GB1037675A - Vacuum deposition of metals - Google Patents

Vacuum deposition of metals

Info

Publication number
GB1037675A
GB1037675A GB1760562A GB1760562A GB1037675A GB 1037675 A GB1037675 A GB 1037675A GB 1760562 A GB1760562 A GB 1760562A GB 1760562 A GB1760562 A GB 1760562A GB 1037675 A GB1037675 A GB 1037675A
Authority
GB
United Kingdom
Prior art keywords
chamber
rod
article
metal
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1760562A
Inventor
Charles Norman Williams
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZF International UK Ltd
Original Assignee
Lucas Industries Ltd
Joseph Lucas Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucas Industries Ltd, Joseph Lucas Industries Ltd filed Critical Lucas Industries Ltd
Priority to GB1760562A priority Critical patent/GB1037675A/en
Publication of GB1037675A publication Critical patent/GB1037675A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Abstract

<PICT:1037675/C6-C7/1> A method of coating an article with a metal by vacuum deposition (e.g. of coating a thermoplastic article with Cr) comprises placing the article to be coated in a chamber, evacuating the chamber, causing electrons derived from an electron gun in the chamber to impinge upon and evaporate metal from a part of a source of metal which is positioned in the chamber, the part being moved angularly either intermittently or continuously, and continuing the process until a coating of the required thickness is deposited on the article. The metal source may be in rod or powder form. The Figure shows a Cr rod 6 supported at 5 by a shaft 12 which is angularly movable about its axis. The Cr rod 6 is bombarded by an electron beam 13, and surrounded by a heater 9 and heat shields 11. The rod may be heated prior to and during bombardment.
GB1760562A 1962-05-08 1962-05-08 Vacuum deposition of metals Expired GB1037675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1760562A GB1037675A (en) 1962-05-08 1962-05-08 Vacuum deposition of metals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1760562A GB1037675A (en) 1962-05-08 1962-05-08 Vacuum deposition of metals

Publications (1)

Publication Number Publication Date
GB1037675A true GB1037675A (en) 1966-08-03

Family

ID=10098079

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1760562A Expired GB1037675A (en) 1962-05-08 1962-05-08 Vacuum deposition of metals

Country Status (1)

Country Link
GB (1) GB1037675A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2396807A1 (en) * 1977-07-08 1979-02-02 Balzers Hochvakuum VACUUM EVAPORATION DEPOSIT INSTALLATION
GB2189509A (en) * 1986-03-27 1987-10-28 Mitsubishi Electric Corp Process for coating a workpiece with a ceramic material
DE4242652A1 (en) * 1992-12-17 1994-06-23 Leybold Ag Electron beam deposition appts.
EP0887435A1 (en) * 1997-06-23 1998-12-30 The Boc Group, Inc. Free-standing rotating evaporation source
JP2013112894A (en) * 2011-12-01 2013-06-10 Ulvac Japan Ltd Vacuum deposition device, electron gun, and vacuum deposition method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2396807A1 (en) * 1977-07-08 1979-02-02 Balzers Hochvakuum VACUUM EVAPORATION DEPOSIT INSTALLATION
GB2189509A (en) * 1986-03-27 1987-10-28 Mitsubishi Electric Corp Process for coating a workpiece with a ceramic material
US4816293A (en) * 1986-03-27 1989-03-28 Mitsubishi Denki Kabushiki Kaisha Process for coating a workpiece with a ceramic material
GB2189509B (en) * 1986-03-27 1990-10-17 Mitsubishi Electric Corp Process for coating a workpiece with a ceramic material
DE4242652A1 (en) * 1992-12-17 1994-06-23 Leybold Ag Electron beam deposition appts.
EP0887435A1 (en) * 1997-06-23 1998-12-30 The Boc Group, Inc. Free-standing rotating evaporation source
JP2013112894A (en) * 2011-12-01 2013-06-10 Ulvac Japan Ltd Vacuum deposition device, electron gun, and vacuum deposition method

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