CH676856A5 - - Google Patents
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- Publication number
- CH676856A5 CH676856A5 CH335587A CH335587A CH676856A5 CH 676856 A5 CH676856 A5 CH 676856A5 CH 335587 A CH335587 A CH 335587A CH 335587 A CH335587 A CH 335587A CH 676856 A5 CH676856 A5 CH 676856A5
- Authority
- CH
- Switzerland
- Prior art keywords
- coating
- nitride
- tantalum
- gold
- titanium
- Prior art date
Links
- 238000000576 coating method Methods 0.000 claims description 31
- 239000011248 coating agent Substances 0.000 claims description 29
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 27
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 24
- 229910052715 tantalum Inorganic materials 0.000 claims description 18
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 18
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 17
- 239000010936 titanium Substances 0.000 claims description 17
- 229910052719 titanium Inorganic materials 0.000 claims description 17
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 150000004767 nitrides Chemical class 0.000 claims description 8
- 238000005507 spraying Methods 0.000 claims description 8
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 5
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- 239000012298 atmosphere Substances 0.000 claims description 3
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 3
- 238000007733 ion plating Methods 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000002987 primer (paints) Substances 0.000 claims description 2
- 230000000737 periodic effect Effects 0.000 claims 1
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 239000012528 membrane Substances 0.000 description 18
- 229910052737 gold Inorganic materials 0.000 description 16
- 239000010931 gold Substances 0.000 description 16
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 15
- 229910052757 nitrogen Inorganic materials 0.000 description 12
- 230000000694 effects Effects 0.000 description 7
- 239000002131 composite material Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 150000002343 gold Chemical class 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/006—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterized by the colour of the layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20652886A JPS6362863A (ja) | 1986-09-02 | 1986-09-02 | 金色を呈する物品 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH676856A5 true CH676856A5 (enrdf_load_stackoverflow) | 1991-03-15 |
Family
ID=16524856
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH335587A CH676856A5 (enrdf_load_stackoverflow) | 1986-09-02 | 1987-09-01 |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS6362863A (enrdf_load_stackoverflow) |
CH (1) | CH676856A5 (enrdf_load_stackoverflow) |
DE (1) | DE3728836C2 (enrdf_load_stackoverflow) |
GB (1) | GB2195664B (enrdf_load_stackoverflow) |
HK (1) | HK67693A (enrdf_load_stackoverflow) |
SG (1) | SG51193G (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT397816B (de) * | 1991-11-25 | 1994-07-25 | Silhouette Int Gmbh | Verfahren zum herstellen einer dekorschicht auf einem gebrauchsgegenstand |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59181452A (ja) * | 1983-03-31 | 1984-10-15 | Mitsubishi Electric Corp | 放電ランプ |
GB2219218A (en) * | 1988-06-03 | 1989-12-06 | Diffusion Alloys Ltd | Coating dart bodies |
JP2795864B2 (ja) * | 1989-01-20 | 1998-09-10 | 大阪大学長 | 硬質被膜材料及びその製造方法 |
WO1992014859A1 (de) * | 1991-02-19 | 1992-09-03 | Eifeler Werkzeuge Gmbh | Verfahren und vorrichtung zur reduzierung von droplets bei der beschichtung von oberflächen mit hartstoffen nach dem pvd-verfahren |
CH684617B5 (de) * | 1992-03-26 | 1995-05-15 | Bloesch W Ag | Oberflächenbeschichtung. |
KR100227101B1 (ko) * | 1997-03-21 | 1999-10-15 | 선호천 | Abs 수지 및 플라스틱상의 건식도금 방법 |
DE10242421A1 (de) * | 2002-09-06 | 2004-03-18 | Fenker, Martin, Dr. | Beschichtung zum Verschleiß- und Korrosionsschutz auf Basis von Niobnitrid oder Niobmetallnitrid sowie Verfahren zur Herstellung derselben |
DE10356944A1 (de) * | 2003-12-06 | 2005-07-07 | Deutsche Titan Gmbh | Beschichtungsverfahren zur Beschichtung eines Substrates mit Metall |
DE202006012902U1 (de) | 2006-08-16 | 2006-10-19 | Aesculap Ag & Co. Kg | Implantat |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3574143A (en) * | 1969-02-19 | 1971-04-06 | Bell Telephone Labor Inc | Resistive composition of matter and device utilizing same |
DE1951362B2 (de) * | 1969-10-11 | 1971-12-02 | W.C. Heraeus Gmbh, 6450 Hanau | Verfahren zum ueberziehen einer schreibfeder mit einer schicht aus hartstoff |
SE357984B (enrdf_load_stackoverflow) * | 1971-11-12 | 1973-07-16 | Sandvik Ab | |
DE2502974B2 (de) * | 1974-06-20 | 1977-11-03 | Matsushita Electric Industrial Co, Ltd, Kadoma, Osaka (Japan) | Abnehmertaster aus einem diamantkern und verfahren zu seiner herstellung |
AT350285B (de) * | 1974-08-07 | 1979-05-25 | Plansee Metallwerk | Mit einem ueberzug versehene, metallische gebrauchsgegenstaende |
JPS5462183A (en) * | 1977-10-26 | 1979-05-18 | Seiko Epson Corp | Outside parts for pocket watch |
DD155252A1 (de) * | 1980-12-11 | 1982-05-26 | Dietmar Fabian | Verfahren zur herstellung von schichtverbunden auf metallischen substraten |
CH659967A5 (de) * | 1981-02-23 | 1987-03-13 | Vni Instrument Inst | Mehrschichtueberzug fuer spanabhebendes werkzeug. |
-
1986
- 1986-09-02 JP JP20652886A patent/JPS6362863A/ja active Granted
-
1987
- 1987-08-28 DE DE19873728836 patent/DE3728836C2/de not_active Expired
- 1987-08-28 GB GB8720330A patent/GB2195664B/en not_active Expired - Lifetime
- 1987-09-01 CH CH335587A patent/CH676856A5/de not_active IP Right Cessation
-
1993
- 1993-04-21 SG SG51193A patent/SG51193G/en unknown
- 1993-07-15 HK HK67693A patent/HK67693A/xx not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT397816B (de) * | 1991-11-25 | 1994-07-25 | Silhouette Int Gmbh | Verfahren zum herstellen einer dekorschicht auf einem gebrauchsgegenstand |
Also Published As
Publication number | Publication date |
---|---|
SG51193G (en) | 1993-06-25 |
JPS6362863A (ja) | 1988-03-19 |
GB2195664B (en) | 1991-01-09 |
DE3728836A1 (de) | 1988-03-03 |
DE3728836C2 (de) | 1989-01-05 |
HK67693A (en) | 1993-07-23 |
GB8720330D0 (en) | 1987-10-07 |
GB2195664A (en) | 1988-04-13 |
JPH0461071B2 (enrdf_load_stackoverflow) | 1992-09-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |