CN100425958C - 分光镜 - Google Patents

分光镜 Download PDF

Info

Publication number
CN100425958C
CN100425958C CNB028270525A CN02827052A CN100425958C CN 100425958 C CN100425958 C CN 100425958C CN B028270525 A CNB028270525 A CN B028270525A CN 02827052 A CN02827052 A CN 02827052A CN 100425958 C CN100425958 C CN 100425958C
Authority
CN
China
Prior art keywords
wavelength dispersion
supporting member
light
wavelength
ambient temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB028270525A
Other languages
English (en)
Chinese (zh)
Other versions
CN1613004A (zh
Inventor
胜沼淳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of CN1613004A publication Critical patent/CN1613004A/zh
Application granted granted Critical
Publication of CN100425958C publication Critical patent/CN100425958C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
CNB028270525A 2002-01-24 2002-12-25 分光镜 Expired - Fee Related CN100425958C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002015920A JP4151271B2 (ja) 2002-01-24 2002-01-24 分光装置
JP15920/2002 2002-01-24

Publications (2)

Publication Number Publication Date
CN1613004A CN1613004A (zh) 2005-05-04
CN100425958C true CN100425958C (zh) 2008-10-15

Family

ID=27606122

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028270525A Expired - Fee Related CN100425958C (zh) 2002-01-24 2002-12-25 分光镜

Country Status (4)

Country Link
US (1) US7173695B2 (enExample)
JP (1) JP4151271B2 (enExample)
CN (1) CN100425958C (enExample)
WO (1) WO2003062776A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7595876B2 (en) * 2006-01-11 2009-09-29 Baker Hughes Incorporated Method and apparatus for estimating a property of a fluid downhole
US7576856B2 (en) * 2006-01-11 2009-08-18 Baker Hughes Incorporated Method and apparatus for estimating a property of a fluid downhole
JP2008159718A (ja) * 2006-12-21 2008-07-10 Sharp Corp マルチチップモジュールおよびその製造方法、並びにマルチチップモジュールの搭載構造およびその製造方法
DE102008024598A1 (de) * 2007-05-21 2008-12-18 Micro-Epsilon Messtechnik Gmbh & Co. Kg Verfahren zur Kompensation von temperaturbedingten Messfehlern einer optischen Anordnung sowie optische Anordnung
JP4891840B2 (ja) * 2007-06-08 2012-03-07 浜松ホトニクス株式会社 分光モジュール
JP5424957B2 (ja) * 2009-04-30 2014-02-26 キヤノン株式会社 分光測色装置およびそれを用いた画像形成装置
JP5781188B1 (ja) * 2014-03-26 2015-09-16 株式会社フジクラ 導光装置、製造方法、及び、ｌｄモジュール
JP6430075B2 (ja) * 2016-07-12 2018-11-28 三菱電機株式会社 光部品および光モジュール
JP7164814B2 (ja) * 2018-12-25 2022-11-02 日本電信電話株式会社 光波長選択フィルタモジュール及び光波長選択方法
CN110596846B (zh) * 2019-09-20 2022-04-08 武汉光迅科技股份有限公司 一种标准具封装结构及波长锁定装置
JP7729053B2 (ja) * 2021-03-18 2025-08-26 セイコーエプソン株式会社 測色装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06331850A (ja) * 1993-05-25 1994-12-02 Matsushita Electric Ind Co Ltd 光フィルタおよび光フィルタに用いる回折素子
JPH08254463A (ja) * 1995-02-14 1996-10-01 Hewlett Packard Co <Hp> ダイオードアレー分光測光器
JPH0915048A (ja) * 1995-06-28 1997-01-17 Shimadzu Corp 分光光度計
JPH09184806A (ja) * 1995-12-28 1997-07-15 Shimadzu Corp 発光分光分析装置
JPH09218091A (ja) * 1996-02-08 1997-08-19 Hewlett Packard Co <Hp> ダイオードアレー分光測光器
JP2000298066A (ja) * 1999-04-01 2000-10-24 Gretag Macbeth Ag 分光計
JP2001108523A (ja) * 1999-10-14 2001-04-20 Matsushita Electric Ind Co Ltd 分光測定装置
JP2001188023A (ja) * 1999-12-28 2001-07-10 Yokogawa Electric Corp 分光装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57125825A (en) * 1981-01-29 1982-08-05 Nippon Kogaku Kk <Nikon> Diffraction grating spectroscope
JP2753310B2 (ja) * 1989-03-03 1998-05-20 アンリツ株式会社 分光器
DE19504835C1 (de) * 1995-02-14 1996-03-21 Hewlett Packard Gmbh Diodenzeilen-Spektralphotometer
JP2002031572A (ja) * 2000-07-17 2002-01-31 Ando Electric Co Ltd 分光器及びこれを備えた光スペクトラムアナライザ

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06331850A (ja) * 1993-05-25 1994-12-02 Matsushita Electric Ind Co Ltd 光フィルタおよび光フィルタに用いる回折素子
JPH08254463A (ja) * 1995-02-14 1996-10-01 Hewlett Packard Co <Hp> ダイオードアレー分光測光器
JPH0915048A (ja) * 1995-06-28 1997-01-17 Shimadzu Corp 分光光度計
JPH09184806A (ja) * 1995-12-28 1997-07-15 Shimadzu Corp 発光分光分析装置
JPH09218091A (ja) * 1996-02-08 1997-08-19 Hewlett Packard Co <Hp> ダイオードアレー分光測光器
JP2000298066A (ja) * 1999-04-01 2000-10-24 Gretag Macbeth Ag 分光計
JP2001108523A (ja) * 1999-10-14 2001-04-20 Matsushita Electric Ind Co Ltd 分光測定装置
JP2001188023A (ja) * 1999-12-28 2001-07-10 Yokogawa Electric Corp 分光装置

Also Published As

Publication number Publication date
US7173695B2 (en) 2007-02-06
CN1613004A (zh) 2005-05-04
JP2003214952A (ja) 2003-07-30
WO2003062776A1 (fr) 2003-07-31
JP4151271B2 (ja) 2008-09-17
US20050088649A1 (en) 2005-04-28

Similar Documents

Publication Publication Date Title
JP4473665B2 (ja) 分光器
US9046412B2 (en) Compact interferometer spectrometer
US20040178329A1 (en) Remote sensing apparatus and method
US9146155B2 (en) Optical system and manufacturing method thereof
CN100425958C (zh) 分光镜
US20090034080A1 (en) Optical system
US20010052980A1 (en) Spectroscope for measuring spectral distribution
US6597451B1 (en) Spectrometry measuring apparatus
US6678044B2 (en) Monochromator and optical spectrum analyzer equipped with the same
WO2003078940A2 (en) High resolution spectral measurement device
JPH11183249A (ja) 分光器
US4605306A (en) Grating monochromator
JP4642621B2 (ja) 分光装置
JP3790630B2 (ja) 分光光度計及び分光波長校正方法
JP3861792B2 (ja) 分光方法
US5528370A (en) Apparatus and method for measuring variations in thickness of an optical interference element
EP1203207B1 (en) Fourier transform spectrometer using an optical block
JP2006234920A (ja) 光学モジュール
US11808630B2 (en) First optical system, monochromator, and optical apparatus
GB2362460A (en) Spectroscope
JP2000321135A (ja) 分光装置
JPH1151768A (ja) レーザ波長分離用ホログラム光学装置
JP2000055733A (ja) マルチチャンネル分光計
JP2001264171A (ja) 干渉計および入出力光学装置
JPH0254130A (ja) 分光器

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20081015

Termination date: 20171225

CF01 Termination of patent right due to non-payment of annual fee