GB1447754A - Apparatus for and process of metal coating - Google Patents

Apparatus for and process of metal coating

Info

Publication number
GB1447754A
GB1447754A GB2806572A GB2806572A GB1447754A GB 1447754 A GB1447754 A GB 1447754A GB 2806572 A GB2806572 A GB 2806572A GB 2806572 A GB2806572 A GB 2806572A GB 1447754 A GB1447754 A GB 1447754A
Authority
GB
United Kingdom
Prior art keywords
substrate
coating
source
glow discharge
metal coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2806572A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Priority to GB2806572A priority Critical patent/GB1447754A/en
Publication of GB1447754A publication Critical patent/GB1447754A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32422—Arrangement for selecting ions or species in the plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1447754 Coating by evaporation DEFENCE SECRETARY OF STATE FOR 14 Sept 1973 [15 June 1972] 28065/72 Heading C7F In the coating of a substrate 15 with metal which may be evaporated from a source 23 by an electron beam 31, the substrate is cleaned by a glow discharge formed in an argon atmosphere between a filament electrode 36 and an anode 37, and the glow discharge is concentrated by an electromagnetic field provided by coils 40, 41. A movable shutter 33 is provided between source and substrate. The substrate temperature, e.g. for a superalloy, may be 300 to 1200‹C. The substrate may be rotated during deposition.
GB2806572A 1972-06-15 1972-06-15 Apparatus for and process of metal coating Expired GB1447754A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB2806572A GB1447754A (en) 1972-06-15 1972-06-15 Apparatus for and process of metal coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2806572A GB1447754A (en) 1972-06-15 1972-06-15 Apparatus for and process of metal coating

Publications (1)

Publication Number Publication Date
GB1447754A true GB1447754A (en) 1976-09-02

Family

ID=10269715

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2806572A Expired GB1447754A (en) 1972-06-15 1972-06-15 Apparatus for and process of metal coating

Country Status (1)

Country Link
GB (1) GB1447754A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2141442A (en) * 1983-05-26 1984-12-19 Secr Defence Apparatus and method for the production of metallic coatings by ion-plating
WO1996015544A1 (en) * 1994-11-12 1996-05-23 ROWO Coating Gesellschaft für Beschichtung mbH Device for coating substrates using a vapour phase material in a reduced pressure or vacuum environment
WO2000023634A1 (en) * 1998-10-21 2000-04-27 Siemens Aktiengesellschaft Method and device for cleaning a product
EP1006211B2 (en) † 1998-12-02 2011-03-16 Sulzer Metco AG Method and apparatus for plasma treatment of substrates

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2141442A (en) * 1983-05-26 1984-12-19 Secr Defence Apparatus and method for the production of metallic coatings by ion-plating
WO1996015544A1 (en) * 1994-11-12 1996-05-23 ROWO Coating Gesellschaft für Beschichtung mbH Device for coating substrates using a vapour phase material in a reduced pressure or vacuum environment
US6302056B1 (en) * 1994-11-12 2001-10-16 Rowo Coating Gesellschaft Fur Beschichtung Mbh Device for coating substrates with a material vapor in negative pressure or vacuum
WO2000023634A1 (en) * 1998-10-21 2000-04-27 Siemens Aktiengesellschaft Method and device for cleaning a product
US6602542B2 (en) 1998-10-21 2003-08-05 Siemens Aktiengesellschaft Device for cleaning an article
EP1006211B2 (en) † 1998-12-02 2011-03-16 Sulzer Metco AG Method and apparatus for plasma treatment of substrates

Similar Documents

Publication Publication Date Title
US3625848A (en) Arc deposition process and apparatus
GB1364735A (en) Method of selectively removing material by ion bombardment
GB1420061A (en) Sputtering method and apparatus
GB1457165A (en) Electron beam vaporizer
GB1492164A (en) Method of forming iron oxide films
GB1305632A (en)
GB1123563A (en) Improvements in or relating to sputtering apparatus
GB1217685A (en) Improvements in or relating to methods and apparatus for sputtering of materials
US3732158A (en) Method and apparatus for sputtering utilizing an apertured electrode and a pulsed substrate bias
GB1233404A (en)
GB1405489A (en) Sputtering apparatus
GB1425095A (en) Process for feeding an evaporation bath
GB1257015A (en)
GB1447754A (en) Apparatus for and process of metal coating
DE2254434A1 (en) DEVICE FOR PREPOSITING METAL BY DUSTING UP FROM THE LIQUID PHASE
GB934408A (en) Methods of depositing metals by evaporation
GB1358411A (en) Sputtering
US3728246A (en) Device for applying thin films to articles
GB1277375A (en) Method and apparatus for applying a coating to a metallic article
FR2082217A5 (en) Substrate coating by cathodic sputtering andevaporation
JPS5466385A (en) Outer parts for pocket watch
JPS5534689A (en) Sputtering device
GB1187802A (en) Method of Applying a Protective Metal Coating to a Steel Base
JPS5457477A (en) Throw away tip of coated tool steel
GB1339910A (en) Alloy deposition by liquid phase sputtering

Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee