CN100404467C - 陶瓷垫板及其制造方法 - Google Patents
陶瓷垫板及其制造方法 Download PDFInfo
- Publication number
- CN100404467C CN100404467C CNB02129691XA CN02129691A CN100404467C CN 100404467 C CN100404467 C CN 100404467C CN B02129691X A CNB02129691X A CN B02129691XA CN 02129691 A CN02129691 A CN 02129691A CN 100404467 C CN100404467 C CN 100404467C
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- China
- Prior art keywords
- mentioned
- ceramic
- cavity
- backing
- sintered compact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/638—Removal thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
- C04B38/0003—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof containing continuous channels, e.g. of the "dead-end" type or obtained by pushing bars in the green ceramic product
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00241—Physical properties of the materials not provided for elsewhere in C04B2111/00
- C04B2111/00267—Materials permeable to vapours or gases
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3418—Silicon oxide, silicic acids, or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/66—Specific sintering techniques, e.g. centrifugal sintering
- C04B2235/668—Pressureless sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/77—Density
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/94—Products characterised by their shape
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2323/00—Functional layers of liquid crystal optical display excluding electroactive liquid crystal layer characterised by chemical composition
- C09K2323/06—Substrate layer characterised by chemical composition
- C09K2323/061—Inorganic, e.g. ceramic, metallic or glass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Inorganic Chemistry (AREA)
- Furnace Charging Or Discharging (AREA)
- Moulds, Cores, Or Mandrels (AREA)
- Ceramic Products (AREA)
Abstract
Description
Claims (4)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP286759/2001 | 2001-09-20 | ||
JP2001286759 | 2001-09-20 | ||
JP2002186151A JP4205902B2 (ja) | 2001-09-20 | 2002-06-26 | セラミックセッター及びその製造方法 |
JP186151/2001 | 2002-06-26 | ||
JP186151/2002 | 2002-06-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1408678A CN1408678A (zh) | 2003-04-09 |
CN100404467C true CN100404467C (zh) | 2008-07-23 |
Family
ID=26622585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB02129691XA Expired - Lifetime CN100404467C (zh) | 2001-09-20 | 2002-09-12 | 陶瓷垫板及其制造方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US7008220B2 (zh) |
JP (1) | JP4205902B2 (zh) |
CN (1) | CN100404467C (zh) |
DE (1) | DE10240161B4 (zh) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4599783B2 (ja) * | 2001-09-20 | 2010-12-15 | 株式会社村田製作所 | 低温焼成セラミック回路基板の製造方法 |
JP4377165B2 (ja) * | 2003-06-18 | 2009-12-02 | 株式会社クレハ | 高温加熱金属成型体支持部材およびその製造方法 |
JP4421910B2 (ja) * | 2004-01-29 | 2010-02-24 | 日本碍子株式会社 | 熱処理用トレー及びそれを用いたセラミック製品の製造方法 |
JP2005321161A (ja) * | 2004-05-11 | 2005-11-17 | Mitsui Mining & Smelting Co Ltd | 焼成用窯道具 |
KR20050119016A (ko) * | 2004-06-15 | 2005-12-20 | 김계태 | 탈바인더 세터 및 이를 구비한 탈바인더 장치 |
DE102004056879B4 (de) * | 2004-10-27 | 2008-12-04 | Curamik Electronics Gmbh | Verfahren zum Herstellen eines Metall-Keramik-Substrates |
US7780905B2 (en) * | 2008-03-04 | 2010-08-24 | Pcc Airfoils, Inc. | Supporting ceramic articles during firing |
CN101960245A (zh) * | 2008-03-05 | 2011-01-26 | 日本碍子株式会社 | 陶瓷烧成用窑工具板 |
JP2011068517A (ja) * | 2009-09-25 | 2011-04-07 | Sumitomo Chemical Co Ltd | セラミックス焼成体の製造方法 |
CN102299485B (zh) * | 2010-05-18 | 2013-09-18 | 株式会社村田制作所 | Esd保护装置的制造方法及esd保护装置 |
JP6284114B2 (ja) * | 2013-05-31 | 2018-02-28 | 日本特殊陶業株式会社 | セラミック部材およびその製造方法 |
WO2015088839A1 (en) * | 2013-12-10 | 2015-06-18 | Saint-Gobain Ceramics & Plastics, Inc. | Refractory article |
CN104048511B (zh) * | 2014-03-31 | 2016-03-30 | 广东固特耐科技新材料有限公司 | 一种窑具垫板及窑具框架 |
CN105180659B (zh) * | 2015-10-19 | 2017-12-01 | 广东热金宝新材料科技有限公司 | 一种改进的应用于烧制陶瓷洗手盆多功能框架结构的窑具窑车 |
WO2017145516A1 (ja) * | 2016-02-23 | 2017-08-31 | 日本碍子株式会社 | 焼成用トチ、及び焼成用トチを用いたハニカム構造体の製造方法 |
CN106242576B (zh) * | 2016-08-09 | 2023-11-24 | 中原工学院 | 一种陶瓷基Mo(Si,Al)2-CBN超硬材料的制备方法 |
CN109716049A (zh) * | 2016-09-12 | 2019-05-03 | 日本碍子株式会社 | 烧成用载置器 |
DE202017006963U1 (de) * | 2017-10-25 | 2019-01-08 | Wpx Faserkeramik Gmbh | Feuerfester Behälter aus einem keramischen Werkstoff und Grünling für einen solchen Behälter |
US11287107B2 (en) * | 2018-02-14 | 2022-03-29 | Ngk Spark Plug Co., Ltd. | Optical wavelength conversion device |
CN111440006B (zh) * | 2019-01-17 | 2022-02-11 | 广东金意陶陶瓷集团有限公司 | 一种发泡陶瓷坯体预热工艺 |
CN110981493A (zh) * | 2019-12-30 | 2020-04-10 | 珠海凯利得新材料有限公司 | 用于排胶脂的多孔碳化硅陶瓷工装及其制备方法 |
CN111302812A (zh) * | 2020-03-31 | 2020-06-19 | 吴跃东 | 一种陶瓷基板的压烧校平方法 |
CN114790115A (zh) * | 2021-01-25 | 2022-07-26 | 南京以太通信技术有限公司 | 陶瓷块的烧结方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3764261A (en) * | 1972-05-18 | 1973-10-09 | Dixon Crucible Co J | Refractory sanitary ware setter |
US4219328A (en) * | 1979-06-06 | 1980-08-26 | General Electric Company | Apparatus for firing low density graphite/alumina cores |
US5130067A (en) * | 1986-05-02 | 1992-07-14 | International Business Machines Corporation | Method and means for co-sintering ceramic/metal mlc substrates |
JPH08181444A (ja) * | 1994-12-22 | 1996-07-12 | Hitachi Ltd | セラミック多層配線基板の焼成方法 |
JPH10120469A (ja) * | 1996-10-22 | 1998-05-12 | Sumitomo Kinzoku Electro Device:Kk | セラミック基板の製造方法 |
US6001761A (en) * | 1994-09-27 | 1999-12-14 | Nippon Shokubai Co., Ltd. | Ceramics sheet and production method for same |
CN1254327A (zh) * | 1997-03-27 | 2000-05-24 | 弗伦顿有限公司 | 耐火制品的制备方法及用该法所制的耐火制品 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3099063A (en) * | 1962-10-18 | 1963-07-30 | Ferro Corp | Sanitary ware setter |
US4259061A (en) * | 1979-12-07 | 1981-03-31 | International Business Machines Corporation | Method of achieving uniform sintering shrinkage in a laminated planar green ceramic substrate and apparatus therefor |
US5053361A (en) * | 1988-07-18 | 1991-10-01 | International Business Machines Corporation | Setter tile for use in sintering of ceramic substrate laminates |
US6395117B1 (en) * | 1994-10-19 | 2002-05-28 | Ngk Insulators | Method for producing ceramic green sheet |
EP1382443B1 (en) * | 1996-01-12 | 2013-04-24 | Ibiden Co., Ltd. | A filter for purifying exhaust gas |
DE19848474C1 (de) * | 1998-10-21 | 2000-01-13 | Bosch Gmbh Robert | Verfahren und Vorrichtung zur Herstellung keramischer Formkörper mittels Setterplatten und Verendung des Verfahrens zur Herstellung keramischer Mehrschichthybride |
EP1184637A1 (en) * | 2000-08-28 | 2002-03-06 | Mino Yogyo Co., Ltd. | Firing setters and process for producing these setters |
JP2002114579A (ja) * | 2000-10-03 | 2002-04-16 | Hitachi Metals Ltd | 焼成用セッター |
JP2002134913A (ja) | 2000-10-19 | 2002-05-10 | Sumitomo Metal Electronics Devices Inc | セラミック多層基板の製造方法 |
-
2002
- 2002-06-26 JP JP2002186151A patent/JP4205902B2/ja not_active Expired - Lifetime
- 2002-08-30 DE DE2002140161 patent/DE10240161B4/de not_active Expired - Lifetime
- 2002-09-11 US US10/241,169 patent/US7008220B2/en not_active Expired - Lifetime
- 2002-09-12 CN CNB02129691XA patent/CN100404467C/zh not_active Expired - Lifetime
-
2005
- 2005-09-13 US US11/224,851 patent/US20060035194A1/en not_active Abandoned
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3764261A (en) * | 1972-05-18 | 1973-10-09 | Dixon Crucible Co J | Refractory sanitary ware setter |
US4219328A (en) * | 1979-06-06 | 1980-08-26 | General Electric Company | Apparatus for firing low density graphite/alumina cores |
US5130067A (en) * | 1986-05-02 | 1992-07-14 | International Business Machines Corporation | Method and means for co-sintering ceramic/metal mlc substrates |
US6001761A (en) * | 1994-09-27 | 1999-12-14 | Nippon Shokubai Co., Ltd. | Ceramics sheet and production method for same |
JPH08181444A (ja) * | 1994-12-22 | 1996-07-12 | Hitachi Ltd | セラミック多層配線基板の焼成方法 |
JPH10120469A (ja) * | 1996-10-22 | 1998-05-12 | Sumitomo Kinzoku Electro Device:Kk | セラミック基板の製造方法 |
CN1254327A (zh) * | 1997-03-27 | 2000-05-24 | 弗伦顿有限公司 | 耐火制品的制备方法及用该法所制的耐火制品 |
Also Published As
Publication number | Publication date |
---|---|
JP4205902B2 (ja) | 2009-01-07 |
DE10240161A1 (de) | 2003-04-30 |
DE10240161B4 (de) | 2013-07-25 |
US20060035194A1 (en) | 2006-02-16 |
CN1408678A (zh) | 2003-04-09 |
US20030054120A1 (en) | 2003-03-20 |
JP2003165775A (ja) | 2003-06-10 |
US7008220B2 (en) | 2006-03-07 |
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Owner name: MURATA MANUFACTURING CO., LTD Free format text: FORMER OWNER: CORPORATION ZHUYOU METAL ELECTRONIC EQUIPMENT |
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Effective date of registration: 20040604 Address after: Kyoto Japan Applicant after: Murata Manufacturing Co.,Ltd. Co-applicant after: Isolite Insulating Products Co.,Ltd. Address before: Yamaguchi Applicant before: SUMITOMO METAL ELECTRONIC EQUIPMENT Co.,Ltd. Co-applicant before: Isolite Insulating Products Co.,Ltd. |
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