CH626407A5 - - Google Patents
Download PDFInfo
- Publication number
- CH626407A5 CH626407A5 CH847577A CH847577A CH626407A5 CH 626407 A5 CH626407 A5 CH 626407A5 CH 847577 A CH847577 A CH 847577A CH 847577 A CH847577 A CH 847577A CH 626407 A5 CH626407 A5 CH 626407A5
- Authority
- CH
- Switzerland
- Prior art keywords
- shield
- evaporation system
- vacuum evaporation
- evaporator
- vacuum
- Prior art date
Links
- 238000010438 heat treatment Methods 0.000 claims description 14
- 238000001704 evaporation Methods 0.000 claims description 13
- 230000008020 evaporation Effects 0.000 claims description 13
- 238000007740 vapor deposition Methods 0.000 claims description 11
- 230000005855 radiation Effects 0.000 claims description 10
- 238000003795 desorption Methods 0.000 claims description 9
- 238000007738 vacuum evaporation Methods 0.000 claims description 8
- 238000009415 formwork Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 238000005086 pumping Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 238000012892 rational function Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229940064431 io-shield Drugs 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH847577A CH626407A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-07-08 | 1977-07-08 | |
| NL7708991A NL7708991A (nl) | 1977-07-08 | 1977-08-15 | Vacuumopdampinrichting. |
| DE2823911A DE2823911C2 (de) | 1977-07-08 | 1978-05-31 | Vakuumaufdampfanlage |
| GB7826983A GB2000813B (en) | 1977-07-08 | 1978-06-15 | Vacuum vapour deposition plant |
| US05/919,546 US4217856A (en) | 1977-07-08 | 1978-06-27 | Vacuum evaporation apparatus |
| FR7820165A FR2396807A1 (fr) | 1977-07-08 | 1978-07-06 | Installation de depot par evaporation sous vide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH847577A CH626407A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-07-08 | 1977-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH626407A5 true CH626407A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-11-13 |
Family
ID=4340949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH847577A CH626407A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-07-08 | 1977-07-08 |
Country Status (6)
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2917841A1 (de) * | 1979-05-03 | 1980-11-13 | Leybold Heraeus Gmbh & Co Kg | Verdampfer fuer vakuumaufdampfanlagen |
| DE3244391A1 (de) * | 1982-12-01 | 1984-06-07 | Leybold-Heraeus GmbH, 5000 Köln | Vorrichtung zur beschichtung von substraten durch plasmapolymerisation |
| US4496828A (en) * | 1983-07-08 | 1985-01-29 | Ultra Carbon Corporation | Susceptor assembly |
| US4858557A (en) * | 1984-07-19 | 1989-08-22 | L.P.E. Spa | Epitaxial reactors |
| AT392486B (de) * | 1988-08-29 | 1991-04-10 | Hainzl Industriesysteme Ges M | Verfahren und vorrichtung zum aufdampfen einer beschichtung auf einem traeger im vakuum |
| US5133286A (en) * | 1989-04-14 | 1992-07-28 | Samsung Electro-Mechanics Co., Ltd. | Substrate-heating device and boat structure for a vacuum-depositing apparatus |
| US4942063A (en) * | 1989-04-20 | 1990-07-17 | North American Philips Corporation | Method for controlling the thickness distribution of an interference filter |
| US5951769A (en) * | 1997-06-04 | 1999-09-14 | Crown Roll Leaf, Inc. | Method and apparatus for making high refractive index (HRI) film |
| US6337102B1 (en) * | 1997-11-17 | 2002-01-08 | The Trustees Of Princeton University | Low pressure vapor phase deposition of organic thin films |
| EP1127954A1 (en) * | 2000-02-24 | 2001-08-29 | Applied Materials, Inc. | Method and apparatus for shielding a device from a semiconductor wafer process chamber |
| US6821378B1 (en) * | 2001-05-25 | 2004-11-23 | Lam Research Corporation | Pump baffle and screen to improve etch uniformity |
| US20050121143A1 (en) * | 2002-05-23 | 2005-06-09 | Lam Research Corporation | Pump baffle and screen to improve etch uniformity |
| JP4430506B2 (ja) * | 2004-10-14 | 2010-03-10 | 三菱電機株式会社 | 蒸着装置 |
| CN104789930B (zh) * | 2015-04-24 | 2016-05-11 | 京东方科技集团股份有限公司 | 蒸镀设备及采用该蒸镀设备的操作方法 |
| KR102680671B1 (ko) * | 2018-12-21 | 2024-07-01 | 어플라이드 머티어리얼스, 인코포레이티드 | 기상 증착 장치 및 진공 챔버에서 기판을 코팅하기 위한 방법 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR887099A (fr) * | 1941-10-28 | 1943-11-03 | Fides Gmbh | Procédé pour munir d'un revêtement continu, des corps en forme de ruban ou de fil, suivant le procédé de vaporisation thermique |
| US2469929A (en) * | 1943-09-24 | 1949-05-10 | American Optical Corp | Apparatus for coating articles |
| US2445310A (en) * | 1944-01-29 | 1948-07-20 | Chilowsky Constantin | Manufacture of piezoelectric elements |
| US2440135A (en) * | 1944-08-04 | 1948-04-20 | Alexander Paul | Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers |
| GB770753A (en) * | 1952-12-31 | 1957-03-27 | Edwards & Co London Ltd W | Improvements in or relating to apparatus for the vaporisation of metals and metalloids |
| US2793609A (en) * | 1953-01-26 | 1957-05-28 | British Dielectric Res Ltd | Means for the deposition of materials by evaporation in a vacuum |
| NL103088C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1957-06-08 | |||
| US3070879A (en) * | 1959-05-11 | 1963-01-01 | Seale George Henry Rol Shenton | Method of protecting the walls of an oven from becoming fouled |
| DE1238307B (de) * | 1960-03-05 | 1967-04-06 | Heraeus Gmbh W C | Verfahren und Vorrichtung zum Betrieb eines Verdampferschiffchens |
| GB1037675A (en) * | 1962-05-08 | 1966-08-03 | Lucas Industries Ltd | Vacuum deposition of metals |
| US3277865A (en) * | 1963-04-01 | 1966-10-11 | United States Steel Corp | Metal-vapor source with heated reflecting shield |
| FR1389582A (fr) * | 1964-01-07 | 1965-02-19 | Commissariat Energie Atomique | Source d'évaporation |
| CH420407A (de) | 1965-06-01 | 1966-09-15 | Balzers Patent Beteilig Ag | Hohler Heizkörper für elektrische Hochtemperaturöfen |
| US3344768A (en) * | 1965-08-30 | 1967-10-03 | Burroughs Corp | Powder evaporation apparatus |
| US3325628A (en) * | 1966-02-16 | 1967-06-13 | Union Carbide Corp | Vapor generator |
| US3396696A (en) * | 1966-10-06 | 1968-08-13 | Ralph F. Becker | Lens turner for high vacuum evaporators |
| FR1563945A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1968-03-01 | 1969-04-18 | ||
| US3571478A (en) * | 1969-07-25 | 1971-03-16 | Thermo Electron Corp | Vacuum furnace |
| US3649339A (en) * | 1969-09-05 | 1972-03-14 | Eugene C Smith | Apparatus and method for securing a high vacuum for particle coating process |
| US3617348A (en) * | 1969-10-15 | 1971-11-02 | Motorola Inc | Method and apparatus for the evaporation of chromium-silver |
| DE2122997A1 (de) * | 1970-05-06 | 1971-11-25 | Metal Lux Spa | Gerät zum Färben von Gegenständen wie beispielsweise Brillengläsern |
| NL7512177A (nl) * | 1975-09-23 | 1977-03-25 | Balzers Patent Beteilig Ag | Vacuuminstallatie voor het behandelen van een produkt in het bijzonder een vacuumopdampin- stallatie. |
-
1977
- 1977-07-08 CH CH847577A patent/CH626407A5/de not_active IP Right Cessation
- 1977-08-15 NL NL7708991A patent/NL7708991A/xx not_active Application Discontinuation
-
1978
- 1978-05-31 DE DE2823911A patent/DE2823911C2/de not_active Expired
- 1978-06-15 GB GB7826983A patent/GB2000813B/en not_active Expired
- 1978-06-27 US US05/919,546 patent/US4217856A/en not_active Expired - Lifetime
- 1978-07-06 FR FR7820165A patent/FR2396807A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| GB2000813B (en) | 1982-01-20 |
| US4217856A (en) | 1980-08-19 |
| DE2823911A1 (de) | 1979-01-25 |
| GB2000813A (en) | 1979-01-17 |
| FR2396807B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1983-01-28 |
| FR2396807A1 (fr) | 1979-02-02 |
| DE2823911C2 (de) | 1983-10-13 |
| NL7708991A (nl) | 1979-01-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased | ||
| PL | Patent ceased |