment
US9412569B2 (en) 2012-09-14 2016-08-09 Vapor Technologies, Inc. Remote arc discharge plasma assisted processes
US10056237B2 (en) 2012-09-14 2018-08-21 Vapor Technologies, Inc. Low pressure arc plasma immersion coating vapor deposition and ion treatment
EP3279364B1 (de) 2016-08-03 2021-10-06 IHI Hauzer Techno Coating B.V. Vorrichtung zur beschichtung von substraten
RU2752334C1 (ru) * 2020-05-08 2021-07-26 Федеральное государственное бюджетное учреждение науки Институт физического материаловедения Сибирского отделения Российской академии наук Газоразрядное распылительное устройство на основе планарного магнетрона с ионным источником

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3341442A (en) * 1963-09-16 1967-09-12 Ibm Method of cathode sputtering including cleaning by ion bombardment wherein an article to be coated is subjected to canal rays
US3594301A (en) * 1968-11-22 1971-07-20 Gen Electric Sputter coating apparatus
GB2342361A (en) * 1998-10-09 2000-04-12 Beijing Zhentao Int L Ti Gold Planar unbalanced magnetron sputtering cathode

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4239843A1 (de) * 1992-11-27 1994-06-01 Leybold Ag Vorrichtung für die Erzeugung von Plasma, insbesondere zum Beschichten von Substraten
US5616225A (en) * 1994-03-23 1997-04-01 The Boc Group, Inc. Use of multiple anodes in a magnetron for improving the uniformity of its plasma
GB9700158D0 (en) * 1997-01-07 1997-02-26 Gencoa Limited Versatile coating deposition system
US6352627B2 (en) * 1997-04-14 2002-03-05 Cemecon-Ceramic Metal Coatings Method and device for PVD coating

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3341442A (en) * 1963-09-16 1967-09-12 Ibm Method of cathode sputtering including cleaning by ion bombardment wherein an article to be coated is subjected to canal rays
US3594301A (en) * 1968-11-22 1971-07-20 Gen Electric Sputter coating apparatus
GB2342361A (en) * 1998-10-09 2000-04-12 Beijing Zhentao Int L Ti Gold Planar unbalanced magnetron sputtering cathode

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2013374A2 *

Also Published As

Publication number Publication date
WO2007124879A2 (de) 2007-11-08
DE102006020004B4 (de) 2011-06-01
EP2013374A2 (de) 2009-01-14
DE102006020004A1 (de) 2008-01-17

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