ATE477515T1 - Fluidausgabe und tropfenausgabe nach bedarf für die herstellung im nanobereich - Google Patents

Fluidausgabe und tropfenausgabe nach bedarf für die herstellung im nanobereich

Info

Publication number
ATE477515T1
ATE477515T1 AT05757163T AT05757163T ATE477515T1 AT E477515 T1 ATE477515 T1 AT E477515T1 AT 05757163 T AT05757163 T AT 05757163T AT 05757163 T AT05757163 T AT 05757163T AT E477515 T1 ATE477515 T1 AT E477515T1
Authority
AT
Austria
Prior art keywords
dispensing
nano
scale manufacturing
drop
volume
Prior art date
Application number
AT05757163T
Other languages
English (en)
Inventor
Pankaj Lad
Ian Mcmackin
Van Truskett
Norman Schumaker
Sidlgata Sreenivasan
Duane Voth
Philip Schumaker
Edward Fletcher
Original Assignee
Molecular Imprints Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Molecular Imprints Inc filed Critical Molecular Imprints Inc
Application granted granted Critical
Publication of ATE477515T1 publication Critical patent/ATE477515T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/28—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for printing downwardly on flat surfaces, e.g. of books, drawings, boxes, envelopes, e.g. flat-bed ink-jet printers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing

Landscapes

  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Catalysts (AREA)
AT05757163T 2004-06-03 2005-06-02 Fluidausgabe und tropfenausgabe nach bedarf für die herstellung im nanobereich ATE477515T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US57687804P 2004-06-03 2004-06-03
PCT/US2005/019509 WO2005120834A2 (en) 2004-06-03 2005-06-02 Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing

Publications (1)

Publication Number Publication Date
ATE477515T1 true ATE477515T1 (de) 2010-08-15

Family

ID=35503694

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05757163T ATE477515T1 (de) 2004-06-03 2005-06-02 Fluidausgabe und tropfenausgabe nach bedarf für die herstellung im nanobereich

Country Status (8)

Country Link
US (1) US20050270312A1 (de)
EP (1) EP1768846B1 (de)
JP (2) JP4792028B2 (de)
KR (1) KR101193918B1 (de)
CN (1) CN100570445C (de)
AT (1) ATE477515T1 (de)
DE (1) DE602005022874D1 (de)
WO (1) WO2005120834A2 (de)

Families Citing this family (116)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2270592B1 (de) 2000-07-17 2015-09-02 Board of Regents, The University of Texas System Verfahren zur Bildung einer Struktur auf einem Substrat
US7019819B2 (en) 2002-11-13 2006-03-28 Molecular Imprints, Inc. Chucking system for modulating shapes of substrates
US7442336B2 (en) * 2003-08-21 2008-10-28 Molecular Imprints, Inc. Capillary imprinting technique
US8211214B2 (en) 2003-10-02 2012-07-03 Molecular Imprints, Inc. Single phase fluid imprint lithography method
JP4481698B2 (ja) * 2004-03-29 2010-06-16 キヤノン株式会社 加工装置
US20070228593A1 (en) * 2006-04-03 2007-10-04 Molecular Imprints, Inc. Residual Layer Thickness Measurement and Correction
US20060062922A1 (en) 2004-09-23 2006-03-23 Molecular Imprints, Inc. Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor
US7811505B2 (en) * 2004-12-07 2010-10-12 Molecular Imprints, Inc. Method for fast filling of templates for imprint lithography using on template dispense
US7647214B2 (en) * 2004-12-27 2010-01-12 Seoul National University Industry Foundation Method for simulating stable but non-dissipative water
US7523701B2 (en) 2005-03-07 2009-04-28 Asml Netherlands B.V. Imprint lithography method and apparatus
US7670530B2 (en) 2006-01-20 2010-03-02 Molecular Imprints, Inc. Patterning substrates employing multiple chucks
CN104317161A (zh) 2005-12-08 2015-01-28 分子制模股份有限公司 用于衬底双面图案形成的方法和系统
US7360851B1 (en) 2006-02-15 2008-04-22 Kla-Tencor Technologies Corporation Automated pattern recognition of imprint technology
US8001924B2 (en) * 2006-03-31 2011-08-23 Asml Netherlands B.V. Imprint lithography
US8142850B2 (en) * 2006-04-03 2012-03-27 Molecular Imprints, Inc. Patterning a plurality of fields on a substrate to compensate for differing evaporation times
US8012395B2 (en) 2006-04-18 2011-09-06 Molecular Imprints, Inc. Template having alignment marks formed of contrast material
US8215946B2 (en) 2006-05-18 2012-07-10 Molecular Imprints, Inc. Imprint lithography system and method
JP4819577B2 (ja) 2006-05-31 2011-11-24 キヤノン株式会社 パターン転写方法およびパターン転写装置
WO2008108798A2 (en) 2006-06-24 2008-09-12 Qd Vision, Inc. Methods for depositing nanomaterial, methods for fabricating a device, and methods for fabricating an array of devices
WO2008111947A1 (en) 2006-06-24 2008-09-18 Qd Vision, Inc. Methods and articles including nanomaterial
WO2008105792A2 (en) 2006-06-24 2008-09-04 Qd Vision, Inc. Methods for depositing nanomaterial, methods for fabricating a device, methods for fabricating an array of devices and compositions
US8015939B2 (en) * 2006-06-30 2011-09-13 Asml Netherlands B.V. Imprintable medium dispenser
TW200842934A (en) * 2006-12-29 2008-11-01 Molecular Imprints Inc Imprint fluid control
KR101391807B1 (ko) 2007-01-03 2014-05-08 삼성디스플레이 주식회사 잉크젯 프린팅과 나노 임프린팅을 이용한 패턴 형성 방법
US8142702B2 (en) 2007-06-18 2012-03-27 Molecular Imprints, Inc. Solvent-assisted layer formation for imprint lithography
JP5773646B2 (ja) 2007-06-25 2015-09-02 キユーデイー・ビジヨン・インコーポレーテツド ナノ材料を被着させることを含む組成物および方法
US20090014917A1 (en) * 2007-07-10 2009-01-15 Molecular Imprints, Inc. Drop Pattern Generation for Imprint Lithography
JP4908369B2 (ja) * 2007-10-02 2012-04-04 株式会社東芝 インプリント方法及びインプリントシステム
US8119052B2 (en) * 2007-11-02 2012-02-21 Molecular Imprints, Inc. Drop pattern generation for imprint lithography
US8945444B2 (en) * 2007-12-04 2015-02-03 Canon Nanotechnologies, Inc. High throughput imprint based on contact line motion tracking control
US20090148619A1 (en) * 2007-12-05 2009-06-11 Molecular Imprints, Inc. Controlling Thickness of Residual Layer
US20090166317A1 (en) * 2007-12-26 2009-07-02 Canon Kabushiki Kaisha Method of processing substrate by imprinting
JP2009182075A (ja) * 2008-01-30 2009-08-13 Canon Inc インプリントによる構造体の製造方法
US8361371B2 (en) * 2008-02-08 2013-01-29 Molecular Imprints, Inc. Extrusion reduction in imprint lithography
US20090212012A1 (en) 2008-02-27 2009-08-27 Molecular Imprints, Inc. Critical dimension control during template formation
JP5258635B2 (ja) * 2008-03-18 2013-08-07 キヤノン株式会社 ナノインプリント方法、ナノインプリントに用いられるモールド及び構造体の製造方法
US8187515B2 (en) * 2008-04-01 2012-05-29 Molecular Imprints, Inc. Large area roll-to-roll imprint lithography
KR101653195B1 (ko) * 2008-06-09 2016-09-01 보드 오브 리전츠 더 유니버시티 오브 텍사스 시스템 적응적 나노토포그래피 형상제작
TWI423306B (zh) * 2008-06-09 2014-01-11 Univ Texas 適應性奈米形貌刻蝕技術
JP2010076219A (ja) * 2008-09-25 2010-04-08 Canon Inc ナノインプリントによる基板の加工方法
JP5361309B2 (ja) * 2008-09-25 2013-12-04 キヤノン株式会社 インプリント装置およびインプリント方法
US8586126B2 (en) 2008-10-21 2013-11-19 Molecular Imprints, Inc. Robust optimization to generate drop patterns in imprint lithography which are tolerant of variations in drop volume and drop placement
US20100098847A1 (en) * 2008-10-21 2010-04-22 Molecular Imprints, Inc. Drop Deposition Materials for Imprint Lithography
US8512797B2 (en) * 2008-10-21 2013-08-20 Molecular Imprints, Inc. Drop pattern generation with edge weighting
US8480933B2 (en) * 2008-10-22 2013-07-09 Molecular Imprints, Inc. Fluid dispense device calibration
US20100102471A1 (en) * 2008-10-24 2010-04-29 Molecular Imprints, Inc. Fluid transport and dispensing
US20100112220A1 (en) * 2008-11-03 2010-05-06 Molecular Imprints, Inc. Dispense system set-up and characterization
NL2003875A (en) * 2009-02-04 2010-08-05 Asml Netherlands Bv Imprint lithography method and apparatus.
US20110031650A1 (en) * 2009-08-04 2011-02-10 Molecular Imprints, Inc. Adjacent Field Alignment
US20110084417A1 (en) * 2009-10-08 2011-04-14 Molecular Imprints, Inc. Large area linear array nanoimprinting
US8691134B2 (en) 2010-01-28 2014-04-08 Molecular Imprints, Inc. Roll-to-roll imprint lithography and purging system
JP5283647B2 (ja) 2010-03-03 2013-09-04 富士フイルム株式会社 パターン転写方法及びパターン転写装置
JP5599205B2 (ja) * 2010-03-17 2014-10-01 富士フイルム株式会社 インプリントシステム
JP5238742B2 (ja) * 2010-03-19 2013-07-17 株式会社東芝 加工方法および加工装置
JP5460541B2 (ja) * 2010-03-30 2014-04-02 富士フイルム株式会社 ナノインプリント方法、液滴配置パターン作成方法および基板の加工方法
JP5408014B2 (ja) * 2010-04-14 2014-02-05 大日本印刷株式会社 接触角の測定方法およびこれを用いたナノインプリント方法
JP5744422B2 (ja) 2010-06-17 2015-07-08 キヤノン株式会社 インプリント方法及びインプリント装置、サンプルショット抽出方法、並びにそれを用いた物品の製造方法
JP5489887B2 (ja) 2010-06-30 2014-05-14 富士フイルム株式会社 液体塗布装置及び液体塗布方法並びにナノインプリントシステム
JP2012015324A (ja) * 2010-06-30 2012-01-19 Fujifilm Corp 液体塗布装置及び液体塗布方法並びにナノインプリントシステム
JP5337776B2 (ja) 2010-09-24 2013-11-06 富士フイルム株式会社 ナノインプリント方法およびそれを利用した基板の加工方法
JP5599356B2 (ja) 2011-03-31 2014-10-01 富士フイルム株式会社 シミュレーション方法、プログラムおよびそれを記録した記録媒体、並びに、それらを利用した液滴配置パターンの作成方法、ナノインプリント方法、パターン化基板の製造方法およびインクジェット装置。
JP5727905B2 (ja) 2011-09-15 2015-06-03 富士フイルム株式会社 インクジェットヘッドの吐出量補正方法、吐出量補正装置、及びナノインプリントシステム
US9433943B2 (en) 2011-11-15 2016-09-06 The Board Of Trustees Of The University Of Illinois Thermal control of droplets by nanoscale field effect transistors
US9616614B2 (en) 2012-02-22 2017-04-11 Canon Nanotechnologies, Inc. Large area imprint lithography
JP5748291B2 (ja) 2012-02-29 2015-07-15 富士フイルム株式会社 液体吐出装置、ナノインプリントシステム及び液体吐出方法
JP5930832B2 (ja) * 2012-04-27 2016-06-08 キヤノン株式会社 光硬化物の製造方法
WO2013183263A1 (ja) * 2012-06-07 2013-12-12 東京エレクトロン株式会社 インプリント装置及びテンプレート
JP5857014B2 (ja) 2012-09-27 2016-02-10 富士フイルム株式会社 光インプリント用硬化性組成物、パターン形成方法およびパターン
JP6123321B2 (ja) * 2013-02-06 2017-05-10 大日本印刷株式会社 インプリント方法およびインプリント装置
JP6032036B2 (ja) * 2013-02-06 2016-11-24 大日本印刷株式会社 インプリント方法およびインプリント装置
JP6028602B2 (ja) * 2013-02-06 2016-11-16 大日本印刷株式会社 インプリント方法およびインプリント装置
JP6395352B2 (ja) * 2013-07-12 2018-09-26 キヤノン株式会社 インプリント装置およびインプリント方法、それを用いた物品の製造方法
JP6495283B2 (ja) * 2013-08-19 2019-04-03 ボード・オブ・リージエンツ，ザ・ユニバーシテイ・オブ・テキサス・システム ナノメータスケール精度を有するユーザ定義プロファイルのプログラム可能な薄膜蒸着
US9718096B2 (en) 2013-08-19 2017-08-01 Board Of Regents, The University Of Texas System Programmable deposition of thin films of a user-defined profile with nanometer scale accuracy
JP6029558B2 (ja) 2013-09-30 2016-11-24 富士フイルム株式会社 光インプリント用硬化性組成物、パターン形成方法、微細パターン、および半導体デバイスの製造方法
KR102348020B1 (ko) * 2013-12-12 2022-01-07 카티바, 인크. 두께를 제어하기 위해 하프토닝을 이용하는 잉크-기반 층 제조
US9415349B2 (en) * 2014-02-28 2016-08-16 General Electric Company Porous membrane patterning technique
JP6329437B2 (ja) 2014-06-10 2018-05-23 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
JP2016009798A (ja) * 2014-06-25 2016-01-18 大日本印刷株式会社 インプリント方法及びインプリント装置
KR102417136B1 (ko) 2014-09-29 2022-07-05 매직 립, 인코포레이티드 상이한 파장의 광을 도파관 밖으로 출력하기 위한 아키텍쳐 및 방법
JP2016173427A (ja) * 2015-03-16 2016-09-29 株式会社東芝 パターン形成方法
KR102335562B1 (ko) 2015-03-16 2021-12-03 매직 립, 인코포레이티드 건강 질환 진단과 치료를 위한 방법 및 시스템
US10120276B2 (en) * 2015-03-31 2018-11-06 Canon Kabushiki Kaisha Imprint apparatus, imprint method, and method of manufacturing article
JP6437387B2 (ja) * 2015-05-25 2018-12-12 東芝メモリ株式会社 基板平坦化方法
JP6851992B2 (ja) 2015-06-15 2021-03-31 マジック リープ， インコーポレイテッドＭａｇｉｃ Ｌｅａｐ，Ｉｎｃ． 多重化された光流を内部結合するための光学要素を有するディスプレイシステム
JP6666039B2 (ja) 2016-03-07 2020-03-13 キヤノン株式会社 インプリント方法、インプリント装置、プログラム、および物品の製造方法
KR20220040511A (ko) 2016-04-08 2022-03-30 매직 립, 인코포레이티드 가변 포커스 렌즈 엘리먼트들을 가진 증강 현실 시스템들 및 방법들
WO2017197020A1 (en) 2016-05-12 2017-11-16 Magic Leap, Inc. Distributed light manipulation over imaging waveguide
JP6365620B2 (ja) * 2016-10-17 2018-08-01 大日本印刷株式会社 インプリント方法およびインプリント装置
JP6365619B2 (ja) * 2016-10-17 2018-08-01 大日本印刷株式会社 インプリント方法およびインプリント装置
JP6924828B2 (ja) * 2016-10-18 2021-08-25 モレキュラー インプリンツ， インコーポレイテッドＭｏｌｅｃｕｌａｒ Ｉｍｐｒｉｎｔｓ，Ｉｎｃ． 構造のマイクロリソグラフィ加工
KR102506485B1 (ko) 2016-11-18 2023-03-03 매직 립, 인코포레이티드 넓은 입사 각도 범위들의 광을 방향전환시키기 위한 다중층 액정 회절 격자들
IL303678B2 (en) 2016-11-18 2024-10-01 Magic Leap Inc Waveguide light multiplexer using crossed gratings
US11067860B2 (en) 2016-11-18 2021-07-20 Magic Leap, Inc. Liquid crystal diffractive devices with nano-scale pattern and methods of manufacturing the same
KR102660933B1 (ko) 2016-11-18 2024-04-24 매직 립, 인코포레이티드 공간 가변적 액정 회절 격자들
CN116107101A (zh) 2016-12-08 2023-05-12 奇跃公司 基于胆甾型液晶的衍射装置
US10895784B2 (en) 2016-12-14 2021-01-19 Magic Leap, Inc. Patterning of liquid crystals using soft-imprint replication of surface alignment patterns
CN110462460B (zh) 2017-01-23 2022-10-14 奇跃公司 用于虚拟、增强或混合现实系统的目镜
CN110546549B (zh) 2017-02-23 2022-06-07 奇跃公司 具有可变屈光力反射器的显示系统
WO2018164015A1 (ja) * 2017-03-08 2018-09-13 キヤノン株式会社 パターン形成方法、インプリント前処理コーティング材料、及び基板の前処理方法
KR102265572B1 (ko) 2017-03-08 2021-06-17 캐논 가부시끼가이샤 광 나노임프린트 기술을 사용한 패턴 형성 방법, 임프린트 장치 및 경화성 조성물
KR102664263B1 (ko) 2017-03-21 2024-05-10 매직 립, 인코포레이티드 회절 광학 엘리먼트들을 이용한 눈-이미징 장치
JP6447657B2 (ja) * 2017-04-25 2019-01-09 大日本印刷株式会社 インプリント樹脂滴下順序決定方法及びインプリント方法
IL311996A (en) 2017-09-21 2024-06-01 Magic Leap Inc An augmented reality display with a waveguide configured to capture images of an eye and/or environment
US10852547B2 (en) 2017-12-15 2020-12-01 Magic Leap, Inc. Eyepieces for augmented reality display system
US11927883B2 (en) 2018-03-30 2024-03-12 Canon Kabushiki Kaisha Method and apparatus to reduce variation of physical attribute of droplets using performance characteristic of dispensers
CN112005092B (zh) * 2018-06-11 2024-12-13 Dh科技发展私人贸易有限公司 微液滴的体积测量
CN113302546A (zh) 2018-11-20 2021-08-24 奇跃公司 用于增强现实显示系统的目镜
WO2020158746A1 (ja) * 2019-01-30 2020-08-06 キヤノン株式会社 シミュレーション方法、シミュレーション装置およびプログラム
JP7361615B2 (ja) * 2019-01-30 2023-10-16 キヤノン株式会社 シミュレーション方法、シミュレーション装置およびプログラム
JP2020127922A (ja) 2019-02-08 2020-08-27 キオクシア株式会社 液体吐出部材、液体吐出装置および半導体装置の製造方法
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Family Cites Families (97)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1236304A (en) * 1917-02-03 1917-08-07 Riley L Howell Cushioned hand-stamp.
GB1183056A (en) * 1966-11-29 1970-03-04 Bp Chemicals U K Ltd Formerly Metering Process for Dispensing Measured Quantities of Liquefied Gas
KR900004269B1 (ko) * 1986-06-11 1990-06-18 가부시기가이샤 도시바 제 1물체와 제 2 물체와의 위치 맞추는 방법 및 장치
FR2604553A1 (fr) * 1986-09-29 1988-04-01 Rhone Poulenc Chimie Substrat polymere rigide pour disque optique et les disques optiques obtenus a partir dudit substrat
US4936465A (en) * 1987-12-07 1990-06-26 Zoeld Tibor Method and apparatus for fast, reliable, and environmentally safe dispensing of fluids, gases and individual particles of a suspension through pressure control at well defined parts of a closed flow-through system
JP2546350B2 (ja) * 1988-09-09 1996-10-23 キヤノン株式会社 位置合わせ装置
US5110514A (en) * 1989-05-01 1992-05-05 Soane Technologies, Inc. Controlled casting of a shrinkable material
US5151754A (en) * 1989-10-06 1992-09-29 Kabushiki Kaisha Toshiba Method and an apparatus for measuring a displacement between two objects and a method and an apparatus for measuring a gap distance between two objects
DE4029912A1 (de) * 1990-09-21 1992-03-26 Philips Patentverwaltung Verfahren zur bildung mindestens eines grabens in einer substratschicht
US5545367A (en) * 1992-04-15 1996-08-13 Soane Technologies, Inc. Rapid prototype three dimensional stereolithography
US5445195A (en) * 1992-07-15 1995-08-29 Kim; Dae S. Automatic computer-controlled liquid dispenser
JP2837063B2 (ja) * 1993-06-04 1998-12-14 シャープ株式会社 レジストパターンの形成方法
US6279474B1 (en) * 1993-08-13 2001-08-28 Heidelberger Druckmaschinen Ag Method and device for transferring ink in a printing unit of an offset printing press
US5512131A (en) * 1993-10-04 1996-04-30 President And Fellows Of Harvard College Formation of microstamped patterns on surfaces and derivative articles
US5449117A (en) * 1993-10-04 1995-09-12 Technical Concepts, L.P. Apparatus and method for controllably dispensing drops of liquid
US5776748A (en) * 1993-10-04 1998-07-07 President And Fellows Of Harvard College Method of formation of microstamped patterns on plates for adhesion of cells and other biological materials, devices and uses therefor
US5542605A (en) * 1994-04-07 1996-08-06 Flow-Rite Controls, Ltd. Automatic liquid dispenser
GB9509487D0 (en) * 1995-05-10 1995-07-05 Ici Plc Micro relief element & preparation thereof
US5820769A (en) * 1995-05-24 1998-10-13 Regents Of The University Of Minnesota Method for making magnetic storage having discrete elements with quantized magnetic moments
US6482742B1 (en) * 2000-07-18 2002-11-19 Stephen Y. Chou Fluid pressure imprint lithography
US5747102A (en) * 1995-11-16 1998-05-05 Nordson Corporation Method and apparatus for dispensing small amounts of liquid material
US6355198B1 (en) * 1996-03-15 2002-03-12 President And Fellows Of Harvard College Method of forming articles including waveguides via capillary micromolding and microtransfer molding
US5817376A (en) * 1996-03-26 1998-10-06 Minnesota Mining And Manufacturing Company Free-radically polymerizable compositions capable of being coated by electrostatic assistance
US5942443A (en) * 1996-06-28 1999-08-24 Caliper Technologies Corporation High throughput screening assay systems in microscale fluidic devices
WO1997039897A1 (en) * 1996-04-23 1997-10-30 Xaar Technology Limited Droplet deposition apparatus
US5888650A (en) * 1996-06-03 1999-03-30 Minnesota Mining And Manufacturing Company Temperature-responsive adhesive article
US6074827A (en) * 1996-07-30 2000-06-13 Aclara Biosciences, Inc. Microfluidic method for nucleic acid purification and processing
US5858580A (en) * 1997-09-17 1999-01-12 Numerical Technologies, Inc. Phase shifting circuit manufacture method and apparatus
US6048623A (en) * 1996-12-18 2000-04-11 Kimberly-Clark Worldwide, Inc. Method of contact printing on gold coated films
US5948470A (en) * 1997-04-28 1999-09-07 Harrison; Christopher Method of nanoscale patterning and products made thereby
US5812629A (en) * 1997-04-30 1998-09-22 Clauser; John F. Ultrahigh resolution interferometric x-ray imaging
US5974150A (en) * 1997-09-30 1999-10-26 Tracer Detection Technology Corp. System and method for authentication of goods
US6089853A (en) * 1997-12-24 2000-07-18 International Business Machines Corporation Patterning device for patterning a substrate with patterning cavities fed by service cavities
US6027595A (en) * 1998-07-02 2000-02-22 Samsung Electronics Co., Ltd. Method of making optical replicas by stamping in photoresist and replicas formed thereby
US6218316B1 (en) * 1998-10-22 2001-04-17 Micron Technology, Inc. Planarization of non-planar surfaces in device fabrication
US20020122873A1 (en) * 2000-01-05 2002-09-05 Mirkin Chad A. Nanolithography methods and products therefor and produced thereby
US6274294B1 (en) * 1999-02-03 2001-08-14 Electroformed Stents, Inc. Cylindrical photolithography exposure process and apparatus
US6334960B1 (en) * 1999-03-11 2002-01-01 Board Of Regents, The University Of Texas System Step and flash imprint lithography
DE19913076A1 (de) * 1999-03-23 2000-10-19 Hahn Schickard Ges Vorrichtung und Verfahren zum Aufbringen von Mikrotröpfchen auf ein Substrat
US6306467B1 (en) * 1999-06-14 2001-10-23 Ford Global Technologies, Inc. Method of solid free form fabrication of objects
US6517995B1 (en) * 1999-09-14 2003-02-11 Massachusetts Institute Of Technology Fabrication of finely featured devices by liquid embossing
US6873087B1 (en) * 1999-10-29 2005-03-29 Board Of Regents, The University Of Texas System High precision orientation alignment and gap control stages for imprint lithography processes
US6623579B1 (en) * 1999-11-02 2003-09-23 Alien Technology Corporation Methods and apparatus for fluidic self assembly
US6234379B1 (en) * 2000-02-28 2001-05-22 Nordson Corporation No-flow flux and underfill dispensing methods
SE515962C2 (sv) * 2000-03-15 2001-11-05 Obducat Ab Anordning för överföring av mönster till objekt
US6528751B1 (en) * 2000-03-17 2003-03-04 Applied Materials, Inc. Plasma reactor with overhead RF electrode tuned to the plasma
US6387330B1 (en) * 2000-04-12 2002-05-14 George Steven Bova Method and apparatus for storing and dispensing reagents
US7859519B2 (en) * 2000-05-01 2010-12-28 Tulbert David J Human-machine interface
US6921615B2 (en) * 2000-07-16 2005-07-26 Board Of Regents, The University Of Texas System High-resolution overlay alignment methods for imprint lithography
EP2270592B1 (de) * 2000-07-17 2015-09-02 Board of Regents, The University of Texas System Verfahren zur Bildung einer Struktur auf einem Substrat
US20050160011A1 (en) * 2004-01-20 2005-07-21 Molecular Imprints, Inc. Method for concurrently employing differing materials to form a layer on a substrate
US7322287B2 (en) * 2000-07-18 2008-01-29 Nanonex Corporation Apparatus for fluid pressure imprint lithography
JP2004523906A (ja) * 2000-10-12 2004-08-05 ボード・オブ・リージエンツ，ザ・ユニバーシテイ・オブ・テキサス・システム 室温かつ低圧マイクロおよびナノ転写リソグラフィのためのテンプレート
US6879162B2 (en) * 2000-11-07 2005-04-12 Sri International System and method of micro-fluidic handling and dispensing using micro-nozzle structures
US6955767B2 (en) * 2001-03-22 2005-10-18 Hewlett-Packard Development Company, Lp. Scanning probe based lithographic alignment
US6517977B2 (en) * 2001-03-28 2003-02-11 Motorola, Inc. Lithographic template and method of formation and use
US6943036B2 (en) 2001-04-30 2005-09-13 Agilent Technologies, Inc. Error detection in chemical array fabrication
US6847433B2 (en) * 2001-06-01 2005-01-25 Agere Systems, Inc. Holder, system, and process for improving overlay in lithography
US7049049B2 (en) * 2001-06-27 2006-05-23 University Of South Florida Maskless photolithography for using photoreactive agents
JP2003084123A (ja) 2001-06-29 2003-03-19 Seiko Epson Corp カラーフィルタ基板、カラーフィルタ基板の製造方法、液晶表示装置、電気光学装置、電気光学装置の製造方法及び電子機器
US6678038B2 (en) * 2001-08-03 2004-01-13 Nikon Corporation Apparatus and methods for detecting tool-induced shift in microlithography apparatus
US6621960B2 (en) * 2002-01-24 2003-09-16 Oplink Communications, Inc. Method of fabricating multiple superimposed fiber Bragg gratings
US7455955B2 (en) * 2002-02-27 2008-11-25 Brewer Science Inc. Planarization method for multi-layer lithography processing
US7117583B2 (en) * 2002-03-18 2006-10-10 International Business Machines Corporation Method and apparatus using a pre-patterned seed layer for providing an aligned coil for an inductive head structure
JP3925283B2 (ja) * 2002-04-16 2007-06-06 セイコーエプソン株式会社 電子デバイスの製造方法、電子機器の製造方法
US6849558B2 (en) * 2002-05-22 2005-02-01 The Board Of Trustees Of The Leland Stanford Junior University Replication and transfer of microstructures and nanostructures
US6932934B2 (en) * 2002-07-11 2005-08-23 Molecular Imprints, Inc. Formation of discontinuous films during an imprint lithography process
US7019819B2 (en) * 2002-11-13 2006-03-28 Molecular Imprints, Inc. Chucking system for modulating shapes of substrates
US7077992B2 (en) * 2002-07-11 2006-07-18 Molecular Imprints, Inc. Step and repeat imprint lithography processes
MY144124A (en) * 2002-07-11 2011-08-15 Molecular Imprints Inc Step and repeat imprint lithography systems
US6900881B2 (en) * 2002-07-11 2005-05-31 Molecular Imprints, Inc. Step and repeat imprint lithography systems
GB2391385A (en) * 2002-07-26 2004-02-04 Seiko Epson Corp Patterning method by forming indent region to control spreading of liquid material deposited onto substrate
US7027156B2 (en) * 2002-08-01 2006-04-11 Molecular Imprints, Inc. Scatterometry alignment for imprint lithography
US6916584B2 (en) * 2002-08-01 2005-07-12 Molecular Imprints, Inc. Alignment methods for imprint lithography
US7071088B2 (en) * 2002-08-23 2006-07-04 Molecular Imprints, Inc. Method for fabricating bulbous-shaped vias
US6936194B2 (en) * 2002-09-05 2005-08-30 Molecular Imprints, Inc. Functional patterning material for imprint lithography processes
US7029529B2 (en) * 2002-09-19 2006-04-18 Applied Materials, Inc. Method and apparatus for metallization of large area substrates
US6929762B2 (en) * 2002-11-13 2005-08-16 Molecular Imprints, Inc. Method of reducing pattern distortions during imprint lithography processes
US6871558B2 (en) * 2002-12-12 2005-03-29 Molecular Imprints, Inc. Method for determining characteristics of substrate employing fluid geometries
US20040112862A1 (en) * 2002-12-12 2004-06-17 Molecular Imprints, Inc. Planarization composition and method of patterning a substrate using the same
US7122079B2 (en) * 2004-02-27 2006-10-17 Molecular Imprints, Inc. Composition for an etching mask comprising a silicon-containing material
US7157036B2 (en) * 2003-06-17 2007-01-02 Molecular Imprints, Inc Method to reduce adhesion between a conformable region and a pattern of a mold
US9725805B2 (en) * 2003-06-27 2017-08-08 Spts Technologies Limited Apparatus and method for controlled application of reactive vapors to produce thin films and coatings
US20050106321A1 (en) * 2003-11-14 2005-05-19 Molecular Imprints, Inc. Dispense geometery to achieve high-speed filling and throughput
US20050170670A1 (en) * 2003-11-17 2005-08-04 King William P. Patterning of sacrificial materials
US20050156353A1 (en) * 2004-01-15 2005-07-21 Watts Michael P. Method to improve the flow rate of imprinting material
US8076386B2 (en) * 2004-02-23 2011-12-13 Molecular Imprints, Inc. Materials for imprint lithography
US20050189676A1 (en) * 2004-02-27 2005-09-01 Molecular Imprints, Inc. Full-wafer or large area imprinting with multiple separated sub-fields for high throughput lithography
US20050230882A1 (en) * 2004-04-19 2005-10-20 Molecular Imprints, Inc. Method of forming a deep-featured template employed in imprint lithography
US7811505B2 (en) * 2004-12-07 2010-10-12 Molecular Imprints, Inc. Method for fast filling of templates for imprint lithography using on template dispense
US7360851B1 (en) * 2006-02-15 2008-04-22 Kla-Tencor Technologies Corporation Automated pattern recognition of imprint technology
US8119052B2 (en) * 2007-11-02 2012-02-21 Molecular Imprints, Inc. Drop pattern generation for imprint lithography
US8187515B2 (en) * 2008-04-01 2012-05-29 Molecular Imprints, Inc. Large area roll-to-roll imprint lithography
US8586126B2 (en) * 2008-10-21 2013-11-19 Molecular Imprints, Inc. Robust optimization to generate drop patterns in imprint lithography which are tolerant of variations in drop volume and drop placement
US8512797B2 (en) * 2008-10-21 2013-08-20 Molecular Imprints, Inc. Drop pattern generation with edge weighting
US20110031650A1 (en) * 2009-08-04 2011-02-10 Molecular Imprints, Inc. Adjacent Field Alignment
JP6495283B2 (ja) * 2013-08-19 2019-04-03 ボード・オブ・リージエンツ，ザ・ユニバーシテイ・オブ・テキサス・システム ナノメータスケール精度を有するユーザ定義プロファイルのプログラム可能な薄膜蒸着

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DE602005022874D1 (de) 2010-09-23
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JP2008502157A (ja) 2008-01-24
JP4792028B2 (ja) 2011-10-12
EP1768846A4 (de) 2008-02-13
US20050270312A1 (en) 2005-12-08
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