ATE556357T1 - Ausrichtungssystem und -verfahren für ein substrat in einem nanodruckverfahren - Google Patents

Ausrichtungssystem und -verfahren für ein substrat in einem nanodruckverfahren

Info

Publication number
ATE556357T1
ATE556357T1 AT08794586T AT08794586T ATE556357T1 AT E556357 T1 ATE556357 T1 AT E556357T1 AT 08794586 T AT08794586 T AT 08794586T AT 08794586 T AT08794586 T AT 08794586T AT E556357 T1 ATE556357 T1 AT E556357T1
Authority
AT
Austria
Prior art keywords
substrate
alignment system
optical energy
sensor system
chuck
Prior art date
Application number
AT08794586T
Other languages
German (de)
English (en)
Inventor
Pawan Nimmakayala
Byung-Jin Choi
Original Assignee
Molecular Imprints Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Molecular Imprints Inc filed Critical Molecular Imprints Inc
Application granted granted Critical
Publication of ATE556357T1 publication Critical patent/ATE556357T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2045—Electron beam lithography processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Multimedia (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
AT08794586T 2007-07-20 2008-07-18 Ausrichtungssystem und -verfahren für ein substrat in einem nanodruckverfahren ATE556357T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US95100207P 2007-07-20 2007-07-20
US12/175,258 US7837907B2 (en) 2007-07-20 2008-07-17 Alignment system and method for a substrate in a nano-imprint process
PCT/US2008/008817 WO2009014655A1 (en) 2007-07-20 2008-07-18 Alignment system and method for a substrate in a nano-imprint process

Publications (1)

Publication Number Publication Date
ATE556357T1 true ATE556357T1 (de) 2012-05-15

Family

ID=40281655

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08794586T ATE556357T1 (de) 2007-07-20 2008-07-18 Ausrichtungssystem und -verfahren für ein substrat in einem nanodruckverfahren

Country Status (8)

Country Link
US (2) US7837907B2 (enExample)
EP (1) EP2171537B1 (enExample)
JP (1) JP4791597B2 (enExample)
KR (1) KR101487301B1 (enExample)
CN (1) CN101772733B (enExample)
AT (1) ATE556357T1 (enExample)
MY (1) MY150368A (enExample)
WO (1) WO2009014655A1 (enExample)

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Also Published As

Publication number Publication date
KR20100050462A (ko) 2010-05-13
KR101487301B1 (ko) 2015-01-28
WO2009014655A1 (en) 2009-01-29
EP2171537A1 (en) 2010-04-07
MY150368A (en) 2013-12-31
JP4791597B2 (ja) 2011-10-12
EP2171537A4 (en) 2010-08-04
JP2010534406A (ja) 2010-11-04
EP2171537B1 (en) 2012-05-02
US7837907B2 (en) 2010-11-23
CN101772733B (zh) 2013-09-18
US8147731B2 (en) 2012-04-03
CN101772733A (zh) 2010-07-07
US20090026657A1 (en) 2009-01-29
US20110026039A1 (en) 2011-02-03

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